JPH06175356A - Device for peeling pellicle - Google Patents

Abstract

PURPOSE:To obtain a peeling device for pellicle capable of automatically peeling pellicle frames from a reticle without any manual work. CONSTITUTION:This device is provided with a peeling soln. supplying means supplying a peeling soln. 50 to an adhesive between the reticle 20 and pellicle frames 21. 22 and a peeling means pulling and peeling pellicle frames 21, 22 from the reticle 20. In this peeling soln. supplying means the peeling soln. 50 reduces adhesive strength of the adhesive and is stable to a pellicle film. Consequently, the pellicle frames 21, 22 can be easily peeled from the reticle 20 without contaminating and injuring the reticle 20.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pellicle peeling device, and more particularly to a device for peeling a pellicle from a reticle used in a semiconductor exposure process.

[0002]

2. Description of the Related Art FIG. 8 is a perspective view of a so-called "reticle with a pellicle". As shown in FIG. 8, the frames 3 and 4 are adhesively fixed to the reticle 1 via the adhesive 2 (the side hidden by the reticle 1 cannot be seen). Further, a pellicle 5 is stretched on the frames 3 and 4 (the pellicle of the lower frame 4 is hidden and invisible, and therefore not shown).

Conventionally, when the pellicle frames 3 and 4 are separated from the reticle with a pellicle shown in FIG.
The peeling work was performed using the peeling jig 10 as shown in FIG. The tip 11 of the peeling jig 10 is cut into the adhesive 2 (usually, as the adhesive 2, a double-sided tape or an acrylic adhesive is used, and the thickness of the adhesive is about 0.5 mm). Then, the frame 3 was peeled off from the reticle 1 by the principle of leverage with the bent side portion 12 as a fulcrum.

[0004]

SUMMARY OF THE INVENTION As described above, the conventional techniques have the following problems. Usually, the adhesive force between the reticle 1 and the adhesive 2 is inferior to the adhesive force between the frame 3 and the adhesive 2.
The adhesive 2 and the adhesive 2 should be able to be separated from the reticle 1 as a unit. However, in reality, the adhesive 2 peels off from the reticle 1, but at the same time, it may also peel off from the frame 3. The adhesives peeled off from both sides re-adhere to the other surface, and particularly fall on the reticle surface. If you do,
In some cases, workability is poor and various problems may occur, such as extra steps such as re-cleaning of the reticle surface.

By the bent portion 12 of the peeling jig 10,
The surface of reticle 1 was sometimes scratched. The 6-inch size is large to hold by hand, and sometimes the reticle was dropped and damaged.

Therefore, an object of the present invention is to provide a peeling device for a pellicle that can automatically and easily peel the pellicle frame from the reticle in order to solve the above problems.

[0007]

In the pellicle peeling apparatus according to the invention described in claim 1, a reticle or a mask is provided with:
A device for peeling a pellicle frame from a pellicle frame holding a pellicle film covering the reticle, which is fixed via an adhesive, wherein the pellicle frame is adhered to the adhesive between the reticle and the pellicle frame. A peeling liquid supply unit that reduces the force and supplies a stable peeling liquid to the pellicle film, and a peeling unit that pulls and peels the pellicle frame from the reticle are provided.

Further, in the pellicle peeling apparatus according to the present invention as set forth in claim 2, the peeling means pulls and peels while applying a pulling force with one side or one point of the pellicle frame fixed to the reticle as a fulcrum. Is.

Further, in the pellicle peeling apparatus according to the present invention as defined in claim 3, the peeling means uses a pulling force with one side or one point of the pellicle frame fixed to the reticle as a fulcrum, and the one side or other points. The other side or another point is used as a fulcrum and another pulling force is continuously suspended while pulling and peeling.

Further, in the pellicle stripping apparatus according to the invention described in claim 4, in the pellicle stripping apparatus according to any one of claims 1 to 3, the stripping liquid supply means is a stripping solution storing stripping solution. It is provided with a liquid tank and a moving means for moving the reticle to which the pellicle frame is fixed in the peeling liquid tank.

Further, in the pellicle peeling apparatus according to the present invention of claim 5, the peeling liquid supply means injects or sprays the peeling liquid onto or in the adhering portion of the reticle to which the pellicle frame is fixed. It is equipped with means.

Further, in the pellicle stripping apparatus according to the invention of claim 6, the stripping solution supply means includes a stripping solution vapor chamber filled with stripping solution vapor, and the pellicle frame in the stripping solution vapor chamber. And a moving means for moving the fixed reticle.

[0013]

In the present invention, the reticle and the peeling liquid supply means for supplying the peeling liquid that reduces the adhesive force of the adhesive to the adhesive between the reticle and the pellicle frame and that is stable to the pellicle film. Therefore, the pellicle frame can be easily peeled off from the reticle without contaminating or scratching the reticle.

That is, in the present invention, the peeling liquid is once supplied to the adhesive for bonding the reticle and the pellicle frame,
Since the frame is peeled off after weakening the adhesive force of the adhesive, the pellicle frame can be easily peeled off from the reticle.

Further, as concrete peeling means, a peeling means for pulling and peeling while applying a pulling force with one side or one point of the pellicle frame fixed to the reticle as a fulcrum, in particular, of the pellicle frame fixed to the reticle is used. In the case of pulling and peeling by continuously suspending a pulling force with one side or one point as a fulcrum and another pulling force with another side or another point other than the one side or one point as a fulcrum, the pellicle is easily removed from the reticle by a machine. The frame can be peeled off,
It is also possible to automate the peeling work.

Further, as a concrete stripping liquid supply means,
A device provided with a stripping liquid tank storing the stripping liquid and a moving means for moving the reticle having the pellicle frame fixed in the stripping liquid tank, and also spraying the stripping liquid on the bonded portion of the reticle to which the pellicle frame is fixed. Or a means provided with a stripping solution injection means for spraying, and a means provided with a stripping solution vapor chamber filled with stripping solution vapor and a moving means for moving a reticle having a pellicle frame fixed in the stripping solution vapor chamber. A stripping solution supply means is disclosed.

That is, in the one provided with the stripping liquid tank storing the stripping liquid and the moving means for moving the reticle having the pellicle frame fixed in the stripping liquid tank, the pellicle frame is fixed to the reticle by the moving means. The so-called "reticle with pellicle" thus prepared is immersed in the stripping solution tank. Since the peeling liquid reduces the adhesive force of the adhesive and is stable to the pellicle film, it does not dissolve the surface of the pellicle film and penetrates into the adhesive part between the pellicle frame and the reticle to bond. Reduce power. Therefore, it can be easily peeled by the above-mentioned peeling means.

The peeling means may also serve as the moving means and perform the peeling work in the peeling liquid tank. Further, the peeling work may be performed outside the bath after the immersion for a predetermined time. in this case,
If the peeling torque seems to be too high, try again.
The same peeling operation may be performed by immersing in a peeling liquid tank.

Further, in a device provided with a peeling liquid injecting means for injecting or spraying the peeling liquid onto the adhesive portion of the reticle to which the pellicle frame is fixed, the ejecting or spraying nozzle is provided at one or several places of the adhesive portion of the reticle with the pellicle. Supply stripper. The supplied stripping solution spreads over the entire circumference by the capillary phenomenon and reduces the adhesive force. Therefore, it can be easily peeled by the above-mentioned peeling means.

Further, in the case where the peeling liquid vapor chamber filled with the peeling liquid vapor and the moving means for moving the reticle with the pellicle frame fixed in the peeling liquid vapor chamber are condensed on the bonded portion of the reticle with the pellicle. Similarly, the peeling liquid spreads over the entire circumference and reduces the adhesive force. Therefore, it can be easily peeled by the above-mentioned peeling means.

Regarding the selection of the stripping solution, it is natural that the adhesive force of the adhesive for fixing the reticle and the pellicle frame is reduced, and it is necessary to be stable with respect to the pellicle film. To do. That is, in order to reduce the adhesive strength of the adhesive, it is sufficient to use a chemical solution having a strong dissolving power to dissolve the adhesive, but at that time, the pellicle film itself is dissolved or the adhesive is completely dissolved. However, there is a possibility that a melted pellicle or adhesive may adhere to the reticle surface.

In this case, when the reticle surface is regenerated, the reticle surface is cleaned. Particularly, when the reticle surface is attached to the edge portion of the reticle surface or a complicated circuit portion, a great amount of cleaning is required. It may take time.

Therefore, in weakening the adhesive force of the adhesive, the optimum chemical solution must be determined by a balance between the degree of decreasing the adhesive force and the degree of not dissolving the pellicle and the adhesive. For this purpose, various peeling liquids are selected according to the material of the pellicle and the kind of the adhesive.

In many cases, the pellicle is made of a cellulosic resin such as nitrocellulose, and the adhesive is a double-sided tape or an acrylic adhesive. As a preferable release agent for these materials, water in which a surfactant is dissolved is used for the double-sided tape, and iPA (isopropyl alcohol) may be used for the acrylic adhesive.

With acetone, ethyl alcohol, methyl alcohol, etc., the pellicle of a cellulosic resin such as nitrocellulose will be instantly thawed and broken, or the degree of swelling will be extremely high. Although it is contaminated, such a phenomenon does not occur with iPA, a surfactant aqueous solution, or the like.

Therefore, when the reticle with a pellicle is immersed in a chemical tank filled with iPA, the iPA may seep into the pellicle through the gap of the adhesive, but the adhesive force of the adhesive decreases and the pellicle and the adhesive Does not dissolve and contaminate the reticle. In such a state, the pellicle frame can be peeled off from the reticle extremely easily without using a peeling jig as shown in FIG.

[0027]

1 is a perspective view of a reticle with a pellicle used in an embodiment of a peeling apparatus of the present invention. Pellicle frames 22 and 23 are adhesively fixed to both surfaces (may be one surface) of the reticle holding member 20. Pellicle frame 2
Two jig holes 23 are provided for each side of 1 and 22.
With respect to one pellicle frame, two jig holes 23 are provided on each side facing each other. Therefore, a total of four jig holes 23 are provided for one pellicle frame.

The jig hole 23 is usually the pellicle frame 2
The holes do not pass through the holes 1 and 22 but are holes having a certain depth in order to maintain the airtightness of the pellicle. As the jig hole 23, for example, JP-A-1-97961
Jig holes for automatic pellicle applicators, such as those disclosed in US Pat.

FIG. 2 is a perspective view of a reticle with a pellicle used in another embodiment of the peeling device of the present invention. Figure 2
In the reticle with pellicle, the pellicle frames 24, 2
A groove 26 is provided in the frame 5. The grooves 26 are also provided on the opposite sides.

1 and 2, only the detailed structure of the peeling means for pulling and peeling the pellicle frame, which will be described later, is changed. Therefore, the following description will be limited to the case of the reticle with a pellicle shown in FIG.

FIG. 3 is a perspective view of a reticle holding arm that holds a reticle holding member that constitutes the peeling means, and FIG.
FIG. 6 is a cross-sectional view when the reticle holding arm holds a reticle holding member. The reticle holding arm is composed of two arms 30 and 31, and V-shaped or concave grooves 30A and 31A are provided inside the arms 30 and 31 facing each other.

Further, the reticle holding member 20 moves the arms 30 and 31 in parallel in the direction of the arrow 32 by a driving unit (not shown) to move the reticle 20 into the groove 30A, as shown in FIG. 4 (cross-sectional view). Depending on 31A, support it and fix it. In addition, stoppers 30B and 31B are provided at the lower ends of the arms 30 and 31, respectively.
Is designed not to fall.

FIG. 5 is a perspective view of a frame holding arm which constitutes the peeling means. It consists of two arms 40 and 41. Protrusions 42 are provided inside the arms 40 and 41 facing each other, and the arms 40 and 41 are translated in the direction of arrow 43 by a driving unit (not shown) to be inserted into the jig hole 23 of FIG. , Hold and fix the pellicle frame.

FIG. 6 shows a reticle 2 with pellicles 21 and 22.
It is sectional drawing when 0 is hold | maintained. The arm 30 and 31 sandwiches the reticle 20, and the arms 40 and 41 sandwich the jig hole 23 of the pellicle frame 21 via the protrusion 42,
The arms 44 and 45 sandwich and support the jig hole 23 of the other pellicle frame 22 via the projection 42.

FIG. 7 is a perspective view showing the construction of an embodiment of the pellicle peeling apparatus of the present invention. The same members as those described above are designated by the same reference numerals. The reticle holding members 20 to which the pellicles 21 and 23 are adhesively fixed are each held by an arm, and a peeling liquid tank 51 filled with a peeling liquid 50 such as iPA and a surfactant is provided with a driving means (not shown) to indicate an arrow 5.
The reticle with a pellicle 20 is moved so as to be attached to the whole.

After being immersed in the stripping solution 50 for a predetermined time (for example, 5 minutes), it is pulled up in the direction opposite to the arrow 52. This time, the arms 40 and 41 are moved in the direction of arrow 53 and the arms 44 and 45 are moved. The pellicle frames 21 and 22 are separated from the reticle holding member 20 by simultaneously pulling the lower side of the pellicle as a fulcrum in the direction of an arrow 54 that is substantially orthogonal to the reticle and pellicle surfaces by driving means (not shown).

At this time, the torque of the driving means (for example, the motor) moved to the arrows 53 and 54 (may be the driving current of the motor) is monitored, and if the torque is too large, the adhesive is still adhered. If it is determined that the force is strong, the reticle with a pellicle is again immersed in the peeling liquid 50 and pulled up, and then the same process is performed, the pellicle frame will not be forcibly peeled from the reticle.

Furthermore, the pulling force with the lower side of the pellicle frames 21, 22 as a fulcrum, and the pellicle frames 21, 22
It is also possible to pull off by pulling continuously with a pulling force using the upper side as a fulcrum. Accordingly, the pellicle frame can be easily peeled off from the reticle holding member, and the peeling work can be automated.

After peeling, the pellicle frames 20 and 21 are
Since it is not reused, the arms 40 and 41 and the arms 44 and 45 may be opened to each other and discarded at a predetermined place. On the other hand, the reticle 20 is cleaned and recycled after the pellicle frames 21 and 22 are peeled off.

Although the reticle 20 may be cleaned by another device, the reticle 20 is held by the arms 30 and 31 even after the pellicle frame is peeled off. It is preferable to carry out cleaning (including, for example, brush cleaning) in the chemical solution tank.

At this time, since the pellicle is no longer attached, the reticle is not contaminated even with a highly soluble chemical solution. The chemical solution used for cleaning after peeling off the pellicle frame may be acetone, ammonia, or the like, or may be immersed in a solution in which sulfuric acid and hydrogen peroxide solution are mixed (normally this is called acid cleaning). Further, it is also possible to irradiate the reticle 20 with UV light (ultraviolet light) to make the reticle surface hydrophilic before being immersed in these chemicals.

Although the reticle with the pellicle is soaked in the stripping solution 50 in FIG. 7, a stripping solution injecting means for spraying or spraying the stripping solution may be provided on the adhesive portion of the reticle holding member. One of the adhesive parts of the reticle with pellicle
The stripping solution is supplied to a place or several places by a jet or spray nozzle. The supplied stripping solution spreads over the entire circumference by the capillary phenomenon and reduces the adhesive force. Therefore, it can be easily peeled by the above-mentioned peeling means.

Further, the reticle holding member to which the pellicle frame is fixed may be moved by the moving means in the peeling liquid vapor chamber filled with the peeling liquid vapor. For this reason,
Similarly, the peeling liquid that has condensed on the bonded portion of the reticle with the pellicle spreads all over the circumference, reducing the adhesive force. Therefore, it can be easily peeled by the above-mentioned peeling means.

[0044]

INDUSTRIAL APPLICABILITY As described above, according to the present invention, a peeling liquid supply for supplying an adhesive between the reticle and the pellicle frame to the adhesive between the reticle and the pellicle frame to reduce the adhesive force of the adhesive and to supply a stable peeling liquid to the pellicle film Since the means and the peeling means for pulling and peeling the pellicle frame from the reticle are provided, the pellicle frame can be easily peeled from the reticle without contaminating or scratching the reticle.

As a specific peeling means, a peeling means for pulling and peeling while applying a pulling force with one side or one point of the pellicle frame fixed to the reticle as a fulcrum, in particular, of the pellicle frame fixed to the reticle is used. In the case of pulling and peeling by continuously suspending a pulling force with one side or one point as a fulcrum and another pulling force with another side or another point other than the one side or one point as a fulcrum, the pellicle is easily removed from the reticle by a machine. The frame can be peeled off,
It is also possible to automate the peeling work.

Further, as a concrete stripping liquid supply means,
In the one provided with a peeling liquid tank storing the peeling liquid and a moving means for moving the reticle having the pellicle frame fixed in the peeling liquid tank, the moving means dips the reticle with the pellicle into the peeling liquid tank. . Since the peeling liquid reduces the adhesive force of the adhesive and is stable to the pellicle film, it does not dissolve the surface of the pellicle film and penetrates into the adhesive part between the pellicle frame and the reticle to bond. Reduce power. Therefore, it can be easily peeled by the above-mentioned peeling means.

Further, in the one provided with the peeling liquid injecting means for injecting or spraying the peeling liquid to the adhesive portion of the reticle to which the pellicle frame is fixed, the ejecting or spraying nozzle is provided at one or several places of the adhesive portion of the reticle with the pellicle. Supply stripper. The supplied stripping solution spreads over the entire circumference by the capillary phenomenon and reduces the adhesive force. Therefore, it can be easily peeled by the above-mentioned peeling means.

Further, in the one provided with the stripping solution vapor chamber filled with the stripping solution vapor and the moving means for moving the reticle having the pellicle frame fixed in the stripping solution vapor chamber, the reticle with the pellicle is condensed on the bonded portion. Similarly, the peeling liquid spreads over the entire circumference and reduces the adhesive force. Therefore, it can be easily peeled by the above-mentioned peeling means.

[Brief description of drawings]

FIG. 1 is a perspective view of a reticle with a pellicle used in an embodiment of a peeling device of the present invention.

FIG. 2 is a perspective view of a reticle with a pellicle used in another embodiment of the peeling device of the present invention.

FIG. 3 is a perspective view of a reticle holding arm that holds a reticle holding member that constitutes peeling means,

FIG. 4 is a sectional view when a reticle holding arm holds a reticle holding member.

FIG. 5 is a perspective view of a frame holding arm that constitutes a peeling unit.

FIG. 6 is a cross-sectional view when holding a reticle with a pellicle.

FIG. 7 is a perspective view showing the configuration of an embodiment of a pellicle peeling device of the present invention.

FIG. 8 is a perspective view showing a configuration of a so-called “reticle with pellicle”.

FIG. 9 is a perspective view showing a configuration of a conventional peeling jig.

Claims (6)

[Claims] 1. A device for peeling a pellicle frame from a reticle or mask in which a pellicle frame holding a pellicle film covering the reticle is fixed via an adhesive, wherein the pellicle frame is separated from the reticle and the pellicle frame. The adhesive of (1) is provided with a peeling liquid supplying unit that reduces the adhesive force of the adhesive and supplies a stable peeling liquid to the pellicle film, and a peeling unit that pulls and peels the pellicle frame from the reticle. A pellicle peeling device. 2. The pellicle peeling apparatus according to claim 1, wherein the peeling means pulls and peels while applying a pulling force with one side or one point of the pellicle frame fixed to the reticle as a fulcrum. A pellicle peeling device. 3. The pellicle peeling device according to claim 1 or 2, wherein the peeling means uses a pulling force with one side or one point of the pellicle frame fixed to the reticle as a fulcrum, and the one side or other points. A pellicle peeling device for pulling and peeling while continuously suspending another pulling force using another side or another point as a fulcrum. 4. The pellicle peeling apparatus according to claim 1, wherein the peeling liquid supply unit stores a peeling liquid tank in which the peeling liquid is stored.
A pellicle peeling apparatus comprising: a moving unit that moves the reticle to which the pellicle frame is fixed in the peeling liquid tank. 5. The pellicle peeling device according to claim 1, wherein the peeling liquid supply unit ejects or sprays a peeling liquid onto a bonding portion of a reticle to which the pellicle frame is fixed. A pellicle peeling device comprising a liquid injection means. 6. The pellicle stripping apparatus according to claim 1, wherein the stripping solution supply means includes a stripping solution vapor chamber filled with stripping solution vapor, and the pellicle in the stripping solution vapor chamber. A pellicle peeling device comprising: a moving unit that moves a reticle to which a frame is fixed.