JPH06150415A - Magneto-optical recording medium - Google Patents

Magneto-optical recording medium

Info

Publication number
JPH06150415A
JPH06150415A JP29862292A JP29862292A JPH06150415A JP H06150415 A JPH06150415 A JP H06150415A JP 29862292 A JP29862292 A JP 29862292A JP 29862292 A JP29862292 A JP 29862292A JP H06150415 A JPH06150415 A JP H06150415A
Authority
JP
Japan
Prior art keywords
film
magnetic field
magneto
recording
magnitude
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29862292A
Other languages
Japanese (ja)
Inventor
Yoichi Hashimoto
洋一 橋本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kuraray Co Ltd
Original Assignee
Kuraray Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kuraray Co Ltd filed Critical Kuraray Co Ltd
Priority to JP29862292A priority Critical patent/JPH06150415A/en
Publication of JPH06150415A publication Critical patent/JPH06150415A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To increase CNR and to lessen the generation of noises under a low magnetic field by setting the magnitude of the saturation magnetization in the direction parallel with the main plane of a recording film consisting of a rare earth-transition metal amorphous alloy at a 20 to 100emu/cm<3> range. CONSTITUTION:A dielectric substance film 3 consisting of SiN, a recording film 4 consisting of TbFeCo, a dielectric substance 5 and a reflection film 6 consisting of AlTi are laminated on a polycarbonate substrate 2. After the formation of the film 4, gaseous oxygen is introduced and the time of the surface oxidation of the film 4 is changed in a 30 to 120 second range, by which the film 4 having the magnitude of the saturation magnetization different in the direction parallel with the main plane of the film is obtd. The relation between the magnitude of the saturation magnetization and Ho at which the CNR begins to appear and the noise level at the point of the time of 0 magnetic field is measured. Consequently, the Ho is small and the noise level is low with the magneto-optical disk having the magnitude of the saturation magnetization in the 20 to 100emu/cm<3> range. As a result, the recording and erasing of information are possible even in a small external magnetic field. In addition, the magneto-optical recording medium having the high CNR is obtd.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は光磁気記録媒体に関す
る。
FIELD OF THE INVENTION The present invention relates to a magneto-optical recording medium.

【0002】[0002]

【従来の技術】光記録素子の中で、情報の追記・消去が
可能な光磁気記録媒体が実用化の段階に入っている。こ
の光磁気記録媒体の記録膜としては、希土類−遷移金属
アモルファス合金の薄膜が、その総合的な特性が適して
いるために最も多く用いられている。希土類−遷移金属
アモルファス合金は、飽和磁化が膜面の垂直方向に向く
垂直磁化膜であり、この磁化方向を利用して情報を記録
する。
2. Description of the Related Art Among optical recording elements, a magneto-optical recording medium capable of additionally recording and erasing information is in the stage of practical use. As a recording film of this magneto-optical recording medium, a thin film of a rare earth-transition metal amorphous alloy is most often used because its comprehensive characteristics are suitable. The rare earth-transition metal amorphous alloy is a perpendicular magnetization film whose saturation magnetization is oriented in the direction perpendicular to the film surface, and information is recorded by utilizing this magnetization direction.

【0003】光磁気記録媒体の記録方法の一つに、キュ
リー点記録方式がある。この方法では、まず、電磁石な
どによって記録媒体に外部磁界を与えておき、その磁界
の作用下で、レンズによって集光されたレーザ光を記録
膜に照射することにより、記録膜の局部(記録箇所)を
キュリー点温度以上になるまで上昇させる。キュリー点
温度に至った部分では、保磁力が0となり、外部磁界と
同じ向きになるように磁化されて、情報が記録または消
去される。
The Curie point recording method is one of the recording methods for a magneto-optical recording medium. In this method, first, an external magnetic field is applied to the recording medium by an electromagnet or the like, and under the action of the magnetic field, the laser light focused by the lens is irradiated to the recording film, thereby locally ) Is increased until it reaches the Curie temperature or higher. At the portion reaching the Curie point temperature, the coercive force becomes 0, and the information is recorded or erased by being magnetized in the same direction as the external magnetic field.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、一般的
な単層の希土類−遷移金属アモルファス合金記録膜を有
するオーバーライト型の光磁気ディスクの場合は、情報
を記録または消去するために、200〜400エルステ
ッド(Oe)程度の極めて大きな外部磁界を必要として
いた。そのため、磁界を発生するための大型の磁界発生
器を備えなければならず、また、磁場の形成にも長時間
を要するので、処理の高速化を図る上での障害となって
おり、より小さな外部磁界によって情報を記録・消去で
きる記録膜の開発が待たれている。
However, in the case of an overwrite type magneto-optical disk having a general single-layer rare earth-transition metal amorphous alloy recording film, in order to record or erase information, 200 to 400 is used. An extremely large external magnetic field of about Oersted (Oe) was required. Therefore, a large-sized magnetic field generator for generating a magnetic field must be provided, and it takes a long time to form the magnetic field, which is an obstacle to speeding up the process, which is smaller. Development of a recording film capable of recording and erasing information by an external magnetic field is awaited.

【0005】磁界変調方式のオーバーライト動作に必要
な外部磁界を低減するために必要なディスクの特性につ
いて、図4及び図5を参照して説明する。図4は、予め
磁化の向きをそろえてディスクを初期化した後に、外部
磁界を与え、レーザパルスを照射して記録膜に情報を書
き込んだときの、外部磁界の強さとCNRとの関係を示
すグラフであり、図5は、書き込み時におけるディスク
の垂直磁化膜の状態を示す断面図である。磁界変調方式
オーバーライトでは、図4に示す、CNRが飽和するH
sレベルとCNRが現われ始めるHoレベルとの間で、
外部磁界をスイッチングするので、外部磁界を低減させ
るためには、Hs,Hoレベルを共に小さくしなければ
ならない。
The characteristics of the disk required to reduce the external magnetic field required for the overwrite operation of the magnetic field modulation method will be described with reference to FIGS. 4 and 5. FIG. 4 shows the relationship between the intensity of the external magnetic field and the CNR when the disk is initialized by aligning the directions of magnetization in advance and then an external magnetic field is applied and a laser pulse is applied to write information on the recording film. 5 is a graph, and FIG. 5 is a cross-sectional view showing the state of the perpendicular magnetization film of the disk at the time of writing. In the magnetic field modulation type overwrite, as shown in FIG.
Between the s level and the Ho level at which CNR begins to appear,
Since the external magnetic field is switched, both the Hs and Ho levels must be reduced in order to reduce the external magnetic field.

【0006】また、図5に示すように、レーザ光が照射
されて高温になった記録箇所(高温部)には、磁界発生
器によって形成された外部磁界Hexの他、その高温部
の周辺のキュリー点温度以下の部分の磁化の大きさに依
存する反磁界Hdが作用する。前記Hoレベルの大きさ
に大きく影響するのは、この反磁界Hdであり、反磁界
Hdが大きければ、それを打ち消すだけの大きなHoレ
ベルの外部磁界を形成しなければならない。反磁界Hd
の大きさは、垂直磁化膜の磁化の大きさに依存するの
で、記録膜が単層であるディスクでは、磁化の小さい補
償組成を選んでディスクを構成すればHoレベルを小さ
くすることができるが、実際上は、このような組成の膜
を安定して生成するのは、極めて困難である。そのた
め、従来、誘電体層、記録層の製膜時の投入電力、スパ
ッタガス圧の調整、誘電体層の逆スパッタ等によって、
補償組成に拘らずHoレベルを小さくする方法が採用さ
れている。
Further, as shown in FIG. 5, at a recording portion (high temperature portion) which has been heated to a high temperature by being irradiated with a laser beam, in addition to the external magnetic field Hex formed by the magnetic field generator, a portion around the high temperature portion is generated. The demagnetizing field Hd that depends on the magnitude of the magnetization of the portion below the Curie point temperature acts. It is this demagnetizing field Hd that greatly affects the magnitude of the Ho level, and if the demagnetizing field Hd is large, it is necessary to form a large Ho level external magnetic field that cancels it. Demagnetizing field Hd
Is dependent on the magnitude of the magnetization of the perpendicularly magnetized film. Therefore, in the case of a disc having a single recording film, the Ho level can be reduced by selecting a compensating composition having a small magnetization to construct the disc. Practically, it is extremely difficult to stably produce a film having such a composition. Therefore, conventionally, by applying the input power at the time of film formation of the dielectric layer and the recording layer, adjusting the sputtering gas pressure, reverse sputtering of the dielectric layer, etc.
A method of reducing the Ho level is adopted regardless of the compensation composition.

【0007】しかし、上記の方法によって製造されたデ
ィスクには、Hoレベルの低減に伴って、低磁界下での
ノイズレベルが上昇するという問題がある。磁界変調に
おいて磁界をスイッチングする過程では、必ず、ある時
点で外部磁界が0となるが、この磁界0時点でのノイズ
を低減し、CNRを高めなければならない。
However, the disk manufactured by the above method has a problem that the noise level increases under a low magnetic field as the Ho level decreases. In the process of switching the magnetic field in the magnetic field modulation, the external magnetic field always becomes 0 at a certain time point, but noise at the time point when this magnetic field is 0 must be reduced and CNR should be increased.

【0008】本発明は、上記の問題を解決するためにな
されたもので、低磁界下でのノイズを低減することによ
り、CNRを高め、小さな外部磁界で情報を記録または
消去することが可能な光磁気記録媒体を提供することを
目的とする。
The present invention has been made to solve the above problems, and by reducing noise under a low magnetic field, CNR can be enhanced, and information can be recorded or erased with a small external magnetic field. It is an object to provide a magneto-optical recording medium.

【0009】[0009]

【課題を解決するための手段】上記の目的を達成するた
めに本発明の光磁気記録媒体は、基板上に積層された希
土類−遷移金属アモルファス合金からなる記録膜におけ
る、記録膜の主面と平行な方向の飽和磁化の大きさが2
0〜100emu/cm2の範囲にあることを特徴とす
る。
In order to achieve the above object, the magneto-optical recording medium of the present invention has a main surface of a recording film in a recording film made of a rare earth-transition metal amorphous alloy laminated on a substrate. The saturation magnetization in the parallel direction is 2
It is characterized by being in the range of 0 to 100 emu / cm 2 .

【0010】[0010]

【作用】上記の構成によれば、記録箇所の反磁界が低減
し、低磁界でのノイズが減少する。これにより、小さな
外部磁界でも情報を記録・消去でき、かつ、CNRの高
い光磁気記録媒体を得ることができる。
According to the above construction, the demagnetizing field at the recording portion is reduced, and the noise in the low magnetic field is reduced. As a result, information can be recorded / erased even with a small external magnetic field, and a magneto-optical recording medium having a high CNR can be obtained.

【0011】[0011]

【実施例】以下に、本発明の光磁気記録媒体の一実施例
を説明する。図1に、本実施例による光磁気ディスクの
構成を示す。同図において、光磁気ディスク1は光透過
性の基板2に、誘電体膜3、希土類−アモルファス合金
からなる記録膜4、誘電体膜5、反射膜6が順次、積層
して構成されている。基板2は、ポリカーボネート、エ
ポキシ樹脂等のプラスチック、ガラス、セラミック、金
属などの材料から任意に選択して形成すればよい。誘電
体膜3,5には、SiN,AlSiN,AlSiON,
SiO,ZnSなどを用いることができる。反射層6
は、Al,Au,Ag,PtなどにTi,Cr,In,
Cuの中から1種類以上を添加したものを用いることが
できる。
EXAMPLE An example of the magneto-optical recording medium of the present invention will be described below. FIG. 1 shows the structure of a magneto-optical disk according to this embodiment. In the figure, a magneto-optical disk 1 is constituted by laminating a dielectric film 3, a recording film 4 made of a rare earth-amorphous alloy, a dielectric film 5, and a reflective film 6 in this order on a light-transmissive substrate 2. . The substrate 2 may be formed by arbitrarily selecting materials such as plastics such as polycarbonate and epoxy resin, glass, ceramics, and metals. The dielectric films 3 and 5 include SiN, AlSiN, AlSiON,
SiO, ZnS, etc. can be used. Reflective layer 6
Is Ti, Cr, In, Al, Au, Ag, Pt, etc.
It is possible to use a material to which one or more kinds of Cu have been added.

【0012】ポリカーボネート基板2上に、SiN膜3
(膜厚:1100Å)、TbFeCo記録膜4(膜厚:
200Å)、SiN膜5(膜厚:350Å)およびAl
Ti膜6(膜厚:500Å)が積層されてなる図1の構
成を有する光磁気ディスクを作製するにあたり、TbF
eCo膜の製膜後、酸素ガス(真空度:0.02Pa)
を導入し、TbFeCo膜の表面酸化の時間を30〜1
20秒の範囲で変えることによって、TbFeCo膜の
主面に平行な方向の異なる飽和磁化の大きさを有する光
磁気ディスクを作製した。かかる光磁気ディスクにおけ
る飽和磁化の大きさとCNRが現われ始めるHo(図中
実線で示す)および磁界0時点でのノイズレベル(図中
破線で示す)との関係を測定した結果を図2に示す。測
定条件は線速7.54m/s,記録周波数4.93MH
z,デューティー25%、記録に用いるレーザー光のパ
ワー7mWである。また、振動試料型磁力計を用いて、
15kOeの最大磁場を印可することにより飽和磁化を
求めた。図2から、上記飽和磁化の大きさが20〜10
0emu/cm3の範囲にある光磁気ディスクでは、上
記のHoが小さく、ノイズレベルが低いことがわかる。
A SiN film 3 is formed on a polycarbonate substrate 2.
(Film thickness: 1100Å), TbFeCo recording film 4 (film thickness:
200Å), SiN film 5 (film thickness: 350Å) and Al
In manufacturing a magneto-optical disk having a structure of FIG. 1 in which a Ti film 6 (film thickness: 500Å) is laminated, TbF
After forming the eCo film, oxygen gas (vacuum degree: 0.02 Pa)
And the surface oxidation time of the TbFeCo film is set to 30 to 1
The magneto-optical disk having different saturation magnetization in the direction parallel to the main surface of the TbFeCo film was manufactured by changing the range within 20 seconds. FIG. 2 shows the result of measurement of the relationship between the magnitude of saturation magnetization in such a magneto-optical disk, Ho (indicated by a solid line in the figure) at which CNR begins to appear, and the noise level (indicated by a broken line in the figure) at the time when the magnetic field is 0. The measurement conditions are a linear velocity of 7.54 m / s and a recording frequency of 4.93 MH.
z, duty 25%, power of laser light used for recording 7 mW. Also, using a vibrating sample magnetometer,
Saturation magnetization was determined by applying a maximum magnetic field of 15 kOe. From FIG. 2, the magnitude of the saturation magnetization is 20 to 10
It can be seen that in the magneto-optical disk in the range of 0 emu / cm 3 , the above Ho is small and the noise level is low.

【0013】次に、上述の方法で作製した、上記の飽和
磁化の大きさが5emu/cm3(図中実線で示す光磁
気ディスクA)、50emu/cm3(図中破線で示す
光磁気ディスクB)および120emu/cm3(図中
1点鎖線で示す光磁気ディスクC)の3種類の光磁気デ
ィスクについて、外部磁界とCNRとの関係を測定した
結果を図3に示す。測定条件は線速1.4m/s、書き
込みパワー4.5mW、読みだしパワー0.7mW、記
録周波数720kHz、デューティ50%である。図3
から、上記飽和磁化の大きさが20〜100emu/c
3の範囲にある光磁気ディスクAでは、この範囲にな
い光磁気ディスクB・Cに比べて低磁界でのCNRが優
れていることがわかる。
Next, the magnitude of the saturation magnetization produced by the above method is 5 emu / cm 3 (magneto-optical disk A shown by the solid line in the figure) and 50 emu / cm 3 (magneto-optical disk shown by the broken line in the figure). FIG. 3 shows the results of measuring the relationship between the external magnetic field and the CNR for three types of magneto-optical disks, B) and 120 emu / cm 3 (magneto-optical disk C shown by the one-dot chain line in the figure). The measurement conditions are a linear velocity of 1.4 m / s, a writing power of 4.5 mW, a reading power of 0.7 mW, a recording frequency of 720 kHz and a duty of 50%. Figure 3
Therefore, the magnitude of the saturation magnetization is 20 to 100 emu / c.
It can be seen that the magneto-optical disk A in the range of m 3 has an excellent CNR in a low magnetic field as compared with the magneto-optical disks B and C not in this range.

【0014】なお、希土類−遷移金属アモルファス合金
の記録膜が上記範囲の飽和磁化を有する光磁気記録媒体
は、0.01〜0.03Paの酸素ガスを60〜360
秒導入することにより記録膜を酸化処理するほか、希土
類−遷移金属アモルファス合金層と10Å以下の膜厚を
有するFe層、Co層またはNi層もしくはこれらの合
金層とを積層してなる記録膜を用いることにより得られ
る。
For a magneto-optical recording medium in which a recording film of a rare earth-transition metal amorphous alloy has a saturation magnetization within the above range, 0.01 to 0.03 Pa of oxygen gas is added to 60 to 360.
In addition to the oxidation treatment of the recording film by introducing the second, a recording film formed by laminating a rare earth-transition metal amorphous alloy layer and a Fe layer, a Co layer or a Ni layer having a film thickness of 10 Å or less or these alloy layers It is obtained by using.

【0015】[0015]

【発明の効果】以上、本発明によれば、低磁界下でのノ
イズ発生を低減でき、CNRを高めることができる。こ
れにより、小さな外部磁界で情報を記録・消去できると
共に、この媒体を使用する記録装置の磁界発生部を小形
化、小電力化が図れる。
As described above, according to the present invention, noise generation under a low magnetic field can be reduced and CNR can be enhanced. As a result, information can be recorded / erased with a small external magnetic field, and the magnetic field generating portion of the recording apparatus using this medium can be downsized and the power consumption can be reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例による光磁気ディスクの基本
構成図である。
FIG. 1 is a basic configuration diagram of a magneto-optical disk according to an embodiment of the present invention.

【図2】記録膜の主面に平行な方向の飽和磁化の大きさ
とCNRが現われ始めるHoおよび磁界0時点でのノイ
ズレベルとの関係を測定した結果を示す図である。
FIG. 2 is a diagram showing the results of measurement of the relationship between the magnitude of saturation magnetization in the direction parallel to the main surface of the recording film, Ho at which CNR begins to appear, and the noise level at the time of zero magnetic field.

【図3】飽和磁化の大きさの異なる光磁気ディスクにつ
いて、外部磁界とCNRとの関係を測定した結果を示す
図である。
FIG. 3 is a diagram showing a result of measuring a relationship between an external magnetic field and CNR with respect to magneto-optical disks having different saturation magnetizations.

【図4】外部磁界の大きさとCNRとの関係を示すグラ
フである。
FIG. 4 is a graph showing the relationship between the magnitude of an external magnetic field and CNR.

【図5】書き込み時の垂直磁化膜の状態を示す断面図で
ある。
FIG. 5 is a cross-sectional view showing a state of a perpendicular magnetization film at the time of writing.

【符号の説明】[Explanation of symbols]

1 光磁気ディスク 2 基板 3 誘電体膜 4 記録膜 5 誘電体膜 6 反射膜 1 Magneto-optical disk 2 Substrate 3 Dielectric film 4 Recording film 5 Dielectric film 6 Reflective film

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 基板上に積層された希土類−遷移金属ア
モルファス合金からなる記録膜における、記録膜の主面
と平行な方向の飽和磁化の大きさが20〜100emu
/cm2の範囲にあることを特徴とする光磁気記録媒
体。
1. A recording film made of a rare earth-transition metal amorphous alloy laminated on a substrate has a saturation magnetization of 20 to 100 emu in a direction parallel to the main surface of the recording film.
A magneto-optical recording medium characterized by being in the range of / cm 2 .
JP29862292A 1992-11-09 1992-11-09 Magneto-optical recording medium Pending JPH06150415A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29862292A JPH06150415A (en) 1992-11-09 1992-11-09 Magneto-optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29862292A JPH06150415A (en) 1992-11-09 1992-11-09 Magneto-optical recording medium

Publications (1)

Publication Number Publication Date
JPH06150415A true JPH06150415A (en) 1994-05-31

Family

ID=17862116

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29862292A Pending JPH06150415A (en) 1992-11-09 1992-11-09 Magneto-optical recording medium

Country Status (1)

Country Link
JP (1) JPH06150415A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1030299A2 (en) * 1999-02-09 2000-08-23 Sony Corporation Magneto-optical recording medium

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1030299A2 (en) * 1999-02-09 2000-08-23 Sony Corporation Magneto-optical recording medium
EP1030299A3 (en) * 1999-02-09 2000-11-15 Sony Corporation Magneto-optical recording medium
US6319623B1 (en) 1999-02-09 2001-11-20 Sony Corporation Magneto-optical recording medium

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