JPH0618401A - Detector of filter clogging - Google Patents

Detector of filter clogging

Info

Publication number
JPH0618401A
JPH0618401A JP19267092A JP19267092A JPH0618401A JP H0618401 A JPH0618401 A JP H0618401A JP 19267092 A JP19267092 A JP 19267092A JP 19267092 A JP19267092 A JP 19267092A JP H0618401 A JPH0618401 A JP H0618401A
Authority
JP
Japan
Prior art keywords
flow rate
filter
opening
valve
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19267092A
Other languages
Japanese (ja)
Other versions
JP2808538B2 (en
Inventor
Futoshi Kuroiwa
太 黒岩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kitz Corp
Original Assignee
Kitz Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kitz Corp filed Critical Kitz Corp
Priority to JP4192670A priority Critical patent/JP2808538B2/en
Publication of JPH0618401A publication Critical patent/JPH0618401A/en
Application granted granted Critical
Publication of JP2808538B2 publication Critical patent/JP2808538B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Flow Control (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
  • Filtration Of Liquid (AREA)

Abstract

PURPOSE:To prevent any useless repairing and damage of a filter based on a misjudgment from occurring by keeping the flow of a pipeline fitted with a filter constant while controlling the opening of a flow control valve, and detecting any clogging in this filter from an increase in the valve opening or drop in the flow rate. CONSTITUTION:A flow sensor 3 and a flow control valve 4 are installed in a pipeline 2 fitted with a filter in series. A motor-driven ball valve is used for this valve 4, controlling the extent of opening in the valve 4 via an electric connection 7. A flow regulating controller 5 controls the opening of the valve 4 on the basis of information out of the flow sensor 3, thereby keeping the flow rate of the pipeline 2 in the preset flow rate. In succession, the controller 5 is so judged that the filter is clogged at the time when the opening of the valve 4 comes to 'full open' or reaches the preset opening, or in the case where it has failed to keep the setting flow rate, thus a user is informed of it by emitting sound or light or by displaying, for example.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、配管の途中に設けた濾
過器の目詰まりを検知するための検知装置に関するもの
である。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a detector for detecting clogging of a filter provided in the middle of a pipe.

【0002】[0002]

【従来の技術】従来は、フィルタの目詰まりを経験など
から設定した使用時間又は流過水量によって想定して、
フィルタの補修又は交換などを行うのが一般であった。
この方法では、設定した使用時間又は流過水量を基準に
するために、フィルタの目詰まりによって必要流量が得
られなくなっても補修などを行わない不都合や、目詰ま
りが起きていないのに補修などを行う無駄が生じた。
2. Description of the Related Art Conventionally, the clogging of a filter has been assumed based on the usage time or the amount of flowing water set from experience, etc.
It was common to repair or replace the filter.
In this method, since the set usage time or flow rate is used as a reference, inconvenience such as not performing repair even if the required flow rate cannot be obtained due to filter clogging, or repairing when clogging does not occur There was a waste of doing.

【0003】また、図5に示した配管図のように、フィ
ルタ41を装着した配管42にフィルタ41に並列させ
て差圧計43を設けたバイパス配管44を設け、差圧計
43が示すフィルタ41の前後の配管の圧力差が予め設
定した圧力差に達したことにより、フィルタ41の目詰
まりと判断することも行われた。図5に示した構造で
は、フィルタ41の上流側の圧力が増大した場合には、
流量が増大するがフィルタ41の前後の配管の圧力差も
増大する。このため、必要流量が得られているにもかか
わらず目詰まりと判断し、不必要にフィルタ41の補修
又は交換などを行う無駄が生じた。
Further, as shown in the piping diagram of FIG. 5, a bypass pipe 44 provided with a differential pressure gauge 43 in parallel with the filter 41 is provided in the piping 42 having the filter 41 attached thereto. It was also determined that the filter 41 was clogged because the pressure difference between the front and rear pipes reached a preset pressure difference. In the structure shown in FIG. 5, when the pressure on the upstream side of the filter 41 increases,
Although the flow rate increases, the pressure difference between the pipes before and after the filter 41 also increases. For this reason, it is judged that the filter is clogged even though the required flow rate is obtained, and there is a waste of unnecessarily repairing or replacing the filter 41.

【0004】次に、フィルタ41の上流側の圧力が減少
した場合には、流量が減少するがフィルタ41の前後の
配管の圧力差も減少する。このため、必要流量が得られ
ていないにもかかわらず目詰まりと判断せず、必要なフ
ィルタ41の補修又は交換を行わないなどの不都合が生
じた。同様なことが、フィルタ41の下流側の圧力が減
少したり増大したりした場合にも起きていた。
Next, when the pressure on the upstream side of the filter 41 decreases, the flow rate decreases, but the pressure difference between the pipes before and after the filter 41 also decreases. For this reason, even though the required flow rate has not been obtained, it is not determined that the filter is clogged, and the necessary repair or replacement of the filter 41 is not performed. The same thing happened when the pressure on the downstream side of the filter 41 decreased or increased.

【0005】更に、前記の設定した使用時間又は流過水
量を基準にしてフィルタの目詰まりを想定する場合も、
図5のようにフィルタ41の前後の配管の圧力差の増大
によってフィルタの目詰まりを検知する場合も、フィル
タの掃除などを行う直前の流量が必要流量であるように
されているので、補修などを行った直後の流量は、フィ
ルタの流量抵抗が小さいため極めて大きくなり、このた
め、フィルタなどを損傷し寿命を短くするなどの不都合
も生じた。
Further, when it is assumed that the filter is clogged based on the set use time or the flow-through water amount,
As shown in FIG. 5, even when the clogging of the filter is detected by the increase in the pressure difference between the pipes before and after the filter 41, the flow rate immediately before the cleaning of the filter is made to be the necessary flow rate, so that repair or the like is required. The flow rate immediately after performing was extremely large due to the small flow resistance of the filter, which caused inconveniences such as damage to the filter and shortening the service life.

【0006】[0006]

【発明が解決しようとする課題】本発明は、上記の従来
のフィルタの目詰まりの想定方法や検知方法が、必要流
量が得られなくなるほど目詰まりしていても、これを想
定することができなかったり、必要流量が得られていて
も目詰まりと判断したり、必要流量が得られていないに
もかかかわらず目詰まりと判断しなかったり、補修など
を行った直後の流量が大きすぎてフィルタを損傷し寿命
を短くするなどの課題を解決することを目的とする。
According to the present invention, it is possible to assume that the above-described conventional filter clogging estimation method and detection method are clogged to such an extent that the required flow rate cannot be obtained. No, it is judged to be clogged even if the required flow rate is obtained, it is not judged to be a clogged even if the required flow rate is not obtained, or the flow rate immediately after repairing is too large. The purpose is to solve problems such as damage to the filter and shortening its life.

【0007】[0007]

【課題を解決するための手段】本発明のフィルタの目詰
まり検知装置は、フィルタを装着した配管に流量センサ
と流量調節バルブを直列に装着し、流量センサに接続し
た流量制御用コントローラの作用により流量調節バルブ
の開度を調節して、配管の流量を予め設定した流量に保
たせ、流量調節バルブの開度が全開又は予め設定した開
度に達したことにより、或いは流量を予め設定した流量
に保てなくなったことにより、フィルタの目詰まりを検
知して報知する構成を採用した。この場合、上記した流
量調節バルブは、コントロールバルブであれば良いが、
特に電動式ボールバルブが好ましい。
According to the filter clogging detection device of the present invention, a flow rate controller and a flow rate control valve are connected in series to a pipe in which a filter is attached, and a flow rate control controller connected to the flow rate sensor is used. Adjust the opening of the flow rate control valve to keep the flow rate of the pipe at a preset flow rate, or when the flow control valve opening is fully opened or reaches a preset opening, or the flow rate is set to a preset flow rate. Since it is no longer possible to keep it in place, we have adopted a configuration to detect and notify the clogging of the filter. In this case, the flow rate control valve described above may be a control valve,
An electric ball valve is particularly preferable.

【0008】[0008]

【作用】流量制御用コントローラは、流量センサから受
ける流量情報に基づき、配管内の流量を予め設定した流
量に保つように、流量調節バルブの開度を調節する作用
を行う。この作用によって、フィルタが目詰まりしてい
ない状態では、フィルタの流量抵抗が小さく流量が増大
する傾向があるので、流量調節バルブの開度を小さく
し、フィルタの目詰まりが進むに従って、流量調節バル
ブの開度を大きくする。
The controller for flow rate controls the opening of the flow rate control valve so as to maintain the flow rate in the pipe at a preset flow rate based on the flow rate information received from the flow rate sensor. Due to this action, when the filter is not clogged, the flow resistance of the filter tends to be small and the flow rate tends to increase.Therefore, the opening of the flow control valve should be reduced and as the filter becomes more clogged, the flow control valve Increase the opening of.

【0009】流量調節バルブの開度が全開又は予め設定
した開度に達したとき、或いは流量が予め設定した流量
に保てなくなったとき、この情報を流量調節バルブ又は
流量センサから受けたコントローラは、フィルタが目詰
まりしたと検知し、この検知信号により音や光を発した
り表示したりして報知するようになっている。また、こ
の検知信号を利用し、他の装置を連動させて動作させた
り、遠い場所で警報を出したりすることもできる。
When the opening of the flow rate control valve is fully opened or reaches a preset level, or when the flow rate cannot be maintained at the preset flow rate, the controller that receives this information from the flow rate control valve or the flow rate sensor It is detected that the filter is clogged, and sound or light is emitted or displayed by this detection signal to notify. Further, by using this detection signal, other devices can be operated in conjunction with each other, or an alarm can be issued at a distant place.

【0010】この装置では、フィルタの目詰まり状態と
は無関係に流量を予め設定した流量に保っているので、
過大な流量によってフィルタなどを損傷し寿命を短くし
たり、必要流量が得られずに不都合を生じたりすること
がない。また、必要流量が得られているのに目詰まりと
報知したり、必要流量が得られていないのに目詰まりの
報知をしなかったりすることがなく、このための無駄や
不都合を生じない。
In this device, the flow rate is maintained at a preset flow rate regardless of the clogging of the filter.
An excessive flow rate will not damage the filter or the like to shorten the service life, and will not cause a problem that the required flow rate cannot be obtained. In addition, there is no need to report clogging even if the required flow rate has been obtained, or to not report clogging even if the required flow rate has not been obtained, and there is no waste or inconvenience for this.

【0011】[0011]

【実施例】図1は、本発明のフィルタの目詰まり検知装
置の一実施例を示す外観図であり、図中の1はフィル
タ、2は配管、3は流量センサ、4は流量調節バルブ、
5は流量制御用コントローラであり、6及び7は電気結
線である。フィルタ1を装着した配管2には流量センサ
3と流量調節バルブ4が直列に装着してあり、流量調節
バルブ4は電動式ボールバルブであって、電気結線7を
通して流量制御用コントローラ5の作用によって開度が
調節され、コントローラ5は、流量センサ3からの結線
6を通して受けた流量情報に基づき流量調節バルブ4の
開度を調節して、配管2内の流量を予め設定した流量に
保つように作用する。また、コントローラ5は、流量調
節バルブ4の開度が全開又は予め設定した開度になった
とき、或いは流量を予め設定した流量に保つことができ
なくなったときにフィルタ1の目詰まりとして、例えば
音や光を発したり表示したりして報知するように構成し
ている。
FIG. 1 is an external view showing an embodiment of a filter clogging detection device of the present invention, in which 1 is a filter, 2 is a pipe, 3 is a flow sensor, 4 is a flow control valve,
Reference numeral 5 is a flow rate controller, and 6 and 7 are electrical connections. A flow rate sensor 3 and a flow rate adjusting valve 4 are attached in series to a pipe 2 to which a filter 1 is attached. The flow rate adjusting valve 4 is an electric ball valve. The opening degree is adjusted, and the controller 5 adjusts the opening degree of the flow rate adjusting valve 4 based on the flow rate information received through the connection 6 from the flow rate sensor 3 to maintain the flow rate in the pipe 2 at a preset flow rate. To work. In addition, the controller 5 determines, for example, that the filter 1 is clogged when the flow rate control valve 4 is fully opened or reaches a preset flow rate, or when the flow rate cannot be maintained at the preset flow rate. It is configured to emit or display sound or light for notification.

【0012】なお、図1において、配管2の流れ方向は
図中に矢印で示したように左方から右方へであり、フィ
ルタ1、流量センサ3及び流量調節バルブ4の配列順序
は、図1に示した配列が標準的であるが、流量センサ3
が流量調節バルブ4よりも上流側にあれば、任意に変更
しても良い。また、コントローラ5は、流量センサ3又
は流量調節バルブ4に一体に組付けられていても良い。
なお、上記の例以外に、流量センサ3を流量調節バルブ
4の下流側に配置しても良い。
In FIG. 1, the flow direction of the pipe 2 is from left to right as indicated by the arrow in the figure, and the arrangement order of the filter 1, the flow rate sensor 3 and the flow rate control valve 4 is as shown in FIG. Although the arrangement shown in 1 is standard, the flow sensor 3
May be arbitrarily changed as long as it is on the upstream side of the flow rate control valve 4. Further, the controller 5 may be integrated with the flow rate sensor 3 or the flow rate control valve 4.
In addition to the above example, the flow rate sensor 3 may be arranged downstream of the flow rate control valve 4.

【0013】図2において、フィルタ31を装着した配
管32に流量センサ33と流量調節バルブ34を直列に
装着してあり、流量センサ33とコントローラ35とが
結線されている。なお、フィルタ31、流量センサ33
及び流量調節バルブ34の配列順序は、図3に示した配
列が配管内の流体が左方から右方へ流れるものとしてい
るが、流量センサ33が流量調節バルブ34よりも上流
側(又はバルブ34の下流側にセンサ33を設けても良
い。)にあれば、どのように変更しても良い。従って、
図3に示すようにフィルタ31の一次側に流量センサ3
3aを設けるようにしても良い。
In FIG. 2, a flow rate sensor 33 and a flow rate adjusting valve 34 are attached in series to a pipe 32 to which a filter 31 is attached, and the flow rate sensor 33 and a controller 35 are connected. The filter 31 and the flow rate sensor 33
The arrangement order of the flow rate adjusting valve 34 and the flow rate adjusting valve 34 is such that the fluid in the pipe flows from left to right in the arrangement shown in FIG. 3, but the flow rate sensor 33 is located upstream of the flow rate adjusting valve 34 (or valve 34). The sensor 33 may be provided on the downstream side of the above). Therefore,
As shown in FIG. 3, the flow sensor 3 is provided on the primary side of the filter 31.
3a may be provided.

【0014】図4は、他例を示すフィルタの目詰まり検
知装置の配管図であり、同図において、フィルタ21を
装着した配管22に流量センサ23が直列に装着してあ
り、流量センサが配管22の流量が予め設定した流量を
下回ったことによってフィルタ21の目詰まりを検知
し、報知装置24によって音や光を発したり、表示した
りして報知するようになっている。なお、流量センサ2
3は、配管22のフィルタ21より上流側にあっても、
下流側にあっても良い。この装置では、フィルタの目詰
まりを流量によって検知するので、必要流量が得られて
いるのに目詰まりと判断したり、必要流量が得られてい
ないのに目詰まりでないと判断したりすることがない。
FIG. 4 is a piping diagram of a filter clogging detection device showing another example. In FIG. 4, a flow sensor 23 is connected in series to a pipe 22 to which a filter 21 is attached, and the flow sensor is attached to the pipe. The clogging of the filter 21 is detected when the flow rate of 22 is lower than a preset flow rate, and the notification device 24 emits a sound or light or displays it to notify. The flow rate sensor 2
3 is located upstream of the filter 21 in the pipe 22,
It may be on the downstream side. Since this device detects the clogging of the filter by the flow rate, it can be judged that the filter is clogged even if the required flow rate has been obtained, or that it is not clogged even if the required flow rate has not been obtained. Absent.

【0015】次に、図1に示した実施例に基づき、その
作用を説明する。流量センサ3によって配管2内の流量
を検知し、この流量情報が結線6を通して流量制御用コ
ントローラに送られ、このコントローラ5は、この開度
情報に基づいて結線7を通して流量調節バルブ4の開度
を調節し、フィルタ1が目詰まりしていない状態では、
フィルタ1の流量抵抗が小さいので流量調節バルブ4の
開度を小さくして、ここでの流量抵抗を大きくし、フィ
ルタ1の目詰まりが増えるに従ってフィルタ1の流量抵
抗が次第に大きくなるので、流量調節バルブ4の開度を
順次大きくして、ここでの流量抵抗を減らし、配管2内
の流量を予め設定した流量に保っている。
Next, the operation will be described based on the embodiment shown in FIG. The flow rate sensor 3 detects the flow rate in the pipe 2, this flow rate information is sent to the flow rate control controller through the connection line 6, and the controller 5 passes through the connection line 7 and the opening degree of the flow rate control valve 4 based on this opening degree information. Adjust, and when the filter 1 is not clogged,
Since the flow resistance of the filter 1 is small, the opening of the flow control valve 4 is reduced to increase the flow resistance here, and as the clogging of the filter 1 increases, the flow resistance of the filter 1 gradually increases. The opening degree of the valve 4 is gradually increased to reduce the flow resistance here, and the flow rate in the pipe 2 is maintained at a preset flow rate.

【0016】また、コントローラ5は前記のように、流
量調節バルブ4の開度が全開又は予め設定した開度にな
ったとき、或いは流量を予め設定した流量に保つことが
できなくなったときに、フィルタ1が目詰まりしたと検
知し、この検知信号により音や光を発したり表示したり
して報知する。
Further, as described above, the controller 5 operates when the opening of the flow rate adjusting valve 4 is fully opened or reaches a preset opening, or when the flow rate cannot be maintained at the preset flow rate. It is detected that the filter 1 is clogged, and sound or light is emitted or displayed by this detection signal to notify.

【0017】上記の各例に示したフィルタ(濾過器)は
一例を示したもので、これに限ることなく、液体、気体
の流体を濾過するためのフィルタを配管の途中に配設す
る場合のフィルタの全てに応用できることは勿論であ
る。
The filter (filter) shown in each of the above examples is an example, and the present invention is not limited to this, and a filter for filtering a liquid or gas fluid may be provided in the middle of the pipe. Of course, it can be applied to all filters.

【0018】[0018]

【発明の効果】本発明におけるフィルタの目詰まり検知
装置は、既に詳述したように必要流量が得られているの
に目詰まりと報知したり、必要流量が得られていないの
に目詰まりの報知をしなかったりすることがなく、フィ
ルタの補修又は交換などを行う必要があるときにだけ、
そして必要があるときには必ず目詰まりを報知するの
で、無駄や不都合が生じない。また、フィルタの目詰ま
り状態とは無関係に、流量を予め設定した流量に保って
いて、過大な流量によってフィルタなどが損傷し寿命を
短くすることもない。
As described above in detail, the filter clogging detection device according to the present invention reports clogging when the required flow rate has been obtained, or causes clogging when the required flow rate has not been obtained. Only when it is necessary to repair or replace the filter without notifying it,
And when it is necessary, the clogging is always notified, so that no waste or inconvenience occurs. Further, the flow rate is maintained at a preset flow rate regardless of the clogging state of the filter, and the filter or the like is not damaged by the excessive flow rate and the service life is not shortened.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明のフィルタの目詰まり検知装置の一実施
例を示す外観図である。
FIG. 1 is an external view showing an embodiment of a filter clogging detection device of the present invention.

【図2】本発明のフィルタの目詰まり検知装置の一例を
説明するための配管図である。
FIG. 2 is a piping diagram for explaining an example of a filter clogging detection device of the present invention.

【図3】本発明のフィルタの目詰まり検知装置の一例を
説明するための配管図である。
FIG. 3 is a piping diagram for explaining an example of a filter clogging detection device of the present invention.

【図4】本発明のフィルタの目詰まり検知装置の他例を
示す配管図である。
FIG. 4 is a piping diagram showing another example of the filter clogging detection device of the present invention.

【図5】従来のフィルタの目詰まり検知装置の例を示す
配管図である。
FIG. 5 is a piping diagram showing an example of a conventional filter clogging detection device.

【符号の説明】[Explanation of symbols]

1 フィルタ 2 配管 3 流量センサ 4 流量調節バルブ 5 流量制御用コントローラ 1 Filter 2 Piping 3 Flow Sensor 4 Flow Control Valve 5 Flow Control Controller

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 フィルタを装着した配管に流量センサと
流量調節バルブを直列に装着し、該流量センサと連結し
た流量制御用コントローラにより、流量調節バルブの開
度を調節して、配管の流量を予め設定した流量に保た
せ、流量調節バルブの開度が全開又は予め設定した開度
に達したことにより、或いは流量を予め設定した流量に
保てなくなったことにより、フィルタの目詰まりを検知
するようにしたことを特徴とするフィルタの目詰まり検
知装置。
1. A flow rate sensor and a flow rate control valve are mounted in series on a pipe equipped with a filter, and the flow control controller connected to the flow rate sensor adjusts the opening of the flow rate control valve to control the flow rate of the pipe. The clogging of the filter is detected by keeping the flow rate set in advance and opening the flow rate control valve fully or reaching the preset opening, or because the flow rate cannot be kept at the preset flow rate. A filter clogging detection device characterized in that.
【請求項2】 上記した流量調節バルブが電動式ボール
バルブである請求項1記載のフィルタの目詰まり検知装
置。
2. The filter clogging detection device according to claim 1, wherein the flow rate control valve is an electric ball valve.
JP4192670A 1992-06-29 1992-06-29 Clogging detection device for liquid filtration filter Expired - Fee Related JP2808538B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4192670A JP2808538B2 (en) 1992-06-29 1992-06-29 Clogging detection device for liquid filtration filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4192670A JP2808538B2 (en) 1992-06-29 1992-06-29 Clogging detection device for liquid filtration filter

Publications (2)

Publication Number Publication Date
JPH0618401A true JPH0618401A (en) 1994-01-25
JP2808538B2 JP2808538B2 (en) 1998-10-08

Family

ID=16295095

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4192670A Expired - Fee Related JP2808538B2 (en) 1992-06-29 1992-06-29 Clogging detection device for liquid filtration filter

Country Status (1)

Country Link
JP (1) JP2808538B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07244023A (en) * 1993-08-30 1995-09-19 Millipore Investment Holdings Ltd Completeness test for porous structure using acoustic radiation
JP2005292000A (en) * 2004-04-01 2005-10-20 Ricoh Co Ltd Through hole inspection method, and device therefor
JP6807480B1 (en) * 2020-07-07 2021-01-06 岩井ファルマテック株式会社 Processing system with membrane monitoring function

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63134022A (en) * 1986-11-25 1988-06-06 Kawasaki Steel Corp Determination method for clogging of bag filter

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63134022A (en) * 1986-11-25 1988-06-06 Kawasaki Steel Corp Determination method for clogging of bag filter

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07244023A (en) * 1993-08-30 1995-09-19 Millipore Investment Holdings Ltd Completeness test for porous structure using acoustic radiation
JP2005292000A (en) * 2004-04-01 2005-10-20 Ricoh Co Ltd Through hole inspection method, and device therefor
JP6807480B1 (en) * 2020-07-07 2021-01-06 岩井ファルマテック株式会社 Processing system with membrane monitoring function
JP2022014746A (en) * 2020-07-07 2022-01-20 岩井ファルマテック株式会社 Processing system with membrane monitoring function

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