JPH06177532A - Reflow device - Google Patents

Reflow device

Info

Publication number
JPH06177532A
JPH06177532A JP19608193A JP19608193A JPH06177532A JP H06177532 A JPH06177532 A JP H06177532A JP 19608193 A JP19608193 A JP 19608193A JP 19608193 A JP19608193 A JP 19608193A JP H06177532 A JPH06177532 A JP H06177532A
Authority
JP
Japan
Prior art keywords
oven
rotating shaft
hot air
furnace
blower
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19608193A
Other languages
Japanese (ja)
Other versions
JP3129886B2 (en
Inventor
Haruhiko Koike
晴彦 小池
Kazuo Sotono
一夫 外野
Yasuo Miyamoto
康夫 宮本
Tsugunori Masuda
二紀 増田
Nobuhide Abe
宣英 阿部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tamura Corp
Original Assignee
Tamura Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tamura Corp filed Critical Tamura Corp
Priority to JP05196081A priority Critical patent/JP3129886B2/en
Publication of JPH06177532A publication Critical patent/JPH06177532A/en
Application granted granted Critical
Publication of JP3129886B2 publication Critical patent/JP3129886B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To produce symmetric convective flows of hot air inside an oven so as to uniformly heat both sides of workpieces in transit by a method wherein an air flow generated from the circumferential surface of a centrifugal blower is driven upwards in an open space vertical to the rotating shaft of the blower in the oven. CONSTITUTION:A rotary shaft 34 is transversely provided in a lower space of an oven 12, two centrifugal blowers 35 are provided in bilateral symmetry about the center of the oven 12 to the rotating shaft 34 used in common under guide plates 13 laterally provided. As an air flow generated from the circumferential surface of the blower 35 rotated by the rotating shaft 34 has such directivity that it moves vertical to the rotating shaft 34, the air flow is blown upwards in an open space in the oven 12 and restrained from blowing horizontally as whirling. Furthermore, the two blowers laterally provided are rotated at the same speed in the same direction by the common rotating shaft 34, so that a symmetric convective flow of hot air is formed inside an oven.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、リフロー装置に関する
ものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a reflow apparatus.

【0002】[0002]

【従来の技術】従来のリフロー装置としては、図4に示
されるように、リフロー炉1の中心軸上に一つの遠心送
風機2を配置し、この遠心送風機2によって水平方向に
発生した風を左右の案内板3により上方へ導き、炉内上
部で下方へ転じた風をヒータ4によりリフロー温度以上
に加熱し、その熱風をワーク(部品搭載基板)Wに当
て、その対流熱をワークWに伝達してソルダペーストを
リフローするリフロー装置が知られている。
2. Description of the Related Art As a conventional reflow apparatus, as shown in FIG. 4, a single centrifugal blower 2 is arranged on the central axis of a reflow furnace 1, and the centrifugal blower 2 horizontally generates wind. Guide plate 3 guides the air upward, and the wind that has turned downward in the upper part of the furnace is heated to a reflow temperature or higher by heater 4, and the hot air is applied to work (component mounting substrate) W, and the convective heat is transferred to work W. A reflow device for reflowing the solder paste is known.

【0003】[0003]

【発明が解決しようとする課題】この種のリフロー装置
ではワークの全体を均一に加熱することが望ましいが、
リフロー炉1の中心軸上の遠心送風機2から水平方向へ
発生した風は、左右の案内板3と炉内壁面との間の通路
で水平方向へ旋回しながら吹上がり、そして左右の案内
板3の間で旋回しながら下降するため、ワークの左右面
で熱風の強く当たる位置および方向が一致せず、ワーク
の左右面が均一に加熱されない。このことが、はんだ付
け不良の発生原因の一つと考えられる。
In this type of reflow apparatus, it is desirable to heat the entire work uniformly.
The wind generated in the horizontal direction from the centrifugal blower 2 on the central axis of the reflow furnace 1 whirls up horizontally in the passage between the left and right guide plates 3 and the inner wall surface of the furnace, and then the left and right guide plates 3 Since it descends while turning between them, the positions and directions of the hot air on the left and right surfaces of the work do not match, and the left and right surfaces of the work are not heated uniformly. This is considered to be one of the causes of defective soldering.

【0004】本発明は、このような点に鑑みなされたも
のであり、ワークの左右面を均一に加熱できるリフロー
装置を提供することを目的とするものである。
The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a reflow apparatus capable of uniformly heating the left and right surfaces of a work.

【0005】[0005]

【課題を解決するための手段】本発明は、炉体の内部
に、左右の炉内壁面に沿って上昇し炉体中央部で合流し
て下降し搬送中のワークを加熱する一対の熱風循環系が
形成されたリフロー装置において、炉体内の下部に横設
された1本の回転軸を共通の回転軸とする一対の遠心送
風機が、一対の熱風循環系の下部にそれぞれ配置された
構成のリフロー装置である。
SUMMARY OF THE INVENTION According to the present invention, a pair of hot air circulation is provided inside a furnace body, which rises along the left and right inner wall surfaces of the furnace body, merges at the central portion of the furnace body, and descends to heat a work being conveyed. In a reflow device in which a system is formed, a pair of centrifugal blowers having a single rotary shaft horizontally provided in the lower part of the furnace body as a common rotary shaft are respectively arranged under the pair of hot air circulation systems. It is a reflow device.

【0006】[0006]

【作用】本発明は、炉体内の下部に横設された回転軸に
より回転される遠心送風機の周面から発生する風は、回
転軸に対し直角方向の方向性を持つため開放された炉内
上方へ吹上げられ、水平方向へ旋回しない。さらに、一
対の遠心送風機は共通の回転軸により等速かつ同方向に
等しく回転される。したがって、炉内に左右対称の熱風
対流が形成され、搬送中のワークの左右面が均一に加熱
される。
According to the present invention, since the wind generated from the peripheral surface of the centrifugal blower rotated by the rotary shaft laterally installed in the lower part of the furnace has a direction perpendicular to the rotary shaft, the inside of the furnace is opened. It is blown up and does not turn horizontally. Further, the pair of centrifugal fans are rotated at a constant speed and in the same direction by a common rotating shaft. Therefore, symmetrical hot air convection is formed in the furnace, and the left and right surfaces of the work being conveyed are uniformly heated.

【0007】[0007]

【実施例】以下、本発明を図1乃至図3に示された実施
例を参照して詳細に説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to the embodiments shown in FIGS.

【0008】図1は、リフロー式はんだ付け装置の全体
構造を示し、装置本体11の内部に炉体12が設けられ、こ
の炉体12の内部に左右の案内板13が設けられ、この案内
板13の上部に加熱ユニット14が配置されている。
FIG. 1 shows the overall structure of the reflow soldering apparatus. A furnace body 12 is provided inside the apparatus body 11, and left and right guide plates 13 are provided inside the furnace body 12. A heating unit 14 is arranged on top of 13.

【0009】装置本体11の上部にヒンジ15により蓋体16
が開閉自在に取付けられ、この蓋体16に前記炉体12から
分離可能の炉体上部12a が図示しない連結部材により一
体的に取付けられ、この炉体上部12a に前記加熱ユニッ
ト14が図示しない連結部材により一体的に取付けられて
いる。
A lid 16 is attached to the upper part of the apparatus main body 11 by a hinge 15.
Is attached so as to be openable and closable, and a furnace body upper part 12a separable from the furnace body 12 is integrally mounted on the lid body 16 by a connecting member (not shown), and the heating unit 14 is connected to the furnace body upper part 12a (not shown). It is attached integrally by a member.

【0010】したがって、装置本体11の蓋部16が開かれ
ると、加熱ユニット14も案内板13上に開放されるから、
この加熱ユニット14のメンテナンスや、後述する赤外線
照射量の調整を手動で行う場合などに便利である。
Therefore, when the lid 16 of the apparatus body 11 is opened, the heating unit 14 is also opened on the guide plate 13,
This is convenient for maintenance of the heating unit 14 and manual adjustment of the infrared irradiation amount described later.

【0011】前記加熱ユニット14は、フレーム21の左右
部間に複数本のシーズヒータ22が取付けられ、この各ヒ
ータ22から照射された赤外線による輻射熱と、各ヒータ
22を経た熱風による強制対流熱とによって部品搭載基板
をリフローはんだ付けする加熱装置であるが、この各ヒ
ータ22の下側に後述する赤外線制御体23が設けられてい
る。さらに、フレーム21の上部にヒータ22に送り込まれ
る風量を均一にする目的でパンチング板(多孔板)24が
取付けられている。
The heating unit 14 has a plurality of sheathed heaters 22 mounted between the left and right portions of the frame 21, and the radiant heat of infrared rays emitted from each heater 22 and each heater.
The heating device reflow-solders the component mounting board by the forced convection heat generated by the hot air that has passed through 22, and an infrared control body 23, which will be described later, is provided below each heater 22. Further, a punching plate (perforated plate) 24 is attached to the upper part of the frame 21 for the purpose of equalizing the amount of air sent to the heater 22.

【0012】この加熱ユニット14の下側には基板搬送コ
ンベヤ31が配置されている。このコンベヤ31は、基板搬
入または搬出用の開口32を経て炉内を貫通する左右一対
のコンベヤフレームが平行に配置され、この左右のコン
ベヤフレームに沿ってそれぞれエンドレスチェンが細長
く設けられ、この左右のチェン間にワークとしての部品
搭載基板Wを架け渡した状態で水平に搬送するものであ
る。
A substrate transfer conveyor 31 is arranged below the heating unit 14. In this conveyor 31, a pair of left and right conveyor frames that penetrate the inside of the furnace through an opening 32 for loading or unloading a substrate are arranged in parallel, and endless chains are elongated along the left and right conveyor frames. The component mounting substrate W as a work is laid horizontally between the chains and is conveyed horizontally.

【0013】この基板搬送コンベヤ31の下側には、前記
ヒータ22への通電を制御して炉内温度を制御する熱電対
等の温度センサ33が挿入されている。
Below the substrate conveyer 31, a temperature sensor 33 such as a thermocouple for controlling energization of the heater 22 to control the temperature inside the furnace is inserted.

【0014】前記炉体12内の下部には1本の回転軸34が
回転自在に横設され、この1本の回転軸34を共通の回転
軸とする左右一対の遠心送風機(シロッコファン)35
が、左右の案内板13の下部に炉体中心を基準として左右
対称にそれぞれ配置されている。前記回転軸34は、ベル
ト伝動機構36を介しモータ37により駆動される。このモ
ータ37の回転速度を制御することにより、遠心送風機35
により循環される炉内風量を制御する。
A rotary shaft 34 is rotatably provided in the lower portion of the furnace body 12, and a pair of left and right centrifugal blowers (sirocco fans) 35 having the common rotary shaft 34 as a common rotary shaft 35 are provided.
However, they are arranged symmetrically below the left and right guide plates 13 with respect to the center of the furnace body. The rotating shaft 34 is driven by a motor 37 via a belt transmission mechanism 36. By controlling the rotation speed of this motor 37, the centrifugal blower 35
Controls the amount of air in the furnace circulated.

【0015】そうして、炉内中央部から左右の遠心送風
機35に吸込まれた炉内雰囲気は、炉体12の左右炉内壁面
と左右の案内板13との間に吐出されてこの間の通路を上
昇し、加熱ユニット14の上部からパンチング板24を経て
ヒータ22により加熱昇温され、後述する赤外線制御体23
を経て基板Wに吹付けられ、基板Wのソルダペーストを
強制対流熱によりリフローし、再び左右の遠心送風機35
に吸込まれる。
The furnace atmosphere sucked into the left and right centrifugal blowers 35 from the center of the furnace is discharged between the left and right inner furnace wall surfaces of the furnace body 12 and the left and right guide plates 13, and a passage between them is provided. Is heated and heated by the heater 22 from the upper part of the heating unit 14 through the punching plate 24, and the infrared control body 23 described later
After being sprayed onto the substrate W, the solder paste of the substrate W is reflowed by the forced convection heat, and again the left and right centrifugal blowers 35
Is sucked into.

【0016】このような左右一対の熱風循環系にあっ
て、炉体内の下部に横設された回転軸34により回転する
左右の遠心送風機35の周面から発生する風は、回転軸34
に対し直角方向の方向性を持つため開放された炉内上方
へ吹上げられ、水平方向へ旋回しながら吹上げられるこ
とはない。加えて、左右一対の遠心送風機35が共通の回
転軸34により等速かつ同方向に等しく回転されるから、
炉内に左右対称の熱風対流が形成され、基板搬送コンベ
ヤ31によって図1の紙面と垂直の方向へ搬送されていく
基板Wの左右面が均一に加熱される。
In such a pair of left and right hot air circulation systems, the wind generated from the peripheral surfaces of the left and right centrifugal blowers 35 rotated by the rotating shaft 34 provided in the lower part of the furnace body is
Since it has a directionality at right angles to, it is blown up into the open furnace and is not swung up while turning horizontally. In addition, since the pair of left and right centrifugal blowers 35 are rotated at the same speed and in the same direction by the common rotating shaft 34,
Symmetrical hot air convection is formed in the furnace, and the left and right surfaces of the substrate W conveyed in the direction perpendicular to the paper surface of FIG.

【0017】前記炉体12の底部には、基板Wに冷風を吹
付けるための多孔ノズル38が設けられている。この多孔
ノズル38からの冷風の吹付けは、基板Wに低融点はんだ
を使用した場合、基板下面の部品を高熱から保護する場
合、炉内温度を強制的に下げる場合等において必要であ
る。
A perforated nozzle 38 for blowing cold air onto the substrate W is provided at the bottom of the furnace body 12. The blowing of cold air from the multi-hole nozzle 38 is necessary when a low melting point solder is used for the substrate W, when components on the lower surface of the substrate are protected from high heat, when the temperature inside the furnace is forcibly lowered, and the like.

【0018】次に、図2に示されるように、前記加熱ユ
ニット14は、前記フレーム21内に所定間隔毎に前記複数
本のシーズヒータ22が配列され、この各ヒータ22の両側
に整流板41が設けられている。
Next, as shown in FIG. 2, in the heating unit 14, the plurality of sheathed heaters 22 are arranged at predetermined intervals in the frame 21, and the straightening plates 41 are provided on both sides of each heater 22. Is provided.

【0019】さらに、各ヒータ22より下側であって一つ
のヒータにつき赤外線透過部42を介し一対の回転軸43が
配置され、この各赤外線透過部42を介する回転軸43に、
相互に対向する前記赤外線制御体23が取付けられてい
る。前記各回転軸43は、赤外線制御体23の取付部分では
正6角形断面であるが、フレーム21とは円形断面部分で
回転自在に嵌合している。
Further, a pair of rotating shafts 43 are arranged below the heaters 22 and one heater is provided with an infrared transmitting portion 42 interposed therebetween.
The infrared control bodies 23 facing each other are attached. Each of the rotating shafts 43 has a regular hexagonal cross section at the mounting portion of the infrared control body 23, but is rotatably fitted to the frame 21 at the circular cross sectional portion.

【0020】各ヒータ22の右下に位置する回転軸43には
実線で示されるアーム44が一体に取付けられ、この各ア
ーム44は共通の連動リンク45に回動自在に軸着されてい
る。また、各ヒータ22の左下に位置する回転軸43には2
点鎖線で示されるアーム46が一体に取付けられ、この各
アーム46も共通の連動リンク47に回動自在に軸着されて
いる。
An arm 44 indicated by a solid line is integrally attached to a rotary shaft 43 located at the lower right of each heater 22, and each arm 44 is rotatably attached to a common interlocking link 45. Further, the rotary shaft 43 located at the lower left of each heater 22 has two
Arms 46 indicated by a chain line are integrally attached, and each arm 46 is also rotatably attached to a common interlocking link 47.

【0021】そして、一方の連動リンク45および他方の
連動リンク47を、手動または図示しないソレノイド、エ
アシリンダ等のアクチュエータにより、相互に相反する
方向に移動すると、対向する赤外線制御体23は、相互に
逆方向に回動されて開閉動作し、閉じ状態でヒータ22か
ら照射された赤外線を遮蔽する。
When the interlocking link 45 on one side and the interlocking link 47 on the other side are moved manually or by actuators such as solenoids and air cylinders (not shown) in mutually opposite directions, the infrared control bodies 23 facing each other are moved to each other. The infrared rays emitted from the heater 22 are shielded in the closed state by being rotated in the opposite direction to open and close.

【0022】さらに、各赤外線制御体23が設けられた共
通の各回転軸43に、赤外線制御体23とは反対側で相互に
対向する熱風制御体48が取付けられている。この熱風制
御体48は、各赤外線制御体23が相互に開く方向に回動し
た分、相互に閉じる方向に回動して熱風通過量を制御す
る。
Further, hot air control bodies 48 facing each other on the side opposite to the infrared control bodies 23 are attached to the common rotary shafts 43 provided with the infrared control bodies 23. The hot air control body 48 rotates in a direction in which the infrared control bodies 23 rotate in a mutually opening direction, and thus rotates in a mutually closing direction to control the hot air passing amount.

【0023】そうして、図3Aに示されるように、前記
赤外線制御体23を開くことにより、ヒータ22から発生し
た赤外線IRを赤外線透過部42を経て基板に照射するとと
もに、ヒータ22で加熱された熱風を赤外線透過部42を経
て基板に吹付け、赤外線IRによる輻射熱および熱風によ
る強制対流熱を併用して部品搭載基板をリフロー加熱す
る。このとき、相互に対向する熱風制御体48は、風量を
制限する方向に回動している。
Then, as shown in FIG. 3A, by opening the infrared control body 23, the infrared IR generated from the heater 22 is applied to the substrate through the infrared transmitting part 42 and is heated by the heater 22. The hot air is blown to the board through the infrared transmitting section 42, and the component mounting board is reflow-heated by using the radiant heat of the infrared IR and the forced convection heat of the hot air together. At this time, the hot air control bodies 48 facing each other are rotating in the direction of limiting the air volume.

【0024】また、図3Bに示されるように、前記ヒー
タ22の下側で相互に対向する赤外線制御体23を閉じるこ
とにより、ヒータ22から下側に照射された赤外線を遮蔽
する。このとき、相互に対向する熱風制御体48は全開状
態となっているので、この対向する熱風制御体48の間を
通過した熱風の強制対流熱により部品搭載基板をリフロ
ー加熱する。
Further, as shown in FIG. 3B, the infrared rays radiated downward from the heater 22 are shielded by closing the infrared ray control bodies 23 facing each other under the heater 22. At this time, since the hot air control bodies 48 facing each other are in the fully open state, the component mounting board is reflow-heated by the forced convection heat of the hot air passing between the hot air control bodies 48 facing each other.

【0025】このように、赤外線制御体23を閉じて熱風
のみにより加熱したときも、前記赤外線制御体23を開い
て赤外線輻射熱および強制対流熱を併用したときも、赤
外線制御体23と共通の回転軸43に相互に対向して取付け
られた熱風制御体48は、赤外線制御体23の相互に開く方
向に回動した分、相互に閉じる方向に回動し、また、赤
外線制御体23の相互に閉じる方向に回動した分、相互に
開く方向に回動して、熱風通過量があまり変化しないよ
うに制御する。
As described above, when the infrared control body 23 is closed and heated only by hot air, or when the infrared control body 23 is opened and both infrared radiant heat and forced convection heat are used together, rotation common to the infrared control body 23 is performed. The hot air control bodies 48 attached to the shaft 43 so as to face each other rotate in the mutually opening directions of the infrared control bodies 23, and thus rotate in the mutually closing directions. The amount of hot air passage is controlled so that the amount of hot air passing does not change so much by turning in the direction of opening by the amount of turning in the direction of closing.

【0026】[0026]

【発明の効果】本発明によれば、炉体内の下部に横設さ
れた回転軸により回転される遠心送風機から発生する風
は、回転軸に対し直角方向の方向性を持つため開放され
た炉内上方へ吹上げられ、水平方向へ旋回しながら吹上
げられることがないから、さらに、一対の熱風循環系の
下部にそれぞれ配置された一対の遠心送風機が共通の回
転軸により等速かつ同方向に等しく回転されるから、炉
内に左右対称の熱風対流を作ることができ、ワークの左
右面を均一に加熱して良好なリフローはんだ付け等を行
うことができる。
According to the present invention, since the wind generated from the centrifugal blower rotated by the rotary shaft laterally installed in the lower part of the furnace body has a direction perpendicular to the rotary shaft, the open furnace Since it is blown up inward and is not swung up while turning in the horizontal direction, a pair of centrifugal blowers respectively placed under the pair of hot air circulation systems are driven by a common rotating shaft at a constant speed and in the same direction. Since it is rotated equally to the left and right, symmetrical hot air convection can be created in the furnace, and the right and left surfaces of the work can be uniformly heated and good reflow soldering or the like can be performed.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明のリフロー装置の一実施例を示す断面図
である。
FIG. 1 is a sectional view showing an embodiment of a reflow apparatus of the present invention.

【図2】同上リフロー装置における加熱ユニットを示す
断面図である。
FIG. 2 is a sectional view showing a heating unit in the above reflow apparatus.

【図3】同上加熱ユニットの作用を示す断面図である。FIG. 3 is a cross-sectional view showing the operation of the above heating unit.

【図4】従来のリフロー装置の断面図である。FIG. 4 is a sectional view of a conventional reflow apparatus.

【符号の説明】[Explanation of symbols]

12 炉体 34 回転軸 35 遠心送風機 W ワーク 12 Furnace 34 Rotating shaft 35 Centrifugal blower W work

───────────────────────────────────────────────────── フロントページの続き (72)発明者 増田 二紀 埼玉県狭山市上広瀬東久保591番地の11 株式会社タムラ製作所機工工場内 (72)発明者 阿部 宣英 埼玉県狭山市上広瀬東久保591番地の11 株式会社タムラ製作所機工工場内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Niki Masuda, Inventor Niki 11-11, 591 Kamihirose Higashikubo, Sayama City, Saitama Prefecture Inside the Tamura Corporation Machinery Factory (72) Inventor Nobuhide Abe 591, Kamihirose Higashikubo, Sayama City, Saitama Prefecture No. 11 Inside the Tamura Corporation machine work factory

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 炉体の内部に、左右の炉内壁面に沿って
上昇し炉体中央部で合流して下降し搬送中のワークを加
熱する一対の熱風循環系が形成されたリフロー装置にお
いて、 炉体内の下部に横設された1本の回転軸を共通の回転軸
とする一対の遠心送風機が、一対の熱風循環系の下部に
それぞれ配置されたことを特徴とするリフロー装置。
1. A reflow apparatus in which a pair of hot air circulation systems are formed inside the furnace body, which rise along the left and right inner wall surfaces of the furnace, merge at the center of the furnace body, and descend to heat a workpiece being conveyed. A reflow device, characterized in that a pair of centrifugal blowers having a common rotary shaft that is provided in the lower part of the furnace body as a common rotary shaft are respectively arranged under the pair of hot air circulation systems.
JP05196081A 1993-08-06 1993-08-06 Reflow equipment Expired - Lifetime JP3129886B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP05196081A JP3129886B2 (en) 1993-08-06 1993-08-06 Reflow equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05196081A JP3129886B2 (en) 1993-08-06 1993-08-06 Reflow equipment

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP5194978A Division JPH07108454B2 (en) 1993-08-05 1993-08-05 Reflow heating device

Publications (2)

Publication Number Publication Date
JPH06177532A true JPH06177532A (en) 1994-06-24
JP3129886B2 JP3129886B2 (en) 2001-01-31

Family

ID=16351892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP05196081A Expired - Lifetime JP3129886B2 (en) 1993-08-06 1993-08-06 Reflow equipment

Country Status (1)

Country Link
JP (1) JP3129886B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08250852A (en) * 1995-03-10 1996-09-27 Senju Metal Ind Co Ltd Reflow method, reflow furnace and hot air heater for the furnace
JP2006153440A (en) * 2001-02-23 2006-06-15 Tamura Seisakusho Co Ltd Hot blast type heating device and heating furnace
JP2006162247A (en) * 2001-02-23 2006-06-22 Tamura Seisakusho Co Ltd Heating furnace

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101768375B1 (en) * 2016-05-20 2017-08-30 오상선 Functional two-toes cover

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08250852A (en) * 1995-03-10 1996-09-27 Senju Metal Ind Co Ltd Reflow method, reflow furnace and hot air heater for the furnace
JP2006153440A (en) * 2001-02-23 2006-06-15 Tamura Seisakusho Co Ltd Hot blast type heating device and heating furnace
JP2006162247A (en) * 2001-02-23 2006-06-22 Tamura Seisakusho Co Ltd Heating furnace
JP4537312B2 (en) * 2001-02-23 2010-09-01 株式会社タムラ製作所 Hot air jet type heating device and heating furnace

Also Published As

Publication number Publication date
JP3129886B2 (en) 2001-01-31

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