JP3473034B2 - Inkjet recording head - Google Patents
Inkjet recording headInfo
- Publication number
- JP3473034B2 JP3473034B2 JP33904892A JP33904892A JP3473034B2 JP 3473034 B2 JP3473034 B2 JP 3473034B2 JP 33904892 A JP33904892 A JP 33904892A JP 33904892 A JP33904892 A JP 33904892A JP 3473034 B2 JP3473034 B2 JP 3473034B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- fixing member
- recording head
- pressure chamber
- laminated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明はヘッド基板と圧電素子と
圧電素子を保持する固定部材とを有するインクジェット
記録ヘッドの構造に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure of an ink jet recording head having a head substrate, a piezoelectric element and a fixing member holding the piezoelectric element.
【０００２】[0002]
【従来の技術】インクジェット記録ヘッドは、圧力室の
体積を変化させることによって圧力室内部に圧力を発生
させ、この圧力によってノズルからインクを吐出する。
圧力室の体積を変化させる手段として、圧電素子に電圧
を印加することによって発生する変位を利用する方法が
ある。2. Description of the Related Art Ink jet recording heads generate pressure inside pressure chambers by changing the volume of the pressure chambers, and ink is ejected from nozzles by this pressure.
As a means for changing the volume of the pressure chamber, there is a method of utilizing displacement generated by applying a voltage to the piezoelectric element.
【０００３】一方、記録装置の小型化・高密度化に伴っ
てインクジェット記録ヘッドも小型化・高密度化が進め
られている。したがって隣接する圧力室の間隔を狭くし
なければならず、また圧力室の幅も狭くなってきてい
る。しかしながら、記録を行うに充分な量のインクを吐
出するためには、充分な容積を持った圧力室が必要であ
る。そこで圧力室の長さを長くして溝状の圧力室とする
ことによって、圧力室の容積を確保する。したがって圧
電素子も各圧力室形状に合わせた形状にすると圧力室の
容積を効率的に変化させることができる。On the other hand, along with the miniaturization and high density of the recording apparatus, the miniaturization and high density of the ink jet recording head has been promoted. Therefore, the space between the adjacent pressure chambers must be narrowed, and the width of the pressure chambers is also narrowed. However, in order to eject a sufficient amount of ink for recording, a pressure chamber having a sufficient volume is required. Therefore, the volume of the pressure chamber is secured by increasing the length of the pressure chamber to form a groove-shaped pressure chamber. Therefore, the volume of the pressure chamber can be changed efficiently if the piezoelectric element is also shaped according to the shape of each pressure chamber.
【０００４】このような構造のインクジェット記録ヘッ
ドとしては、例えば図８に示す特開平０３−２４７４５
３号公報に記載されたものなどが知られている。図にお
いて圧電素子２２は圧力室２５を覆い、上下に電極２４
を有し、スリット２３によって各圧力室２５に対応する
ように上部を残して分割されている。振動板２８と圧電
素子２２は振動板２８の表面に設けられた電極２４に接
着されている。固定部材２１は電極２４を介して圧電素
子２２の電極２４に積層されており、その両端がコの字
型に曲がっている。圧電素子２２の電極２４に電圧を印
加し、圧電素子２２を厚み変形させることによって圧力
室２５の容積を変化させてインクを吐出させる場合、圧
電素子２２は厚み変形とともに厚みと垂直方向にも変形
しようとする。前記従来例においては固定部材２１の剛
性を圧電素子２２の剛性に対して充分に高くすることに
よって圧電素子２２の厚みと垂直な方向の変形を抑える
ものである。An example of an ink jet recording head having such a structure is shown in FIG.
Those described in Japanese Patent Publication No. 3 are known. In the figure, the piezoelectric element 22 covers the pressure chamber 25, and the electrodes 24
And is divided by the slit 23 so as to correspond to each pressure chamber 25, leaving the upper part. The vibrating plate 28 and the piezoelectric element 22 are bonded to an electrode 24 provided on the surface of the vibrating plate 28. The fixing member 21 is laminated on the electrode 24 of the piezoelectric element 22 via the electrode 24, and both ends thereof are bent in a U shape. When a voltage is applied to the electrode 24 of the piezoelectric element 22 to change the thickness of the piezoelectric element 22 to change the volume of the pressure chamber 25 to eject ink, the piezoelectric element 22 is deformed in the direction perpendicular to the thickness as well as the thickness. try to. In the conventional example, the rigidity of the fixing member 21 is made sufficiently higher than the rigidity of the piezoelectric element 22 to suppress the deformation of the piezoelectric element 22 in the direction perpendicular to the thickness thereof.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、圧電素
子を剛性の高い部材に接合して厚みと垂直な方向の変形
を拘束した場合には、厚み方向にも変形しにくくなり、
効率的なインク吐出を行うことができない。However, when the piezoelectric element is bonded to a member having high rigidity to restrain the deformation in the direction perpendicular to the thickness, the deformation in the thickness direction becomes difficult.
Ink cannot be ejected efficiently.
【０００６】そこで本発明はこのような問題点を解決す
るもので、その目的とするところは、圧電素子の厚み方
向の変形を拘束することなく、効率的なインク吐出が可
能な構成のインクジェット記録ヘッドを提供することに
ある。Therefore, the present invention solves such a problem, and an object of the present invention is to provide an ink jet recording having a structure capable of ejecting ink efficiently without restraining the deformation of the piezoelectric element in the thickness direction. To provide the head.
【０００７】[0007]
【課題を解決するための手段】このような問題点を解決
するために、本願発明のインクジェット記録ヘッドは、
溝状の圧力室が複数形成された平板状のヘッド基板と、
前記ヘッド基板の前記圧力室が形成された側に積層され
た振動板と、前記圧力室に対応して前記振動板に積層さ
れ、前記圧力室内のインクに圧力変動を発生させる圧電
素子と、前記圧電素子に積層され圧電素子を支持する固
定部材とを具備したインクジェット記録ヘッドであっ
て、前記圧電素子は、該圧電素子の前記固定部材と積層
される側である固定面の略中央領域が前記固定面に当接
する様配置されると共に、前記圧電素子の少なくとも一
方の端部付近において、弾性材により前記固定部材に支
持されていることを特徴とする。また、前記弾性材は、
前記固定部材と一体に形成されていることを特徴とす
る。また、溝状の圧力室が複数形成された平板状のヘッ
ド基板と、前記ヘッド基板の前記圧力室が形成された側
に積層された振動板と、前記圧力室に対応して前記振動
板に積層され、前記圧力室内のインクに圧力変動を発生
させる圧電素子と、前記圧電素子に積層され圧電素子を
支持する固定部材とを具備したインクジェット記録ヘッ
ドであって、前記圧電素子は、前記固定部材の前記圧電
素子と積層される側である固定面の一方の端部付近にお
いて前記圧電素子と固着され、かつ前記固定面の略中央
領域においては前記圧電素子と固着されることなく当接
していることを特徴とする。また、前記固定面の固着さ
れる一方の端部と他方の端部付近は、弾性材を介して前
記固定部材と接合されていることを特徴とする。In order to solve such problems, the ink jet recording head of the present invention is
A flat head substrate on which a plurality of groove-shaped pressure chambers are formed,
A vibrating plate laminated on a side of the head substrate where the pressure chamber is formed; a piezoelectric element laminated on the vibrating plate corresponding to the pressure chamber to generate a pressure fluctuation in ink in the pressure chamber; An inkjet recording head comprising: a fixing member laminated on a piezoelectric element to support the piezoelectric element, wherein the piezoelectric element has a substantially central region of a fixing surface which is a side of the piezoelectric element laminated with the fixing member. The piezoelectric element is arranged so as to come into contact with the fixed surface, and is supported by the fixed member by an elastic material near at least one end of the piezoelectric element. In addition, the elastic material,
It is characterized in that it is formed integrally with the fixing member. Also, a flat plate-shaped head substrate having a plurality of groove-shaped pressure chambers formed thereon, a vibration plate laminated on the side of the head substrate on which the pressure chambers are formed, and a vibration plate corresponding to the pressure chambers. An inkjet recording head comprising: a piezoelectric element that is stacked and that causes a pressure fluctuation in ink in the pressure chamber; and a fixing member that is stacked on the piezoelectric element and supports the piezoelectric element, wherein the piezoelectric element is the fixing member. Of the fixing surface is fixed to the piezoelectric element in the vicinity of one end of the fixing surface on which the piezoelectric element is laminated, and is in contact with the piezoelectric element without being fixed in the substantially central region of the fixing surface. It is characterized by In addition, one end portion and the vicinity of the other end portion of the fixing surface, which are fixed, are joined to the fixing member via an elastic material.
【０００８】[0008]
【実施例】以下に本発明の実施例を図面にもとづいて説
明する。Embodiments of the present invention will be described below with reference to the drawings.
【０００９】図１は、本発明のインクジェット記録ヘッ
ド１の実施例を示す斜視図である。図においてインクジ
ェット記録ヘッド１は、ヘッド基板９と振動板１２と固
定部材６とを積層し、ノズル１１を有するノズル板１７
を接合して構成している。FIG. 1 is a perspective view showing an embodiment of an ink jet recording head 1 of the present invention. In the figure, an inkjet recording head 1 includes a nozzle plate 17 having nozzles 11 in which a head substrate 9, a vibrating plate 12 and a fixing member 6 are laminated.
It is configured by joining.
【００１０】図２は、図１に示したインクジェット記録
ヘッド１のＡ−Ａ断面の一例を示す断面図である。図に
おいてインクジェット記録ヘッド１は、ヘッド基板９、
振動板１２、圧電素子２、固定部材６、ノズル板１７に
よって構成されている。ヘッド基板９はインクに加圧す
るための複数の圧力室１０を形成している。振動板１２
は圧力室１０に対応する位置に島状の肉厚部分１３とそ
れ以外の変形しやすい振動膜部分１６を有する。振動板
１２の島状部分１３は圧電素子２の変位を効率的に圧力
室１０に伝達する効果がある。また振動板１２の圧力室
端部付近は充分な強度を得るために、島状部分１３と同
様の肉厚のリブ状部分１４となっている。島状部分１３
およびリブ状部分１４は、振動板１２と同一の材質によ
って構成されている。このような形状は電鋳法や選択エ
ッチング法によって容易に形成することができる。圧電
素子２は振動板１２の島状部分１３の上に配置され、圧
力室１０の深さ方向に変位する。圧電素子２の圧力室１
０の長さ方向の端部は弾性材８によって固定部材６と接
合されている。また圧電素子２は圧力室１０の長さ方向
の中央部付近の固定部材側は固定部材６と接合されてい
ないが接している。ここで弾性材８の弾性係数は、圧電
素子２の弾性係数に対して充分低い方が望ましい。した
がって、圧電素子２の縦弾性係数が６．５×１０10Ｐａ
に対して、３×１０9Ｐａ程度以下の樹脂系接着剤など
は弾性材としては好適である。圧電素子２は板状の圧電
部材３を複数枚積層して構成された積層圧電素子を用い
ている。各圧電部材３の電極４は、圧電素子２の圧力室
１０の長さ方向端面で結合されており、固定部材６の表
面に設けられた電極４に弾性材８を介して接合されてい
る。よってここで用いられている弾性材８は弾性的導電
接着剤などを用いることが望ましい。したがって、弾性
係数が低く導電性であることから、銀などの導電性フィ
ラーを含有する樹脂系接着剤や、樹脂系銀ペースト、ま
たは導電性のゴムなどが好適である。固定部材６はリブ
状部分１４の一部を介してヘッド基板９と接合してい
る。ノズル板１７はヘッド基板９に垂直に接合されてお
り、各圧力室に対応する位置にノズルが設けられてい
る。FIG. 2 is a sectional view showing an example of an AA section of the ink jet recording head 1 shown in FIG. In the drawing, the ink jet recording head 1 includes a head substrate 9,
The vibrating plate 12, the piezoelectric element 2, the fixing member 6, and the nozzle plate 17 are included. The head substrate 9 forms a plurality of pressure chambers 10 for pressurizing the ink. Diaphragm 12
Has an island-shaped thick portion 13 at a position corresponding to the pressure chamber 10 and a vibrating membrane portion 16 other than that which is easily deformed. The island portion 13 of the vibration plate 12 has an effect of efficiently transmitting the displacement of the piezoelectric element 2 to the pressure chamber 10. Further, the vibrating plate 12 has a rib-shaped portion 14 having the same thickness as the island-shaped portion 13 near the end of the pressure chamber in order to obtain sufficient strength. Island part 13
The rib-shaped portion 14 is made of the same material as the diaphragm 12. Such a shape can be easily formed by an electroforming method or a selective etching method. The piezoelectric element 2 is arranged on the island-shaped portion 13 of the vibration plate 12, and is displaced in the depth direction of the pressure chamber 10. Pressure chamber 1 of piezoelectric element 2
The end portion in the length direction of 0 is joined to the fixing member 6 by the elastic material 8. Further, the piezoelectric element 2 is in contact with the fixing member 6 on the fixing member side in the vicinity of the central portion in the lengthwise direction of the pressure chamber 10, although it is not joined to the fixing member 6. Here, it is desirable that the elastic coefficient of the elastic member 8 is sufficiently lower than the elastic coefficient of the piezoelectric element 2. Therefore, the longitudinal elastic modulus of the piezoelectric element 2 is 6.5 × 10 10 Pa
On the other hand, a resin-based adhesive having a viscosity of 3 × 10 9 Pa or less is suitable as the elastic material. The piezoelectric element 2 uses a laminated piezoelectric element configured by laminating a plurality of plate-shaped piezoelectric members 3. The electrodes 4 of each piezoelectric member 3 are joined at the end faces in the length direction of the pressure chamber 10 of the piezoelectric element 2, and are joined to the electrodes 4 provided on the surface of the fixed member 6 via the elastic material 8. Therefore, it is desirable to use an elastic conductive adhesive or the like as the elastic material 8 used here. Therefore, a resin-based adhesive containing a conductive filler such as silver, a resin-based silver paste, or a conductive rubber is preferable because it has a low elastic coefficient and is conductive. The fixing member 6 is joined to the head substrate 9 via a part of the rib-shaped portion 14. The nozzle plate 17 is vertically joined to the head substrate 9, and nozzles are provided at positions corresponding to the respective pressure chambers.
【００１１】図３は、従来の構成と本発明の構成との変
形状態の違いを示す断面図の一例である。図３（ａ）は
従来の構成で圧電素子２に電圧が印加された状態を、図
３（ｂ）および図３（ｃ）は本発明の構成で圧電素子２
に電圧が印加された状態を示す。図３（ａ）において圧
力室１０に対応する圧電素子２を、電圧を印加すること
によって図の上下方向に伸びさせようとすると、圧電素
子２は図の左右方向に縮もうとする。しかしながら圧電
素子２の固定部材側が固定部材６と接合されているた
め、圧電素子２は固定部材側では図の左右方向に縮むこ
とはできず、よって上下方向に伸びることもできない。
したがって固定部材６と接合されていない側だけの変形
となってしまい、圧電素子２の上下方向の充分な変形を
得ることができない。これに対して図３（ｂ）では、圧
力室１０に対応する圧電素子２を、電圧を印加すること
によって図の上下方向に伸びさせようとして、左右方向
に縮もうした場合、圧電素子２は端部において弾性材８
で接合されているだけなので、左右方向に変形可能であ
り、したがって圧電素子２の全体で変形することがで
き、上下方向に充分な変形を得ることができる。FIG. 3 is an example of a cross-sectional view showing the difference in the modified state between the conventional structure and the structure of the present invention. FIG. 3A shows a state in which a voltage is applied to the piezoelectric element 2 in the conventional configuration, and FIGS. 3B and 3C show the piezoelectric element 2 in the configuration of the present invention.
A state in which a voltage is applied to is shown. In FIG. 3A, when the piezoelectric element 2 corresponding to the pressure chamber 10 is made to extend in the vertical direction of the drawing by applying a voltage, the piezoelectric element 2 tries to contract in the horizontal direction of the drawing. However, since the fixing member side of the piezoelectric element 2 is joined to the fixing member 6, the piezoelectric element 2 cannot contract in the lateral direction of the drawing on the fixing member side, and therefore cannot extend in the vertical direction.
Therefore, only the side that is not joined to the fixing member 6 is deformed, and it is not possible to obtain sufficient vertical deformation of the piezoelectric element 2. On the other hand, in FIG. 3B, when the piezoelectric element 2 corresponding to the pressure chamber 10 is contracted in the left-right direction in an attempt to extend in the vertical direction of the drawing by applying a voltage, the piezoelectric element 2 becomes Elastic material 8 at the end
Since the piezoelectric element 2 can be deformed in the left-right direction because it is only joined by, the piezoelectric element 2 as a whole can be deformed, and sufficient deformation can be obtained in the vertical direction.
【００１２】また図３（ａ）において、圧電素子２が左
右方向に変形できるように、圧電素子２の固定部材側の
中央部付近または全面を弾性材を介して固定部材６と接
合した場合、圧電素子２の厚さ方向の変形も弾性材に吸
収されてしまい、圧電素子２の厚さ方向変形を効率的に
ヘッド基板側すなわち圧力室１０に伝達することができ
ない。しかし図３（ｂ）では上下方向の変形のもっとも
大きな圧電素子２の中央部付近には弾性材が接しておら
ず、直接固定部材６に接しているため、圧電素子２の厚
さ方向変形は圧力室側へ効率的に伝達することができ
る。さらに圧電素子２の最も大きく変位する部分が固定
部材６に接合されておらず、接合されている部分も弾性
材８を介しているため、圧電素子２が変形したときの弾
性材８への影響が小さい。したがって弾性材８を介して
変位させている圧電素子２から他の圧電素子２へ影響を
あたえるいわゆるクロストークがほとんどない。Further, in FIG. 3A, when the piezoelectric element 2 is joined to the fixing member 6 through an elastic material near the central portion or the entire surface of the piezoelectric element 2 so that the piezoelectric element 2 can be deformed in the left-right direction, The deformation of the piezoelectric element 2 in the thickness direction is also absorbed by the elastic material, and the deformation of the piezoelectric element 2 in the thickness direction cannot be efficiently transmitted to the head substrate side, that is, the pressure chamber 10. However, in FIG. 3B, since the elastic member is not in contact with the vicinity of the central portion of the piezoelectric element 2 which is most deformed in the vertical direction and is in direct contact with the fixing member 6, the piezoelectric element 2 is not deformed in the thickness direction. It can be efficiently transmitted to the pressure chamber side. Further, since the portion of the piezoelectric element 2 that is most displaced is not joined to the fixing member 6, and the joined portion is also via the elastic material 8, the influence on the elastic material 8 when the piezoelectric element 2 is deformed. Is small. Therefore, there is almost no so-called crosstalk that affects the other piezoelectric element 2 from the piezoelectric element 2 that is displaced through the elastic material 8.
【００１３】さらに圧電素子２と振動板１２の島状部分
１３とが接合されている場合も、圧電素子２は左右方向
に縮みにくくなり、よって上下方向にも伸びにくくな
る。したがって図３（ｃ）に示すように、圧電素子２は
固定部材側の中央部で固定部材６と接合されていないだ
けでなく、振動板側では島状部分１３と接合していない
方が望ましい。Further, even when the piezoelectric element 2 and the island-shaped portion 13 of the vibration plate 12 are joined together, the piezoelectric element 2 is less likely to contract in the left-right direction, and therefore is less likely to extend in the up-down direction. Therefore, as shown in FIG. 3C, it is preferable that the piezoelectric element 2 is not joined to the fixing member 6 at the central portion on the fixing member side, and is not joined to the island portion 13 on the diaphragm side. .
【００１４】図４は本発明のインクジェット記録ヘッド
の製造方法を示す斜視図である。図３（ａ）のように圧
電素子２と固定部材６が圧電素子２の中央部付近を含め
て接合されている場合には効率的な変形ができないが、
図８のように圧電素子２２がスリット２３を設けただけ
で上部で一体化されている場合も効率的な変形ができな
い。すなわち圧電素子２２を上下方向に変形させようと
電圧を印加した場合、圧電素子２２は圧力室２５の長さ
方向だけでなく圧力室２５の列方向にも変形しようとす
るが、各圧力室２５に対応する圧電素子２２が一体で形
成されていると、圧力室２５の列方向の変形が拘束され
てしまうからである。したがって圧電素子２２は各圧力
室毎に分割されていなければならない。しかしながら圧
力室が高密度に配置されていると、圧力室の幅が狭くか
つ圧力室間の間隔が狭いため各圧力室毎に圧電素子を配
置することは困難である。そこで図４（ａ）のように、
まず大きな圧電素子２ａを圧力室の長さ方向の端部付近
で固定部材６と弾性材８を介して接合する。その後、図
４（ｂ）のように、圧力室の幅と圧力室の間隔に合うよ
うにワイヤーソー等によって切断し、各圧力室に対応す
る圧電素子２ｂに分割する。次に図４（ｃ）のように、
振動板１２とヘッド基板９に位置決めして接合する。こ
れによって容易に多数の圧力室に対してそれぞれ分割さ
れた圧電素子２ｂを高精度に位置決めすることが可能で
ある。また圧力室と圧電素子との位置関係が圧力室毎に
異なっていることによる、圧力室毎のインク吐出特性の
ばらつきを無くすことができる。FIG. 4 is a perspective view showing a method of manufacturing the ink jet recording head of the present invention. As shown in FIG. 3A, when the piezoelectric element 2 and the fixing member 6 are joined together including the central portion of the piezoelectric element 2, efficient deformation cannot be achieved.
Even when the piezoelectric element 22 is provided with the slit 23 and is integrated at the upper portion as shown in FIG. 8, efficient deformation cannot be performed. That is, when a voltage is applied to deform the piezoelectric elements 22 in the vertical direction, the piezoelectric elements 22 try to deform not only in the length direction of the pressure chambers 25 but also in the column direction of the pressure chambers 25. This is because the deformation of the pressure chambers 25 in the column direction is restrained if the piezoelectric element 22 corresponding to is integrally formed. Therefore, the piezoelectric element 22 must be divided for each pressure chamber. However, when the pressure chambers are arranged at a high density, it is difficult to arrange the piezoelectric element for each pressure chamber because the width of the pressure chamber is narrow and the space between the pressure chambers is narrow. Therefore, as shown in FIG.
First, the large piezoelectric element 2a is bonded to the fixing member 6 via the elastic material 8 in the vicinity of the end portion in the length direction of the pressure chamber. After that, as shown in FIG. 4B, the piezoelectric element 2b is cut by a wire saw or the like so as to match the width of the pressure chambers and the distance between the pressure chambers. Next, as shown in FIG.
The vibration plate 12 and the head substrate 9 are positioned and joined. This makes it possible to easily position the divided piezoelectric elements 2b in a large number of pressure chambers with high accuracy. In addition, since the positional relationship between the pressure chambers and the piezoelectric elements is different for each pressure chamber, it is possible to eliminate the variation in the ink ejection characteristics among the pressure chambers.
【００１５】図５は本発明のインクジェット記録ヘッド
の別の実施例を示す断面図である。図４（ｂ）に示すよ
うな方法で圧電素子２ａを分割する場合に、弾性材８に
よって圧電素子２ａと固定部材６とを接合しているだけ
では切断時に圧電素子２ａが移動してしまって高精度な
切断ができない場合がある。このような場合には圧電素
子２ａと固定部材６とをより強固に接合する必要があ
る。図５は圧電素子２の圧力室の長さ方向端部の一方を
弾性材８を介して接合し、一方は剛体的に接合した場合
を示す。これによって切断時には圧電素子２が固定部材
６と強固に接合しているため、高精度に切断することが
できる。また圧電素子２に電圧を印加した場合には、圧
電素子２が固定部材６と剛体的に接合された部分を中心
に上下方向、左右方向に変形可能であるため、圧電素子
２の変形を妨げることがなく効率的に変位が得られる。FIG. 5 is a sectional view showing another embodiment of the ink jet recording head of the present invention. When the piezoelectric element 2a is divided by the method as shown in FIG. 4B, the piezoelectric element 2a is moved at the time of cutting just by joining the piezoelectric element 2a and the fixing member 6 with the elastic material 8. High-precision cutting may not be possible. In such a case, it is necessary to more firmly bond the piezoelectric element 2a and the fixing member 6. FIG. 5 shows a case where one end of the pressure chamber of the piezoelectric element 2 in the lengthwise direction is joined via the elastic member 8 and the other end is rigidly joined. As a result, the piezoelectric element 2 is firmly bonded to the fixing member 6 at the time of cutting, so that the piezoelectric element 2 can be cut with high precision. Further, when a voltage is applied to the piezoelectric element 2, the piezoelectric element 2 can be deformed in the up-down direction and the left-right direction around the portion rigidly joined to the fixing member 6, thus preventing the deformation of the piezoelectric element 2. Displacement can be obtained efficiently without
【００１６】図６は本発明のインクジェット記録ヘッド
の別の実施例を示す斜視図である。これは圧電素子２ａ
を切断する際に図５に示した場合よりもより強固に圧電
素子２ａと固定部材６とを接合した場合を示す。図６
（ａ）において固定部材６は３つの凸部７を有する山字
型に形成されている。圧電素子２ａは固定部材６の中央
の凸部７ａを除く両端の凸部７ｂと剛体的に接合され
る。この状態で圧電素子２ａは図６（ｂ）のように、各
圧力室に対応する形状に切断分割される。この後図６
（ｃ）のように、圧電素子２と接合されている固定部材
６の凸部７ｂの一方を切断することによって、圧電素子
２ｂは圧力室の長さ方向端部付近の一方のみが固定部材
６と剛体的に接合される。圧電素子２ｂに電圧を印加し
た場合、圧電素子２ｂと固定部材６とが剛体的に接合さ
れた部分を中心に上下方向、左右方向に変形可能となる
ため、圧電素子２ｂの変形を妨げることがなく効率的に
変位を得られる。この場合圧電素子２ｂの電極４は各圧
力室に対応する圧電素子毎に設けられたリード５によっ
て構成される。FIG. 6 is a perspective view showing another embodiment of the ink jet recording head of the present invention. This is the piezoelectric element 2a
A case where the piezoelectric element 2a and the fixing member 6 are more firmly joined to each other than in the case shown in FIG. Figure 6
In (a), the fixing member 6 is formed in a mountain shape having three convex portions 7. The piezoelectric element 2a is rigidly joined to the convex portions 7b at both ends of the fixing member 6 except for the central convex portion 7a. In this state, the piezoelectric element 2a is cut and divided into shapes corresponding to the respective pressure chambers, as shown in FIG. 6 (b). After this
As shown in (c), by cutting one of the convex portions 7b of the fixing member 6 joined to the piezoelectric element 2, the piezoelectric element 2b has only one fixing member 6 near the end in the length direction of the pressure chamber. Is rigidly joined with. When a voltage is applied to the piezoelectric element 2b, the piezoelectric element 2b and the fixing member 6 can be deformed in the up-down direction and the left-right direction around the rigidly joined portion, which may hinder the deformation of the piezoelectric element 2b. Displacement can be obtained efficiently. In this case, the electrode 4 of the piezoelectric element 2b is composed of the lead 5 provided for each piezoelectric element corresponding to each pressure chamber.
【００１７】図７は本発明のインクジェット記録ヘッド
の別の実施例を示す斜視図である。図において固定部材
６は３つの凸部７を有する山字型で、中央部の凸部７ａ
が大きく、両端の凸部７ｂは細い柱状に形成されてお
り、圧電素子２は固定部材６の両端の凸部７ｂに接合さ
れる。圧電素子２が接合される固定部材６の凸部７ｂは
圧電素子２の変形に対して容易に変形可能で構造的に弾
性を有する形状である。この構造によって、圧電素子２
に電圧を印加した場合、圧電素子２は厚さ方向および圧
力室の長さ方向に変形可能であり、変形を拘束されるこ
とはない。FIG. 7 is a perspective view showing another embodiment of the ink jet recording head of the present invention. In the figure, the fixing member 6 is a mountain shape having three convex portions 7, and the central convex portion 7a
Is large, and the convex portions 7b at both ends are formed in a thin columnar shape, and the piezoelectric element 2 is joined to the convex portions 7b at both ends of the fixing member 6. The convex portion 7b of the fixing member 6 to which the piezoelectric element 2 is joined has a shape that is easily deformable and structurally elastic with respect to the deformation of the piezoelectric element 2. With this structure, the piezoelectric element 2
When a voltage is applied to the piezoelectric element 2, the piezoelectric element 2 can be deformed in the thickness direction and the length direction of the pressure chamber, and the deformation is not restricted.
【００１８】以上の実施例は溝状の圧力室１０の長さ方
向端面にノズル１１が設けられたエッヂイジェクトタイ
プのインクジェット記録ヘッド１について述べてきた
が、ヘッド基板９の振動板１２に対向する面にノズル板
が積層されたフェイスイジェクト構造のインクジェット
記録ヘッドにおいても本発明の構成により同様の効果が
得られる。また固定部材が直接振動板またはヘッド基板
と接合されていず、別部材を介して接合されていてもよ
い。Although the above embodiments have described the eject type ink jet recording head 1 in which the nozzle 11 is provided on the end face in the lengthwise direction of the groove-shaped pressure chamber 10, it faces the diaphragm 12 of the head substrate 9. The same effect can be obtained by the configuration of the present invention even in an inkjet recording head having a face eject structure in which a nozzle plate is laminated on the surface. Further, the fixing member may not be directly bonded to the vibration plate or the head substrate, but may be bonded via another member.
【００１９】[0019]
【発明の効果】本発明のインクジェット記録ヘッドは、
圧電素子の圧力室の長さ方向の変形および圧力室の列方
向の変形を拘束することなく、効率的に圧電素子を変形
させ、また圧電素子の変形を効果的に圧力室に伝える。The ink jet recording head of the present invention is
The piezoelectric element is efficiently deformed and the deformation of the piezoelectric element is effectively transmitted to the pressure chamber without restraining the deformation of the piezoelectric element in the length direction of the pressure chamber and the deformation of the pressure chamber in the column direction.
【図１】本発明のインクジェット記録ヘッドの実施例を
示す斜視図。FIG. 1 is a perspective view showing an embodiment of an inkjet recording head of the present invention.
【図２】本発明のインクジェット記録ヘッドの実施例を
示す断面図。FIG. 2 is a cross-sectional view showing an example of an inkjet recording head of the present invention.
【図３】従来のインクジェット記録ヘッドと本発明のイ
ンクジェット記録ヘッドとの変形状態の違いを示す断面
図。FIG. 3 is a cross-sectional view showing a difference in deformation state between a conventional inkjet recording head and an inkjet recording head of the present invention.
【図４】本発明のインクジェット記録ヘッドの製造方法
を示す斜視図。FIG. 4 is a perspective view showing a method for manufacturing an inkjet recording head of the present invention.
【図５】本発明のインクジェット記録ヘッドの実施例を
示す断面図。FIG. 5 is a cross-sectional view showing an embodiment of the inkjet recording head of the present invention.
【図６】本発明のインクジェット記録ヘッドの製造方法
を示す斜視図。FIG. 6 is a perspective view showing a method for manufacturing an inkjet recording head of the present invention.
【図７】本発明のインクジェット記録ヘッドの実施例を
示す斜視図。FIG. 7 is a perspective view showing an embodiment of an inkjet recording head of the present invention.
【図８】従来のインクジェット記録ヘッドの構造を示す
断面図。FIG. 8 is a cross-sectional view showing the structure of a conventional inkjet recording head.
１ インクジェット記録ヘッド ２ 圧電素子 ３ 圧電部材 ４ 電極 ５ リード ６ 固定部材 ７ 凸部 ８ 弾性材 ９ ヘッド基板 １０ 圧力室 １１ ノズル １２ 振動板 １３ 島状部分 １４ リブ状部分 １５ 梁状部分 １６ 振動膜部分 １７ ノズル板 1 Inkjet recording head 2 Piezoelectric element 3 Piezoelectric member 4 electrodes 5 leads 6 fixing members 7 convex 8 elastic material 9 head substrate 10 Pressure chamber 11 nozzles 12 diaphragm 13 islands 14 Rib-shaped part 15 Beam-shaped part 16 Vibration film part 17 nozzle plate
Claims (4)
ヘッド基板と、前記ヘッド基板の前記圧力室が形成され
た側に積層された振動板と、前記圧力室に対応して前記
振動板に積層され、前記圧力室内のインクに圧力変動を
発生させる圧電素子と、前記圧電素子に積層され圧電素
子を支持する固定部材とを具備したインクジェット記録
ヘッドであって、 前記圧電素子は、該圧電素子の前記固定部材と積層され
る側である固定面の略中央領域が前記固定部材に当接す
る様配置されると共に、前記圧電素子の少なくとも一方
の端部付近において、弾性材により前記固定部材に支持
されていることを特徴とするインクジェット記録ヘッ
ド。1. A flat plate-shaped head substrate having a plurality of groove-shaped pressure chambers formed therein, a vibration plate laminated on a side of the head substrate where the pressure chambers are formed, and the diaphragm corresponding to the pressure chambers. An inkjet recording head comprising: a piezoelectric element that is laminated on a vibrating plate to generate a pressure fluctuation in ink in the pressure chamber; and a fixing member that is laminated on the piezoelectric element and supports the piezoelectric element, wherein the piezoelectric element is The piezoelectric element is arranged such that a substantially central region of the fixing surface, which is a side where the piezoelectric element is laminated with the fixing member, contacts the fixing member, and the elastic element fixes the piezoelectric element near at least one end of the piezoelectric element. An inkjet recording head, which is supported by a member.
成されていることを特徴とする請求項１に記載のインク
ジェット記録ヘッド。2. The ink jet recording head according to claim 1, wherein the elastic material is formed integrally with the fixing member.
ヘッド基板と、前記ヘッド基板の前記圧力室が形成され
た側に積層された振動板と、前記圧力室に対応して前記
振動板に積層され、前記圧力室内のインクに圧力変動を
発生させる圧電素子と、前記圧電素子に積層され圧電素
子を支持する固定部材とを具備したインクジェット記録
ヘッドであって、 前記圧電素子は、前記固定部材の前記圧電素子と積層さ
れる側である固定面の一方の端部付近において前記圧電
素子と固着され、かつ前記固定面の略中央領域において
は前記圧電素子と固着されることなく当接していること
を特徴とするインクジェット記録ヘッド。3. A flat head substrate having a plurality of groove-shaped pressure chambers formed therein, a vibration plate laminated on the side of the head substrate where the pressure chambers are formed, and the pressure chamber corresponding to the pressure chambers. An inkjet recording head comprising: a piezoelectric element that is laminated on a vibrating plate to generate a pressure fluctuation in ink in the pressure chamber; and a fixing member that is laminated on the piezoelectric element and supports the piezoelectric element, wherein the piezoelectric element is The fixing member is fixed to the piezoelectric element in the vicinity of one end of the fixing surface on the side where the piezoelectric element is laminated, and is fixed to the piezoelectric element in a substantially central region of the fixing surface without being fixed to the piezoelectric element. An inkjet recording head characterized by being in contact with each other.
方の端部付近は、弾性材を介して前記固定部材と接合さ
れていることを特徴とする請求項３に記載のインクジェ
ット記録ヘッド。4. The ink jet recording according to claim 3, wherein the one end of the fixing surface and the vicinity of the other end of the fixing surface are joined to the fixing member via an elastic material. head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33904892A JP3473034B2 (en) | 1992-12-18 | 1992-12-18 | Inkjet recording head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33904892A JP3473034B2 (en) | 1992-12-18 | 1992-12-18 | Inkjet recording head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06182995A JPH06182995A (en) | 1994-07-05 |
| JP3473034B2 true JP3473034B2 (en) | 2003-12-02 |
Family
ID=18323767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33904892A Expired - Fee Related JP3473034B2 (en) | 1992-12-18 | 1992-12-18 | Inkjet recording head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3473034B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09174836A (en) * | 1995-12-22 | 1997-07-08 | Nec Corp | Ink jet recording head and manufacture thereof |
-
1992
- 1992-12-18 JP JP33904892A patent/JP3473034B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06182995A (en) | 1994-07-05 |
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