JPH0616896Y2 - Heating furnace equipment - Google Patents

Heating furnace equipment

Info

Publication number
JPH0616896Y2
JPH0616896Y2 JP1989111923U JP11192389U JPH0616896Y2 JP H0616896 Y2 JPH0616896 Y2 JP H0616896Y2 JP 1989111923 U JP1989111923 U JP 1989111923U JP 11192389 U JP11192389 U JP 11192389U JP H0616896 Y2 JPH0616896 Y2 JP H0616896Y2
Authority
JP
Japan
Prior art keywords
heating furnace
cooling jacket
heater
furnace
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989111923U
Other languages
Japanese (ja)
Other versions
JPH0350028U (en
Inventor
秀夫 平沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP1989111923U priority Critical patent/JPH0616896Y2/en
Publication of JPH0350028U publication Critical patent/JPH0350028U/ja
Application granted granted Critical
Publication of JPH0616896Y2 publication Critical patent/JPH0616896Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Heat Treatments In General, Especially Conveying And Cooling (AREA)
  • Furnace Housings, Linings, Walls, And Ceilings (AREA)

Description

【考案の詳細な説明】[Detailed description of the device]

【産業上の利用分野】 本考案は、例えば光ファイバ用母材や石英ガラスの製造
に用いる加熱炉装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heating furnace device used for manufacturing, for example, a base material for optical fibers or quartz glass.

【従来の技術】[Prior art]

光ファイバ用母材や石英ガラスの製造工程において、ガ
ラス微粒子を堆積させた多孔質の部材を透明ガラス化す
る装置として加熱炉が用いられている。 第4図に加熱炉の一例を示す。この加熱炉は、不銹鋼製
の胴部2とその両端の蓋体3とで構成された炉体1の内
部に、カーボンあるいは炭化ケイ素製のヒータ4を配置
したものである。ヒータ4の周囲には断熱材5が配設さ
れている。胴部2および蓋体3の外側には夫々冷却ジャ
ケット6が設けられ、その外壁6aには冷却水入出口7
が取り付けられている。炉体1の側面には胴部2および
冷却ジャケット6を貫通する温度測定口8や覗き窓9な
どが取り付けられている。 胴部2や蓋体3は溶接構造であり、例えば胴部2とその
端部のフランジ2aとは炉体1内側の溶接部分10にて
溶接されている。また、炉体1の側面に取り付けられた
温度測定口8や覗き窓9の端部も胴部2の内側で溶接し
てある。 この装置は以下のように使用する。例えばガラス微粒子
を堆積させた多孔質部材を加熱炉の中央に入れ、ヒータ
4に通電して昇温する。ヒータ4の温度は1400〜1600℃
に達するため、冷却ジャケット6に水を流して胴部2や
蓋体3を冷却しておく。
BACKGROUND ART A heating furnace is used as an apparatus for converting a porous member on which glass particles are deposited into a transparent glass in a manufacturing process of an optical fiber preform and quartz glass. FIG. 4 shows an example of the heating furnace. In this heating furnace, a heater 4 made of carbon or silicon carbide is arranged inside a furnace body 1 composed of a body 2 made of stainless steel and lids 3 at both ends thereof. A heat insulating material 5 is arranged around the heater 4. Cooling jackets 6 are provided on the outer sides of the body 2 and the lid 3, respectively, and a cooling water inlet / outlet 7 is provided on an outer wall 6a thereof.
Is attached. On the side surface of the furnace body 1, a temperature measuring port 8 penetrating the body 2 and the cooling jacket 6, a peep window 9 and the like are attached. The body 2 and the lid 3 have a welded structure. For example, the body 2 and the flange 2a at the end of the body 2 are welded at a welded portion 10 inside the furnace body 1. Further, the ends of the temperature measuring port 8 and the observation window 9 attached to the side surface of the furnace body 1 are also welded inside the body 2. This device is used as follows. For example, a porous member having glass particles deposited therein is placed in the center of the heating furnace, and the heater 4 is energized to raise the temperature. The temperature of the heater 4 is 1400-1600 ℃
Therefore, the body 2 and the lid 3 are cooled by pouring water through the cooling jacket 6.

【考案が解決しようとする課題】[Problems to be solved by the device]

ところがこの加熱炉装置は、溶接部分10に応力腐食割
れ(SCC)が発生することがある。これは、金属材料
が腐食性環境で応力を受けると孔食やすきま腐食が起点
となって亀裂が発生し、結晶粒界や粒内を通って進展
し、割れに至る損傷形態である。SCCは、特に環化物
を含む環境で発生しやすい。この加熱炉装置の場合、熱
応力と冷却水中の塩素イオンとが応力腐食割れの原因に
なっている。 第3図にステンレスの金属材料(JIS SUS316)の温度と
塩素イオン濃度との関係におけるSCC領域を示す。冷
却水として使用される水道水や工業用水の塩素イオン濃
度は6〜15ppmであることから、金属材料としてSUS316
を用いた場合、同図によれば溶接部分10の温度が100
℃を越えるとSCC領域に入ることがわかる。 この加熱炉装置の場合、炉体1外面の温度は100℃以下
に冷却される。しかし、溶接部分10が位置する炉体1
内壁の温度は、ヒータ4の周囲に断熱材5を配置し、冷
却ジャケット6で胴部2や蓋体3を冷却しているにもか
かわらず120〜250℃に達している。 本考案は前記の課題を解決するためになされたもので、
応力腐食割れの発生しない加熱炉装置を提供することを
目的とする。
However, in this heating furnace device, stress corrosion cracking (SCC) may occur in the welded portion 10. This is a form of damage in which when a metal material is stressed in a corrosive environment, pitting or crevice corrosion is a starting point to generate a crack, which propagates through a grain boundary or inside the grain to cause a crack. SCC is particularly likely to occur in an environment containing a cyclized product. In the case of this heating furnace apparatus, thermal stress and chlorine ions in cooling water cause stress corrosion cracking. FIG. 3 shows the SCC region in the relationship between the temperature and the chloride ion concentration of the stainless metal material (JIS SUS316). Since tap water or industrial water used as cooling water has a chlorine ion concentration of 6 to 15 ppm, SUS316 is used as a metal material.
When using, the temperature of the welded part 10 is 100
It can be seen that when the temperature exceeds ℃, it enters the SCC region. In the case of this heating furnace apparatus, the temperature of the outer surface of the furnace body 1 is cooled to 100 ° C. or lower. However, the furnace body 1 in which the welded portion 10 is located
The temperature of the inner wall reaches 120 to 250 ° C. even though the heat insulating material 5 is arranged around the heater 4 and the body 2 and the lid 3 are cooled by the cooling jacket 6. The present invention has been made to solve the above problems,
An object of the present invention is to provide a heating furnace device in which stress corrosion cracking does not occur.

【課題を解決するための手段】[Means for Solving the Problems]

前記の目的を達成するためなされた本考案の加熱炉装置
を、実施例に対応する第1図を用いて説明する。 同図に示すように本考案の加熱炉装置は、炉体1と、炉
体1の内部に配置されたヒータ4およびヒータ5を取り
囲む断熱材と、炉体1の外側に設けられた冷却ジャケッ
ト6とを有し、溶接により接合された部分10が冷却ジ
ャケット6の外側に位置している。
A heating furnace apparatus of the present invention made to achieve the above object will be described with reference to FIG. 1 corresponding to an embodiment. As shown in the figure, the heating furnace apparatus of the present invention comprises a furnace body 1, a heat insulating material surrounding the heater 4 and the heater 5 arranged inside the furnace body 1, and a cooling jacket provided outside the furnace body 1. 6 and the portion 10 joined by welding is located outside the cooling jacket 6.

【実施例】【Example】

以下、本考案の実施例を説明する。 第1図は本考案を適用する加熱炉装置の一実施例の縦断
面図である。 この加熱炉装置の炉体1は、円筒形の胴部2とその上下
面の蓋体3とで構成される。胴部2の中央部にはヒータ
4が備えられ、ヒータ4の周囲には断熱材5が配置され
ている。胴部2および蓋体3の外側には冷却ジャケット
6が設けられている。また、炉体1の側面には胴部2お
よび冷却ジャケット6を貫通する温度測定口8や覗き窓
9が取り付けられている。 この加熱炉の胴部2や蓋体3は、SUS316からなる比較的
大型の金属インゴットを削り出して作製したものであ
る。胴部2の端部にはフランジ2a、側面の開口部の周
囲には突起2bが一体に形成されている(第2図参
照)。冷却ジャケット6の外壁6aや温度測定口8など
は、フランジ2aや突起2bにて溶接される。これらの
溶接部分10は全て冷却ジャケット6の外側に位置して
おり、炉体1の内壁面、即ちヒータ4に近接した箇所に
は溶接された部分がない。 この装置は以下のように使用する。炉体1の中央部に被
加工物を載置し、ヒータ4に通電して1400〜1600℃に昇
温する。同時に冷却ジャケット6に冷却水を流し、炉体
1を冷却する。 このとき胴部2や蓋体3の内面側の温度は120〜250℃に
達するが、各溶接部分10は冷却ジャケット6の外側に
位置し、高温のヒータ4から離れているため、溶接部分
10の温度は100℃以下に保たれる。従って冷却ジャケ
ット6の冷却水に6〜15ppm程度の塩素イオンが含まれ
ていても、SUS316の溶接部分10はSCC領域に入ら
ず、クラックが発生することはない。 なお、本考案の加熱炉装置の溶接構造は、加熱炉以外に
も線引炉などの高温装置に応用することも可能である。
Embodiments of the present invention will be described below. FIG. 1 is a vertical sectional view of an embodiment of a heating furnace apparatus to which the present invention is applied. A furnace body 1 of this heating furnace device is composed of a cylindrical body 2 and lids 3 on the upper and lower surfaces thereof. A heater 4 is provided in the center of the body 2, and a heat insulating material 5 is arranged around the heater 4. A cooling jacket 6 is provided outside the body 2 and the lid 3. Further, a temperature measuring port 8 penetrating the body 2 and the cooling jacket 6 and a viewing window 9 are attached to the side surface of the furnace body 1. The body 2 and lid 3 of this heating furnace are made by cutting a relatively large metal ingot made of SUS316. A flange 2a is integrally formed on the end of the body 2, and a projection 2b is integrally formed around the opening on the side surface (see FIG. 2). The outer wall 6a of the cooling jacket 6, the temperature measuring port 8 and the like are welded by the flange 2a and the protrusion 2b. All of these welded portions 10 are located outside the cooling jacket 6, and there is no welded portion on the inner wall surface of the furnace body 1, that is, in the vicinity of the heater 4. This device is used as follows. The workpiece is placed on the center of the furnace body 1, and the heater 4 is energized to raise the temperature to 1400 to 1600 ° C. At the same time, cooling water is flown through the cooling jacket 6 to cool the furnace body 1. At this time, the temperature on the inner surface side of the body portion 2 and the lid body 3 reaches 120 to 250 ° C., but since each welding portion 10 is located outside the cooling jacket 6 and is away from the high temperature heater 4, the welding portion 10 The temperature is kept below 100 ° C. Therefore, even if the cooling water of the cooling jacket 6 contains chlorine ions of about 6 to 15 ppm, the welded portion 10 of SUS316 does not enter the SCC region and cracks do not occur. The welding structure of the heating furnace apparatus of the present invention can be applied to a high temperature apparatus such as a drawing furnace other than the heating furnace.

【考案の作用、効果】[Function and effect of the device]

以上詳細に説明したように、本考案の加熱炉装置は、各
構成部材の溶接部分が冷却ジャケットの外側に位置し、
加熱炉の高温部分から離間している。そのため、溶接部
分の温度が応力腐食割れ領域に入らず、熱応力や冷却水
中の塩素イオンによる応力腐食割れが発生することがな
い。
As described in detail above, in the heating furnace device of the present invention, the welding portion of each component is located outside the cooling jacket,
Separated from the hot part of the furnace. Therefore, the temperature of the welded portion does not enter the stress corrosion cracking region, and stress corrosion cracking due to thermal stress or chlorine ions in the cooling water does not occur.

【図面の簡単な説明】[Brief description of drawings]

第1図は本考案を適用する加熱炉装置の一実施例を示す
縦断面図、第2図はその溶接部分を示す概略縦断面図、
第3図は応力腐食割れ領域を示す図、第4図は従来の加
熱炉装置を示す部分断面図 2……胴部、2a……フランジ 2b……突起部、3……蓋体 4……ヒータ、5……断熱材 6……冷却ジャケット、6a……外壁 7……冷却水入出口、8……温度測定口 9……覗き窓、10……溶接部分
FIG. 1 is a vertical sectional view showing an embodiment of a heating furnace apparatus to which the present invention is applied, and FIG. 2 is a schematic vertical sectional view showing a welding portion thereof.
FIG. 3 is a diagram showing a stress corrosion cracking region, and FIG. 4 is a partial cross-sectional view showing a conventional heating furnace apparatus .. 2 Body ... 2a ... Flange 2b ... Projection, 3 ... Lid 4 ... Heater, 5 ... Insulation material 6 ... Cooling jacket, 6a ... Outer wall 7 ... Cooling water inlet / outlet, 8 ... Temperature measurement port 9 ... Viewing window, 10 ... Welded part

Claims (3)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】炉体と、炉体内部に配置されたヒータおよ
びヒータを取り囲む断熱材と、炉体の外側に設けられた
冷却ジャケットとを有し、溶接により接合された部分が
冷却ジャケットの外側に位置することを特徴とする加熱
炉装置。
1. A furnace body, a heater disposed inside the furnace body, a heat insulating material surrounding the heater, and a cooling jacket provided outside the furnace body, and a portion joined by welding is a cooling jacket. A heating furnace device which is located outside.
【請求項2】前記冷却ジャケットにより100℃以下に
冷却された部分が溶接により接合されていることを特徴
とする実用新案登録請求の範囲第1項記載の加熱炉装
置。
2. The heating furnace apparatus according to claim 1, wherein parts cooled to 100 ° C. or less by the cooling jacket are joined by welding.
【請求項3】前記チャンバ、フランジおよび溶接により
接合された部分が不銹鋼で形成されていることを特徴と
する実用新案登録請求の範囲第1項記載の加熱炉装置。
3. The heating furnace apparatus according to claim 1, wherein the chamber, the flange and the portion joined by welding are formed of stainless steel.
JP1989111923U 1989-09-25 1989-09-25 Heating furnace equipment Expired - Lifetime JPH0616896Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989111923U JPH0616896Y2 (en) 1989-09-25 1989-09-25 Heating furnace equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989111923U JPH0616896Y2 (en) 1989-09-25 1989-09-25 Heating furnace equipment

Publications (2)

Publication Number Publication Date
JPH0350028U JPH0350028U (en) 1991-05-15
JPH0616896Y2 true JPH0616896Y2 (en) 1994-05-02

Family

ID=31660384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989111923U Expired - Lifetime JPH0616896Y2 (en) 1989-09-25 1989-09-25 Heating furnace equipment

Country Status (1)

Country Link
JP (1) JPH0616896Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100492806B1 (en) * 1996-03-13 2005-10-13 도레이 가부시끼가이샤 Thermoplastic sealant and its manufacturing method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7398032B2 (en) * 2020-02-28 2023-12-14 島津産機システムズ株式会社 industrial furnace

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62284186A (en) * 1986-05-31 1987-12-10 日新電機株式会社 Heating furnace

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100492806B1 (en) * 1996-03-13 2005-10-13 도레이 가부시끼가이샤 Thermoplastic sealant and its manufacturing method

Also Published As

Publication number Publication date
JPH0350028U (en) 1991-05-15

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