JPH06148273A - Classification of tested ic element - Google Patents

Classification of tested ic element

Info

Publication number
JPH06148273A
JPH06148273A JP4294967A JP29496792A JPH06148273A JP H06148273 A JPH06148273 A JP H06148273A JP 4294967 A JP4294967 A JP 4294967A JP 29496792 A JP29496792 A JP 29496792A JP H06148273 A JPH06148273 A JP H06148273A
Authority
JP
Japan
Prior art keywords
elements
same
test result
picked
storage tray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4294967A
Other languages
Japanese (ja)
Other versions
JP3014015B2 (en
Inventor
Kuniaki Sakauchi
邦昭 坂内
Minoru Baba
稔 馬場
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to JP4294967A priority Critical patent/JP3014015B2/en
Publication of JPH06148273A publication Critical patent/JPH06148273A/en
Application granted granted Critical
Publication of JP3014015B2 publication Critical patent/JP3014015B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE:To shorten classification and distribution times. CONSTITUTION:A head capable of simultaneously adsorbing four IC elements is provided and the IC elements in the same arrangement state as the head are searched on a test tray on the basis of the same test result and four tested ICs are simultaneously taken up to be carried to a receiving tray. When the ICs arranged in the same way as the ICs on the head of the same test result are lost, three arranged IC elements are searched to be simultaneously taken up and, next, one IC elements of the same test result are searched and taken up to be carried to the receiving tray as four ones. In this step, if there is no one IC element of the same test result, the arrangement of two IC elements of the same test result is searched and one of the IC element thereof is taken up to simultaneously carry four IC elements.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は水平搬送装置を用いて
IC素子を試験位置に移動し、その試験結果に応じて試
験済IC素子が乗せられたトレイから収納トレイに分
類、収納する試験済IC素子分類方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention moves an IC element to a test position by using a horizontal transfer device, and tests the IC element according to the test result. The present invention relates to an IC device classification method.

【0002】[0002]

【従来の技術】図4に示すように、試験トレイ11には
試験済IC素子12がマトリックス状に配列されてい
る。図においてはX方向に10個のIC素子が、Y方向
に4個のIC素子が並べられ、全体で40個の試験済I
C素子12がトレイ11上に乗せられている状態を示
し、試験済IC素子12上に付けた1乃至4の番号は試
験結果を示しており、即ち試験結果が1級のものには1
を、2級のものには2を付けて表示してある。この試験
済IC素子12をその試験結果に応じて個別の収納トレ
イ13乃至16に収納する。このため、そのIC素子を
取り上げて移動させる機構のヘッド17は、その試験ト
レイ11上のIC素子の配列状態の一部のIC素子を同
時に取り上げる、この例ではX方向において並べられた
4個のIC素子を同時に取り上げることができるヘッド
が用いられている。
2. Description of the Related Art As shown in FIG. 4, tested IC elements 12 are arranged in a matrix on a test tray 11. In the figure, 10 IC elements are arranged in the X direction and 4 IC elements are arranged in the Y direction, and a total of 40 tested I
The C element 12 is placed on the tray 11, and the numbers 1 to 4 attached to the tested IC element 12 indicate the test result, that is, 1 is assigned to the test result of the first grade.
Is labeled with 2 for the second grade. The tested IC element 12 is stored in individual storage trays 13 to 16 according to the test result. Therefore, the head 17 of the mechanism for picking up and moving the IC element picks up a part of the IC elements on the test tray 11 at the same time. In this example, four heads arranged in the X direction are arranged. A head capable of picking up IC elements at the same time is used.

【0003】従来において、このようなヘッドを用いて
試験済IC素子を収納トレイに分類、収納する場合、そ
の試験トレイから同一級のIC素子を決められた配列順
番に取って4つの同一級のIC素子を取り上げると、こ
れと対応する収納トレイに収納している。このため従来
においては、試験トレイ11上におけるIC素子の配列
を決まった順に、同一級のものを探し、例えばX方向の
0番目からにおけるY方向に探して、次にX方向の1番
目からY方向を探していく。例えば2級のIC素子を取
り出す場合は、図4Bに示すようにヘッド17の一番左
に(0、1)、つまりX=0、Y=1の位置のIC素子
を取り、次に(1、0)の位置のIC素子を取り、次に
(1、2)の位置のIC素子を取り、更に(1、3)位
置のIC素子を取って、その状態でヘッド17を収納ト
レイ14上に移動して2級のIC素子の4個を同時にト
レイ14に収納する。このようにして1級のIC素子は
収納トレイ13に、3級のIC素子は収納トレイ15
に、4級のIC素子は収納トレイ16にと言うように分
類して収納していた。
Conventionally, when the tested IC elements are sorted and stored in a storage tray by using such a head, IC elements of the same class are taken from the test tray in a predetermined arrangement order and four of the same class are stored. When the IC element is picked up, it is stored in a storage tray corresponding to it. For this reason, conventionally, the IC elements on the test tray 11 are searched for the same class in a predetermined order, for example, in the Y direction from the 0th position in the X direction, and then from the 1st position in the X direction. Search for directions. For example, when taking out a second-class IC element, as shown in FIG. 4B, the IC element at the leftmost position (0, 1) of the head 17, that is, the position of X = 0, Y = 1 is taken, and then (1 , 0), the IC element at the (1, 2) position, and the IC element at the (1, 3) position. To the tray 14 at the same time. In this way, the first-class IC element is stored in the storage tray 13 and the third-class IC element is stored in the storage tray 15.
In addition, the fourth-class IC elements were classified and stored in the storage tray 16.

【0004】[0004]

【発明が解決しようとする課題】以上述べたように、従
来においては同一試験結果、即ち同一級の試験済IC素
子を試験トレイ上の予め決まった順に順次探して1個ず
つ試験済IC素子を取り、ヘッド17に、この例では4
個取ると収納トレイに移動して収納していた。IC素子
を取り上げるための時間が比較的長いため、全体として
分類、収納にかかる時間が比較的長かった。
As described above, in the prior art, tested IC elements of the same test result, that is, the same class, are sequentially searched for in a predetermined order on the test tray, and tested IC elements are tested one by one. Take the head 17, 4 in this example
When I picked them up, they moved to the storage tray and stored. Since the time for picking up the IC element is relatively long, the time required for sorting and storing as a whole was relatively long.

【0005】[0005]

【課題を解決するための手段】この発明によれば、収納
トレイに同時に移動可能な最大の配列状態に近い配列状
態にあるIC素子から順に試験トレイ上の試験済IC素
子を収納トレイへ移動して分類、収納する。
According to the present invention, the tested IC elements on the test tray are moved to the storage tray in order from the IC elements in the arrangement state that is close to the maximum arrangement state that can be simultaneously moved to the storage tray. Sort and store.

【0006】[0006]

【実施例】図1に同時に移動可能のIC素子の数Xが
4、つまりヘッド17で同時に試験済IC素子を取り上
げることができ、かつ収納トレイに収納できる数が4の
場合で、この例では従来の図4に示した、X方向に4個
並んだIC素子を同時に取り上げることができるヘッド
を使用した場合を例として説明する。先ずX方向に4個
並んだIC素子12を探す。例えば図4に示した例にお
いては、試験結果が2級のIC素子についてはトレイ1
1上の位置が(6、1)、(7、1)、(8、1)、
(9、1)の箇所を探し、この同一試験結果が4個並ん
だ4つのIC素子を、例えば真空的差により同時に取り
上げて、これを収納トレイに収納する。その収納したの
ち再びこのステップ1に戻って、このヘッド17で同時
に移動することができる最大のIC素子が並んだ状態の
ものを取り出して運ぶことを繰り返す。
EXAMPLE FIG. 1 shows a case where the number X of simultaneously movable IC elements is 4, that is, the tested IC elements can be simultaneously picked up by the head 17 and can be stored in the storage tray. In this example, An example will be described in which a conventional head shown in FIG. 4 that can simultaneously pick up four IC elements arranged in the X direction is used. First, four IC elements 12 arranged in the X direction are searched. For example, in the example shown in FIG. 4, the tray 1 is used for the IC element whose test result is grade 2.
The positions on 1 are (6, 1), (7, 1), (8, 1),
A location (9, 1) is searched for, and four IC elements in which four identical test results are lined up are simultaneously picked up by, for example, a vacuum difference, and are stored in a storage tray. After the storage, the process returns to step 1 again, and the process of taking out and carrying the one in which the maximum IC elements that can be simultaneously moved by the head 17 are lined up is repeated.

【0007】この最大に運ぶことができる並び状態が無
くなるとステップS2に移り、次に最大の並び状態より
1個少ない、この例では同じ試験結果のものが3個並ん
でいるものを探し、その3個をヘッド17で同時に先ず
取り、更にそれと同一級のもので1個独立しているもの
を探してそれをヘッド17の残りの箇所に取り上げ(S
3)、これを収納トレイに運ぶ。収納トレイに運ぶとス
テップS1に戻って同じことを繰り返すが、ステップS
3において1個並びのものが無くなった場合はそれと同
一級の2個並びのものからその内の1個だけを取り上げ
て収納トレイに運ぶ(S4)。同様にして3個並びのも
のを取り上げた後に、それと同一試験結果のものが1個
並びも、2個並びもない場合は、それと同一級の3個並
びから1個取り上げて収納トレイに搬送する(S5)。
このステップS5において3個並びのものがない場合は
ステップS2でヘッド17に同時に取り上げた3個だけ
を収納トレイに運んでステップS1に戻る。
[0007] When there is no more line-up state that can be carried to the maximum, the process moves to step S2, and next, one less than the maximum line-up state, in this example, three lines with the same test result are lined up. First, three heads 17 are simultaneously picked up, and one of the same grade as that which is independent is searched for and picked up in the rest of the head 17 (S
3), carry this to the storage tray. When carried to the storage tray, the process returns to step S1 and the same operation is repeated, but step S
When the one lined up in 3 is gone, only one of the two lined up of the same grade is picked up and carried to the storage tray (S4). Similarly, after picking up three rows, if there is neither one row nor two rows with the same test result, pick one from the same three rows and convey it to the storage tray. (S5).
If there are no three arranged in this step S5, only three picked up by the head 17 at the same time in step S2 are carried to the storage tray and the process returns to step S1.

【0008】このようにしてステップS2で同一試験結
果の3個並びのものを同時に取り上げるものがなくなる
るとステップS6に移り、同一試験結果の2個並びのも
のを探して、その2個を同時に取り上げ、その後再び同
一試験結果のものについて2個並びのものを探して、取
り上げてこれを収納トレイに運ぶ(S7)。このステッ
プS7において2個並びのものを検出できない場合は、
それと同一試験結果の1個並びのものを探し、これを取
り上げ(S8)、更に同一試験結果の1個並びのものを
探し(S9)、ヘッド17に4個を取り上げた状態で収
納トレイに運ぶ。
In this way, when there is no more picking up the same test result in three rows at the same time in step S2, the process goes to step S6 to search for the same test result in two rows and simultaneously search for those two rows. After picking up, two pieces of the same test result in line are searched again, picked up and carried to the storage tray (S7). If two lines cannot be detected in step S7,
The one with the same test result is searched for and picked up (S8), the one with the same test result is searched (S9), and four heads 17 are picked up and carried to the storage tray. .

【0009】ステップS8で同一試験結果の1個並びの
ものが無い場合は、ヘッドに2個取り上げた状態のまま
収納トレイに運ぶ。又ステップS9においてそれと同一
試験結果の1個並びのものが無い場合は、ヘッドに取り
上げた3個を収納トレイに運ぶ。このようにして2個並
びのものを同時に取り上げることを繰り返し行った後、
次にステップS6で2個並びのものが検出できなくなっ
た場合はステップS10に移って同一試験結果の1個並
びのものを探して取り上げ、次にステップS11で同一
試験結果で1個並びのものを探して取り上げ、更にステ
ップS12、S13で順次同一試験結果の1個並びのも
のをそれぞれ取り上げてヘッド17に4個揃った状態で
収納トレイに運ぶ。しかしスッテプS11で1個並びの
ものが無い場合は、その取り上げた1個だけを収納トレ
イに運び、ステップS12において1個並びのものを検
出できない場合はそれまでに取り上げた2個だけを収納
トレイに運び、ステップS13において1個並びのもの
を検出できない場合はそれまでに取り上げた3個のもの
を収納トレイに運ぶ。このようにしてステップS10に
おいて1個並びのものを検出できない状態でその同一試
験結果の全ての試験済IC素子を分類、収納したことに
なる。他の同一試験結果のものも同様にして収納トレイ
に収納する。
If there is no one having the same test result in step S8, the two heads are picked up and carried to the storage tray. If there is no one having the same test result as that in step S9, the three picked up by the head are carried to the storage tray. In this way, after repeating picking up two pieces at the same time,
Next, in the case where two rows of the same test result cannot be detected in step S6, the process moves to step S10 to search for and pick up one row of the same test result, and then in step S11 one row of the same test result. Are picked up and picked up, and in steps S12 and S13, one line of the same test result is picked up one by one and carried to the storage tray in a state where four heads are aligned. However, if there is no one lined up in step S11, only the one picked up is carried to the storage tray, and if one lined up cannot be detected in step S12, only the two picked up so far are stored in the storage tray. If one lined up item cannot be detected in step S13, the three items picked up to that point are brought to the storage tray. In this way, all the tested IC elements having the same test result are sorted and stored in the state where one lined up cannot be detected in step S10. The other same test results are also stored in the storage tray in the same manner.

【0010】次に、ヘッドは4個同時に運ぶことができ
るが、収納は3個ずつしか受け取ることができない場合
は、つまりヘッドが最大3個しか同時に収納できない場
合は例えば図2に示すような処理をする。即ち先ず同一
試験結果のものが3個並んでいるものを探して、その3
個を同時に取り上げて収納トレイに運び(S1)、この
3個並びのものが無くなったら4個並びのものからその
内の3個並びを同時に取り上げて収納トレイに運ぶ(S
2)。4個並びのものが無くなったら次に2個並びのも
のを検出して2個並びのものを同時に取り上げる(S
3)。更にその後それと同一試験結果のものの1個並び
のものを探し(S4)、あればそれを取り上げて3個取
り上げた状態で収納トレイに運ぶ。ステップS4で1個
並びのものが無い場合は同一試験結果で2個並びのもの
を探し、その内の1個を取り上げて3つのIC素子を同
時に収納トレイに運ぶ。ステップS4で2個並びのもの
が無ければ、それまでにステップS3で取り上げた2個
のIC素子を収納トレイに運ぶ。
Next, when four heads can be carried at the same time but only three can be received at a time, that is, when only a maximum of three heads can be received at the same time, for example, a process as shown in FIG. do. That is, first of all, search for the one in which three of the same test results are lined up, and
Pick up the pieces at the same time and carry them to the storage tray (S1), and when these three rows are lost, pick up three rows out of the four rows at the same time and carry them to the storage tray (S1).
2). When the four-row one is gone, the next two-row one is detected and the two-row one is picked up at the same time (S
3). After that, one line of the same test result is searched for (S4), and if there is one, three are picked up and carried to the storage tray. If there is no one lined up in step S4, a lineup of two lines is searched for by the same test result, one of them is picked up, and three IC elements are simultaneously carried to the storage tray. If there is no two arranged in step S4, the two IC elements picked up in step S3 are carried to the storage tray.

【0011】ステップS3で2個並びのものが検出でき
なくなったらステップS5に移り、図1で示した場合と
同様に1個並びのものを探し、しかも1個ずつなるべく
多く取り上げるようにして収納トレイに運び、それを1
個だけを検出できなくなるまで行う。次に収納側で受け
取ることができる数が2個の場合について、或いはヘッ
ドが同時に取り上げることができる数が2個の場合を図
3で説明する。この場合、先ず同一試験結果で2個並ん
でいるものを検出して、これを同時にそれを取り上げて
収納トレイに運ぶ(S1)。この2個同時に取り上げる
ものが無くなると、4個並びのものを探してその内の2
個を同時に取り上げて収納トレイに運ぶ(S2)。この
4個並びの場合は、その左からの2個或いは右からの2
個を同時に取り上げる。この4個並びのものも検出でき
なくなると、次に3個並びのものを探してその内2個を
同時に取り上げて収納トレイに運ぶ(S3)。3個並び
のものが検出できなくなると1個並びのものを探し(S
4)、更に1個並びのものを探して、有れば2個を収納
トレイに運び収納する(S5)。ステップS5において
1個並びのものが検出されなければそれまでに取り上げ
た1個のみを収納トレイに運ぶ。又ステップS4におい
て1個並びのものが無くなった時は、その同一試験結果
に対する収納は終わりとなる。
When it is not possible to detect the two-row-arranged ones in step S3, the process proceeds to step S5, and the one-row-arranged ones are searched for as in the case shown in FIG. Carry it to 1
Repeat until only one cannot be detected. Next, a case in which the number that can be received on the storage side is two, or a case in which the number that the head can simultaneously pick up is two will be described with reference to FIG. In this case, first, two lined up objects are detected by the same test result, and they are picked up at the same time and carried to the storage tray (S1). When there are no more items to pick up at the same time, search for the one with 4 lines
The pieces are picked up at the same time and carried to the storage tray (S2). In the case of four rows, two from the left or two from the right.
Pick up individual pieces at the same time. When the four-lined one cannot be detected, next, the three-lined one is searched and two of them are picked up at the same time and carried to the storage tray (S3). If 3 rows are not detected, search for 1 row (S
4) Further, one in line is searched for, and if there is one, two are carried to the storage tray and stored (S5). If one lined up is not detected in step S5, only the one picked up to that time is carried to the storage tray. Further, when there is no one lined up in step S4, the storage for the same test result ends.

【0012】図2のステップS1、S2、又図3のステ
ップS1、S2及びS3の順番はどうでもよく、要は運
ぶことができる最大のものを同時に取り上げて収納する
ことを行う処理である。上述においては、運ぶヘッドと
して4個同時に取り上げることができるものを使用した
が、その同時に取り上げる個数は4に限らない。又その
配列方向が一致しているヘッドとして試験トレイ上のX
方向の配列の複数の素子と同一状態のものを取り上げた
が、Y方向のもの或いはXYの方向に並んだものを同時
に、例えば2×2の4個のIC素子を同時に取り上げる
ヘッドでも良い。
The order of steps S1 and S2 in FIG. 2 and steps S1, S2 and S3 in FIG. 3 does not matter, and the point is to take up and store the largest items that can be carried at the same time. In the above description, a carrying head that can pick up four at a time was used, but the number of picking up at the same time is not limited to four. Also, as a head whose arrangement direction is the same, X on the test tray is used.
Although a head having the same state as a plurality of elements arranged in the same direction has been taken up, a head picking up one in the Y direction or one arranged in the XY direction at the same time, for example, 4 × 2 × 2 IC elements may be used.

【0013】[0013]

【発明の効果】以上述べたように、この発明によれば複
数の試験済IC素子を同時に取り上げることができるも
のから運び、そのため従来においては試験済ICの取り
上げは1個ずつ行っていた場合と比べて、その取り上げ
に要する時間がすこぶる短くなる。4個並びの同一試験
結果の素子の検出などは、ソフトウエアー上で行うため
に著しく迅速に行うことができ、つまりIC素子をヘッ
ドに取り上げる時間と比べれば著しく短い。このため従
来の方法と比較して分類、収納速度を短時間で行うこと
ができる。
As described above, according to the present invention, a plurality of tested IC elements can be picked up at the same time. Therefore, in the conventional case, the tested ICs are picked up one by one. In comparison, the time it takes to take up is much shorter. The detection of elements having the same test result in a row of four can be performed remarkably quickly because it is performed by software, that is, it is remarkably short as compared with the time for picking up the IC elements by the head. Therefore, the sorting and storing speed can be shortened as compared with the conventional method.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の実施例を示す流れ図。FIG. 1 is a flow chart showing an embodiment of the present invention.

【図2】他の実施例を示す流れ図。FIG. 2 is a flowchart showing another embodiment.

【図3】更に他の例を示す流れ図。FIG. 3 is a flowchart showing still another example.

【図4】試験済IC素子の分類、分配の様子と従来の分
類、分配を説明する図。
FIG. 4 is a diagram for explaining classification and distribution of tested IC elements and conventional classification and distribution.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 試験トレイ上にマトリックス状に配列さ
れた試験済IC素子を、これと同一配列を保持した状態
で複数個同時に取り上げることができるヘッドにより取
り上げ、同一試験結果別に収納トレイに分類、収納する
方法において、 収納トレイに同時に移動可能な最大の配列状態に近いI
C素子から順に収納トレイに移動することを特徴とする
試験済IC素子分類方法。
1. A plurality of tested IC elements arranged in a matrix on a test tray are picked up by a head capable of picking up a plurality of IC elements at the same time while maintaining the same arrangement, and are classified into storage trays according to the same test result. In the storage method, I is close to the maximum arrangement that can be moved to the storage tray at the same time.
A tested IC element classification method, characterized in that the C elements are sequentially moved to a storage tray.
JP4294967A 1992-11-04 1992-11-04 Tested IC element classification method Expired - Fee Related JP3014015B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4294967A JP3014015B2 (en) 1992-11-04 1992-11-04 Tested IC element classification method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4294967A JP3014015B2 (en) 1992-11-04 1992-11-04 Tested IC element classification method

Publications (2)

Publication Number Publication Date
JPH06148273A true JPH06148273A (en) 1994-05-27
JP3014015B2 JP3014015B2 (en) 2000-02-28

Family

ID=17814628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4294967A Expired - Fee Related JP3014015B2 (en) 1992-11-04 1992-11-04 Tested IC element classification method

Country Status (1)

Country Link
JP (1) JP3014015B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6078188A (en) * 1995-09-04 2000-06-20 Advantest Corporation Semiconductor device transporting and handling apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6078188A (en) * 1995-09-04 2000-06-20 Advantest Corporation Semiconductor device transporting and handling apparatus

Also Published As

Publication number Publication date
JP3014015B2 (en) 2000-02-28

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