JPH06151476A - Frame feeding mechanism - Google Patents

Abstract

PURPOSE:To provide a frame feeding mechanism which does not require any stroke adjustment against lead frames and cab reduce the stroke confirming time and product kind switching time. CONSTITUTION:The title mechanism is used for pushing a lead frame to the feeder-side entrance section of the wire bonder of a semiconductor manufacturing device from a loader 1 side, A magazine for housing lead frames 2 and pusher 4 which pushes out the lead frames from the magazine 3 are provided on the loader 1 side and a lead frame chute 6 is provided on the feeder 5 side. In addition, a frame detecting sensor 7 is provided at the positioning location of the chute 6. At the time of feeding the lead frames 2, the pusher 4 pushes out the lead frames 2 to the chute 6 on the feeder 5 side from the magazine 3 on the loader 1 side and the pusher 4 is stopped when the sensor 7 detects the lead frames 2. As a result, the lead frames 2 are positioned within a prescribed extent.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lead frame frame supply mechanism, and particularly, it is necessary to take out a lead frame housed in a magazine and to position the lead frame within a predetermined range in a pretreatment stage. The present invention relates to a technique effectively applied to a frame supply mechanism capable of reducing a stroke confirmation time of a lead frame and a switching time for each product in a wire bonder of a semiconductor manufacturing apparatus.

[0002]

2. Description of the Related Art For example, for supplying lead frames to a wire bonder, a magazine accommodating a plurality of lead frames is arranged on the loader side, and the lead frames are taken out one by one from the magazine side. The structure is such that it is supplied onto the chute and positioned within a predetermined range.

At this time, when the lead frames are taken out from the magazine, a pusher which is interlocked with an air cylinder is used, and the lead frames are supplied one by one by pushing or pulling back the pushers. .

[0004]

However, in the prior art as described above, when the lead frame size is different and the difference between the magazine length and the lead frame length is changed, the pusher stroke must be changed. For this reason, it is necessary to adjust the position of the pusher stopper for each product type or replace the pusher with a stopper having a different size.

Further, it is necessary to confirm the push-out of the pusher every time the position of the stopper is adjusted or replaced, and therefore, it takes a lot of time to adjust or replace the stopper, and it is easy to make an adjustment error. is there.

As described above, since the difference between the magazine length and the lead frame length differs depending on the product type, when the product type is changed, it is necessary to absorb the dimensional difference related to the stroke of the pusher.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a frame supply mechanism which eliminates the need for stroke adjustment of a lead frame which is apt to cause problems, reduces stroke confirmation time, and reduces switching time for each product type. It is in.

The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

[0009]

Among the inventions disclosed in the present application, a brief description will be given to the outline of typical ones.
It is as follows.

That is, the frame supply mechanism of the present invention is
A frame supply mechanism that takes out the lead frame stored in the magazine on the loader side and positions this lead frame at a predetermined position on the feeder side. The lead frame inside is pushed out from the loader side to the feeder side by a frame pushing mechanism.

Another frame supply mechanism of the present invention is
A frame presence / absence detection sensor is arranged at a positioning position on the feeder side, and the lead frame in the magazine is pulled out from the loader side to the feeder side by a frame gripping mechanism.

In this case, a clamp mechanism for clamping the lead frame at the position closer to the loader than the frame presence / absence detection sensor is provided on the feeder side chute.

In addition, the frame presence / absence detection sensor is replaced with a line detection sensor.

Further, the frame pushing-out mechanism on the loader side or the frame holding mechanism on the feeder side is operated in conjunction with the frame presence / absence detection sensor or the line detection sensor on the feeder side.

Further, according to still another frame supply mechanism of the present invention, when the lead frame in the magazine is pushed out from the loader side to the feeder side by the frame pushing mechanism, the gap between the magazine and the magazine guide is made constant, and The length and the length of the lead frame are input, and the frame pushing mechanism is controlled according to the length of the magazine, the length of the lead frame and the size of the gap.

[0016]

According to the above-described frame supply mechanism, the frame presence / absence detection sensor is provided at the positioning position, so that when the lead frame is pushed out from the loader side to the feeder side, the lead frame pushed out by the frame presence / absence detection sensor. Immediately after the detection of the lead frame, the frame pushing mechanism is reversely operated or stopped, and the lead frame can be stopped to be positioned.

In this case, by adding the clamp mechanism on the feeder side chute, the lead frame can be clamped and positioned by the clamp mechanism immediately after the frame pushing mechanism is reversely operated or stopped. .

Further, by replacing the frame presence / absence detection sensor with the line detection sensor, the feed amount of the lead frame to the next process can be varied according to the positioning position on the line detection sensor.

Further, the frame pushing-out mechanism on the loader side is interlocked with the frame presence / absence detecting sensor or the line detecting sensor, so that the frame pushing-out mechanism can be reversed or stopped by detecting the lead frame.

As a result, within the stroke range of the frame pushing mechanism, even if the length of the magazine or the length of the lead frame changes, the magazine length and frame length of each product type can be adjusted without the conventional adjustment or replacement work. It is possible to deal with different dimensions of the lead frame, and the stroke adjustment for positioning the lead frame can be eliminated.

Further, according to the other frame supply mechanism described above, when the lead frame is pulled out from the loader side to the feeder side by the frame holding mechanism, the frame holding is performed immediately after the lead frame pulled out by the frame presence / absence detection sensor is detected. Positioning can be performed by stopping or opening the mechanism and stopping the lead frame from being pulled out.

In this case, by adding the clamp mechanism on the feeder side chute, the lead frame can be clamped and positioned by the clamp mechanism immediately after the frame gripping mechanism is stopped or opened.

Further, by replacing the frame presence / absence detection sensor with a line detection sensor, the feed amount of the lead frame to the next process can be varied according to the positioning position on the line detection sensor.

Further, by interlocking the frame holding mechanism on the feeder side with the frame presence / absence detecting sensor or the line detecting sensor, the frame holding mechanism can be stopped or opened by detecting the lead frame.

As a result, even if the length of the magazine and the length of the lead frame change within the stroke range of the frame gripping mechanism, it is possible to eliminate the stroke adjustment of the lead frame in the positioning by the frame gripping mechanism. it can.

Further, according to still another frame supply mechanism described above, the frame pushing mechanism is the length of the magazine,
By controlling the length of the lead frame and the size of the gap between the magazine and the magazine guide, the stroke of the frame pushing mechanism for pushing the lead frame can be varied.

As a result, within the stroke range of the frame pushing mechanism, the lead frame can be positioned only by inputting the magazine length and the lead frame length without adjusting the stroke of the frame pushing mechanism.

[0028]

[Embodiment 1] FIG. 1 is a block diagram showing a frame supply mechanism according to an embodiment of the present invention.

First, the structure of the frame supply mechanism of this embodiment will be described with reference to FIG.

The frame supply mechanism of the present embodiment is a frame supply mechanism that pushes out a lead frame from the loader side of the wire bonder of the semiconductor manufacturing apparatus to the inlet side of the feeder side. The lead frame 2 is vertically movable on the loader side 1. And a pusher (frame pushing mechanism) 4 for pushing the lead frame 2 out of the magazine 3, and a chute 6 for feeding the lead frame 2 is provided on the feeder side 5. A frame presence / absence detection sensor 7 is arranged at a predetermined positioning position of the chute 6.

The pusher 4 is driven in conjunction with, for example, an air cylinder 8 or the like, and the air cylinder 8 is normally or reversely operated by supplying or discharging air.
As a result, the pusher 4 is pushed out to the feeder side 5 or, conversely, pulled back to the loader side 1.

When the lead frame 2 is supplied, the lead frame 2 is pushed out of the magazine 3 on the loader side 1 onto the chute 6 on the feeder side 5 by pushing out by the pusher 4, and detected by the frame presence / absence detection sensor 7. Immediately after being pushed, the pusher 4 is stopped in conjunction with this detection and then pulled back, whereby the lead frame 2 is positioned at a predetermined position on the chute 6.

Next, with respect to the operation of this embodiment, a case where the lead frame 2 is actually supplied from the loader side 1 to the feeder side 5 will be described.

First, air is supplied to the air cylinder 8 and the pusher 4 on the loader side 1 pushes the lead frame 2 contained in the magazine 3 onto the chute 6 on the feeder side 5. Further, while the lead frame 2 is being pushed out, the frame presence / absence detection sensor 7 on the chute 6 detects the tip of the lead frame 2.

Immediately after the tip of the lead frame 2 is detected, the air cylinder 8 is reversely operated to pull back the pusher 4 and return it to its original position. As a result, the lead frame 2 stops substantially at the position of the frame presence / absence detection sensor 7, and the lead frame 2 can be stably supplied within the predetermined range of the positioning position.

Therefore, according to the frame supply mechanism of the present embodiment, the frame presence / absence detection sensor 7 is provided at a predetermined positioning position of the chute 6, so that the frame presence / absence detection can be performed without adjusting the stroke of the pusher 4. The pusher 4 is stopped by the detection of the sensor 7, whereby the lead frame 2 can be positioned within a predetermined range.

That is, the dimensional difference between the length (L1) of the magazine 3 and the length (L2) of the lead frame 2 accommodated therein and the distance (L3) from the magazine 3 to the frame presence / absence detection sensor 7 are determined by the pusher. Within the stroke range of 4, it becomes possible to perform positioning without stroke adjustment, for example, when switching products of different lead frame 2 dimensions.

[0038]

[Embodiment 2] FIG. 2 is a block diagram showing a frame supply mechanism according to another embodiment of the present invention.

The frame supply mechanism of this embodiment is the same as that of the first embodiment.
Similarly, the pusher (frame pushing mechanism) 4 pushes the lead frame 2 out of the magazine 3 on the loader side 1 onto the chute 6 on the feeder side 5 and positions it within a predetermined range by the detection of the frame presence / absence detection sensor 7, The difference from the first embodiment is that a clamp (clamp mechanism) 9 is additionally arranged on the chute 6 on the feeder side 5.

That is, the clamp 9 of this embodiment is shown in FIG.
As shown in FIG.
After the lead frame 2 is disposed at a position closer to the loader side 1 and stopped by the detection of the frame presence / absence detection sensor 7,
The structure is such that it is fixed and positioned by the clamp 9.

Therefore, according to the frame supply mechanism of the present embodiment, the clamp 9 is added in addition to the frame presence / absence detection sensor 7, so that the stroke of the pusher 4 is not adjusted as in the first embodiment. The lead frame 2 can be positioned within a predetermined range by the detection of the presence / absence detection sensor 7, and the displacement of the lead frame 2 due to vibration or the like can be prevented as compared with the first embodiment.

[0042]

[Third Embodiment] FIG. 3 is a structural view showing a frame supply mechanism according to another embodiment of the present invention.

The frame supply mechanism of this embodiment is the same as that of the first embodiment.
Similarly, the loader side 1 is provided with a magazine 3 in which the lead frame 2 is vertically movable and a pusher (frame pushing mechanism) 4 for pushing the lead frame 2 out of the magazine 3, and a feeder side 5 A chute 6 is provided so that the lead frame 2 can be carried, and the difference from the first embodiment is that a line detection sensor 10 is used in place of the frame presence / absence detection sensor 7.

That is, the line detection sensor 1 of this embodiment
0 is arranged on the chute 6 on the feeder side 5 as shown in FIG. 3, for example, so that the positioning position becomes the center position of the line detection sensor 10.
The lead frame 2 is stopped at an arbitrary position on 0, and the feed amount of the lead frame 2 to the next stage is variable according to the stop position.

Therefore, according to the frame supply mechanism of the present embodiment, the line detection sensor 10 is provided in place of the frame presence / absence detection sensor 7 to adjust the stroke of the pusher 4 as in the first embodiment. Instead, the lead frame 2 can be positioned within a predetermined range by the detection of the frame presence / absence detection sensor 7, and the pusher 4 can be downsized or the drive amount of the pusher 4 can be reduced as compared with the first embodiment. Further, it is possible to control the feed amount to the next process over a wide range.

[0046]

[Fourth Embodiment] FIG. 4 is a structural view showing a frame supply mechanism according to another embodiment of the present invention.

The frame supply mechanism of this embodiment is, for example, a frame supply mechanism for pulling out the lead frame from the loader side of the wire bonder to the inlet side of the feeder side, and the magazine in which the lead frame 2 is housed in the loader side 1 so as to be vertically movable. 3, a chute 6 is provided on the feeder side 5 so that the lead frame 2 can be conveyed, and a frame presence / absence detection sensor 7 is provided at a predetermined positioning position of the chute 6.
And a hand (frame gripping mechanism) 11 for pulling out the lead frame 2 to the feeder side 5 is provided.

That is, using the hand 11 of this embodiment,
When the lead frame 2 is supplied, the lead frame 2 in the magazine 3 is pulled out from the loader side 1 to the feeder side 5 by the hand 11, and the pulled lead frame 2 is detected by the frame presence / absence detection sensor 7. Immediately after the detection, the hand 11 is stopped, the lead frame 2 is opened, and the lead frame 2 is positioned.

Therefore, according to the frame supply mechanism of this embodiment, in addition to the frame presence / absence detection sensor 7, the hand 11 for pulling out the lead frame 2 to the feeder side 5 is provided to adjust the stroke of the hand 11. However, since the hand 11 is stopped by the detection of the frame presence / absence detection sensor 7 and the lead frame 2 can be positioned within a predetermined range by this, it is possible to cope with a change in the type of the lead frame 2 having a different size. It is easily possible.

[0050]

[Embodiment 5] FIG. 5 is a block diagram showing a frame supply mechanism according to another embodiment of the present invention.

The frame supply mechanism of this embodiment is, for example, a frame supply mechanism that pushes out the lead frame from the loader side of the wire bonder to the inlet side of the feeder side, and the loader side 1 accommodates the lead frame 2 so as to be vertically movable. A magazine 3 and a pusher (frame pushing mechanism) 4 for pushing the lead frame 2 out of the magazine 3 are arranged, and a chute 6 for feeding the lead frame 2 is provided on the feeder side 5.

On the loader side 1, the magazine 3 is attached to the magazine guide 12 by a stopper member (not shown) or the like so that the gap is constant, and the lead frame 2 is pushed from the inside of the magazine 3 by the pusher 4 to the feeder side. On the chute 6 of 5, the length of the magazine 3, the length of the lead frame 2, the magazine 3 and the magazine guide 12
The structure is such that it is extruded according to the size of the gap between and and positioned within a predetermined range.

That is, the conditions that need to be changed when switching the product type are the difference between the length of the magazine 3 and the length of the lead frame 2, and the gap between the magazine guide 12 and the magazine 3 (L
It is the dimension of 4). Therefore, since the gap between the magazine guide 12 and the magazine 3 is constant, the length of the magazine 3 and the length of the lead frame 2 are input as data, the difference between them is calculated, and this dimensional difference is fed back to the pusher 4 to change the stroke amount. By doing so, the lead frame 2 can always be pushed to a fixed position.

Therefore, according to the frame supply mechanism of this embodiment, the stroke of the pusher 4 can be changed according to the length of the magazine 3, the length of the lead frame 2, and the size of the gap between the magazine 3 and the magazine guide 12. Because you can
The presence / absence detection function of the lead frame 2 is unnecessary, and the lead frame 2 can be positioned only by inputting the length of the magazine 3 and the length of the lead frame 2 even when the type of the lead frame 2 is changed. .

Although the invention made by the present inventor has been specifically described based on the first to fifth embodiments, the present invention is not limited to the above-mentioned embodiments and various modifications are possible without departing from the scope of the invention. It goes without saying that it can be changed.

For example, in the frame supply mechanism of the first, second, third, and fifth embodiments, the case where the pusher 4 is driven in conjunction with the air cylinder 8 has been described, but the present invention is not limited to the aforementioned embodiment. However, the present invention can be widely applied to a driving method using a motor.

Regarding the frame supply mechanism of the fourth embodiment, as in the second and third embodiments, a clamp mechanism may be added to the chute 6 or the frame presence / absence detection sensor may be replaced with a line detection sensor. Applicable.

Further, it goes without saying that the frame supply mechanism can be variously changed such as a combination of a line detection sensor and a clamp mechanism.

In the above description, the invention mainly made by the present inventor is applied to the frame supply mechanism used in the wire bonder of the semiconductor manufacturing apparatus, which is the field of application thereof, but the invention is not limited to this. The present invention is also widely applicable to other semiconductor manufacturing apparatuses such as a pellet bonder and an autoloader.

[0060]

The effects obtained by the typical ones of the inventions disclosed in the present application will be briefly described as follows.
It is as follows.

(1). A frame presence / absence detection sensor is arranged at the positioning position on the feeder side, and the lead frame in the magazine is pushed out from the loader side to the feeder side by the frame pushing mechanism. Since it is possible to detect and position the lead frame, it is possible to cope with different sizes of the magazine length and the lead frame length for each product without adjusting the stroke of the lead frame.

(2) The frame presence / absence detection sensor is arranged at the position of the feeder side, and the lead frame in the magazine is pulled out from the loader side to the feeder side by the frame gripping mechanism. Since it can detect and position
As in (1) above, it is possible to support a wide variety of products with different lead frame dimensions.

(3) By providing a clamp mechanism for clamping the lead frame at a position closer to the loader than the frame presence / absence detection sensor on the chute on the feeder side, the lead frame can be clamped and positioned by the clamp mechanism. Therefore, it is possible to prevent the lead frame from being displaced due to vibration or the like.

(4) By replacing the frame presence / absence detection sensor with a line detection sensor, the feed amount of the lead frame to the next process can be changed according to the positioning position on the line detection sensor. The mechanism or the frame gripping mechanism can be downsized or the driving amount can be reduced, and a wide range of control in the conveyance to the next process becomes possible.

(5). The drive mechanism and the sensors can be controlled by operating the frame pushing-out mechanism on the loader side or the frame gripping mechanism on the feeder side in conjunction with the frame presence / absence detection sensor or line detection sensor on the feeder side. This simplifies the positioning control.

(6). When the lead frame in the magazine is pushed out from the loader side to the feeder side by the frame pushing mechanism, the length of the magazine, the length of the lead frame, and the size of the gap between the magazine and the magazine guide set to a fixed value are set. Since the stroke of the frame pushing mechanism can be changed accordingly, the lead frame detection function and the like are not required, and the lead frame can be positioned only by inputting the magazine length and the lead frame length.

(7) Due to the above (1) to (6), stroke adjustment of the lead frame is not required, so that it is possible to reduce the stroke confirmation time and the switching time for each product type, which is highly reliable. A frame supply mechanism can be obtained.

[Brief description of drawings]

FIG. 1 is a configuration diagram illustrating a frame supply mechanism that is Embodiment 1 of the present invention.

FIG. 2 is a configuration diagram showing a frame supply mechanism that is Embodiment 2 of the present invention.

FIG. 3 is a configuration diagram showing a frame supply mechanism that is Embodiment 3 of the present invention.

FIG. 4 is a configuration diagram showing a frame supply mechanism that is Embodiment 4 of the present invention.

FIG. 5 is a configuration diagram showing a frame supply mechanism that is Embodiment 5 of the present invention.

[Explanation of symbols]

 1 loader side 2 lead frame 3 magazine 4 pusher (frame pushing mechanism) 5 feeder side 6 chute 7 frame presence / absence detection sensor 8 air cylinder 9 clamp (clamp mechanism) 10 line detection sensor 11 hand (frame gripping mechanism) 12 magazine guide

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yuichi Komaba 3-3, Fujibashi, Ome City, Tokyo 2 Hitachi Hitachi Electronics Co., Ltd.

Claims (6)

[Claims] 1. A frame supply mechanism for taking out a lead frame stored in a magazine on the loader side and positioning the lead frame at a predetermined position on the feeder side, wherein a frame presence / absence detection sensor is provided at a positioning position on the feeder side. And the lead frame in the magazine is pushed out from the loader side to the feeder side by a frame pushing mechanism, and the frame pushing mechanism is reversely operated immediately after the lead frame pushed by the frame presence / absence detection sensor is detected or A frame supply mechanism characterized in that the lead frame is stopped and the extrusion of the lead frame is stopped to perform positioning. 2. A frame supply mechanism for taking out a lead frame housed in a magazine on the loader side and positioning the lead frame at a predetermined position on the feeder side, wherein a frame presence / absence detection sensor is provided at a positioning position on the feeder side. The lead frame in the magazine is pulled out from the loader side to the feeder side by the frame holding mechanism, and the frame holding mechanism is stopped or opened immediately after the lead frame pulled out by the frame presence / absence detection sensor is detected. Then, the frame feeding mechanism is characterized in that the lead frame is stopped from being pulled out for positioning. 3. A clamp mechanism for clamping the lead frame at a position closer to the loader than the frame presence / absence detection sensor is provided on the feeder-side chute, and immediately after the frame pushing-out mechanism is reversely operated or stopped, or 3. The frame supply mechanism according to claim 1, wherein the lead frame is clamped and positioned by the clamp mechanism immediately after the frame gripping mechanism is stopped or opened. 4. The frame presence / absence detection sensor is replaced with a line detection sensor, and the feed amount of the lead frame to the next process is changed according to the positioning position on the line detection sensor. The frame supply mechanism according to 2 or 3. 5. The frame pushing-out mechanism on the loader side or the frame gripping mechanism on the feeder side is operated in conjunction with a frame presence / absence detection sensor or a line detection sensor on the feeder side.
The frame supply mechanism according to 2, 3 or 4. 6. A frame feeding mechanism for taking out a lead frame stored in a magazine on a loader side and positioning the lead frame at a predetermined position on a feeder side. A frame pushing mechanism for pushing the lead frame in the magazine. When pushing out from the loader side to the feeder side by means of, the gap between the magazine and the magazine guide is made constant, the length of the magazine and the length of the lead frame are input, and the length of the magazine, the length of the lead frame and A frame supply mechanism, wherein a stroke of the frame pushing mechanism is changed according to a size of a gap.