JPH06155238A - Working device and method thereof - Google Patents

Abstract

PURPOSE:To provide a working device and a method thereof by which working can be performed based on a previously worked surface form even though all the previously worked surface forms are not measured and stored previously. CONSTITUTION:This working device is constituted so that a plurality of displacement gauges 2a, 2b which are interlocked with a tool and outputs relative positions against a work piece are provided in front of the advancing tool 1 spacedly in one line in the advancing direction of the tool, a relative displacement quantity of the tool and the work piece based on the previously worked surface is computed from the displacement output values of the displacement gauges, and hence the working quantity is corrected. A specified section of the work piece is set as a reference face, relative distance of the tool 1 and the work piece 6 is obtained from the output of the nearest displacement gauge to the tool so as to correct the depth of cut, and simultaneously by integrating difference of output between the nearest displacement gauge and one more gauge, succeeding form of the work piece is measured and stored so as to make it the reference face at succeeding working, and further by repeating this process the whole face of the work piece is worked.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing device for processing a large-diameter and large-length workpiece with high precision such as cutting.

[0002]

2. Description of the Related Art In order to create a highly accurate shape by cutting, a highly accurate drive table and a strict temperature environment for suppressing mechanical thermal deformation during processing are required. In particular, a large stroke, a large length and a long workpiece require a large stroke of a high precision drive table and a temperature control for a long time. On the other hand, conventionally, a method of measuring and correcting an in-process table drive error and mechanical thermal deformation during processing has been considered.

[0003] FIG. 3 shows, for example, a publication (Annual Meeting of the Precision Engineering Society of Japan 1989 Autumn Conference, p. 135) and Japanese Patent Application No. 6
It is a block diagram which shows the principal part of the conventional cutting device shown by 3-322782 specification. In FIG. 3, 1 is a tool, 2
a and 2b are displacement gauges, 3 is a tool 1 and displacement gauges 2a and 2b
Is a micro-movement device that is attached to give a micro-displacement to the tool 1 and the displacement gauges 2a and 2b. For example, the micro-movement device moves up and down by expanding and contracting the piezo element. Reference numeral 4 is a table to which the minute moving device is attached, and 5 is an arrow indicating the moving direction of the table 4. 6 is a workpiece, 6a is a pre-processed surface which is a surface before processing, and 6b is a finished surface which is a processed surface after cutting. Reference numeral 7 stores the shape of the pre-machined surface 6a and the target machined shape to be machined, and the displacement shapes 2a and 2b.
A calculator 8 which calculates a minute movement amount based on the output value of the above and gives a command, 8 amplifies the command value of the calculator 7, and
It is a drive amplifier that supplies voltage to.

Next, a conventional cutting method using the above processing device will be described. FIG. 4 is an explanatory diagram of a conventional cutting method. In the cutting method, the shape of the pre-machined surface 6a is measured and stored in advance, and at the time of machining, the cutting amount is corrected with reference to the pre-machined surface 6a. That is, in the conventional method, the tool 1 is retracted to a position where the tool 1 does not come into contact with the workpiece 6, and the two displacement gauges 2a and 2b are sequentially scanned by the table 4 over the entire surface of the workpiece 6. Measure and confirm. The sequential measurement method is a method of mathematically erasing a table driving error and measuring only the shape by measuring the entire surface of the workpiece with two displacement gauges.

Next, the correction principle will be described. The following equation is obtained from the geometrical relation. I (x + s) + P (x) = T0 (x) + δ (x) + L (1) where I (x) is the output value of the displacement sensor 2a and P (x)
Is the pre-machined surface 6a shape, T0 (x) is the target machined shape, δ
(X) is a correction amount, L is a relative distance between the measurement reference of the displacement meter 2a and the cutting point in the Y-axis direction, and s is a relative distance between the measurement reference of the displacement meter 2a and the cutting point in the X-axis direction. Further, the following equation is obtained from the equation (1). δ (x) = P (x + s) + I (x + s) -L-T0 (x) (2) Therefore, the pre-machining shape P (x) is accurately grasped and the output of the displacement sensor 2a at the time of machining The correction amount δ (x) can be obtained from the value. Finally, since the correction amount δ (x) is 0 for finishing the target machining shape T0 (x), the displacement meter output at each point is given by the following equation. I (x + s) = T0 (x) + L + P (x + s) (3) That is, if the cutting control is performed so that I (x + s) satisfies the expression (3), regardless of the table drive error M (x), The target machining shape T0 (x) can be finished.

[0006]

In the conventional processing apparatus and processing method as described above, it is necessary to measure all the pre-processed surface shapes with high accuracy in advance by means such as the sequential measurement method. However, there is a drawback in that the measurement process must be performed in addition to the machining process, and the whole process takes time.

The present invention has been made in order to solve such a problem, and measures all pre-machined surface shapes in advance,
It is an object of the present invention to provide a processing apparatus and a processing method that can perform processing based on the shape of a pre-processed surface without having to store it.

[0008]

A machining apparatus according to the present invention has a displacement type which outputs a relative position with respect to a work piece in cooperation with the tool in front of the advance of the tool for machining the work piece. It has a plurality of lines in a line in the direction of travel at intervals, and is configured to calculate the relative displacement amount of the tool and the workpiece based on the pre-machined surface from the displacement output values of these displacement gauges and correct the machining amount. It was done.

Further, in the above machining apparatus, the machining amount is corrected by obtaining the relative distance between the tool and the workpiece from the output of the displacement meter close to the tool, using the specific section of the workpiece as the reference surface, and at the same time, the tool is By measuring the difference between the output of another displacement meter and the output of another displacement sensor, the shape of the next workpiece is measured and stored to be used as the reference surface for the next processing, and this process is sequentially performed. It is characterized in that the object to be processed is processed by repeating the process.

[0010]

In the processing apparatus and processing method configured as described above, even when a large-diameter workpiece is cut,
Since it is possible to measure the pre-machined surface shape in a predetermined section at the same time as machining, it is not necessary to measure and store all the pre-machined surface shapes in advance, and the machining amount error during machining is measured and corrected. It is possible to create a high-precision machining shape in a short time even in a machining machine and environment in which the physical precision is poor.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a processing apparatus according to one embodiment of the present invention,
In this example, it is a configuration diagram showing a cutting device, and FIG. 2 is an explanatory diagram illustrating a machining method according to an embodiment of the present invention.
In the figure, 1 to 8 are exactly the same as the above example slave devices.
The two displacement gauges 2a and 2b are arranged on the tool base in a front row with a space in the machining direction, that is, the traveling direction of the tool 1. 7 is based on the outputs of the displacement meters 2a and 2b,
It is a computer having a function of calculating a correction amount, giving a command, and calculating and storing a pre-machined surface shape in a predetermined section during machining.

The principle of the high-precision machining method by the cutting device configured as described above will be described with reference to FIG.

Consider cutting of a workpiece to 0 ≦ x <d. Now, if it is known that the pre-machined surface shape between s ≦ x <s + d is known as a primary reference surface, the geometrical relation of the following equation is obtained as in the equation (1). Ib (x + s) + P (x + s) = T0 (x) + δ (x) + L (4) where Ib (x) is the output value of the displacement sensor 2b, P
(X) is the pre-machined shape, T0 (x) is the target machined shape, δ
(X) is a correction amount, L is a relative distance between the measurement reference of the displacement meter 2b and the cutting point in the Y-axis direction, and s is a relative distance between the measurement reference of the displacement meter 2b and the cutting point in the X-axis direction. Therefore, in order to finish the target machined surface shape, the correction amount is as follows. δ (x) = P (x + s) + Ib (x + s) -L-T0 (x) (5) Similar to the equation (3), finally, the target machining shape T0 is obtained.
Since the correction amount δ (x) is 0 to finish to (x),
The output of the displacement sensor 2b at each point is given by the following equation. Ib (x + s) = T0 (x) + L + P (x + s) (6) That is, when the pre-machined surface between s ≦ X <s + d is known, Ib (x + s) is cut so as to satisfy the expression (6). If the control is performed, it is possible to finish the machined surface in the range of 0 ≦ X <d to the target machined shape T0 (x) regardless of the table drive error M (x).

By the way, there is the following geometrical relationship between the displacement gauges 2a and 2b. P (s + d + x) + Ib (s + x) = P (s + x) + Ia (s + d + x) (7) where Ia (x) is the output value of the displacement meter 2a. Therefore, the pre-machined shape between s + d ≦ x <s + 2 · d is as follows. P (s + d + x) = P (s + x) + Ia (s + d + x) -Ib (s + x) (8) Formula (8) shows that the pre-machined shape between s + d ≦ x <s + 2 · d is before the s ≦ x <s + d section. If the machined surface shape P (x) is known, this is used as the primary reference surface for the displacement gauges 2a, 2b.
It can be obtained from the output of.

In summary, using the pre-machined surface shape P (X) in the section s ≦ x <s + d as the primary reference surface, the machining between 0 ≦ x <d is carried out so as to satisfy the equation (6). And at the same time, s ≦ x <s + 2, which is the secondary reference surface according to the equation (8).
The pre-processed surface shape P (x) between d can be obtained. Next, based on this secondary reference, processing and measurement of the tertiary reference surface are performed, and by sequentially repeating this correction cutting and measurement, all pre-machined surface shapes are measured and stored in advance. The entire machined surface can be finished with high precision.

By the way, in the above description, the present invention has been described for the case where the displacement gauges 2a, 2b and the tool 1 are driven, but it goes without saying that the same applies even if the other workpiece 6 is driven.

Further, the present invention describes the principle of processing, and does not refer to the types and accuracy of the displacement gauges 2a and 2b.

In the above embodiment, the displacement gauges 2a and 2b are used.
Two in total are used, but more may be used in order to improve accuracy.

Further, in the above-mentioned embodiment, the case where the present invention is applied to the cutting process is shown, but it can be applied to other processes for processing the shape.

[0020]

As described above, according to the present invention, in advance of the advance of the tool for machining the workpiece, the displacement type which outputs the relative position with respect to the workpiece in cooperation with the tool is advanced. A plurality of them are arranged in a line in the direction at intervals, and the relative displacement amount of the tool and the work piece is calculated based on the displacement output value of these displacement gauges based on the pre-machined surface, and the machining amount is corrected. Therefore, the pre-machined surface shape can be measured at the same time as the machining, and the machining can be performed on the basis of the pre-machined surface shape without measuring and storing all the pre-machined surface shapes in advance.

As an example of the machining method, using a specific section of the workpiece as a reference surface, the relative distance between the tool and the workpiece is obtained from the output of the displacement meter close to the tool, and the depth of cut is corrected, and at the same time, it is close to the tool. By accumulating the difference between the displacement gauge output and another displacement gauge output, the shape of the next workpiece is measured and stored to be used as the reference surface for the next machining, and this process is repeated in sequence. By processing the object to be processed by the above, the above effects can be obtained by a simple method.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing a cutting device according to an embodiment of the present invention.

FIG. 2 is an explanatory diagram illustrating a cutting method according to an embodiment of the present invention.

FIG. 3 is a configuration diagram showing a conventional cutting device.

FIG. 4 is an explanatory diagram illustrating a conventional cutting method.

[Explanation of symbols]

 1 Tool 2a, 2b Displacement meter 3 Micro mover 4 Table 6 Workpiece 7 Computer 8 Drive amplifier

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[Procedure amendment]

[Submission date] May 10, 1993

[Procedure Amendment 1]

[Document name to be amended] Statement

[Name of item to be corrected] 0005

[Correction method] Change

[Correction content]

Next, the correction principle will be described. The following equation is obtained from the geometrical relation. I (x + s) + P (x) = T0 (x) + δ (x) + L (1) where I (x) is the output value of the displacement sensor 2a and P (x)
Is the pre-machined surface 6a shape, T0 (x) is the target machined shape, δ
(X) is a correction amount, L is a relative distance between the measurement reference of the displacement meter 2a and the cutting point in the Y-axis direction, and s is a relative distance between the measurement reference of the displacement meter 2a and the cutting point in the X-axis direction. Further, the following equation is obtained from the equation (1). δ (x) = P (x + s) + I (x + s) -L-T0 (x) (2) Therefore, the pre-machining shape P (x) is accurately grasped and the output of the displacement sensor 2a at the time of machining The correction amount δ (x) can be obtained from the value. Finally, since the correction amount δ (x) is 0 for finishing the target machining shape T0 (x), the displacement meter output at each point is given by the following equation. I (x + s) = T0 (x) + L - P (x + s) (3) That is, if the cutting control is performed so that I (x + s) satisfies the expression (3), it is related to the table drive error M (x). Instead, the target machining shape T0 (x) can be finished.

[Procedure Amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0013

[Correction method] Change

[Correction content]

Consider cutting of a workpiece to 0 ≦ x <d. Now, if it is known that the pre-machined surface shape between s ≦ x <s + d is known as a primary reference surface, the geometrical relation of the following equation is obtained as in the equation (1). Ib (x + s) + P (x + s) = T0 (x) + δ (x) + L (4) where Ib (x) is the output value of the displacement sensor 2b, P
(X) is the pre-machined shape, T0 (x) is the target machined shape, δ
(X) is a correction amount, L is a relative distance between the measurement reference of the displacement meter 2b and the cutting point in the Y-axis direction, and s is a relative distance between the measurement reference of the displacement meter 2b and the cutting point in the X-axis direction. d is strange
It is the relative distance between the position gauge 2b and the displacement gauge 2a. Therefore, in order to finish the target machined surface shape, the correction amount is as follows. δ (x) = P (x + s) + Ib (x + s) -L-T0 (x) (5) Similar to the equation (3), finally, the target machining shape T0 is obtained.
Since the correction amount δ (x) is 0 to finish to (x),
The output of the displacement sensor 2b at each point is given by the following equation. Ib (x + s) = T0 (x) + L − P (x + s) (6) That is, when the pre-machined surface between s ≦ x <s + d is known, Ib (x + s) satisfies the expression (6). If the cutting control is performed on, the machined surface in the range of 0 ≦ x <d can be finished to the target machined shape T0 (x) regardless of the table drive error M (x).

[Procedure 3]

[Document name to be amended] Statement

[Correction target item name] 0014

[Correction method] Change

[Correction content]

By the way, there is the following geometrical relationship between the displacement gauges 2a and 2b. P (s + d + x) + Ia (s + d + x) = P (s + x) + Ib ( s + x ) ... (7) Here, Ia (x) is an output value of the displacement meter 2a. Therefore, the pre-machined shape between s + d ≦ x <s + 2 · d is as follows. P (s + d + x) = P (s + x) + I b (s + x) -I a (s + d + x) ... (8) (8) expression before machining shape between s + d ≦ x <s + 2 · d is s ≦ x < If the pre-machined surface shape P (x) in the s + d section is known, this is used as the primary reference surface for the displacement meters 2a, 2b.
It can be obtained from the output of.

[Procedure amendment 4]

[Document name to be corrected] Drawing

[Name of item to be corrected] Figure 2

[Correction method] Change

[Correction content]

[Fig. 2]

Claims (2)

[Claims] 1. A plurality of displacement types, which are interlocked with the tool and output a relative position with respect to the workpiece, are provided in a line in the traveling direction of the tool at intervals in front of the tool for machining the workpiece. A processing device configured to calculate the relative displacement amount of the tool and the workpiece with reference to the pre-processing surface from the displacement output values of these displacement gauges and correct the processing amount. 2. The machining apparatus according to claim 1, wherein the machining amount is corrected by obtaining a relative distance between the tool and the workpiece from an output of a displacement meter close to the tool with a specific section of the workpiece as a reference surface. At the same time, the difference between the displacement gauge output close to that of the tool and another displacement gauge output is integrated to measure and store the shape of the next workpiece, which is used as the reference surface for the next machining. A processing method characterized by processing a workpiece by sequentially repeating this process.