JPH06182236A - Vibration-absorbing table - Google Patents

Abstract

PURPOSE:To provide a suspension type vibration-absorbing table which is useful as the one for precision mechanical equipment and where maintenance of the mounted equipment is facilitated and economically performed. CONSTITUTION:A frame 11 on which equipment 12 is mounted, a pair of supporting side plates 14, 15 whose lower ends are freely attachably and detachably fixed to the ends of the frame 11, respectively and a vibration-proof device 17 which supports the upper ends of the supporting side plates 14, 15 and on which the frame 11 is suspended and supported are provided. And casters 18 for moving the supporting side plates 14, 15 in an arbitrary direction are fitted to the supporting plates 14, 15 so as to be movable vertically.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration isolation table used for precision optical instruments such as electron microscopes and precision measuring instruments.

[0002]

2. Description of the Related Art Conventionally, as a vibration isolation table for precision instruments such as precision optical instruments such as electron microscopes and precision measuring instruments, FIG.
There is known a suspension type vibration isolation table as shown in the front view of FIG.

That is, this suspension type vibration isolation table is provided with a pedestal 2 for mounting equipment such as precision equipment having a U-shaped equipment mounting portion 1 in the central portion, and vibration proofs at both ends of the pedestal 2. It consists of a vibration isolator 3 with a vibration isolator such as an air spring to support it, and prevents the rotational vibration due to horizontal vibration harmful to the vibration isolation system by aligning or adjoining the support points with the horizontal center of gravity of the mounted device 4. It is intended to obtain a high anti-vibration effect.

Conventionally, as shown in FIG. 7, this vibration isolation table is
It is common that the entire gantry 2 is integrally formed,
In the case where the width of the path for carrying in the vibration isolation table is narrow and it is difficult to carry it in with an integrated type, as shown in FIG. 8, the bottom plate portion 5 on which the device 4 is mounted and the vibration isolator 3 are supported. An assembled type has been developed in which the side plate portion 6 to be formed has a divided structure and can be integrally fastened by a bolt 7 or the like at a predetermined installation place after being carried in. In these figures, 8
Are reinforcing ribs for reinforcing the support portions of the vibration isolator 3 at both ends of the gantry 2.

[0005]

However, such a conventional suspension type vibration isolation table has the following inconveniences. That is, in the equipment 4 mounted on the vibration isolation table, it may be necessary to pull out the components housed therein for the maintenance or the like. In this case, there is no problem if the parts are drawn out in the front-rear direction of the vibration isolation table, but in the case of the left-right direction, it is impossible to draw out the side plate portion 6 as an obstacle.

Therefore, conventionally, the device 4 is temporarily lowered from the vibration isolation table, or in the case of the assembly type as shown in FIG. 8, the bolt 7 that fastens the bottom plate portion 5 and the side plate portion 6 is used. A method of removing the side plate portion 6 and moving the side plate portion 6 to another place together with the vibration damping device 3 is adopted.

However, since the vibration isolation table and the equipment 4 mounted therein are generally very heavy and large, the work is not easy and requires a lot of labor and time. In addition, the financial burden is large when a specialized cargo handler or dedicated cargo handling equipment is required. Moreover, in some cases, the device 4 and the vibration isolation table may be damaged during the work. Furthermore, such a problem also occurs when reassembling after maintenance.

The present invention has been made in order to solve the problems of the prior arts described above, and provides a suspension type vibration isolation table which can easily and economically perform maintenance of mounted equipment. With the goal.

[0009]

A vibration isolation table of the present invention includes a frame for mounting equipment, a pair of support side plates whose lower ends are detachably fixed to both ends of the frame, and a pair of support side plates. In an anti-vibration table including an anti-vibration device that supports the upper end portion and suspends and supports the gantry, a free wheel that moves these supporting side plates in any direction is attached to each of the supporting side plates in a vertically movable manner. It is characterized by that.

[0010]

In the anti-vibration table of the present invention, since the free wheels are attached to the support side plate so as to be movable up and down, by appropriately moving the free wheels vertically and holding them at the required positions, The supporting side plate can be easily attached to and detached from the pedestal and moved, and the workability of the maintenance of the mounted device can be improved and the cost associated with the maintenance can be reduced. In addition, damage to the onboard equipment and itself is prevented at that time.

[0011]

Embodiments of the present invention will be described below with reference to the drawings. 1 and 2 are a front view and a side view showing a vibration isolation table according to an embodiment of the present invention. In these figures,
11 is a precision device 1 such as an electron microscope shown by a chain double-dashed line
2 shows a mount on which 2 is mounted. On both sides of this gantry 11, there are provided a pair of supporting side plates 14 and 15 reinforced by a plurality of reinforcing ribs 13 and having an inverted L-shaped cross section.
4a and 15a are directed to the outside, and each lower end is attached to the pedestal 1
It is fastened to both ends of the bolt 1 by bolts 16.
An anti-vibration device 17 including anti-vibration materials such as anti-vibration springs is provided below the arm portions 14a and 15a of the respective support side plates 14 and 15.
2 are arranged for each of them, and the gantry 11 is suspended and supported by these vibration isolation devices 17.

In the present invention, each supporting side plate 1
Eight casters 18 are attached to each of the reinforcing ribs 13 of 4 and 15 in two places each. Each caster 18 is attached to the lower end of a leveling bolt 20 screwed to an attachment fitting 19 having a thread groove on the inner peripheral surface attached to the reinforcing rib 13, and the caster 18 is also supported by the vertical movement of the leveling bolt 20. The side plates 14 and 15 are vertically movable. During use, the casters 19 are held in a state of being separated from the installation floor 21.

In the vibration isolation table thus constructed,
If maintenance of the mounted device 12 becomes necessary,
This is done as follows. First, as shown in FIG.
1 and the floor surface of the installation floor 21 between the leveling block 22
To place the gantry 11 on each side plate 14 for supporting the gantry 11.
The arm portions 14a and 15a of 15 are supported while being slightly lifted from the vibration isolator 17, and the vibration isolator 17 is pulled out to the outside.
Next, the leveling bolt 20 is screwed down, and when the caster 18 comes into contact with the installation floor 21, the bolt 16 that fastens the pedestal 11 and the support side plates 14 and 15 is removed. After that, the leveling bolt 20 is further screwed down, and the support side plates 14 and 15 are lifted up. As a result, the support side plates 14 and 15 are fixed to the casters 18.
Since it can be freely moved in any direction by being supported by, it can be easily moved from the gantry 11 on which the device 12 is mounted to a place that does not hinder the maintenance of the device 12. In this way, after the supporting side plates 14 and 15 are separated from the gantry 11 on which the device 12 is mounted and the necessary maintenance for the device 12 is performed, the supporting side plate 1 is reversed in the above procedure.
After fixing 4 and 15 to the gantry 11 and returning the anti-vibration device 17 to a predetermined position, the leveling block 22 may be finally removed, and the original state can be easily restored as in the case of disassembly.

As described above, in this embodiment, the supporting side plate 1 is
Since it is possible to easily separate and move the units 4 and 15 from the gantry 11 and to easily reassemble them, it is possible to save labor and time required for maintenance of the device 12 and reduce costs.

FIG. 3 is a front view showing a vibration isolation table according to another embodiment of the present invention, and FIG. 4 is a side view thereof (however, a part of the structure is omitted).
1 and FIG. 2 are denoted by the same reference numerals.

This embodiment has substantially the same structure as the above embodiment except for the following points. That is, a common floor plate 23 is arranged under the vibration isolator 17 arranged on both sides of the gantry 11, and a mounting bracket having through holes attached to the reinforcement ribs 13 of the respective support side plates 14 and 15 is arranged on the floor plate 23. The floor plate 23 can be fixed to the support side plates 14 and 15 by screwing the tip of the bolt 25 loosely inserted into the upper part 24 from above and tightening the nut 26 screwed to the bolt 25 toward the mounting fitting 24. Is configured. A total of eight bolts 25 are attached to each of the front and rear ends of the floor plate 23 at two locations.

In the vibration isolation table thus constructed,
Prior to separating the support side plates 14 and 15 from the pedestal 11,
By fixing the base plate 23 and the support side plates 14 and 15 in advance, when the support side plates 14 and 15 are separated and moved, or when the support side plates 14 and 15 are reassembled after the maintenance, the base plate 23
Since the upper anti-vibration device 17 can also be moved integrally, it is not necessary to move the anti-vibration device 17 separately, and the work can be further simplified as compared with the case of the above embodiment.

FIG. 5 is a front view showing a vibration isolation table of still another embodiment of the present invention, and FIG. 6 is a side view thereof (however, a part of the structure is omitted). In these figures as well, portions common to FIGS. 1 to 4 are denoted by the same reference numerals, and duplicated description will be omitted.

This embodiment is different from the embodiment shown in FIGS. 3 and 4 in that metal fittings 27 having bolt insertion holes are further attached at four front and rear ends of the gantry 11, and leveling bolts 28 are screwed into these. It was done.

In the vibration isolation table thus constructed,
The leveling bolt 28 is the leveling block 2 described above.
The supporting side plates 14 and 15 are attached to the pedestal 1 in order to function like 2.
When separating from 1, it is not necessary to use equipment such as the leveling block 22 for lifting the gantry 11, and the work is further facilitated.

[0021]

As described above, according to the vibration isolation table of the present invention, the pair of support side plates detachably fixed to both ends of the gantry move the support side plates in arbitrary directions. Since it is attached so that it can move up and down, it is easy to separate and move the supporting side plate that hinders the maintenance of the mounted equipment and reassemble it, improving the workability of maintenance and reducing the cost required for maintenance. You can In addition, damage to the onboard equipment and the vibration isolation table itself at that time is also prevented.

[Brief description of drawings]

FIG. 1 is a front view showing an embodiment of a vibration isolation table of the present invention.

FIG. 2 is a side view of FIG.

FIG. 3 is a front view showing another embodiment of the vibration isolation table of the present invention.

FIG. 4 is a side view of FIG. 3 (partially omitted).

FIG. 5 is a front view showing still another embodiment of the vibration isolation table of the present invention.

FIG. 6 is a side view of FIG. 5 (partially omitted).

FIG. 7 is a front view showing an example of a conventional vibration isolation table.

FIG. 8 is a front view showing another example of a conventional vibration isolation table.

[Explanation of symbols]

 11: Mounting frame 12: Equipment 13: Reinforcing ribs 14, 15: Supporting side plate 16: Bolts 17: Anti-vibration device 18: Casters 19: Mounting bracket 20: … Leveling bolts

Front Page Continuation (72) Inventor Mitsuhiro Hanada 1-9-9 Kanda-Awaji-cho, Chiyoda-ku, Tokyo Within Showa Science Co., Ltd. (72) Inventor Hiroyuki Tanaka 2-1-1 Oda Sakae, Kawasaki-ku, Kanagawa Prefecture Showa Electric Cable Denki Co., Ltd.

Claims (1)

[Claims] 1. A gantry on which a device is mounted, a pair of supporting side plates whose lower ends are detachably fixed to both ends of the gantry, and upper ends of the supporting side plates are supported to suspend and support the gantry. An anti-vibration table comprising a vibration isolator, wherein free-moving wheels for vertically moving the supporting side plates are attached to the respective supporting side plates in an arbitrary direction.