JP3014015B2 - Tested IC element classification method - Google Patents

Tested IC element classification method

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Publication number
JP3014015B2
JP3014015B2 JP4294967A JP29496792A JP3014015B2 JP 3014015 B2 JP3014015 B2 JP 3014015B2 JP 4294967 A JP4294967 A JP 4294967A JP 29496792 A JP29496792 A JP 29496792A JP 3014015 B2 JP3014015 B2 JP 3014015B2
Authority
JP
Japan
Prior art keywords
elements
picked
storage tray
same
tested
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP4294967A
Other languages
Japanese (ja)
Other versions
JPH06148273A (en
Inventor
邦昭 坂内
稔 馬場
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to JP4294967A priority Critical patent/JP3014015B2/en
Publication of JPH06148273A publication Critical patent/JPH06148273A/en
Application granted granted Critical
Publication of JP3014015B2 publication Critical patent/JP3014015B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Testing Of Individual Semiconductor Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】この発明は水平搬送装置を用いて
IC素子を試験位置に移動し、その試験結果に応じて試
験済IC素子が乗せられたトレイから収納トレイに分
類、収納する試験済IC素子分類方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention uses a horizontal transfer device to move an IC element to a test position, and sorts the tray on which the tested IC element is loaded into a storage tray according to the test result, and stores the IC element in a storage tray. The present invention relates to an IC element classification method.

【0002】[0002]

【従来の技術】図4に示すように、試験トレイ11には
試験済IC素子12がマトリックス状に配列されてい
る。図においてはX方向に10個のIC素子が、Y方向
に4個のIC素子が並べられ、全体で40個の試験済I
C素子12がトレイ11上に乗せられている状態を示
し、試験済IC素子12上に付けた1乃至4の番号は試
験結果を示しており、即ち試験結果が1級のものには1
を、2級のものには2を付けて表示してある。この試験
済IC素子12をその試験結果に応じて個別の収納トレ
イ13乃至16に収納する。このため、そのIC素子を
取り上げて移動させる機構のヘッド17は、その試験ト
レイ11上のIC素子の配列状態の一部のIC素子を同
時に取り上げる、この例ではX方向において並べられた
4個のIC素子を同時に取り上げることができるヘッド
が用いられている。
2. Description of the Related Art As shown in FIG. 4, a test tray 11 has tested IC elements 12 arranged in a matrix. In the figure, ten IC elements are arranged in the X direction and four IC elements are arranged in the Y direction.
The C element 12 indicates a state in which the C element 12 is placed on the tray 11, and the numbers 1 to 4 attached to the tested IC elements 12 indicate test results.
, And those of the second grade are indicated by adding 2. The tested IC elements 12 are stored in individual storage trays 13 to 16 according to the test results. For this reason, the head 17 of the mechanism for picking up and moving the IC element picks up a part of the IC elements in the arrangement state of the IC elements on the test tray 11 at the same time. In this example, four heads arranged in the X direction are arranged. A head capable of simultaneously picking up IC elements is used.

【0003】従来において、このようなヘッドを用いて
試験済IC素子を収納トレイに分類、収納する場合、そ
の試験トレイから同一級のIC素子を決められた配列順
番に取って4つの同一級のIC素子を取り上げると、こ
れと対応する収納トレイに収納している。このため従来
においては、試験トレイ11上におけるIC素子の配列
を決まった順に、同一級のものを探し、例えばX方向の
0番目からY方向に探して、次にX方向の1番目からY
方向を探していく。例えば2級のIC素子を取り出す場
合は、図4Bに示すようにヘッド17の一番左に(0、
1)、つまりX=0、Y=1の位置のIC素子を取り、
次に(1、0)の位置のIC素子を取り、次に(1、
2)の位置のIC素子を取り、更に(1、3)位置のI
C素子を取って、その状態でヘッド17を収納トレイ1
4上に移動して2級のIC素子の4個を同時にトレイ1
4に収納する。このようにして1級のIC素子は収納ト
レイ13に、3級のIC素子は収納トレイ15に、4級
のIC素子は収納トレイ16にと言うように分類して収
納していた。
Conventionally, when such tested heads are used to classify and store tested IC elements in storage trays, the same class of IC elements are taken out of the test tray in a predetermined arrangement order and four same-class IC elements are taken out. When the IC element is picked up, it is stored in the corresponding storage tray. Y Thus conventionally, the order of fixed arrays of IC elements on the test tray 11, looking for those same class, for example, looking into 0 th or et Y direction of the X-direction, then from the first X-direction
Looking for directions. For example, when taking out a second-class IC element, as shown in FIG.
1) That is, take the IC element at the position of X = 0, Y = 1,
Next, the IC element at the position (1, 0) is taken, and then (1, 0).
The IC element at the position 2) is taken, and the I element at the position (1, 3) is
After taking the C element, the head 17 is stored in the storage tray 1 in that state.
4 and move four of the second-class IC elements to tray 1 at the same time.
Store in 4. Thus, the first-class IC elements are stored in the storage tray 13, the third-class IC elements are stored in the storage tray 15, and the fourth-class IC elements are stored in the storage tray 16.

【0004】[0004]

【発明が解決しようとする課題】以上述べたように、従
来においては同一試験結果、即ち同一級の試験済IC素
子を試験トレイ上の予め決まった順に順次探して1個ず
つ試験済IC素子を取り、ヘッド17に、この例では4
個取ると収納トレイに移動して収納していた。IC素子
を取り上げるための時間が比較的長いため、全体として
分類、収納にかかる時間が比較的長かった。
As described above, in the prior art, the same test result, that is, the tested IC elements of the same class are sequentially searched in a predetermined order on the test tray, and the tested IC elements are found one by one. And the head 17 has 4
When they were picked, they were moved to the storage tray and stored. Since the time for picking up the IC element is relatively long, the time required for classification and storage as a whole is relatively long.

【0005】[0005]

【課題を解決するための手段】この発明によれば、収納
トレイに同時に収納可能な数に最も近い数の同一試験結
果が連続して配列されているIC素子を優先して、収納
トレイに同時に収納することができる最大の数に到達で
きるまでヘッドに取上げ、取上げられたIC素子を、同
一試験結果別に収納トレイに分類、収納する。
According to the present invention, the same number of the same test results as the number that can be simultaneously stored in the storage tray are provided.
Storing, giving priority to IC elements in which fruits are continuously arranged
Reach the maximum number that can be stored simultaneously in the tray
Pick up the head until it is
Classify and store in a storage tray for each test result.

【0006】[0006]

【実施例】図1に同時に移動可能のIC素子の数Xが
4、つまりヘッド17で同時に試験済IC素子を取り上
げることができ、かつ収納トレイに収納できる数が4の
場合で、この例では従来の図4に示した、X方向に4個
並んだIC素子を同時に取り上げることができるヘッド
を使用した場合を例として説明する。先ずX方向に4個
並んだIC素子12を探す。例えば図4に示した例にお
いては、試験結果が2級のIC素子についてはトレイ1
1上の位置が(6、1)、(7、1)、(8、1)、
(9、1)の箇所を探し、この同一試験結果が4個並ん
だ4つのIC素子を、例えば真空的差により同時に取り
上げて、これを収納トレイに収納する。その収納したの
ち再びこのステップ1に戻って、このヘッド17で同時
に移動することができる最大のIC素子が並んだ状態の
ものを取り出して運ぶことを繰り返す。
FIG. 1 shows a case where the number X of simultaneously movable IC elements is 4, that is, the number of tested IC elements that can be picked up simultaneously by the head 17 and the number that can be stored in the storage tray is 4. In this example, FIG. An example in which a conventional head shown in FIG. 4 which can pick up four IC elements arranged in the X direction at the same time is used will be described. First, four IC elements 12 arranged in the X direction are searched. For example, in the example shown in FIG.
The position on 1 is (6, 1), (7, 1), (8, 1),
(9, 1) is searched, and four IC elements in which the same test result is arranged four are picked up at the same time due to, for example, a vacuum difference and stored in a storage tray. After the storage, the process returns to step 1 again, and the process of taking out and carrying the largest IC element that can be moved simultaneously by the head 17 is repeated.

【0007】この最大に運ぶことができる並び状態が無
くなるとステップS2に移り、次に最大の並び状態より
1個少ない、この例では同じ試験結果のものが3個並ん
でいるものを探し、その3個をヘッド17で同時に先ず
取り、更にそれと同一級のもので1個独立しているもの
を探してそれをヘッド17の残りの箇所に取り上げ(S
3)、これを収納トレイに運ぶ。収納トレイに運ぶとス
テップS1に戻って同じことを繰り返すが、ステップS
3において1個並びのものが無くなった場合はそれと同
一級の2個並びのものからその内の1個だけを取り上げ
て収納トレイに運ぶ(S4)。同様にして3個並びのも
のを取り上げた後に、それと同一試験結果のものが1個
並びも、2個並びもない場合は、それと同一級の3個並
びから1個取り上げて収納トレイに搬送する(S5)。
このステップS5において3個並びのものがない場合は
ステップS2でヘッド17に同時に取り上げた3個だけ
を収納トレイに運んでステップS1に戻る。
[0007] When there is no more arrangement state that can be carried to the maximum, the process proceeds to step S2. Next, one less than the maximum arrangement state, that is, in this example, three pieces having the same test result are arranged. First, three heads are simultaneously taken by the head 17, and one of the same grade as that of the head 17 is searched for and taken up in the rest of the head 17 (S
3), carry this to the storage tray. When the item is carried to the storage tray, the process returns to step S1 and repeats the same operation.
In the case where the one-row arrangement is lost in 3, only one of the two-row arrangements of the same grade is picked up and transported to the storage tray (S 4). In the same way, after picking up three pieces, if there is no one or two pieces with the same test result, one piece is taken out of three pieces of the same grade and transported to the storage tray. (S5).
If there is no three in the step S5, only the three picked up simultaneously by the head 17 in the step S2 are carried to the storage tray and the process returns to the step S1.

【0008】このようにしてステップS2で同一試験結
果の3個並びのものを同時に取り上げるものがなくなる
るとステップS6に移り、同一試験結果の2個並びのも
のを探して、その2個を同時に取り上げ、その後再び同
一試験結果のものについて2個並びのものを探して、取
り上げてこれを収納トレイに運ぶ(S7)。このステッ
プS7において2個並びのものを検出できない場合は、
それと同一試験結果の1個並びのものを探し、これを取
り上げ(S8)、更に同一試験結果の1個並びのものを
探し(S9)、ヘッド17に4個を取り上げた状態で収
納トレイに運ぶ。
In this way, if there is no longer any one that picks up the same three test results in step S2, the process proceeds to step S6, where the two same test results are searched for, and the two are simultaneously checked. Then, two pieces of the same test result are searched again, picked up and transported to the storage tray (S7). If it is not possible to detect a two-row arrangement in step S7,
One of the same test results is searched for and picked up (S8), and one of the same test results is searched for (S9), and four heads 17 are picked up and transported to the storage tray. .

【0009】ステップS8で同一試験結果の1個並びの
ものが無い場合は、ヘッドに2個取り上げた状態のまま
収納トレイに運ぶ。又ステップS9においてそれと同一
試験結果の1個並びのものが無い場合は、ヘッドに取り
上げた3個を収納トレイに運ぶ。このようにして2個並
びのものを同時に取り上げることを繰り返し行った後、
次にステップS6で2個並びのものが検出できなくなっ
た場合はステップS10に移って同一試験結果の1個並
びのものを探して取り上げ、次にステップS11で同一
試験結果で1個並びのものを探して取り上げ、更にステ
ップS12、S13で順次同一試験結果の1個並びのも
のをそれぞれ取り上げてヘッド17に4個揃った状態で
収納トレイに運ぶ。しかしスッテプS11で1個並びの
ものが無い場合は、その取り上げた1個だけを収納トレ
イに運び、ステップS12において1個並びのものを検
出できない場合はそれまでに取り上げた2個だけを収納
トレイに運び、ステップS13において1個並びのもの
を検出できない場合はそれまでに取り上げた3個のもの
を収納トレイに運ぶ。このようにしてステップS10に
おいて1個並びのものを検出できない状態でその同一試
験結果の全ての試験済IC素子を分類、収納したことに
なる。他の同一試験結果のものも同様にして収納トレイ
に収納する。
If there is no single test result of the same test result in step S8, it is transported to the storage tray with two heads picked up. If there is no one with the same test result in step S9, the three picked up by the head are transported to the storage tray. After repeating the process of picking up two items at the same time,
Next, if it is determined in step S6 that no two test pieces can be detected, the process proceeds to step S10 to search for and pick up one test result of the same test result, and then in step S11 one test result of the same test result. Then, in steps S12 and S13, one row of the same test result is sequentially picked up and transported to the storage tray with four heads 17 aligned. However, in step S11, if there is no one-lined item, only the picked-up item is carried to the storage tray. In step S13, if one line is not detected, the three items picked up to that point are transferred to the storage tray. In this way, all the tested IC elements having the same test result are classified and stored in a state where one array is not detected in step S10. Other results of the same test are stored in the storage tray in the same manner.

【0010】次に、ヘッドは4個同時に運ぶことができ
るが、収納は3個ずつしか受け取ることができない場合
は、つまりヘッドが最大3個しか同時に収納できない場
合は例えば図2に示すような処理をする。即ち先ず同一
試験結果のものが3個並んでいるものを探して、その3
個を同時に取り上げて収納トレイに運び(S1)、この
3個並びのものが無くなったら4個並びのものからその
内の3個並びを同時に取り上げて収納トレイに運ぶ(S
2)。4個並びのものが無くなったら次に2個並びのも
のを検出して2個並びのものを同時に取り上げる(S
3)。更にその後それと同一試験結果のものの1個並び
のものを探し(S4)、あればそれを取り上げて3個取
り上げた状態で収納トレイに運ぶ。ステップS4で1個
並びのものが無い場合は同一試験結果で2個並びのもの
を探し、その内の1個を取り上げて3つのIC素子を同
時に収納トレイに運ぶ。ステップS4で2個並びのもの
が無ければ、それまでにステップS3で取り上げた2個
のIC素子を収納トレイに運ぶ。
Next, when four heads can be carried at the same time, but only three heads can be received at a time, that is, when only three heads can be stored at the same time, a process such as that shown in FIG. do. That is, first, three pieces of the same test result are searched, and the three
Simultaneously pick up the pieces and carry them to the storage tray (S1). When the three-rows are no longer present, pick up three of the four-rows at the same time and carry them to the storage tray (S1).
2). When there are no more four-row objects, the next two-row objects are detected and picked up at the same time (S
3). Further, after that, one of the same test results is searched for (S4), and if there is one, it is picked up and transported to the storage tray with three picked up. If there is no one arranged in step S4, two arranged ones are searched by the same test result, one of them is picked up, and three IC elements are simultaneously transferred to the storage tray. If no two IC elements are aligned in step S4, the two IC elements picked up in step S3 are transported to the storage tray.

【0011】ステップS3で2個並びのものが検出でき
なくなったらステップS5に移り、図1で示した場合と
同様に1個並びのものを探し、しかも1個ずつなるべく
多く取り上げるようにして収納トレイに運び、それを1
個だけを検出できなくなるまで行う。次に収納側で受け
取ることができる数が2個の場合について、或いはヘッ
ドが同時に取り上げることができる数が2個の場合を図
3で説明する。この場合、先ず同一試験結果で2個並ん
でいるものを検出して、これを同時にそれを取り上げて
収納トレイに運ぶ(S1)。この2個同時に取り上げる
ものが無くなると、4個並びのものを探してその内の2
個を同時に取り上げて収納トレイに運ぶ(S2)。この
4個並びの場合は、その左からの2個或いは右からの2
個を同時に取り上げる。この4個並びのものも検出でき
なくなると、次に3個並びのものを探してその内2個を
同時に取り上げて収納トレイに運ぶ(S3)。3個並び
のものが検出できなくなると1個並びのものを探し(S
4)、更に1個並びのものを探して、有れば2個を収納
トレイに運び収納する(S5)。ステップS5において
1個並びのものが検出されなければそれまでに取り上げ
た1個のみを収納トレイに運ぶ。又ステップS4におい
て1個並びのものが無くなった時は、その同一試験結果
に対する収納は終わりとなる。
If it is determined in step S3 that no two-rows can be detected, the process proceeds to step S5, where the one-rows are searched for as in the case shown in FIG. Carry it to one
Repeat until no more pieces can be detected. Next, a case where the number that can be received on the storage side is two or a case where the head can pick up two at the same time will be described with reference to FIG. In this case, first, two identical test results are detected, and these are simultaneously picked up and transported to the storage tray (S1). When there are no more items to be picked up at the same time, search for 4
The individual is picked up and carried to the storage tray at the same time (S2). In the case of the arrangement of four, two from the left or two from the right
Pick up the individuals at the same time. If the four-row array cannot be detected, the three-row array is searched, and two of the three rows are simultaneously picked up and transported to the storage tray (S3). If the three-row arrangement cannot be detected, the one-row arrangement is searched (S
4) Further, one is arranged, and if there is one, two are carried to the storage tray and stored (S5). If no one is detected in step S5, only one picked up to that point is transported to the storage tray. When there is no longer one in step S4, the storage for the same test result ends.

【0012】上述においては、運ぶヘッドとして4個同
時に取り上げることができるものを使用したが、その同
時に取り上げる個数は4に限らない。又その配列方向が
一致しているヘッドとして試験トレイ上のX方向の配列
の複数の素子と同一状態のものを取り上げたが、Y方向
のもの或いはXYの方向に並んだものを同時に、例えば
2×2の4個のIC素子を同時に取り上げるヘッドでも
良い。
In the above description, four heads that can be picked up at the same time are used. However, the number of picked up heads is not limited to four. In addition, a head having the same arrangement direction as a plurality of elements arranged in the X direction on the test tray is taken as a head having the same arrangement direction. A head that simultaneously picks up four × 2 IC elements may be used.

【0013】[0013]

【発明の効果】以上述べたように、この発明によれば複
数の試験済IC素子を同時に取り上げることができるも
のから運び、そのため従来においては試験済ICの取り
上げは1個ずつ行っていた場合と比べて、その取り上げ
に要する時間がすこぶる短くなる。4個並びの同一試験
結果の素子の検出などは、ソフトウエアー上で行うため
に著しく迅速に行うことができ、つまりIC素子をヘッ
ドに取り上げる時間と比べれば著しく短い。このため従
来の方法と比較して分類、収納速度を短時間で行うこと
ができる。
As described above, according to the present invention, a plurality of tested IC elements can be picked up at the same time, so that the tested ICs are conventionally picked up one by one. In comparison, the time required to pick it up is significantly shorter. The detection of the elements having the same test result in a row of four can be performed very quickly because the processing is performed on software, that is, the time required for picking up the IC elements to the head is extremely short. For this reason, classification and storage speed can be performed in a shorter time as compared with the conventional method.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の実施例を示す流れ図。FIG. 1 is a flowchart showing an embodiment of the present invention.

【図2】他の実施例を示す流れ図。FIG. 2 is a flowchart showing another embodiment.

【図3】更に他の例を示す流れ図。FIG. 3 is a flowchart showing still another example.

【図4】試験済IC素子の分類、分配の様子と従来の分
類、分配を説明する図。
FIG. 4 is a view for explaining classification and distribution of tested IC elements and conventional classification and distribution.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 試験トレイ上にマトリックス状に配列さ
れた試験済IC素子を、収納トレイに同時に収納するこ
とができる最大の数nに到達できるまで、同時に複数個
又は1個ずつヘッドで取上げ、取上げられたIC素子
を、同一試験結果別に収納トレイに分類、収納する方法
において、上記nに近い最大の数の連続して配列された同一試験結
果のIC素子を、優先して上記ヘッドで取り上げる こと
を特徴とする試験済IC素子分類方法。
1. A test tray in which tested IC elements arranged in a matrix on a test tray are simultaneously stored in a storage tray.
Until the maximum number n that can be reached is reached.
Or picked up one by one with the head and picked up IC elements
In the storage tray according to the same test result and storing them in the storage tray , the same number of the same test results arranged in succession close to the above n
A method for classifying tested IC elements, wherein the resulting IC elements are preferentially picked up by the head .
JP4294967A 1992-11-04 1992-11-04 Tested IC element classification method Expired - Fee Related JP3014015B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4294967A JP3014015B2 (en) 1992-11-04 1992-11-04 Tested IC element classification method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4294967A JP3014015B2 (en) 1992-11-04 1992-11-04 Tested IC element classification method

Publications (2)

Publication Number Publication Date
JPH06148273A JPH06148273A (en) 1994-05-27
JP3014015B2 true JP3014015B2 (en) 2000-02-28

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Country Link
JP (1) JP3014015B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6078188A (en) * 1995-09-04 2000-06-20 Advantest Corporation Semiconductor device transporting and handling apparatus

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JPH06148273A (en) 1994-05-27

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