JPH0618575A - Electric resistance measuring instrument - Google Patents

Electric resistance measuring instrument

Info

Publication number
JPH0618575A
JPH0618575A JP19905892A JP19905892A JPH0618575A JP H0618575 A JPH0618575 A JP H0618575A JP 19905892 A JP19905892 A JP 19905892A JP 19905892 A JP19905892 A JP 19905892A JP H0618575 A JPH0618575 A JP H0618575A
Authority
JP
Japan
Prior art keywords
sample
voltage
circuit
standard
electric resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19905892A
Other languages
Japanese (ja)
Inventor
Naohiko Miyamoto
尚彦 宮本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rigaku Denki Co Ltd
Rigaku Corp
Original Assignee
Rigaku Denki Co Ltd
Rigaku Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rigaku Denki Co Ltd, Rigaku Corp filed Critical Rigaku Denki Co Ltd
Priority to JP19905892A priority Critical patent/JPH0618575A/en
Publication of JPH0618575A publication Critical patent/JPH0618575A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To measure the electric current of a sample kept under a heating condition with high accuracy irrespective of the stability of a measuring current and, at the same time, to measure a plurality of samples with a simple and inexpensive facility. CONSTITUTION:A DC circuit 10 which makes a DC current to flow to a sample is provided and, at the same time, a standard resistor 11 is connected in series to the circuit 10. The current values respectively generated in the sample and standard resistance are outputted by successively switching the values by means of a switch 17 and inputted to a CPU 14 after the values are converted into digital signals by means of an A/D converter 18. The CPU 14 calculates the value of the current flowing through the circuit 10 from the already known resistance of the resistor 11 and an input voltage signal and, at the same time, the electric resistance of the sample is calculated based on the calculated current value and the voltage value of the sample.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、加熱下におかれた試料
の電気抵抗を測定する装置に関し、詳しくは熱起電力等
の誤差をとり除き高精度に試料の電気抵抗を測定するこ
とができる電気抵抗測定装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for measuring the electrical resistance of a sample that has been heated, and more specifically, it can accurately measure the electrical resistance of a sample by removing errors such as thermoelectromotive force. The present invention relates to an electric resistance measuring device.

【0002】[0002]

【従来の技術】電気抵抗を高精度に測定する場合、試料
温度に応じて試料と電圧検出回路との接触点に熱起電力
等が生じるため、これによる誤差をとり除く必要があ
る。図7は従来のこの種の電気抵抗測定装置を示すブロ
ック図、図8は同装置の動作を説明するタイミングチャ
ートである。試料Sは電気炉50中で所要の温度に加熱
されている。この試料Sに電流発生器51から断続的な
直流電流(図8、i)を流し、試料Sの二点間に生じる
電圧を増幅器52を介して出力する。この電圧出力を更
に増幅器52で増幅した後、第一サンプルホールド回路
54に入力する。第一サンプルホールド回路54は、試
料Sへの直流電流が遮断されている間の電圧をサンプリ
ングする(図8、en)。このサンプリングした電圧
は、すなわち温度変化等に起因する熱起電力によるもの
である。したがって、この電圧値を積分回路55を介し
て負帰還させることにより、増幅器53の出力から熱起
電力による誤差分をとり除くことができる。そこで、試
料Sに直流電流が流れている間の電圧増幅出力を第二サ
ンプルホールド回路56によりサンプリングし(図8、
0 )、濾波回路57で平滑化すると、試料Sの二点間
における抵抗に比例した電圧出力が出力端子58に得ら
れる。この出力を指示計器で読取ることにより、試料S
の電気抵抗を算出することができる。なお、59はタイ
ミング信号発生回路であり、各サンプルホールド回路5
4,56及び電流発生器51の動作タイミング信号を出
力する。
2. Description of the Related Art When an electric resistance is measured with high accuracy, a thermoelectromotive force or the like is generated at a contact point between a sample and a voltage detection circuit according to the sample temperature, and it is necessary to eliminate an error due to this. FIG. 7 is a block diagram showing a conventional electric resistance measuring apparatus of this type, and FIG. 8 is a timing chart for explaining the operation of the apparatus. The sample S is heated to the required temperature in the electric furnace 50. An intermittent DC current (FIG. 8, i) is caused to flow from the current generator 51 to the sample S, and the voltage generated between the two points of the sample S is output via the amplifier 52. This voltage output is further amplified by the amplifier 52 and then input to the first sample hold circuit 54. The first sample-and-hold circuit 54 samples the voltage between the direct current to the sample S is cut off (Fig. 8, e n). This sampled voltage is due to the thermoelectromotive force caused by temperature changes and the like. Therefore, by negatively feeding back this voltage value via the integrating circuit 55, it is possible to remove the error component due to the thermoelectromotive force from the output of the amplifier 53. Therefore, the voltage amplified output while the direct current is flowing through the sample S is sampled by the second sample hold circuit 56 (see FIG. 8,
e 0 ), when smoothed by the filtering circuit 57, a voltage output proportional to the resistance between the two points of the sample S is obtained at the output terminal 58. By reading this output with an indicating instrument, the sample S
The electrical resistance of can be calculated. Reference numeral 59 is a timing signal generation circuit, and each sample hold circuit 5
4, 56 and the operation timing signal of the current generator 51 are output.

【0003】[0003]

【発明が解決しようとする課題】上述した従来の電気抵
抗測定装置によれば、出力端子58に得られた電圧値と
試料Sに流した直流電流値から、オームの法則によって
試料Sの抵抗値が算出できる。ここで、試料Sに流す直
流電流は、抵抗値算出のための基準となるものであり、
測定を実施している間高い安定性を保たなければならな
い。しかしながら、そのような高安定の電流発生器は高
価格であり、また電源オン・オフ時の過渡現象等により
電流値を高度に安定させることは難しい。したがって、
上記従来の電気抵抗測定装置では、信頼性の高い測定結
果を得ることが困難であるという課題があった。
According to the above-mentioned conventional electric resistance measuring device, the resistance value of the sample S is determined by Ohm's law from the voltage value obtained at the output terminal 58 and the direct current value flowing in the sample S. Can be calculated. Here, the direct current flowing through the sample S serves as a reference for calculating the resistance value,
High stability must be maintained during the measurement. However, such a highly stable current generator is expensive and it is difficult to highly stabilize the current value due to a transient phenomenon when the power is turned on and off. Therefore,
The conventional electrical resistance measuring device described above has a problem that it is difficult to obtain a highly reliable measurement result.

【0004】また、上記従来の電気抵抗測定装置では、
測定対象となる試料一つに対して図7に示した回路系が
必要であり、複数の試料を一括して測定したいような場
合、同図の回路系を試料ごとに備える必要があり、設備
コストが高価格となる課題を有していた。
Further, in the above-mentioned conventional electric resistance measuring device,
The circuit system shown in Fig. 7 is required for one sample to be measured. If you want to measure multiple samples at once, you need to prepare the circuit system shown in Fig. 7 for each sample. There was a problem that the cost was high.

【0005】本発明は上述した従来の課題を解決するた
めになされたもので、測定電流の安定度にかかわらず高
精度な測定結果を得ることができ、しかも複数の試料を
簡単かつ安価な設備で測定することのできる電気抵抗測
定装置の提供を目的とする。
The present invention has been made in order to solve the above-mentioned conventional problems, and it is possible to obtain a highly accurate measurement result regardless of the stability of the measurement current, and to use a plurality of samples in a simple and inexpensive facility. An object of the present invention is to provide an electric resistance measuring device that can be measured by.

【0006】[0006]

【課題を解決するための手段】上記目的を達成するため
に、本発明の電気抵抗測定装置は、直流電流を発生する
電流発生器と、この電流発生器からの直流電流を試料に
流す直流回路と、前記直流回路に対して直列に接続した
標準抵抗と、試料の二点間に生じた電圧を増幅する試料
電圧増幅器と、前記標準抵抗の両端に生じた電圧を増幅
する標準電圧増幅器と、前記試料電圧増幅器からの入力
と前記標準電圧増幅器からの入力とを切替えて出力する
切替器と、前記切替器からの出力をデジタル変換して出
力するアナログ・デジタル変換器と、前記電流発生器を
断続的にオン・オフするとともに、同電流発生器がオン
状態の間及びオフ状態の間にそれぞれ前記切替器の各入
力接点に対する所定の切替え操作を行ない、かつ前記ア
ナログ・デジタル変換器からの入力にもとづき試料の電
気抵抗を算出する中央処理装置と、を備えた構成として
ある。また、複数の試料を測定するために請求項2の発
明では、前記直流回路に複数の試料を直列に接続すると
ともに、各試料それぞれにおける二点間に生じた電圧を
増幅する試料電圧増幅器を各々設け、かつ前記切替器に
これら試料電圧増幅器からの入力接点を備え、前記中央
処理装置が、前記アナログ・デジタル変換器からの入力
信号にもとづき各試料ごとの電気抵抗を算出する構成と
してある。さらに、請求項3の発明では、前記電流発生
回路、直流回路、標準抵抗、試料電圧増幅器、及び標準
電圧増幅器からなる回路系を複数備え、前記切替器に、
前記各試料電圧増幅器及び各標準電圧増幅器からの入力
接点を設け、前記中央処理装置が、前記アナログ・デジ
タル変換器からの入力信号にもとづき各回路系における
各試料ごとの電気抵抗を算出する構成としてある。
In order to achieve the above object, an electric resistance measuring apparatus of the present invention comprises a current generator for generating a direct current and a direct current circuit for flowing the direct current from the current generator to a sample. A standard resistance connected in series to the DC circuit, a sample voltage amplifier for amplifying the voltage generated between two points of the sample, and a standard voltage amplifier for amplifying the voltage generated across the standard resistance, A switch for switching and outputting the input from the sample voltage amplifier and the input from the standard voltage amplifier; an analog / digital converter for digitally converting the output from the switch to output; and a current generator. The switch is turned on and off intermittently, and a predetermined switching operation is performed on each input contact of the switching device while the current generator is in an on state and an off state. A central processing unit for calculating the electrical resistance of the sample based on the input from the exchanger, a configuration equipped with. Further, in order to measure a plurality of samples, in the invention of claim 2, a plurality of samples are connected in series to the DC circuit, and sample voltage amplifiers for amplifying a voltage generated between two points in each sample are provided. The switching device is provided with input contacts from these sample voltage amplifiers, and the central processing unit calculates the electrical resistance of each sample based on the input signal from the analog-digital converter. Further, in the invention of claim 3, a plurality of circuit systems each including the current generating circuit, the direct current circuit, the standard resistor, the sample voltage amplifier, and the standard voltage amplifier are provided, and the switching device includes:
An input contact from each sample voltage amplifier and each standard voltage amplifier is provided, and the central processing unit calculates the electrical resistance of each sample in each circuit system based on the input signal from the analog-digital converter. is there.

【0007】[0007]

【作用】直流回路に挿入された試料及び標準抵抗に対し
て、電流発生器から直流電流を断続的に流すと、試料の
二点間及び標準抵抗の両端にそれぞれ抵抗値に比例した
電圧が生ずる。これらの電圧を各々試料電圧増幅器及び
標準電圧増幅器により増幅してとり出す。そして、直流
回路導通時の各電圧増幅出力を切替器の操作によって個
別的にアナログ・デジタル変換器に出力し、中央処理装
置に入力する。次いで、直流回路非導通時の試料電圧増
幅出力を切替器の操作によってアナログ・デジタル変換
器へと出力し、中央処理装置に入力する。
[Operation] When a DC current is intermittently applied from the current generator to the sample and standard resistance inserted in the DC circuit, a voltage proportional to the resistance value is generated between two points of the sample and both ends of the standard resistance. . These voltages are amplified and taken out by a sample voltage amplifier and a standard voltage amplifier, respectively. Then, each voltage-amplified output when the DC circuit is turned on is individually output to the analog / digital converter by the operation of the switching device and input to the central processing unit. Then, the sample voltage amplification output when the DC circuit is not conducted is output to the analog-digital converter by the operation of the switching device and input to the central processing unit.

【0008】中央処理装置では、上記入力された標準抵
抗に関する直流回路導通時の電圧信号Vs にもとづき直
流回路に流れる電流値IS を算出する。ここで、標準抵
抗の抵抗値をRS とすると、IS は次式で求められる。 IS =VS/RS ・・・(I) 次に、上記算出した電流値IS と、試料に関する直流回
路導通時及び非導通時の電圧信号にもとづき試料の電気
抵抗を算出する。すなわち、直流回路導通時の試料電圧
信号Vm には、試料の電気抵抗Rによる電圧値V0 に加
え熱起電力による電圧値Vt が含まれている(すなわ
ち、Vm =V0 +Vt )。一方、電流回路非導通時に
は、試料の電気抵抗による電圧値V0 は0となるため、
この時の入力電圧信号は熱起電力による電圧値Vt のみ
となる。したがって、中央処理装置では、次式によって
試料の電気抵抗Rを算出できることになる。 R=(Vm −Vt) /IS ={(V0 +Vt )−Vt}/
S ・・・(II)
In the central processing unit, the current value I S flowing in the DC circuit is calculated on the basis of the voltage signal Vs when the DC circuit is conducting with respect to the input standard resistance. Here, assuming that the resistance value of the standard resistance is R S , I S is obtained by the following equation. I S = V S / R S (I) Next, the electrical resistance of the sample is calculated based on the calculated current value I S and the voltage signal of the sample when the DC circuit is conducting and non-conducting. That is, the sample voltage signal V m when the DC circuit is conducting includes the voltage value V t due to the thermoelectromotive force in addition to the voltage value V 0 due to the electrical resistance R of the sample (that is, V m = V 0 + V t). ). On the other hand, when the current circuit is not conducted, the voltage value V 0 due to the electrical resistance of the sample becomes 0,
The input voltage signal at this time is only the voltage value V t due to the thermoelectromotive force. Therefore, in the central processing unit, the electrical resistance R of the sample can be calculated by the following equation. R = (V m −V t ) / I S = {(V 0 + V t ) −V t } /
I S ... (II)

【0009】複数の試料を測定する場合には、直流回路
に挿入した各試料の電圧出力を切替器によって各々個別
的に中央処理装置へと入力し、それぞれの試料に関して
上述した計算を行なえば各試料の電気抵抗を求めること
ができる。
When measuring a plurality of samples, the voltage output of each sample inserted in the DC circuit is individually input to the central processing unit by a switch, and the above-mentioned calculation is performed for each sample. The electrical resistance of the sample can be determined.

【0010】[0010]

【実施例】以下、本発明の実施例について図面を参照し
て説明する。図1は本発明の第一実施例に係る電気抵抗
測定装置を示すブロック図である。本実施例の電気抵抗
測定装置は、直流回路10に試料S及び標準抵抗11を
直列に接続し、電流発生器12によって直流電流を流す
回路系を一つ備えている。試料Sは電気炉13内で所定
の温度に加熱し、本実施例装置によって当該加熱下にお
ける電気抵抗が測定される。標準抵抗11は一定の抵抗
値RS を有している。電流発生器12は、直流回路10
に対して一定の直流電流を断続的に流す。この電流発生
器12のオン・オフ制御は、後述するように中央処理装
置14によって行なう。
Embodiments of the present invention will be described below with reference to the drawings. 1 is a block diagram showing an electric resistance measuring apparatus according to a first embodiment of the present invention. The electric resistance measuring apparatus of the present embodiment is provided with one circuit system in which a sample S and a standard resistance 11 are connected in series to a DC circuit 10 and a DC current is caused to flow by a current generator 12. The sample S is heated to a predetermined temperature in the electric furnace 13, and the electric resistance under the heating is measured by the apparatus of this embodiment. The standard resistor 11 has a constant resistance value R S. The current generator 12 is a DC circuit 10
A constant DC current is intermittently applied to the. The on / off control of the current generator 12 is performed by the central processing unit 14 as described later.

【0011】試料Sの二点間には、電圧検出リード線を
介して試料電圧増幅器15が接続してある。また、標準
抵抗11の両端間にも標準電圧増幅器16が接続してあ
る。これら電圧増幅器15,16の出力側は、それぞれ
切替器17の入力端子s,1に接続してある。切替器1
7の出力端子aは、アナログ・デジタル変換器(以下、
A/Dコンバータという)18を介して中央処理装置1
4に接続されている。
A sample voltage amplifier 15 is connected between two points of the sample S via a voltage detection lead wire. A standard voltage amplifier 16 is also connected between both ends of the standard resistor 11. The output sides of these voltage amplifiers 15 and 16 are connected to the input terminals s and 1 of the switch 17, respectively. Switch 1
The output terminal a of 7 is an analog-digital converter (hereinafter,
Central processing unit 1 via A / D converter 18
4 is connected.

【0012】中央処理装置14は、電流発生器12を一
定時間単位でオン・オフ制御するとともに、切替器17
の切替え動作を制御する。この中央処理装置14は、専
用のマイクロコンピュータで構成してもよく、また汎用
のパーソナルコンピュータを利用してもよい。
The central processing unit 14 controls the current generator 12 to be turned on and off at regular time intervals, and also has a switching unit 17
Control the switching operation of. The central processing unit 14 may be composed of a dedicated microcomputer or a general-purpose personal computer.

【0013】次に、上述した第一実施例に係る電気抵抗
測定装置の動作を図1及び図2にもとづいて説明する。
図2は同装置の動作を説明するタイミングチャートであ
る。中央処理装置14の制御によって、まず電流発生器
12をオン状態とし、標準抵抗11及び試料Sに直流電
流を流す。この導通状態における標準抵抗11及び試料
Sの電圧値VS 及びVm を各増幅器15,16で増幅
し、切替器17の入力端子s,1に送る。そして、導通
状態の間(図2のTON)に、中央処理装置14の制御に
よって切替器17を切替え操作し、各入力端子s及び1
に入力された電圧出力VS,Vm をA/Dコンバータ18
へと順次出力する。
Next, the operation of the electric resistance measuring apparatus according to the first embodiment described above will be described with reference to FIGS. 1 and 2.
FIG. 2 is a timing chart for explaining the operation of the device. Under the control of the central processing unit 14, the current generator 12 is first turned on, and a direct current is passed through the standard resistor 11 and the sample S. The voltage values V S and V m of the standard resistor 11 and the sample S in this conducting state are amplified by the amplifiers 15 and 16 and sent to the input terminals s and 1 of the switch 17. Then, during the conducting state (T ON in FIG. 2), the switching unit 17 is switched by the control of the central processing unit 14, and the input terminals s and 1
The voltage outputs V S and V m input to the A / D converter 18
Are sequentially output to.

【0014】次いで、電流発生器12をオフ状態とす
る。このとき、試料Sの二点間には熱起電力による電圧
Vt が生じており、この電圧Vt を試料電圧増幅器15
によって増幅し、切替器17の入力端子1に送る。そし
て、非導通状態の間(図2のTOFF )に、中央処理装置
14の制御によって切替器17を切替え操作し、入力端
子1に入力された電圧出力Vt をA/Dコンバータ18
へと出力する。
Next, the current generator 12 is turned off. At this time, a voltage Vt due to a thermoelectromotive force is generated between two points of the sample S, and this voltage Vt is applied to the sample voltage amplifier 15
Amplified by and sent to the input terminal 1 of the switch 17. Then, during the non-conducting state (T OFF in FIG. 2), the switching device 17 is switched under the control of the central processing unit 14, and the voltage output Vt input to the input terminal 1 is converted into the A / D converter 18
Output to.

【0015】A/Dコンバータ18は、各電圧出力V
S ,Vm ,Vt をデジタル信号に変換して中央処理装置
14に送る。中央処理装置14では、まず標準抵抗11
の抵抗値Rs と導通時の標準電圧値VS にもとづいて、
前記(I)式により直流回路10に流れる電流値IS を
算出する。続いて、この電流値IS と、試料Sに関する
直流回路10導通時及び非導通時の電圧値Vm ,Vt
もとづき、前記(II)式により試料Sの電気抵抗を算
出する。なお、試料の加熱温度を変化させて種々の温度
における試料の電気抵抗を測定する場合には、以上の動
作を種々の設定温度ごとに繰り返し行なえばよい。
The A / D converter 18 outputs each voltage output V
The S , V m , and V t are converted into digital signals and sent to the central processing unit 14. In the central processing unit 14, first, the standard resistance 11
Based on the resistance value Rs and the standard voltage value VS during conduction,
The current value IS flowing in the DC circuit 10 is calculated by the equation (I). Then, based on this current value I S and the voltage values V m and V t of the sample S when the DC circuit 10 is conducting and non-conducting, the electric resistance of the sample S is calculated by the formula (II). When the electric resistance of the sample at various temperatures is measured by changing the heating temperature of the sample, the above operation may be repeated for each of various set temperatures.

【0016】上述のように中央処理装置14によって算
出した試料Sの電気抵抗に関するデータは、デジタル信
号によって他の試料測定関連機器にインターフェイスを
介することなく直接に出力できる。
As described above, the data regarding the electric resistance of the sample S calculated by the central processing unit 14 can be directly output to other sample measurement-related equipment by a digital signal without an interface.

【0017】図3は本発明の第二実施例に係る電気抵抗
測定装置を示すブロック図、図4は同装置の動作を説明
するためのフローチャート、図5は同じくタイミングチ
ャートである。第二実施例の電気抵抗測定装置は、複数
の試料S1 〜Sn に対し、電気抵抗を一括して測定する
もので、第一実施例に示した装置(図1参照)における
直流回路10に、各試料S1 〜Sn を直列に挿入した構
成となっている。各試料S1 〜Sn には、それぞれ二点
間に生じる電圧を増幅するための試料電圧増幅器151
〜15n が接続してある。また、切替器17には、各増
幅器151 〜15n の出力に対応して入力端子1〜nが
設けてある。このように、本発明の電気抵抗測定装置に
よれば、電圧増幅器及び切替器17の入力接点を増設す
るだけで安価に複数試料の電気抵抗測定が可能となる。
FIG. 3 is a block diagram showing an electric resistance measuring apparatus according to a second embodiment of the present invention, FIG. 4 is a flow chart for explaining the operation of the apparatus, and FIG. 5 is a timing chart. The electric resistance measuring apparatus of the second embodiment collectively measures the electric resistance of a plurality of samples S 1 to S n , and the DC circuit 10 in the apparatus shown in the first embodiment (see FIG. 1) is used. In addition, each of the samples S 1 to S n is inserted in series. Each of the samples S 1 to S n has a sample voltage amplifier 15 1 for amplifying a voltage generated between two points.
~ 15 n are connected. Further, the switch 17 is provided with input terminals 1 to n corresponding to the outputs of the amplifiers 15 1 to 15 n . As described above, according to the electric resistance measuring apparatus of the present invention, the electric resistance of a plurality of samples can be measured at low cost simply by adding the voltage amplifier and the input contact of the switching unit 17.

【0018】次に、上述した電気抵抗測定装置の動作を
説明する(図4及び図5参照)。中央処理装置14の制
御によって、まず電流発生器12をオン状態とし(図
4、ST1)、標準抵抗11及び各試料S1 〜Sn に直流電
流を流す。この導通状態における標準抵抗11及び各試
料S1 〜Sn の電圧値VS 及びVm1〜Vmnを各増幅器1
6,151 〜15n で増幅し、切替器17の入力端子
s,1〜nに送る。そして、導通状態の間(図5の
ON)に、中央処理装置14の制御によって切替器17
を切替え操作し(図4、ST2,ST4 )、各入力端子s及び
1〜nに入力された電圧出力VS ,Vm1〜VmnをA/D
コンバータ18へと順次出力する(図4、ST3,ST5 )。
Next, the operation of the above-described electric resistance measuring device will be described (see FIGS. 4 and 5). Under the control of the central processing unit 14, first, the current generator 12 is turned on (FIG. 4, ST1), and a direct current is passed through the standard resistor 11 and each of the samples S 1 to S n . The standard resistor 11 and the voltage values VS and V m1 to V mn of the samples S 1 to S n in this conducting state are set to the amplifiers 1 respectively.
It is amplified by 6, 15 1 to 15 n and sent to the input terminals s, 1 to n of the switch 17. Then, during the conducting state (T ON in FIG. 5), the switching unit 17 is controlled by the central processing unit 14.
(FIG. 4, ST2, ST4), and the voltage outputs V S , V m1 to V mn input to the input terminals s and 1 to n are A / D.
The signals are sequentially output to the converter 18 (ST3, ST5 in FIG. 4).

【0019】次いで、電流発生器12をオフ状態とする
(図4、ST6 )。このとき、試料S1 〜Sn の各二点間
には熱起電力による電圧Vt1〜Vtnがそれぞれが生じて
おり、これらの電圧Vt1〜Vtnを各試料電圧増幅器15
1 〜15n によって増幅し、切替器17の各入力端子1
〜nに送る。そして、非導通状態の間(図5のTOFF
に、中央処理装置14の制御によって切替器17を切替
え操作し(図4、ST7)、入力端子1〜nに入力された
電圧出力Vt1〜VtnをA/Dコンバータ18へと出力す
る(図4、ST8 )。
Next, the current generator 12 is turned off (ST6 in FIG. 4). At this time, voltages V t1 to V tn due to thermoelectromotive force are generated between the two points of the samples S 1 to S n , respectively, and these voltages V t1 to V tn are applied to the sample voltage amplifiers 15 respectively.
Each input terminal 1 of the switch 17 is amplified by 1 to 15 n
Send to ~ n. Then, during the non-conduction state (T OFF in FIG. 5)
Then, the switching device 17 is switched by the control of the central processing unit 14 (ST7 in FIG. 4), and the voltage outputs V t1 to V tn input to the input terminals 1 to n are output to the A / D converter 18 ( Figure 4, ST8).

【0020】A/Dコンバータ18は、各電圧出力V
S ,Vm1〜Vmn,Vt1〜Vtnをデジタル信号に変換して
中央処理装置14に送る。中央処理装置14では、まず
標準抵抗11の抵抗値RS と導通時の標準電圧VS にも
とづいて、前記(I)式により直流回路10に流れる電
流値IS を算出する(図4、ST9 )。続いて、この電流
値IS と、試料に関する直流回路10導通時及び非導通
時の各電圧Vm1〜Vmn,Vt1〜Vtnにもとづき、前記
(II)式により各試料S1 〜Sn の電気抵抗を算出す
る。なお、試料の加熱温度を変化させて種々の温度にお
ける試料の電気抵抗を測定する場合には、以上の動作を
種々の設定温度ごと繰り返し行なえばよい。
The A / D converter 18 outputs each voltage output V
S , V m1 to V mn , V t1 to V tn are converted into digital signals and sent to the central processing unit 14. In the central processing unit 14, first, based on the resistance value R S of the standard resistor 11 and the standard voltage V S at the time of conduction, the current value I S flowing in the DC circuit 10 is calculated by the above formula (I) (FIG. 4, ST9). ). Then, based on this current value I S and each voltage V m1 to V mn , V t1 to V tn when the DC circuit 10 relating to the sample is conducting and non-conducting, each sample S 1 to S is expressed by the formula (II). Calculate the electrical resistance of n . When the electric resistance of the sample is measured at various temperatures by changing the heating temperature of the sample, the above operation may be repeated for various set temperatures.

【0021】図6は本発明の第三実施例に係る電気抵抗
測定装置を示すブロック図である。本実施例では、前記
第二実施例で示した電流発生器、直流回路10、標準抵
抗11、各試料電圧増幅器151〜15n 、及び標準電
圧増幅器16からなる回路系を複数備えており、切替器
17に各試料電増幅器151 〜15n ,151 〜15n
及び各標準電圧増幅器16,16からの入力接点を設け
た構成となっている。ここで、各回路系における直流回
路10に挿入する試料は、電気抵抗を求めようとする各
種試料を任意に選択できることは勿論である。
FIG. 6 is a block diagram showing an electric resistance measuring apparatus according to the third embodiment of the present invention. In this embodiment, a plurality of circuit systems including the current generator, the DC circuit 10, the standard resistor 11, the sample voltage amplifiers 15 1 to 15 n , and the standard voltage amplifier 16 shown in the second embodiment are provided. each sample collector amplifier 15 to the switch 17 1 ~15 n, 15 1 ~15 n
In addition, the input contacts from the standard voltage amplifiers 16 and 16 are provided. Here, as a sample to be inserted into the DC circuit 10 in each circuit system, it goes without saying that various samples for which electric resistance is to be obtained can be arbitrarily selected.

【0022】本実施例装置においても、中央処理装置1
4の制御によって各電流発生回路12、12をオン・オ
フするとともに、切替器17を切替え操作することによ
り、電流導通時の標準電圧VS ,各試料電圧Vm と、電
流非導通時の各試料電圧Vtとを順次個別に中央処理装
置14へと入力し、これらの入力信号にもとづき標準電
流IS を求めた後、各試料の電気抵抗Rを算出してい
く。
Also in the apparatus of this embodiment, the central processing unit 1
By turning on / off each of the current generating circuits 12 and 12 under the control of No. 4 and switching the switching device 17, the standard voltage V S , each sample voltage V m when the current is conducting, and each of the non-conducting currents The sample voltage V t and the sample voltage V t are sequentially input to the central processing unit 14, the standard current I S is obtained based on these input signals, and then the electrical resistance R of each sample is calculated.

【0023】なお、本発明は上述した実施例に限定され
るものではなく、要旨を変更しない範囲で種々の変形又
は応用が可能である。また、本発明の電気抵抗測定装置
は、電気的熱分析装置の試料はもとより、リレー接点の
接触抵抗等、金属の接触抵抗測定などにも適用すること
ができる。
The present invention is not limited to the above-described embodiments, but various modifications and applications are possible without changing the gist. Further, the electrical resistance measuring device of the present invention can be applied not only to a sample of an electrical thermal analysis device, but also to a contact resistance of a relay contact, a contact resistance of a metal, and the like.

【0024】[0024]

【発明の効果】以上説明したように本発明によれば、標
準抵抗11により測定電流値を算出しているので、同電
流値が不安定であっても該算出データにもとづいて高精
度に試料の電気抵抗を算出することができる。また、試
料電圧増幅器15と切替器17の入力接点を増設するだ
けで、簡易かつ安価に複数試料の電気抵抗を一括して測
定できるという効果である。
As described above, according to the present invention, since the measured current value is calculated by the standard resistor 11, even if the current value is unstable, the sample can be accurately measured based on the calculated data. The electrical resistance of can be calculated. Further, it is an effect that the electrical resistances of a plurality of samples can be collectively measured simply and inexpensively by simply adding the input contacts of the sample voltage amplifier 15 and the switching device 17.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の第一実施例に係る電気抵抗測定装置
を示すブロック図である。
FIG. 1 is a block diagram showing an electric resistance measuring apparatus according to a first embodiment of the present invention.

【図2】 同装置の動作を説明するためのタイミングチ
ャートである。
FIG. 2 is a timing chart for explaining the operation of the device.

【図3】 本発明の第二実施例に係る電気抵抗測定装置
を示すブロック図である。
FIG. 3 is a block diagram showing an electric resistance measuring device according to a second embodiment of the present invention.

【図4】 同装置の動作を説明するためのフローチャー
トである。
FIG. 4 is a flowchart for explaining the operation of the device.

【図5】 同じくタイミングチャートである。FIG. 5 is also a timing chart.

【図6】 本発明の第三実施例に係る電気抵抗測定装置
を示すブロック図である。
FIG. 6 is a block diagram showing an electric resistance measuring device according to a third embodiment of the present invention.

【図7】 従来例を示すブロック図である。FIG. 7 is a block diagram showing a conventional example.

【図8】 従来例の動作を説明するためのタイミングチ
ャートである。
FIG. 8 is a timing chart for explaining the operation of the conventional example.

【符号の説明】[Explanation of symbols]

10 直流回路 11 標準抵抗 12 電流発生器 13 電気炉 14 中央処理装置 15 試料電圧増幅器 16 標準電圧増幅器 17 切替器 18 アナログ・デジタル変換器 10 DC circuit 11 Standard resistance 12 Current generator 13 Electric furnace 14 Central processing unit 15 Sample voltage amplifier 16 Standard voltage amplifier 17 Switching device 18 Analog-digital converter

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 直流電流を発生する電流発生器と、 この電流発生器からの直流電流を試料に流す直流回路
と、 前記直流回路に対して直列に接続した標準抵抗と、 試料の二点間に生じた電圧を増幅する試料電圧増幅器
と、 前記標準抵抗の両端に生じた電圧を増幅する標準電圧増
幅器と、 前記試料電圧増幅器からの入力と前記標準電圧増幅器か
らの入力とを切替えて出力する切替器と、 前記切替器からの出力をデジタル変換して出力するアナ
ログ・デジタル変換器と、 前記電流発生器を断続的にオン・オフするとともに、同
電流発生器がオン状態の間及びオフ状態の間にそれぞれ
前記切替器の各入力接点に対する所定の切替え操作を行
ない、かつ前記アナログ・デジタル変換器からの入力に
もとづき試料の電気抵抗を算出する中央処理装置と、 を備えたことを特徴とする電気抵抗測定装置。
1. A current generator for generating a direct current, a direct current circuit for supplying a direct current from the current generator to a sample, a standard resistance connected in series to the direct current circuit, and a point between two points of the sample. A sample voltage amplifier that amplifies the voltage generated at the reference voltage, a standard voltage amplifier that amplifies the voltage generated at both ends of the standard resistance, and outputs by switching the input from the sample voltage amplifier and the input from the standard voltage amplifier. A switch, an analog-to-digital converter that digitally converts the output from the switch and outputs the output, and the current generator is turned on and off intermittently, and while the current generator is on and off. A central processing unit that performs a predetermined switching operation for each input contact of the switching device during each of the steps and calculates the electrical resistance of the sample based on the input from the analog-digital converter; Electric resistance measuring apparatus characterized by comprising a.
【請求項2】 請求項1記載の電気抵抗測定装置におい
て、 前記直流回路に複数の試料を直列に接続するとともに、
各試料それぞれにおける二点間に生じた電圧を増幅する
試料電圧増幅器を各々設け、かつ前記切替器にこれら試
料電圧増幅器からの入力接点を備え、 前記中央処理装置は、前記アナログ・デジタル変換器か
らの入力信号にもとづき各試料ごとの電気抵抗を算出す
ることを特徴とした電気抵抗測定装置。
2. The electric resistance measuring device according to claim 1, wherein a plurality of samples are connected in series to the DC circuit,
A sample voltage amplifier for amplifying a voltage generated between two points in each sample is provided respectively, and the switching device is provided with an input contact from these sample voltage amplifiers, and the central processing unit is provided with the analog-digital converter. An electric resistance measuring device characterized by calculating the electric resistance of each sample based on the input signal of.
【請求項3】 請求項1又は2記載の電気抵抗測定装置
において、 前記電流発生器、直流回路、標準抵抗、試料電圧増幅
器、及び標準電圧増幅器からなる回路系を複数備え、 前記切替器に、前記各試料電圧増幅器及び各標準電圧増
幅器からの入力接点を設け、 前記中央処理装置は、前記アナログ・デジタル変換器か
らの入力信号にもとづ0き各回路系における各試料ごと
の電気抵抗を算出することを特徴とした電気抵抗測定装
置。
3. The electric resistance measuring device according to claim 1, wherein a plurality of circuit systems each including the current generator, the direct current circuit, the standard resistance, the sample voltage amplifier, and the standard voltage amplifier are provided, and the switching device includes: Input contacts from the sample voltage amplifiers and the standard voltage amplifiers are provided, and the central processing unit determines the electrical resistance of each sample in each circuit system based on the input signal from the analog-digital converter. An electric resistance measuring device characterized by calculating.
JP19905892A 1992-07-03 1992-07-03 Electric resistance measuring instrument Pending JPH0618575A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19905892A JPH0618575A (en) 1992-07-03 1992-07-03 Electric resistance measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19905892A JPH0618575A (en) 1992-07-03 1992-07-03 Electric resistance measuring instrument

Publications (1)

Publication Number Publication Date
JPH0618575A true JPH0618575A (en) 1994-01-25

Family

ID=16401407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19905892A Pending JPH0618575A (en) 1992-07-03 1992-07-03 Electric resistance measuring instrument

Country Status (1)

Country Link
JP (1) JPH0618575A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102087194A (en) * 2010-11-26 2011-06-08 清华大学 Concrete permeability resistance measuring system based on high-frequency alternating current
CN102288831A (en) * 2011-05-16 2011-12-21 钟小梅 Low-cost high-accuracy resistance measuring system and measuring method thereof
JP2012163496A (en) * 2011-02-08 2012-08-30 East Japan Railway Co Rail bond resistance measuring device and rail bond resistance measuring method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102087194A (en) * 2010-11-26 2011-06-08 清华大学 Concrete permeability resistance measuring system based on high-frequency alternating current
JP2012163496A (en) * 2011-02-08 2012-08-30 East Japan Railway Co Rail bond resistance measuring device and rail bond resistance measuring method
CN102288831A (en) * 2011-05-16 2011-12-21 钟小梅 Low-cost high-accuracy resistance measuring system and measuring method thereof

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