JPH06171098A - Manufacture of ink jet recording head - Google Patents

Abstract

PURPOSE:To improve a process for arranging piezoelectric elements adapted to change the capacity of pressure chambers communicated to a plurality of ink injection nozzle ports opposite to respective pressure chambers in a manufacture of an ink jet recording head. CONSTITUTION:Pressure chambers 4 communicated to nozzle ports 2 are formed on each inclined surface 8 of a substrate 1 having a plurality of inclined surfaces formed on its upper surface. At the time of arranging respective pressure chambers in opposition to respective pressure chambers on a vibration board 6 spreading over the surface of the substrate 1, a piece of a planar piezoelectric element is laid on the vibration board 6 in a manner opposing to all pressure chambers 4. Then, the piezoelectric element is pressed down thereon by a member having a configuration fitting to the unevenness of an upper surface of the substrate 1, in order that it is cut into a piezoelectric element 7 with the size in opposition to respective pressure chambers 4.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing an ink jet recording head for ejecting ink in the ink pressure chamber from the nozzle hole by changing the volume of the ink pressure chamber communicating with each of the plurality of nozzle holes by a piezo element. The present invention relates to a method, and particularly, a method in which a piezo element can be easily arranged corresponding to each ink pressure chamber.

[0002]

2. Description of the Related Art A conventional ink jet recording head will be described below. FIG. 5 shows a conventional ink jet recording head. In the figure, reference numeral 1 is a glass substrate, and a groove serving as a nozzle hole 2, an ink passage 3, a pressure chamber 4 and an ink supply passage 5 is formed on an upper surface of the glass substrate by etching. Has been formed. Reference numeral 6 is an elastic diaphragm bonded so as to cover these grooves. Reference numeral 7 denotes a plurality of piezo elements adhered on the vibration plate 6 so as to correspond to the pressure chambers 4, respectively.

Ink passage 3 and pressure chamber 4 are filled with ink through an ink supply passage 5 communicating with an ink storage portion (not shown) due to a capillary phenomenon. The piezo element 7 is deformed by receiving an electric signal through each connected signal line, and deforms the diaphragm 6 forming the side wall of the pressure chamber 4 facing the piezo element 7. When the volume of the pressure chamber 4 decreases due to the deformation of the vibrating plate 6, pressure is applied to the ink in the pressure chamber 4, and the ink flies from the nozzle hole 2 through the ink passage 3. By applying different electric signals to the piezo element 7, it is possible to control the droplets to fly independently from each other through the nozzle holes 2.

[0004]

However, when manufacturing the above-mentioned conventional ink jet recording head, when piezo elements are arranged facing each pressure chamber,
Since the piezo elements were cut into small pieces and then they were attached to the diaphragm 6 one by one, there was a problem that the work was fine and many man-hours were required to manufacture.

The present invention solves the above-mentioned conventional problems, and an object of the present invention is to make it possible to dispose a piezo element on a diaphragm more easily without requiring a detailed work.

[0006]

In order to achieve this object, a method of manufacturing an ink jet recording head according to the present invention comprises a side surface of a space which communicates with a plurality of nozzle holes for ejecting ink and which accommodates ink. A pressure chamber covered with a vibrating plate having elasticity is formed on each of a plurality of inclined surfaces formed on one surface of the substrate, and a piezoelectric element for changing the volume of the pressure chamber to eject ink from the nozzle hole is provided. ,
In order to arrange on the vibrating plate so as to face each pressure chamber, after arranging one planar piezoelectric element facing the inclined surface of the substrate on which the plurality of pressure chambers are formed, the inclined surface The one flat piezoelectric element is divided by a member engaging with the shape of and is arranged on the diaphragm.

[0007]

In the above manufacturing method, the pressure chamber whose upper surface is covered with the vibration plate is formed on the plurality of inclined surfaces formed on one surface of the substrate, and the pressure chamber is provided on the vibration plate so as to face the pressure chamber. A plurality of divided piezo elements are arranged, and one flat piezo element arranged on the diaphragm is provided between the member that engages with the uneven shape of the inclined surface and the substrate. The piezoelectric element is arranged by dividing the piezoelectric element by engaging the substrate with the member, and the piezoelectric element is arranged on the diaphragm so as to face each pressure chamber.

[0008]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view of an ink jet recording head according to an embodiment of the present invention. In the figure, 1
Is a plastic substrate formed by molding a plurality of inclined surfaces 8 having the same inclination so that the upper surface has a sawtooth shape, and the nozzle holes 2, the ink paths 3, Grooves to be the pressure chambers 4 and the ink supply paths 5 are formed by molding. A vibrating plate 6 is formed so as to cover the saw-toothed upper surface of the substrate 1, and completes the nozzle hole 2, the ink passage 3, the pressure chamber 4, and the ink supply passage 5. Reference numeral 7 denotes a flat plate-shaped piezo element which is attached to the vibrating plate 6 so as to face the pressure chamber 4 and has the same width as that of the inclined surface 8.

On the side surface of the ink jet recording head, a plurality of nozzle holes 2 are formed in a line, the nozzle holes 2 are connected to a pressure chamber 4 through an ink passage 3, and the pressure chamber 4 is connected to an ink passage through an ink passage 3. It communicates with a storage unit (not shown). One of the side walls of the pressure chamber 4 is a piezo element 7
Is a diaphragm 6 for holding an electric signal. The piezoelectric element 7 is connected to a signal line (not shown) to receive an electric signal. The ink passage 3 and the pressure chamber 4 are filled with ink by a capillary phenomenon. By sending an electric signal to the piezo element 7, the piezo element 7 and the vibration plate 6 are deformed, and the volume of the pressure chamber 4 is reduced. This causes ink to fly from the nozzle holes 2.

FIG. 2 is a side view of the ink jet recording head, and illustrates the process of attaching the piezo element 7 onto the vibrating plate 6. In FIG. 2A, the upper surface is formed in a sawtooth shape, and the vibration plate 6 conforming to the shape of the upper surface is provided on the substrate 1 in which the nozzle hole 2, the ink passage 3 and the pressure chamber 4 are formed on the inclined surface 8. Adhere it.
Above the vibrating plate 6, one flat piezo element 7 having a length substantially equal to the total length of the widths of the plurality of inclined surfaces 8 is provided.
It is arranged so as to face the pressure chamber 4. The piezoelectric element 7 is preliminarily cut with a diamond cutter or the like at intervals equal to the width of each inclined surface 8. A saw-toothed pressing member 9 conforming to the shape of the surface of the diaphragm 6 is arranged above the piezo element 7 in which the cut is arranged at the sharp tip of the diaphragm 6. Then, the pointed tip portion of the pressing member 9 is arranged at the cut of the piezo element 7 and pushed down, so that the piezo element 7 is cut along the cut as shown in FIG. Is located in. By removing the pressing member 9, the inkjet recording head shown in FIG. 1 can be obtained.

When the piezoelectric element 7 and the vibrating plate 6 are joined, if the adhesive is applied to the lower surface of the piezoelectric element 7 in advance, the adhesive can be disposed accurately and can be bonded at the same time as cutting. it can. In addition, the piezoelectric element 7 is placed on the vibrating plate 6.
The piezo element 7 is attached to the pressing member 9 that engages with the shape in which the
Wiring can be performed at the same time by providing a contact of the signal line to.

FIG. 3 shows an ink jet recording head in which a piezo element 7 is arranged by forming an inclined surface 8 having two different inclinations on the upper surface of the substrate 1.
[Fig. 3] is a side view for explaining the producing process. In FIG. 4 (a), above the piezo element 7 which is cut by a diamond cutter or the like at intervals equal to the width of each inclined surface 8,
The pressing member 9 is arranged along the shape of the inclined surface 8, and the diaphragm 6
By pressing the cut portion with the sharp tip of the pressing member 9, the piezo element 7 is cut and placed on each inclined surface 8 as shown in FIG.

In this configuration, the substrate 1 is the same as in the above embodiment.
Side and the pressing member 9 side sharpened the piezo element 7 in comparison with what is sheared, the piezo element 7 is bent and bent by the pressing member 9 at the valley portion of the intermediate portion of the substrate 1 side. Therefore, it can be easily cut with a small force.

[0014]

As described above, in the method of manufacturing the ink jet recording head of the present invention, the pressure chamber communicating with the nozzle hole is
It is provided on each of a plurality of different inclined surfaces formed so as to have unevenness on the upper surface of the substrate, and one piezoelectric element is pressed by a member that engages with the unevenness of the substrate and cut to face each pressure chamber. The divided piezo elements are arranged on the vibrating plate. Therefore, compared to the conventional one in which many small piezo elements are attached one by one,
Since the man-hours are reduced and the fine work is eliminated, it becomes possible to easily manufacture the ink jet recording head.

[Brief description of drawings]

FIG. 1 is a perspective view of an inkjet recording head according to an embodiment of the present invention.

FIG. 2 is a side view illustrating a step of attaching a piezo element in the example.

FIG. 3 is a perspective view of an ink jet recording head according to another embodiment of the present invention.

FIG. 4 is a side view illustrating a step of attaching a piezo element in the example.

FIG. 5 is a perspective view of a conventional inkjet recording head.

[Explanation of symbols]

 1 Substrate 2 Nozzle Hole 3 Ink Passage 4 Pressure Chamber 5 Ink Supply Passage 6 Vibration Plate 7 Piezo Element 8 Inclined Surface 9 Pressing Member

Claims (1)

[Claims] 1. A plurality of slopes formed on one surface of a substrate, each pressure chamber being in communication with a plurality of nozzle holes for ejecting ink and having one side surface of a space for accommodating ink covered with a vibrating plate having elasticity. A plurality of piezo elements, which are respectively formed on the surfaces and are configured to change the volume of the pressure chambers to eject ink from the nozzle holes, are arranged on the vibration plate so as to face the pressure chambers. After arranging a flat piezo element facing the inclined surface of the substrate in which the pressure chamber is formed, the flat piezo element is divided by a member engaging with the shape of the inclined surface. A method for manufacturing an inkjet recording head arranged on a diaphragm.