JPH0620228A - Thin-film magnetic head - Google Patents
Thin-film magnetic headInfo
- Publication number
- JPH0620228A JPH0620228A JP4176895A JP17689592A JPH0620228A JP H0620228 A JPH0620228 A JP H0620228A JP 4176895 A JP4176895 A JP 4176895A JP 17689592 A JP17689592 A JP 17689592A JP H0620228 A JPH0620228 A JP H0620228A
- Authority
- JP
- Japan
- Prior art keywords
- core
- magnetic
- substrate
- thin film
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 34
- 239000000758 substrate Substances 0.000 claims abstract description 44
- 239000002184 metal Substances 0.000 claims abstract description 24
- 229910052751 metal Inorganic materials 0.000 claims abstract description 24
- 239000010410 layer Substances 0.000 claims abstract description 16
- 239000011241 protective layer Substances 0.000 claims abstract description 11
- 230000000694 effects Effects 0.000 abstract description 5
- 239000000463 material Substances 0.000 abstract description 5
- 230000001681 protective effect Effects 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 6
- 230000004907 flux Effects 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- 239000012790 adhesive layer Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910000889 permalloy Inorganic materials 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 230000035882 stress Effects 0.000 description 3
- 230000008646 thermal stress Effects 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910001004 magnetic alloy Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000191 radiation effect Effects 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/40—Protective measures on heads, e.g. against excessive temperature
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
- G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、たとえば、ＨＤＤ
（固定ディスク・駆動装置）、ＶＴＲ（ビデオ・テープ
・レコーダ）、ＦＤＤ（フロッピィ・ディスク・駆動装
置）、磁気テープ装置などに使用される薄膜磁気ヘッド
に関するものである。BACKGROUND OF THE INVENTION The present invention relates to an HDD, for example.
The present invention relates to a thin film magnetic head used for a (fixed disk / driving device), a VTR (video tape recorder), an FDD (floppy disk / driving device), a magnetic tape device and the like.
【０００２】[0002]
【従来の技術】図３は、たとえば、特開昭６１−１１０
３２０号公報に示された従来の薄膜磁気ヘッドを示す断
面図である。この図３において、１はＡｌ2 Ｏ3 −Ｔｉ
Ｃなどの非磁性基板、２はパーマロイなどの下コアであ
り、この非磁性基板１に形成されている。３はＡｌ2 Ｏ
3 などのギャップ材、３ａはギャップ部、４は有機樹脂
などの絶縁層、５はＣｕなどのコイルである。このコイ
ル５は絶縁層４により下コア２と上コア６間を絶縁さ
れ、また、コイル５の線間も絶縁されている。2. Description of the Related Art FIG. 3 shows, for example, JP-A-61-110.
FIG. 13 is a cross-sectional view showing a conventional thin film magnetic head shown in Japanese Patent Publication No. 320. In FIG. 3, 1 is Al 2 O 3 —Ti
A non-magnetic substrate 2 such as C is a lower core such as permalloy, and is formed on the non-magnetic substrate 1. 3 is Al 2 O
Gap material, such as 3, 3a gap portion, 4 an insulating layer such as an organic resin, 5 is a coil, such as Cu. The coil 5 is insulated between the lower core 2 and the upper core 6 by the insulating layer 4, and also between the wires of the coil 5.
【０００３】また、７はＡｌ2 Ｏ3 などの保護層であ
り、上面全面に亘って形成されている。Ｇｄはギャップ
深さ、Ｋは磁気記録媒体（図示せず）に情報を記録、再
生する記録、再生面である。Further, 7 is a protective layer of Al 2 O 3 or the like, which is formed over the entire upper surface. Gd is a gap depth, and K is a recording and reproducing surface for recording and reproducing information on a magnetic recording medium (not shown).
【０００４】図４は上記従来の薄膜磁気ヘッドの絶縁層
４と保護層７を除いた状態の平面図であり、また、図４
のＡ−Ａ線に沿って切断した断面図が図３である。ただ
し、図３では絶縁層４と保護層７は示されている。この
図３において、Ｔｗはトラック幅である。下コア２と上
コア６は１個所で接続されており、コイル５は下コア２
と上コア６の接続部の周りにスパイラル状に巻かれてい
る。FIG. 4 is a plan view of the conventional thin film magnetic head from which the insulating layer 4 and the protective layer 7 have been removed, and FIG.
FIG. 3 is a sectional view taken along line AA of FIG. However, in FIG. 3, the insulating layer 4 and the protective layer 7 are shown. In FIG. 3, Tw is the track width. The lower core 2 and the upper core 6 are connected at one place, and the coil 5 is connected to the lower core 2
And is spirally wound around the connecting portion of the upper core 6.
【０００５】さらに、図５は磁気記録媒体に記録すると
きの記録、再生面Ｋから見た上記従来の薄膜磁気ヘッド
を示す正面図である。Further, FIG. 5 is a front view showing the above-mentioned conventional thin film magnetic head viewed from the recording / reproducing surface K when recording on a magnetic recording medium.
【０００６】従来の薄膜磁気ヘッドは以上のように構成
されており、磁気記録媒体の記録はコイル５に流れる信
号電流により発生する磁束が上コア６、下コア２を流
れ、ギャップ部３ａでの漏れ磁束で磁気記録媒体にトラ
ック幅Ｔｗで信号を記録する。また、再生は磁気記録媒
体からの漏れ磁束をギャップ部３ａで拾い、上コア６、
下コア２を流れる磁束の変化を電磁誘導によりコイル５
に発生する電圧に変化する。The conventional thin film magnetic head is constructed as described above, and in recording on the magnetic recording medium, the magnetic flux generated by the signal current flowing through the coil 5 flows through the upper core 6 and the lower core 2, and the gap 3a is formed. A signal is recorded on the magnetic recording medium with the track width Tw by the leakage magnetic flux. For reproduction, the leakage magnetic flux from the magnetic recording medium is picked up by the gap portion 3a,
The change in the magnetic flux flowing through the lower core 2 is changed to the coil 5 by electromagnetic induction.
Changes to the voltage generated at.
【０００７】[0007]
【発明が解決しようとする課題】上記のような従来の薄
膜磁気ヘッドでは、非磁性基板１としては、セラミック
材が用いられ、磁気コア用の磁性薄膜としては、パーマ
ロイ、Ｃｏ系アモルファス合金、センダストなどの金属
材が使用されている。磁気コアは熱膨張係数が１２〜１
５＊１／１０6 であるが、通常のセラミック材では、熱
膨張係数が１０＊１／１０6 であるので、磁性薄膜の熱
処理工程において、磁性薄膜が基板から剥離、応力歪を
生じるという問題点があった。In the conventional thin film magnetic head as described above, a ceramic material is used as the non-magnetic substrate 1, and as the magnetic thin film for the magnetic core, permalloy, Co-based amorphous alloy, sendust. Metal materials such as are used. The thermal expansion coefficient of the magnetic core is 12 to 1
5 * 1/10 is a 6, in the conventional ceramic materials, the thermal expansion coefficient is 10 * 1/10 6, in the heat treatment process of the magnetic thin film, magnetic thin film is peeled off from the substrate, that results in a stress-strain problems There was a point.
【０００８】また、従来の薄膜磁気ヘッドをＶＴＲ，Ｆ
ＤＤ，磁気テープ装置に適用を考えた場合、薄膜磁気ヘ
ッドが媒体と擦れるので、セラミック基板と磁性薄膜の
硬度の違いにより、偏摩耗が生じる。一般に、セラミッ
ク基板は磁性薄膜より硬度が高いので、磁気コアの方が
セラミック基板よりもへこみ、記録再生効率が低下する
という問題があった。In addition, a conventional thin film magnetic head is used as a VTR, F
In the case of applying to a DD or a magnetic tape device, the thin film magnetic head rubs against the medium, so that uneven wear occurs due to the difference in hardness between the ceramic substrate and the magnetic thin film. Generally, since the hardness of the ceramic substrate is higher than that of the magnetic thin film, the magnetic core is dented more than the ceramic substrate, and there is a problem that the recording / reproducing efficiency is reduced.
【０００９】また、一般に、セラミック基板は、熱伝導
率が低いので、コイルの発熱による熱ノイズや熱応力の
問題や、ヘッド製造工程における基板冷却に問題があっ
た。Further, since the ceramic substrate generally has low thermal conductivity, there are problems of thermal noise and thermal stress due to heat generation of the coil, and substrate cooling in the head manufacturing process.
【００１０】この発明は、かかる問題点を解決するため
になされたもので、磁気コアの剥離がなく、基板との偏
摩耗の少ない薄膜磁気ヘッドを得ることを目的としてお
り、また、記録、再生効率が低下しない薄膜磁気ヘッド
を提供することを目的としている。The present invention has been made in order to solve the above problems, and an object thereof is to obtain a thin film magnetic head in which the magnetic core is not peeled off and uneven wear on the substrate is small, and recording / reproducing is performed. An object of the present invention is to provide a thin film magnetic head whose efficiency does not decrease.
【００１１】[0011]
【課題を解決するための手段】この発明に係る薄膜磁気
ヘッドは、非磁性金属基板を用いたものである。A thin film magnetic head according to the present invention uses a non-magnetic metal substrate.
【００１２】また、保護膜として、非磁性金属基板を用
いたものである。A nonmagnetic metal substrate is used as the protective film.
【００１３】[0013]
【作用】上記のように構成された薄膜磁気ヘッドにおい
ては、磁性薄膜と基板との熱膨張係数の近い材質を選択
でき、磁性薄膜の剥離、応力歪を低減することになる。In the thin film magnetic head constructed as described above, it is possible to select a material having a thermal expansion coefficient close to that of the magnetic thin film and the substrate, so that peeling of the magnetic thin film and stress strain can be reduced.
【００１４】また、保護膜として非磁性金属基板を接着
したので、磁気記録媒体と擦れても、非磁性金属基板と
コアとの偏摩耗が少なく、記録再生効率が低下しなくな
る。Further, since the non-magnetic metal substrate is adhered as the protective film, even if the magnetic recording medium is rubbed, uneven wear between the non-magnetic metal substrate and the core is small, and the recording / reproducing efficiency is not lowered.
【００１５】[0015]
実施例１ 図１はこの発明の一実施例を示す断面図であり、この図
１において、１１は非磁性金属基板であり、この非磁性
金属基板１１上には絶縁層８を介してパーマロイなどの
下コア２が形成されている。この下コア２上には、磁気
ギャップを形成するＡＩ2 Ｏ3 などのギャップ材３を介
して上コア６が形成されており、この上コア６と下コア
２の接続部の周りにはＣｕなどによるコイル５が巻装さ
れている。これらのコイル５、下コア２、上コア６とを
互いに絶縁するように、有機樹脂などの絶縁層４により
絶縁し、かつコイル５を下コア２、上コア６に固定して
いる。７はＡｌ2 Ｏ3 などの保護層であり、上面全面に
亘って形成されている。なお、Ｋは磁気記録媒体（図示
せず）に情報を記録、再生する記録、再生面である。Embodiment 1 FIG. 1 is a cross-sectional view showing an embodiment of the present invention. In FIG. 1, 11 is a non-magnetic metal substrate, and permalloy or the like on this non-magnetic metal substrate 11 with an insulating layer 8 interposed therebetween. The lower core 2 is formed. An upper core 6 is formed on the lower core 2 via a gap material 3 such as AI 2 O 3 forming a magnetic gap, and Cu is provided around the connecting portion between the upper core 6 and the lower core 2. The coil 5 is wound by the above. The coil 5, the lower core 2 and the upper core 6 are insulated from each other by an insulating layer 4 such as an organic resin, and the coil 5 is fixed to the lower core 2 and the upper core 6. 7 is a protective layer of Al 2 O 3 or the like, which is formed over the entire upper surface. Incidentally, K is a recording / reproducing surface for recording / reproducing information on / from a magnetic recording medium (not shown).
【００１６】上記非磁性金属基板１１は下コア２、上コ
ア６などの磁性薄膜との熱膨張係数の近いものが選択で
き、磁性薄膜の剥離、応力を低減することができる。こ
の非磁性金属基板１１としては、たとえば、Ａｌ，Ｃ
ｒ，Ｃｕ，Ｆｅ，Ｍｏ，Ｎｉ，Ｔｉ，Ｗなどの組み合わ
せからなる非磁性合金から、熱膨張係数、硬度が上コア
６、下コア２に最も近いものを選択すればよい。The non-magnetic metal substrate 11 can be selected from those having a coefficient of thermal expansion close to that of the magnetic thin film such as the lower core 2 and the upper core 6, and peeling of the magnetic thin film and stress can be reduced. As the non-magnetic metal substrate 11, for example, Al, C
From the non-magnetic alloy composed of a combination of r, Cu, Fe, Mo, Ni, Ti, W, etc., one having a thermal expansion coefficient and hardness closest to those of the upper core 6 and the lower core 2 may be selected.
【００１７】また、非磁性金属基板１１はセラミック基
板に比較して熱伝導率が数倍以上大きいものが選択でき
るので、コイル発熱に対して放熱効果が大きく、熱ノイ
ズ、熱応力の影響を低減できる。したがって、コイル５
に流せる許容電流を大きくとれ、しかも、ヘッド製造工
程における基板冷却効果が大きくできる。Since the non-magnetic metal substrate 11 can be selected to have a thermal conductivity several times higher than that of the ceramic substrate, it has a large heat radiation effect on the heat generation of the coil and reduces the influence of thermal noise and thermal stress. it can. Therefore, the coil 5
A large allowable current can be applied to the substrate, and the effect of cooling the substrate in the head manufacturing process can be increased.
【００１８】さらに、絶縁層８は、非磁性金属基板１１
と下コア２、コイル５との絶縁をとるためのものであ
り、下コア２に対しては、渦電流損失の防止、コイル５
に対しては、ショートの防止の役割を果たす。Further, the insulating layer 8 is a non-magnetic metal substrate 11
To insulate the lower core 2 and the coil 5 from each other.
Against, it plays the role of preventing short circuit.
【００１９】実施例２．図２はこの発明の実施例２によ
る薄膜磁気ヘッドの構成を示す断面図である。この図２
の実施例２では、上記図１の実施例１の構成に加えて、
保護層７上に接着層９により保護板１０を接着したもの
である。この接着層９としては、有機樹脂、モールドガ
ラス、陽極接合などによるものであり、また、保護板１
０は非磁性金属からなるものである。この保護板１０は
非磁性金属基板１１と同一のものを使用することが望ま
しい。Example 2. Second Embodiment FIG. 2 is a sectional view showing the structure of a thin film magnetic head according to a second embodiment of the present invention. This Figure 2
In the second embodiment, in addition to the configuration of the first embodiment shown in FIG.
The protective plate 10 is adhered onto the protective layer 7 with an adhesive layer 9. The adhesive layer 9 is made of organic resin, mold glass, anodic bonding, or the like, and the protective plate 1
0 is made of a non-magnetic metal. It is desirable to use the same protective plate 10 as the non-magnetic metal substrate 11.
【００２０】また、上記実施例１、実施例２では、いず
れも、非磁性金属基板１１と下コア２、コイル５との絶
縁をとるために、絶縁層８を別途配置しているが、絶縁
層８として、非磁性金属基板１１の表面を陽極酸化、イ
オン打ち込みなどにより、絶縁体化したものを用いても
よい。In each of the first and second embodiments, the insulating layer 8 is separately arranged in order to insulate the non-magnetic metal substrate 11 from the lower core 2 and the coil 5. As the layer 8, a nonmagnetic metal substrate 11 whose surface is made into an insulator by anodic oxidation, ion implantation or the like may be used.
【００２１】[0021]
【発明の効果】この発明は、以上説明したように構成さ
れているので、以下に記載されるような効果を奏する。Since the present invention is constructed as described above, it has the following effects.
【００２２】基板として非磁性金属基板を用いることに
より、磁性薄膜と熱膨張係数の近いものを選択すること
ができ、したがって、磁性薄膜の剥離，応力歪を低減す
ることができるとともに、非磁性金属基板を磁性薄膜と
硬度や摩耗特性が近いものを選択できるので、偏摩耗を
防止することができる。By using a non-magnetic metal substrate as the substrate, one having a coefficient of thermal expansion close to that of the magnetic thin film can be selected. Therefore, peeling and stress strain of the magnetic thin film can be reduced and the non-magnetic metal substrate can be reduced. Since it is possible to select a substrate whose hardness and wear characteristics are close to those of the magnetic thin film, it is possible to prevent uneven wear.
【００２３】また、非磁性金属基板は、セラミック基板
に比較して熱伝導率が数倍以上大きいので、コイルの発
熱に対して、放熱効果が大きく、熱ノイズ、熱応力の影
響を低減できる。したがって、コイルに流せる許容電流
を大きくとれる。Further, since the non-magnetic metal substrate has a thermal conductivity several times higher than that of the ceramic substrate, it has a great heat radiating effect with respect to the heat generated by the coil and can reduce the influence of thermal noise and thermal stress. Therefore, a large allowable current can be applied to the coil.
【００２４】さらに、ヘッド製造工程における非磁性金
属基板の冷却効果が大きいから、非磁性金属基板の温度
上昇を防止することができる。Further, since the cooling effect of the non-magnetic metal substrate in the head manufacturing process is great, the temperature rise of the non-magnetic metal substrate can be prevented.
【００２５】加えて、保護層上に保護板を接着している
ことにより、非磁性金属基板とコアとの偏摩耗が少な
く、記録再生効率が低下しない利点を有する。In addition, since the protective plate is adhered onto the protective layer, there is an advantage that uneven wear between the non-magnetic metal substrate and the core is small and the recording / reproducing efficiency is not lowered.
【図１】この発明の実施例１による薄膜磁気ヘッドの構
成を示す断面図である。FIG. 1 is a sectional view showing the structure of a thin film magnetic head according to a first embodiment of the invention.
【図２】この発明の実施例２による薄膜磁気ヘッドの構
成を示す断面図である。FIG. 2 is a sectional view showing a structure of a thin film magnetic head according to a second embodiment of the invention.
【図３】従来の薄膜磁気ヘッドの構成を示す断面図であ
る。FIG. 3 is a cross-sectional view showing a configuration of a conventional thin film magnetic head.
【図４】従来の薄膜磁気ヘッドの絶縁層と保護層とを除
いた状態の平面図である。FIG. 4 is a plan view of a conventional thin film magnetic head with an insulating layer and a protective layer removed.
【図５】従来の薄膜磁気ヘッドの正面図である。FIG. 5 is a front view of a conventional thin film magnetic head.
２ 下コア ３ ギャップ材 ４ 磁性層 ５ コイル ６ 上コア ７ 保護層 ８ 絶縁層 ９ 接着層 １０ 保護板 １１ 非磁性金属基板 Ｋ 記録・再生面 2 Lower core 3 Gap material 4 Magnetic layer 5 Coil 6 Upper core 7 Protective layer 8 Insulating layer 9 Adhesive layer 10 Protective plate 11 Non-magnetic metal substrate K Recording / reproducing surface
Claims (2)
された下コアと、この下コア上に磁気ギャップを介して
配設された上コアと、上記上コアと下コアの接続部の周
りに巻装されたコイルと、このコイルを上記下コアと上
コア間を絶縁する絶縁層と、上面に形成された保護層と
を備えた薄膜磁気ヘッド。1. A lower core formed on a non-magnetic metal substrate via an insulating layer, an upper core disposed on the lower core via a magnetic gap, and a connecting portion between the upper core and the lower core. A thin film magnetic head comprising: a coil wound around a coil; an insulating layer for insulating the coil between the lower core and the upper core; and a protective layer formed on the upper surface.
ることを特徴とする請求項１に記載の薄膜磁気ヘッド。2. The thin-film magnetic head according to claim 1, wherein a non-magnetic metal substrate is bonded onto the protective layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4176895A JPH0620228A (en) | 1992-07-03 | 1992-07-03 | Thin-film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4176895A JPH0620228A (en) | 1992-07-03 | 1992-07-03 | Thin-film magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0620228A true JPH0620228A (en) | 1994-01-28 |
Family
ID=16021632
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4176895A Pending JPH0620228A (en) | 1992-07-03 | 1992-07-03 | Thin-film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0620228A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1308921C (en) * | 2001-04-18 | 2007-04-04 | 希捷科技有限公司 | Non-magnetic metallic layer in a reader gap of a disc drive |
-
1992
- 1992-07-03 JP JP4176895A patent/JPH0620228A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1308921C (en) * | 2001-04-18 | 2007-04-04 | 希捷科技有限公司 | Non-magnetic metallic layer in a reader gap of a disc drive |
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