JPH06171097A - Manufacture of ink jet head - Google Patents

Manufacture of ink jet head

Info

Publication number
JPH06171097A
JPH06171097A JP32640392A JP32640392A JPH06171097A JP H06171097 A JPH06171097 A JP H06171097A JP 32640392 A JP32640392 A JP 32640392A JP 32640392 A JP32640392 A JP 32640392A JP H06171097 A JPH06171097 A JP H06171097A
Authority
JP
Japan
Prior art keywords
ink jet
pressure chambers
jet head
piezoelectric elements
piezoelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP32640392A
Other languages
Japanese (ja)
Inventor
Koichi Sanpei
浩一 三瓶
Mutsuro Watanabe
睦郎 渡邉
Masaru Sugie
優 杉江
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Isotec Ltd
Original Assignee
Fujitsu Isotec Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Isotec Ltd filed Critical Fujitsu Isotec Ltd
Priority to JP32640392A priority Critical patent/JPH06171097A/en
Publication of JPH06171097A publication Critical patent/JPH06171097A/en
Pending legal-status Critical Current

Links

Landscapes

  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

PURPOSE:To provide a manufacture of a long-life ink jet head having the nature of no drop in the vibration characteristics of a vibration board. CONSTITUTION:When an injection head is constructed so that after joining piezoelectric elements onto a vibration board provided adjacent to respective pressure chambers 15 communicated respectively to a plurality of nozzles 13, a plurality of piezoelectric elements 16 corresponding to respective pressure chambers 15 are formed by cutting this at the part between respective pressure chambers 15, the piezoelectric elements are not subject to complete cutting so that thin skins 18 remain uncut.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、圧電素子の形成工程に
特徴を有するインクジェットヘッドの製造方法に関する
ものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an ink jet head which is characterized by a piezoelectric element forming process.

【0002】[0002]

【従来の技術】インクジェットプリンタに使用されるイ
ンクジェットヘッドは、複数のノズルと、インク供給系
からインクの供給を受けかつ各ノズルに連絡する複数の
圧力室と、該各圧力室に接して配置された振動板と、該
振動板上に各圧力室に対向して配置された複数の圧電素
子とを備えている。このインクジェットヘッドは、プラ
テンに沿い走行するキャリッジ上に搭載され、所定時機
に作動して印字を行う。印字手順の概要は次の通りであ
る。
2. Description of the Related Art An ink jet head used in an ink jet printer is provided with a plurality of nozzles, a plurality of pressure chambers for receiving ink from an ink supply system and communicating with the respective nozzles, and arranged in contact with the respective pressure chambers. And a plurality of piezoelectric elements arranged on the diaphragm so as to face each pressure chamber. The inkjet head is mounted on a carriage that runs along a platen and operates at a predetermined time to perform printing. The outline of the printing procedure is as follows.

【0003】印字に際しては、所定時機に所定の圧電素
子に所定時間通電する。これにより、該圧電素子に対向
する圧力室上の振動板が変位して該圧力室内の圧力が上
昇し、該圧力室に連絡するノズルからインクが噴出して
記録紙上にドットが形成される。
When printing, a predetermined piezoelectric element is energized for a predetermined time at a predetermined time. As a result, the vibrating plate on the pressure chamber facing the piezoelectric element is displaced, the pressure inside the pressure chamber rises, ink is ejected from the nozzle communicating with the pressure chamber, and dots are formed on the recording paper.

【0004】図4は上記のような構成,作用を有する従
来のインクジェットヘッド1の側面図で、図中、2は複
数のノズル3を有するノズル板、4は各ノズル3にそれ
ぞれ連絡する複数の圧力室5を有する振動板、6は各圧
力室5に対向する位置で振動板4上に接合された複数の
圧電素子である。圧電素子6は、全圧力室5を覆う大き
さの1枚のピエゾ素子を振動板4上に接合し、その各圧
力室5の間の部分にカッティング溝7を加工して形成さ
れる。なお、溝加工はダイシングソー等を用いて行われ
る。
FIG. 4 is a side view of a conventional ink jet head 1 having the above-mentioned structure and action. In the figure, 2 is a nozzle plate having a plurality of nozzles 3 and 4 is a plurality of nozzles 3 which communicate with each nozzle 3, respectively. A vibrating plate having pressure chambers 5 is a plurality of piezoelectric elements bonded on the vibrating plate 4 at positions facing the pressure chambers 5. The piezoelectric element 6 is formed by joining one piezoelectric element having a size that covers all the pressure chambers 5 to the vibration plate 4 and processing the cutting groove 7 in a portion between the pressure chambers 5. The groove processing is performed using a dicing saw or the like.

【0005】[0005]

【発明が解決しようとする課題】このように従来は素子
の特性を100%伝達しようとしてピエゾ素子を完全に
切断していたため、この切断時に振動板Aに傷をつけて
しまっていた。その結果、振動板の振動特性が低下し、
甚だしいときは振動板に穴があいてしまい寿命が低下す
る。
As described above, conventionally, the piezoelectric element was completely cut in order to transmit 100% of the characteristics of the element, so that the diaphragm A was scratched at the time of this cutting. As a result, the vibration characteristics of the diaphragm deteriorate,
In extreme cases, the diaphragm will have holes and its life will be shortened.

【0006】本発明は、振動板の振動特性が低下しない
長寿命のインクジェットヘッドの製造方法を提供するこ
とを目的としている。
An object of the present invention is to provide a method of manufacturing a long-life ink jet head in which the vibration characteristics of the diaphragm are not deteriorated.

【0007】[0007]

【課題を解決するための手段】上記目的を達成するた
め、本発明では、複数のノズルにそれぞれ連絡する各圧
力室に接する振動板上にピエゾ素子を接合した後、これ
を前記各圧力室の間の部分でカットすることにより各圧
力室に対応した複数の圧電素子を形成してインクジェッ
トヘッドを構成する際に、前記ピエゾ素子を完全に切断
せずに薄皮を残すようにしたことを特徴とする構成とす
る。
In order to achieve the above object, according to the present invention, after a piezo element is bonded to a vibration plate which is in contact with each pressure chamber which communicates with each of a plurality of nozzles, the piezoelectric element is connected to each pressure chamber. When a plurality of piezoelectric elements corresponding to each pressure chamber is formed by cutting at a portion between them to form an inkjet head, the piezo element is not completely cut and a thin skin is left. The configuration is

【0008】[0008]

【作用】カッティング深さが振動板まで達しないため、
振動板には傷が付かない。従って、振動板の特性に影響
を与えることはなく、寿命も向上する。
[Operation] Since the cutting depth does not reach the diaphragm,
The diaphragm is not scratched. Therefore, the characteristics of the diaphragm are not affected and the life is improved.

【0009】[0009]

【実施例】以下、図面に関連して本発明の実施例を説明
する。
Embodiments of the present invention will be described below with reference to the drawings.

【0010】図1は本例のインクジェットヘッド11の
側面図、図2は同分解斜視図で、図中、12は複数のノ
ズル13を有するノズル板、14は各ノズル13にそれ
ぞれ連絡する複数の圧力室15を有する振動板、16は
各圧力室15に対向する位置で振動板14上に接合され
た複数の圧電素子である。
FIG. 1 is a side view of an ink jet head 11 of this embodiment, and FIG. 2 is an exploded perspective view of the same. In FIG. 1, 12 is a nozzle plate having a plurality of nozzles 13, and 14 is a plurality of nozzles 13 respectively communicating with each nozzle 13. A vibration plate having pressure chambers 15 is a plurality of piezoelectric elements bonded on the vibration plate 14 at positions facing the pressure chambers 15.

【0011】圧電素子16は、全圧力室15を覆う大き
さの1枚のピエゾ素子を振動板14上に接合し、その各
圧力室15の間の部分にカッティング溝17を加工して
形成される。この加工に際し、本発明では、数μmの薄
皮18を残して切断している。この加工には、カッティ
ング深さのコントロールの容易なレーザやウォータジェ
ット等を採用することが望ましい。
The piezoelectric element 16 is formed by bonding one piezoelectric element having a size covering the entire pressure chamber 15 onto the vibrating plate 14 and processing a cutting groove 17 in a portion between the pressure chambers 15. It At the time of this processing, in the present invention, the thin skin 18 of several μm is left and cut. For this processing, it is desirable to use a laser or water jet whose cutting depth can be easily controlled.

【0012】このように、本発明ではピエゾ素子のカッ
ティング溝加工時に薄皮18を残すようにしているた
め、振動板14に傷が付くことはなく、従来問題となっ
ていた振動特性の低下や振動板の損傷をなくすことがで
きる。
As described above, according to the present invention, since the thin skin 18 is left at the time of machining the cutting groove of the piezo element, the diaphragm 14 is not scratched, and the deterioration of the vibration characteristic and the vibration which have been a problem in the related art. The damage to the board can be eliminated.

【0013】上述の説明では、振動板そのものに圧力室
を形成する例について述べたが、これを2つに分割し、
圧力室,インク供給路を貫通形成した流路板上に振動板
を接合するようにしても良く、この方が加工は容易であ
る。なお、図2において、19は圧電素子16への電源
供給用フレキシブルプリント板で、その端子部は対応す
る各圧電素子16に接続される。また、20は各圧力室
15にインクを供給するインク供給口である。
In the above description, an example in which the pressure chamber is formed in the diaphragm itself has been described, but this is divided into two,
The vibrating plate may be joined to the flow path plate formed through the pressure chamber and the ink supply path, which is easier to process. In FIG. 2, reference numeral 19 denotes a flexible printed board for supplying power to the piezoelectric elements 16, the terminal portions of which are connected to the corresponding piezoelectric elements 16. Reference numeral 20 is an ink supply port for supplying ink to each pressure chamber 15.

【0014】このインクジェットヘッド11の作用は前
述と同様で、所定時機に所定の圧電素子16に通電する
ことにより、該圧電素子16が対向する圧力室15に連
絡するノズル13からインクが噴出して印字が行われ
る。
The operation of the ink jet head 11 is the same as that described above, and when a predetermined piezoelectric element 16 is energized at a predetermined time, ink is ejected from the nozzle 13 communicating with the pressure chamber 15 facing the piezoelectric element 16. Printing is performed.

【0015】図3はインクジェットヘッド11を用いた
インクジェットプリンタの概要を示す斜視図で、インク
ジェットヘッド11は、ガイドシャフト21,22に案
内されて送りローラ(プラテン)23に沿い走行するキ
ャリッジ24上に搭載されている。インクジェットヘッ
ド11へは、インクタンク25からのインクがインクチ
ューブ26を介し供給される。100は記録紙である。
FIG. 3 is a perspective view showing an outline of an ink jet printer using the ink jet head 11. The ink jet head 11 is guided by guide shafts 21 and 22 on a carriage 24 which runs along a feed roller (platen) 23. It is installed. Ink from the ink tank 25 is supplied to the inkjet head 11 through an ink tube 26. 100 is a recording paper.

【0016】[0016]

【発明の効果】以上述べたように、本発明によれば、振
動板に傷が付かないため、振動板の振動特性が低下しな
い長寿命のインクジェットヘッドを得ることができる。
As described above, according to the present invention, since the diaphragm is not scratched, it is possible to obtain a long-life ink jet head in which the vibration characteristics of the diaphragm are not deteriorated.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例のインクジェットヘッドの側面
図である。
FIG. 1 is a side view of an inkjet head according to an embodiment of the present invention.

【図2】本発明の実施例のインクジェットヘッドの分解
斜視図である。
FIG. 2 is an exploded perspective view of the inkjet head according to the embodiment of the present invention.

【図3】本発明の実施例のインクジェットプリンタの概
要を示す斜視図である。
FIG. 3 is a perspective view showing an outline of an inkjet printer according to an embodiment of the present invention.

【図4】従来のインクジェットヘッドの側面図である。FIG. 4 is a side view of a conventional inkjet head.

【符号の説明】[Explanation of symbols]

11 インクジェットヘッド 13 ノズル 14 振動板 15 圧力室 16 圧電素子 17 カッティング溝 18 薄皮 11 Inkjet Head 13 Nozzle 14 Vibration Plate 15 Pressure Chamber 16 Piezoelectric Element 17 Cutting Groove 18 Thin Skin

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 複数のノズル(13)にそれぞれ連絡す
る各圧力室(15)に接する振動板(14)上にピエゾ
素子を接合した後、これを前記各圧力室(15)の間の
部分で切断することにより該各圧力室(15)に対応し
た複数の圧電素子(16)を形成してインクジェットヘ
ッドを構成する際に、前記ピエゾ素子を完全に切断せず
に薄皮(18)を残すようにしたことを特徴とするイン
クジェットヘッドの製造方法。
1. A piezoelectric element is bonded on a vibrating plate (14) which is in contact with each pressure chamber (15) which communicates with each of the plurality of nozzles (13), and the piezoelectric element is connected between the pressure chambers (15). When a plurality of piezoelectric elements (16) corresponding to the respective pressure chambers (15) are formed by cutting with, the ink jet head is constituted, and the thin skin (18) is left without completely cutting the piezoelectric elements. An inkjet head manufacturing method characterized by the above.
JP32640392A 1992-12-07 1992-12-07 Manufacture of ink jet head Pending JPH06171097A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32640392A JPH06171097A (en) 1992-12-07 1992-12-07 Manufacture of ink jet head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32640392A JPH06171097A (en) 1992-12-07 1992-12-07 Manufacture of ink jet head

Publications (1)

Publication Number Publication Date
JPH06171097A true JPH06171097A (en) 1994-06-21

Family

ID=18187407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32640392A Pending JPH06171097A (en) 1992-12-07 1992-12-07 Manufacture of ink jet head

Country Status (1)

Country Link
JP (1) JPH06171097A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007275884A (en) * 2006-04-05 2007-10-25 Xerox Corp Drop generator
JP2013184479A (en) * 2012-03-05 2013-09-19 Xerox Corp Print head transducer dicing directly on diaphragm

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007275884A (en) * 2006-04-05 2007-10-25 Xerox Corp Drop generator
JP2013184479A (en) * 2012-03-05 2013-09-19 Xerox Corp Print head transducer dicing directly on diaphragm

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