JPH06184744A - Substrate holder and substrate washing jig - Google Patents

Abstract

PURPOSE:To realize the substrate holder which can retransfer a substrate from a substrate holder to a substrate washing jig with a simple operation and the substrate washing CONSTITUTION:This substrate holder 1 consists of a pair of clamping bands 11, 12. These clamping bands 11, 12 respectively have three pieces of projecting parts 15 to 20. The two clamping bands 11, 12 are fastened to each other by means of fastening bolts 13, 14 and nuts 13a, 14a, by which the respective projecting parts 15 to 20 are brought into pressurized contact with the outer peripheral edge W1 of the substrate W. The respective projecting parts 15 to 20 project by a prescribed extent inward in the diametral direction of the above-mentioned clamping bands 11, 12 and intermittent annular space parts A having a width t are formed between the clamping bands 11, 12 and the substrate W. Supporting rods 35, 36 of the substrate washing jig are inserted into these space parts A and after the substrate is supported by these rods, the substrate holder 1 is removed from the substrate W at the time of retransferring the substrate W from the substrate holder 1 to the substrate washing jig.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate holder and a substrate cleaning used in a process of manufacturing a thin film such as an optical film of an optical system using light in the ultraviolet region to the infrared region on a large-diameter substrate. It relates to jigs.

[0002]

2. Description of the Related Art When vapor-depositing an optical film for a high-power laser on a large-diameter substrate or when manufacturing a reflector for a large astronomical telescope, it is difficult to automate the substrate cleaning process before vapor deposition. is there.

Generally, the substrate on which an optical film or the like is deposited is made of glass or quartz. When using a small or medium diameter substrate, the substrate is relatively lightweight, so the substrate held by the substrate holder should be used. Although it is easy to transfer the substrate holder to a substrate cleaning jig of a cleaning device such as an ultrasonic cleaning tank or a warm pure water pull-up drying device, for example, the diameter is 800 m.
In the case of a large-diameter quartz substrate having a thickness of m and a thickness of 120 mm, the weight reaches 140 kg, so it is difficult for one operator to carry the substrate held by the substrate holder and transfer it from the substrate holder to the substrate cleaning jig. . Therefore, it is necessary for several workers to carry the substrate held by the substrate holder and transfer it from the substrate holder to the substrate cleaning jig, or to use a large-scale transfer device such as a chain block or a forklift. It was a situation I couldn't get.

[0004]

According to the above-mentioned conventional technique, the work of transferring the substrate between the substrate holder and the substrate cleaning jig is extremely complicated even if the above-mentioned transfer device is used. It requires a lot of manpower. Therefore, in order to clean a large-diameter substrate, an operator often resorts to hand-cleaning without using an ultrasonic cleaning tank or a hot pure water pull-up / drying device. However, hand-washing has problems such as uneven wiping and stains.

The present invention has been made in view of the above-mentioned unsolved problems of the prior art, and a substrate holder and a substrate that can transfer a substrate by a simple operation without requiring a lot of manpower. It is intended to provide a cleaning jig.

[0006]

In order to achieve the above object, the substrate holder of the present invention comprises a pair of holding members and a fastening means for fastening the two members to each other, and the pair of holding members is provided by the fastening means. Is a substrate holder that holds the substrate by fastening both clamping members to the outer peripheral edge of the substrate and integrating them with each other, wherein each clamping member faces the outer peripheral edge of the substrate. A protrusion is provided on the surface, and the protrusion has a protrusion amount that separates the other portion of the surface from the outer peripheral edge of the substrate by a predetermined distance.

A substrate cleaning jig of the present invention is a substrate cleaning jig for transferring a substrate to and from the above-mentioned substrate holder, wherein a pair of side plates are held by the substrate holder and this. And a pair of rod-shaped members having a length that can be engaged with the other side plate by penetrating one of the pair of side plates and being integrally connected with each other at a sufficient distance to accommodate the substrate. And a fixing means for removably fixing each rod-shaped member to each side plate, and a lateral fall prevention device capable of abutting on the outer peripheral edge of the substrate supported by each rod-shaped member between both side plates. is there.

[0008]

Since the present invention is configured as described above, when the substrate is held by the substrate holder, a space having a predetermined size can be provided between the outer peripheral edge of the substrate and each holding member. When the substrate held by the substrate holder is transferred to the substrate cleaning jig, the substrate holder and the substrate are inserted between both side plates of the substrate cleaning jig, and the rod-shaped members of the substrate cleaning jig are inserted in the space. After inserting, attach this to each side plate, and then remove the substrate holder from the substrate. When the substrate holder is removed, the substrate is supported by each rod-shaped member. Next, the lateral collapse prevention device is brought into contact with the outer peripheral edge of the substrate to prevent the lateral tilt of the substrate supported by the rod-shaped member.

[0009]

Embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a partial sectional elevational view showing a substrate holder according to an embodiment of the present invention.

The substrate holder 1 of this embodiment is used, for example, when a quartz substrate W having a diameter of 800 mm and a thickness of 80 mm is transferred to a cleaning device by a forklift or the like, and has a pair of holding members having an arc shape. Holding band 11,1
2, and the rising portions 11a, 11 protruding outward in the radial direction are formed at both ends of each sandwiching band 11, 12, respectively.
b, 12a, 12b are provided, and each rising part 11a, 1
1b, 12a, 12b are fastening bolts 1 as fastening means
It has holes (not shown) through which 3, 14 are inserted. Each sandwiching band 11 and 12 is provided with three projecting portions 15 to 17 and 18 to 20 arranged at predetermined intervals at three locations on the inner peripheral surface which is the surface facing the outer peripheral edge of the substrate. In the embodiment, the protrusions 15 to 20 are spacers 15a to 20a fixed to the inner peripheral surfaces of the sandwiching bands 11 and 12, and the cushion member 1 laminated on the surfaces of the spacers 15a to 20a.
5b to 20b, and each cushion member 15b to 20
b is made of silicone rubber or the like. Here, the number of protrusions is not limited to three, and the number can be increased or decreased as necessary.

The surface of the outer peripheral edge W ₁ of the substrate W is smoothly polished, and the protruding portions 15 to 2 of the sandwiching bands 11 and 12 are each smoothed.
0 is brought into contact with the outer peripheral edge W ₁ of the substrate W, and both clamping bands 11,
12 is each fastening bolt 13, 14 and its nut 13
a, when fastened by 14a, the cushion member 15b~20b of each protrusion 15 to 20 is pressed against the outer peripheral edge W ₁ of the surface of the substrate W while resiliently deformable. In addition, as described above, the thickness, which is the amount of protrusion of the spacers 15a to 20a of each of the protrusions 15 to 20, is determined by the both clamping bands 11 and 12 by the fastening bolts 13 and 14 and the nuts 13a and 14a. When clamped to W ₁ , the width t of the intermittent ring-shaped space A formed between the outer peripheral edge W ₁ of the substrate W and the inner surfaces of the sandwiching bands 11 and 12 is determined by the substrate cleaning jig to be described later. It is set to be sufficient to penetrate each support bar 35, 36 (shown in broken lines).

FIG. 2 shows a substrate cleaning jig 3 for receiving a substrate W from a substrate holder 1 selected as a cleaning device by a forklift or the like and immersing the substrate W in a cleaning tank (not shown). A plan view and (b) are side views seen from the direction of arrow B in (a).

As shown in FIG. 2 (a), the substrate cleaning jig 3 includes a pair of side plates 31, 32, a pair of connecting rods 33a, 33b disposed near the lower ends thereof, and a pair of connecting rods 33a, 33b above them. A supporting frame is integrally connected by a connecting rod 34 arranged so as to be substantially parallel to each other at a predetermined interval.

Each of the side plates 31, 32 is provided near its lower end,
It has support rod mounting holes (not shown), which are a pair of through holes, through which the support rods 35, 36, which are a pair of rod-shaped members, are inserted, respectively, and the upper end of each side plate 31, 32 is prevented from falling sideways. L-shaped long grooves 31c, 32 for mounting the device 37
c (long groove 32c is not shown) is provided.

The side fall prevention device 37 includes side plates 31, 32.
Mounting rod 38 that engages with the respective long grooves 31c and 32c of
a and 38b each have a block 39 projecting from both ends, an adjusting screw 40 screwed into a screw hole penetrating the block 39 in the vertical direction in the drawing, and a holding plate 41 rotatably held at its lower end. The holding plate 41 can be lowered or raised by rotating the adjusting screw 40 forward and backward, and the holding plate 41 is lowered as shown in the figure and supported by the support rods 35 and 36. when brought into contact with the outer peripheral edge W ₁ of the substrate W, the substrate W with the support rod 35, 36 and supported only at its outer edge W _1, the substrate W
It prevents the sideways falling. Although not shown, the adjusting screw 40 can be locked by a lock mechanism such as a lock nut.

Further, the side plates 31 and 32 are provided with openings 42 each having an area and a shape such that most of both surfaces of the held substrate W are exposed to the cleaning tank. Is designed so that both surfaces of the substrate W can be sufficiently washed with the cleaning liquid without reducing

The procedure for transferring the substrate W carried over the substrate cleaning jig 3 from the substrate holder 1 to the substrate cleaning jig 3 is as follows.

The substrate cleaning jig 3 before mounting the substrate W is
Both supporting rods 35, 36 and the sideways-preventing device 37 are removed and directly installed on a pedestal or a floor (not shown) and held by the substrate holder 1 carried above the substrate cleaning jig 3. The substrate W is inserted between the side plates 31 and 32 by lowering a forklift that suspends the substrate W. A predetermined portion of the space A formed between the substrate W and the substrate holder 1 holding the substrate W is a side plate 31, 3
2, the forklift is stopped from descending at a position aligned with the support rod mounting hole, and both support rods 35 and 36 are passed through the support rod mounting holes of one side plate 31 or 32 between the side face plates 31 and 32. , And the space A between the substrate W and the substrate holder 1 is penetrated, and then inserted into the support rod mounting hole of the other side plate 32 or 31. Both support bars 35, 3
6 is fixed to each side plate 31, 32 by nuts 35a, 35b, 36a, 36b (nut 35b is not shown) which are fixing means to be screwed into the respective screw parts, and then the forklift is further lowered. A load of W is applied to both support bars 35 and 36, and the substrate holder 1 is removed from the substrate W. The lower end of the substrate W released from the substrate holder 1 is supported by both support bars 35 and 36. Next, the two mounting rods 38a and 38b of the sideways fall prevention device 37 are engaged with the L-shaped long grooves 31c and 32c of the side plates 31 and 32, respectively, and the mounting rods 38a and 38b are screwed to their nuts. Fastened to the side plates 31 and 32 by 44a and 44b. After that, the holding plate 41 is lowered by rotating the adjusting screw 40 of the lateral fall prevention device 37, and abuts against the outer peripheral edge W ₁ of the substrate W. In this way, the substrate cleaning jig 3 that supports the substrate W only on the outer peripheral edge W ₁ thereof has the hooks 31
It is immersed in a cleaning liquid such as an ultrasonic cleaning tank (not shown) by a conveyor having a, 31b, 32a and 32b.

According to this embodiment, while the substrate holder holding the substrate is suspended by a forklift or the like, it is inserted between both side plates of the substrate cleaning jig, and each support rod is attached to one side plate. After passing through the space between the support rod mounting hole and the outer peripheral edge of the substrate holder to the support rod mounting hole of the other side plate, fasten each support rod to both side plates, and then remove the substrate holder from the substrate. It is possible to remove and install a sideways fall prevention device on the upper ends of both side plates and move it from the substrate holder to the substrate cleaning jig by contacting it with the outer peripheral edge of the substrate. And it is easy and does not require a lot of manpower.

[0021]

Since the present invention is configured as described above, it has the following effects.

The work of transferring a large-diameter substrate from the substrate holder to the substrate cleaning jig is simple and easy, and does not require a lot of manpower. Therefore, the substrate cleaning process can be greatly saved. As a result, the manufacturing cost of the optical film can be reduced.

[Brief description of drawings]

FIG. 1 is a partially sectional elevational view showing a substrate holder according to an embodiment.

FIG. 2 is a view showing a substrate cleaning jig of one embodiment, (a)
Is an elevation view thereof, and (b) is a side view seen from the direction of arrow B in (a).

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 board | substrate holder 3 board | substrate cleaning jig 11,12 pinching band 13,14 fastening bolt 15-20 projecting part 15a-20a spacer 15b-20b cushion member 31,32 side plate 35,36 support rod 37 side fall prevention device

(72) Inventor Junri Ishikura, 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor, Koji Sawamura 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. Within

Claims (3)

[Claims] 1. A pair of holding members and a fastening means for fastening them to each other. By fastening the pair of holding members to each other by the fastening means, both holding members are fastened to the outer peripheral edge of the substrate. A substrate holder for holding the substrate by being integrated therewith, wherein each sandwiching member has a protruding portion on a surface facing the outer peripheral edge of the substrate, and the protruding portion is another portion of the surface. A substrate holder having a protrusion amount for separating the substrate from the outer peripheral edge of the substrate by a predetermined distance. 2. The substrate holder according to claim 1, wherein the protrusion comprises a spacer having a predetermined thickness and having a cushion member laminated on the surface thereof. 3. A substrate cleaning jig for transferring a substrate between the substrate holder and the substrate holder according to claim 1, wherein a pair of side plates accommodates the substrate holder and the substrate held by the substrate holder. A support frame that is integrally coupled at a sufficient distance to do so, and a pair of rod-shaped members that penetrate one of the pair of side plates and have a length that is engageable with the other side plate,
A substrate cleaning jig including a fixing means for detachably fixing each rod-shaped member to each side plate and a lateral fall prevention device capable of abutting on the outer peripheral edge of the substrate supported by each rod-shaped member between both side plates. .