JPH06168557A - Magnetic head and magnetic disk device - Google Patents

Magnetic head and magnetic disk device

Info

Publication number
JPH06168557A
JPH06168557A JP31757592A JP31757592A JPH06168557A JP H06168557 A JPH06168557 A JP H06168557A JP 31757592 A JP31757592 A JP 31757592A JP 31757592 A JP31757592 A JP 31757592A JP H06168557 A JPH06168557 A JP H06168557A
Authority
JP
Japan
Prior art keywords
magnetic head
disk medium
magnetic
slider
disk device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP31757592A
Other languages
Japanese (ja)
Inventor
Takafumi Fumoto
孝文 麓
Keiji Okubo
恵司 大久保
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP31757592A priority Critical patent/JPH06168557A/en
Publication of JPH06168557A publication Critical patent/JPH06168557A/en
Pending legal-status Critical Current

Links

Landscapes

  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)

Abstract

PURPOSE:To provide the magnetic head which does not damage the surface of a disk medium even at a low floating quantity and has good reliability in order to design the stationary magnetic disk device of a high recording density. CONSTITUTION:This magnetic head is constituted of a slider 1, an electromagnetic conversion part 2 and a coil 3. A surface rugged layer 4 having microruggedness on a diskmedium facing surface 5 of the slider 1 is formed of a sputtered film consisting of a low melting metal or alloy. This surface rugged layer 4 is otherwise formable by a mechanical polishing method as well.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、磁気ディスク装置等に
用いられる磁気ヘッドに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head used in a magnetic disk device or the like.

【0002】[0002]

【従来の技術】近年、コンピュータなどの情報処理装置
の外部記憶装置として磁気ディスク装置が多用されてき
ている。周知のように、現在の固定磁気ディスク装置の
データーの書き込み読み出し(以下R/Wと称す)部
は、図3に示すように基板6の上に薄膜層7を形成した
ディスク媒体と、スライダー1、電磁変換部2及びコイ
ル3により構成された磁気ヘッドからなり、装置停止時
はディスク媒体表面と磁気ヘッドが線接触しており、デ
ィスク媒体が回転方向10に回転した時におきる空気流11
により磁気ヘッドが浮上し、浮上量9を確保するコンタ
クトスタートストップ方式(以下CSSと称する)が一
般的に採用されている。この装置の起動、停止に伴う磁
気ヘッドとディスク媒体表面との摺動に起因して生じる
CSS特性の低下を防止するため、及びR/W部に於け
る磁気ヘッドの浮上量を適正に維持するため、図3に示
す基板6の表面に一般的な機械研磨法であるテクスチャ
リングを行い、基板表面を粗くする。このテクスチャリ
ングは、基板の円周方向に細かい溝を形成し表面に凹凸
を設けるものである。
2. Description of the Related Art In recent years, magnetic disk devices have been widely used as external storage devices for information processing devices such as computers. As is well known, the writing / reading (hereinafter referred to as R / W) portion of the data of the current fixed magnetic disk device includes a disk medium having a thin film layer 7 formed on a substrate 6 and a slider 1 as shown in FIG. , A magnetic head composed of the electromagnetic conversion unit 2 and the coil 3, the surface of the disk medium is in line contact with the magnetic head when the apparatus is stopped, and an air flow 11 generated when the disk medium rotates in the rotation direction 10
The contact start / stop method (hereinafter referred to as CSS) in which the magnetic head is levitated by the above and secures the flying height 9 is generally adopted. In order to prevent the deterioration of CSS characteristics caused by the sliding of the magnetic head and the surface of the disk medium due to the start and stop of this device, and to properly maintain the flying height of the magnetic head in the R / W section. Therefore, texturing, which is a general mechanical polishing method, is performed on the surface of the substrate 6 shown in FIG. 3 to roughen the substrate surface. In this texturing, fine grooves are formed in the circumferential direction of the substrate to form irregularities on the surface.

【0003】このテクスチャリング技術により、現在C
SS2万回後で摩擦係数0.6 以下、浮上量0.2 〜0.1 μ
mの固定磁気ディスク装置が提供されている。なお従来
技術による磁気ヘッドのCSS特性(スライドμ)は図
2に示されている。ここで図2の内容に付き詳述すると
aは従来技術による滑らかなディスク媒体対向面をもつ
磁気ヘッドの特性b、cはそれぞれ実施例1、2の磁気
ヘッドの特性を示す。
With this texturing technology, C
After 20,000 SS, the coefficient of friction is 0.6 or less, the flying height is 0.2 to 0.1 μ
m fixed magnetic disk drive is provided. The CSS characteristic (slide μ) of the conventional magnetic head is shown in FIG. 2A and 2B, a is a characteristic of a magnetic head having a smooth disk medium facing surface according to the prior art, and b is a characteristic of the magnetic head of Examples 1 and 2, respectively.

【0004】[0004]

【発明が解決しようとする課題】最近磁気ディスク装置
のダウンサイジング化が要求され、これに対応するため
低浮上量にしディスク媒体の線記録密度を高くしなけれ
ばならない。前記したテクスチャリング技術により、さ
らにCSS特性を向上しかつ浮上量を低下させ、高密度
化に対応した固定磁気ディスク装置を提供するには、次
のような不具合が発生する。
Recently, downsizing of magnetic disk devices has been required, and in order to meet this demand, the flying height must be reduced to increase the linear recording density of the disk medium. In order to provide a fixed magnetic disk device that further improves the CSS characteristics and reduces the flying height by the above-mentioned texturing technique and is compatible with high density, the following problems occur.

【0005】浮上量を低下させるためには、ディスク媒
体の表面を完全に滑らかにする事により達成できるが、
逆にディスク媒体表面の凹凸が無くなり、磁気ヘッドと
ディスク媒体表面間の摩擦係数が増加し、磁気ヘッドと
ディスク媒体が損傷を受けるという問題が発生する。さ
らにディスク媒体が回転を始める際、磁気ヘッドとディ
スク媒体が吸着を起こし、ディスク媒体の回転がスムー
ズに行われなくなり、ディスク媒体表面の損傷を起こす
問題も発生する。
The reduction of the flying height can be achieved by completely smoothing the surface of the disk medium.
On the contrary, the unevenness on the surface of the disk medium disappears, the friction coefficient between the magnetic head and the surface of the disk medium increases, and the magnetic head and the disk medium are damaged. Further, when the disk medium starts to rotate, the magnetic head and the disk medium are attracted to each other, so that the disk medium is not smoothly rotated, and the surface of the disk medium is damaged.

【0006】すなわち、現状のテクスチャリング技術だ
けでCSS特性を向上しようとすれば浮上量を低くでき
ず、低浮上量を確保しようとすればCSS特性が低下す
ることになる。本発明は、低浮上量にしても磁気ヘッド
とディスク媒体表面が損傷を受けない、信頼性の高い磁
気ヘッドと、それを組み込んだ磁気ディスク装置を提供
することにある。
That is, if the CSS characteristic is improved only by the current texturing technique, the flying height cannot be lowered, and if the low flying height is secured, the CSS characteristic is deteriorated. An object of the present invention is to provide a highly reliable magnetic head in which the magnetic head and the surface of the disk medium are not damaged even when the flying height is low, and a magnetic disk device incorporating the magnetic head.

【0007】[0007]

【課題を解決するための手段】上記目的は、スライダー
のディスク媒体対向面に、微小な凹凸を持つ面即ち表面
凹凸層を形成することにより達成される。またこの微小
な凹凸を持つ面、表面凹凸層は一般的な機械的研磨法、
スパッタ法によるAl、Bi、Ti等低融点金属の形
成、又はスパッタ法によるAl、Bi、Tiを少なくと
も1種類以上含む合金の形成等により実現される。
The above object can be achieved by forming a surface having a minute unevenness, that is, a surface unevenness layer on the surface of the slider facing the disk medium. In addition, the surface with this minute unevenness, the surface uneven layer is a general mechanical polishing method,
It is realized by forming a low melting point metal such as Al, Bi or Ti by a sputtering method, or forming an alloy containing at least one kind of Al, Bi or Ti by a sputtering method.

【0008】[0008]

【作用】上記の構成によれば、R/W部に於ける低浮上
量化の為にディスク媒体表面の粗さをより滑らかにして
も、CSS部では磁気ヘッドとディスク媒体の表面が、
お互いに微小な凹凸を持つ面で点接触し停止しているた
め、その相乗効果により摩擦係数が低くなり、かつ長期
間放置後起動しても磁気ヘッドとディスク媒体間の吸着
が少なくなる。
According to the above structure, even if the surface roughness of the disk medium is made smoother in order to reduce the flying height in the R / W section, the magnetic head and the disk medium surface in the CSS section are
Since they are in point contact with each other on the surfaces having minute irregularities and are stopped, the synergistic effect reduces the friction coefficient, and the adsorption between the magnetic head and the disk medium is reduced even after starting after being left for a long time.

【0009】[0009]

【実施例】本発明の実施例を図面に基づいて説明する。
図1において滑らかなスライダー1のディスク媒体対向
面5に表面凹凸層4を設けてある。以下、表面凹凸層4
の形成方法を詳細に述べる。 実施例1 滑らかな表面を持つスライダー1のディスク媒体対向面
5を、ターゲット材に対向するようにスパッタ装置にセ
ットし、スパッタ装置内の真空度を3×10-6Torr以下に
し、続いて真空度50mTorrのArガス雰囲気中でAl
をターゲット材としてスパッタし、膜厚30nmのAl
薄膜を形成する。この時のAl薄膜の中心線平均粗さは
3nmである。
Embodiments of the present invention will be described with reference to the drawings.
In FIG. 1, a surface uneven layer 4 is provided on the disk medium facing surface 5 of the smooth slider 1. Hereinafter, the surface uneven layer 4
The method for forming the above will be described in detail. Example 1 A disk medium facing surface 5 of a slider 1 having a smooth surface was set in a sputtering device so as to face a target material, the degree of vacuum in the sputtering device was set to 3 × 10 −6 Torr or less, and then the vacuum was applied. Al in an Ar gas atmosphere of 50 mTorr
Target material is sputtered to form a 30 nm thick Al film.
Form a thin film. The center line average roughness of the Al thin film at this time is 3 nm.

【0010】この結果得られた磁気ヘッドのCSS特性
を図2のbに示す。 実施例2 実施例1のArガス雰囲気を、Ar+5%N2 雰囲気に
変え他の条件は変えずにスパッタし、膜厚30nmのA
l薄膜を形成する。この時のAl薄膜の中心線平均粗さ
は2nmである。
The CSS characteristic of the magnetic head obtained as a result is shown in FIG. Example 2 The Ar gas atmosphere of Example 1 was changed to an Ar + 5% N 2 atmosphere, and sputtering was performed without changing other conditions.
l Form a thin film. The center line average roughness of the Al thin film at this time is 2 nm.

【0011】この結果得られた磁気ヘッドのCSS特性
を図2のcに示す。実施例1の磁気ヘッドよりCSS特
性が向上している。実施例1・2の選択については要求
品質により自由に選定される。以上の実施例ではAlを
ターゲット材として用いたが、Bi、Ti及びこれら合
金材料を用いても同様の結果が得られる。
The CSS characteristics of the magnetic head obtained as a result are shown in FIG. The CSS characteristics are improved as compared with the magnetic head of the first embodiment. The first and second embodiments can be freely selected according to the required quality. Although Al is used as the target material in the above examples, similar results can be obtained by using Bi, Ti and their alloy materials.

【0012】またこのような表面凹凸層4はテープ研
磨、ホーニング等機械的研磨法によってディスク媒体対
向面5に形成される凹凸層を有する磁気ヘッドとする事
が出来る。
The surface uneven layer 4 may be a magnetic head having an uneven layer formed on the disk medium facing surface 5 by a mechanical polishing method such as tape polishing or honing.

【0013】[0013]

【発明の効果】以上述べたように、本発明による磁気ヘ
ッドを用いれば低浮上量でも、磁気ヘッドとディスク媒
体が損傷を受けず、より高記録密度の磁気ディスク装置
の設計が可能となる。
As described above, when the magnetic head according to the present invention is used, the magnetic head and the disk medium are not damaged even with a low flying height, and a magnetic disk device with a higher recording density can be designed.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例を示す概念図FIG. 1 is a conceptual diagram showing an embodiment of the present invention.

【図2】本発明技術と従来技術による磁気ヘッドのCS
S特性(スライドμ)比較図
FIG. 2 shows a CS of a magnetic head according to the present invention and the prior art.
Comparison of S characteristics (slide μ)

【図3】従来技術のR/W部概念図FIG. 3 is a conceptual diagram of a conventional R / W unit.

【符号の説明】[Explanation of symbols]

1 スライダー 2 電磁変換部 3 コイル 4 表面凹凸層 5 ディスク媒体対向面 6 基板 7 薄膜層 8 ディスク媒体表面 9 浮上量 10 ディスク媒体回転方向 11 空気流 DESCRIPTION OF SYMBOLS 1 slider 2 electromagnetic conversion part 3 coil 4 surface uneven layer 5 disk medium facing surface 6 substrate 7 thin film layer 8 disk medium surface 9 flying height 10 disk medium rotating direction 11 air flow

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】スライダー及びこれに隣接するコイルを持
った電磁変換部より構成される磁気ヘッドにおいて、ス
ライダーのディスク媒体表面に対向する面を、微小な凹
凸を持つ面で形成したことを特徴とする磁気ヘッド。
1. A magnetic head comprising an electromagnetic conversion portion having a slider and a coil adjacent to the slider, wherein a surface of the slider facing the disk medium surface is formed by a surface having minute irregularities. Magnetic head.
【請求項2】特許請求の範囲第1項記載の磁気ヘッドに
おいて、凹凸面を低融点金属または合金のスパッタ膜で
形成したことを特徴とする磁気ヘッド。
2. A magnetic head according to claim 1, wherein the uneven surface is formed of a sputtered film of a low melting point metal or alloy.
【請求項3】特許請求の範囲第1項記載の磁気ヘッドに
おいて、凹凸面を機械的研磨法で形成したことを特徴と
する磁気ヘッド。
3. The magnetic head according to claim 1, wherein the uneven surface is formed by a mechanical polishing method.
【請求項4】特許請求の範囲第2項記載の磁気ヘッドに
おいて、凹凸面をAl、Bi、Tiを少なくとも1種類
以上含む合金のスパッタ膜で形成したことを特徴とする
磁気ヘッド。
4. A magnetic head according to claim 2, wherein the uneven surface is formed of a sputtered film of an alloy containing at least one of Al, Bi and Ti.
【請求項5】特許請求の範囲第1〜4項記載の磁気ヘッ
ドを具備したことを特徴とする磁気ディスク装置。
5. A magnetic disk device comprising the magnetic head according to any one of claims 1 to 4.
JP31757592A 1992-11-27 1992-11-27 Magnetic head and magnetic disk device Pending JPH06168557A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31757592A JPH06168557A (en) 1992-11-27 1992-11-27 Magnetic head and magnetic disk device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31757592A JPH06168557A (en) 1992-11-27 1992-11-27 Magnetic head and magnetic disk device

Publications (1)

Publication Number Publication Date
JPH06168557A true JPH06168557A (en) 1994-06-14

Family

ID=18089776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31757592A Pending JPH06168557A (en) 1992-11-27 1992-11-27 Magnetic head and magnetic disk device

Country Status (1)

Country Link
JP (1) JPH06168557A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11199030B2 (en) 2018-02-26 2021-12-14 Ford Global Technologies, Llc Closure system that resists separation when laterally loaded

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11199030B2 (en) 2018-02-26 2021-12-14 Ford Global Technologies, Llc Closure system that resists separation when laterally loaded

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