JPH06148048A - Pressure tester - Google Patents

Abstract

PURPOSE:To simply obtain good positioning accuracy between a small object to be applied with load and a load-applying probe. CONSTITUTION:A load-applying probe 23 is removably attached to a lower face 22a of a block 22 by using vacuum suction for example, and the attaching is performed so that a load-applying probe moving axial line is always constant. A laser light source 27 is attached to an upper face 22b of the block 22 with the load-applying probe moving axial line and an optic axis aligned with each other. With the load-applying probe 23 removed, visible laser emitted from the laser light source 27 is applied to a load-applied plane 17a through a through hole of the block 22, and after a small object 31 to be applied with load is positioned at this laser spot position, the load-applying probe 23 is attached.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pressure tester used for pressure test of minute weighted objects.

[0002]

2. Description of the Related Art A pressurizing tester conventionally used for performing a so-called pressurizing test such as measurement of load-displacement characteristics is such that a load is placed on a load plane from above. The test is performed by pressing the probe against the weighted plane, and the alignment of the weighted object and the tip of the weighted probe was performed by observing them and adjusting the XY stage to which the weighted plane is attached. .

On the other hand, there has been conventionally proposed a pressurizing tester capable of aligning a weighted probe and a weighted probe without directly aligning them, and the configuration thereof is shown in FIG.
Will be described with reference to. An XY stage 12 is installed on the base 11, and a load cell installation plate 13 is installed on the XY stage 12.
Will be installed. The load cell 1 is mounted on the load cell installation plate 13.
Although not shown, three circular recesses 15 for accommodating 4 are formed, and the load cells 14 are accommodated in these circular recesses 15 with their upper portions protruding from the plate surface of the load cell installation plate 13. The weight plate 16 disposed on the load cell installation plate 13 is supported by these load cells 14 at three points. A sample table 17 is installed on the weight plate 16, and the upper surface thereof serves as a weight plane 17a on which an object to be weighted is placed.

On the other hand, a support base 18 is installed on the other half of the base 11, and is movable on the support base 18 via a mounting plate 19 in the Z-axis direction, that is, in the direction orthogonal to the weight plane 17a. The Z stage 21 is attached. The Z stage 21 is driven by a pulse motor 21a, and its moving plate 21
b is movable with high precision. The block 22 is attached to the moving plate 21b, and the weight probe 23 is attached to the lower surface 22a of the block 22 that faces the weight plane 17a of the sample table 17, and the axis of the weight probe 23 is in the Z-axis direction. Three load cells 1 in which the moving axis of the weight probe 23 is housed in the load cell installation plate 13
It is planted so as to pass through the center of the triangle connecting the load points of No. 4. The tip portion 23a of the weight probe 23 has a truncated cone shape.

A laser displacement meter 24 for measuring the amount of movement of the weighted probe 23 due to the driving of the Z stage 21 is fixed to the mounting plate 19 via a support member 25. The laser light emitted from one side surface 24a of the V groove of the laser displacement meter 24 is reflected by the upper surface 22b of the block 22 and is incident on the other side surface 24b of the V groove, and the phase change of this incident light due to the displacement of the block 22 is changed. Displacement of the block 22 using
That is, the amount of movement of the weight probe 23 is measured.

A base 11 near the XY stage 12
A pillar 26 is installed on the pillar 26, and the laser light source 2 is attached to the pillar 26.
7 is attached. The laser light source 27 has its optical axis tilted at a predetermined angle θ with respect to the moving axis of the weighted probe 23,
Moreover, the point where the optical axis thereof intersects with the weighting plane 17a of the sample stage 17 is almost coincident with the intersection of the moving axis of the weighting probe 23 and the weighting plane 17a, and the visible light laser is emitted to irradiate the weighting plane 17a. .

In the pressure tester 30 configured as described above, the weighted object is positioned by positioning the weighted object at the laser spot position formed on the weighted plane 17a by the visible light laser emitted from the laser light source 27. It is possible to perform alignment in the XY directions with the tip portion 23a of the weighted probe 23. FIG. 5 shows the weight 31
The weighted probe 23
When the object to be weighted 31 is a minute spherical body having a diameter d, the laser light source 27 has a distance d from the weighting plane 17a on the moving axis 32 of the weighting probe 23. The mounting position is adjusted so that the optical axis 33 intersects the position.

The output of the laser displacement meter 24 and the output of the load cell 14, which are generated by moving the Z stage 21 and pressing the weighted probe 23 against the weighted object 31 arranged on the weighted plane 17a, are shown in FIG. As shown in FIG. 5, the load-displacement curve indicating the relationship between the load and the displacement is input to the display device 36 via the cables 34 and 35 and displayed on the display screen.

[0009]

As described above, the alignment of the weighted probe and the weighted object in the conventional pressure tester is performed by directly aligning them, or as shown in FIGS. As described above, the weighted plane 17a is obliquely irradiated with the visible light laser provided with the laser light source 27, a laser spot serving as a positioning reference of the weighted object 31 is formed on the weighted plane 17a, and the weighted object is placed at the laser spot position. By positioning 31, the weighted object 31 and the weighted probe 23 are aligned with each other.

However, in the case where the weighted object 31 and the tip portion 23a of the weighted probe 23 are directly aligned, the weighted probe tip portion 23a must be brought very close to the weighted object 31 for alignment. When the weighted object 31 is very small, the weighted object 31 is difficult to see and the alignment becomes difficult. Therefore, for example, as shown by the broken line in FIG. 6, the minute weighted object 31 may deviate from the center of the weighted probe tip portion 23a and may not be accurately positioned.

On the other hand, in the case where the weighted object 31 is positioned at the laser spot position formed on the weighted plane 17a, even if the weighted object 31 is minute, the weighted object 31 can be easily positioned and the weighted probe is preliminarily used. 23 movement axis 3
Since 2 and the optical axis 33 of the laser beam are set in a predetermined relationship, the weighted object 31 and the weighted probe 23 can be accurately aligned. However, in this case, when the size of the weighted object 31, for example, the diameter changes from d to D, the positioning position of the weighted object 31 shifts from the movement axis 32 of the weighted probe 23 by X, as shown in FIG. That is, if the size of the weighted object 31 varies,
There is a problem that positioning cannot be performed with high precision.

The object of the present invention is to eliminate the problems of the prior art,
It is an object of the present invention to provide a pressure tester that can always accurately and easily align the position of the minute weighted object with the weighted probe even if the size of the minute weighted object varies.

[0013]

SUMMARY OF THE INVENTION The present invention provides a pressure tester for testing a minute load object placed on a load plane attached to an XY stage by pressing a load probe against the load plane from above. , Mounting means for detachably mounting the weighted probe to the pressure tester, positioning means for ensuring that the weighted probe moving axis is always constant when mounting the weighted probe to the pressure tester by the mounting means, and pressure test A laser light source that is attached to the machine above the weighted probe and that emits a visible light laser whose optical axis coincides with the axis of movement of the weighted probe and illuminates the weighted plane.

[0014]

According to the present invention having the above-described structure, if the minute weighted object is positioned at the laser spot position formed on the weighted plane, it can be accurately aligned with the weighted probe regardless of its size.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention is shown in FIG. The parts corresponding to those of the conventional pressure tester shown in FIG. 4 are designated by the same reference numerals, and the description thereof will be omitted. In this embodiment, the weighted probe 23 is removably attached to the block 22. This embodiment uses vacuum suction as the mounting means, and the details thereof will be described with reference to FIG. A rectangular trapezoidal weighted probe mounting portion 41 is integrally projectingly provided on a lower surface 22a of the block 22 which faces the weighted flat surface 17a, and an end surface thereof serves as a weighted probe mounting surface 41a. Weighted probe mounting surface 41
A rectangular frame-shaped concave groove 42 is formed in a, and an intake port 43 is formed in a part of the concave groove 42. A through hole 44 having the intake port 43 as one opening is formed in the block 22.
The through hole 44 is formed by bending at a right angle, and the other opening is located on one side surface 22c of the block 22. The intake pipe 45 is attached to the side surface 22c of the block 22 with the through hole 44 and the axis aligned. A vacuum pump (not shown) is connected to the intake pipe 45 via a tube (not shown).

On the other hand, at the rear end of the weighted probe 23, there is mounted a disc portion 46 which is coaxial with the weighted probe 23 and is sized to cover the groove 42 formed in the weighted probe mounting surface 41a of the block 22. To be By operating the vacuum pump, the plate surface of the disk portion 46 is vacuum-sucked by the weighted probe mounting surface 41 a, and the weighted probe 23 is mounted on the block 22. The weighted probe 23 can be easily removed from the block 22 by stopping the vacuum pump.

The mounting position of the weighted probe 23 on the weighted probe mounting surface 41a is always constant. That is, the positioning keys 47 and 48 in the form of square poles are attached to the two adjacent side surfaces of the weighted probe mounting portion 41 so as to be in contact with each other, and the positioning keys 47 and 48 protruding from the weighted probe mounting surface 41a have their weighted probe mounting surfaces 41a. The respective side surfaces that are visible are the abutting surfaces 47a and 48a of the disk portion 46 of the weighted probe 23. By abutting and positioning the peripheral surface of the disk portion 46 against both abutting surfaces 47a and 48a,
The weighted probe 23 is always attached at a fixed position. In this way, the weighted probe 23 is attached to the weighted probe mounting surface 41a.
By mounting the load probe 23 on the load cell installation plate 13, the axis of the weight probe 23 is in the Z-axis direction, and the movement axis 32 of the weight probe 23 due to the movement of the Z stage 21 (see FIG. 1) is always constant. The three load cells 14 are arranged so as to pass through the centers of triangles connecting the respective load points.

The laser light source 27 is positioned on the upper surface 22b of the block 22 so that the weighted probe 23 is located above the weighted probe 23 with the weighted probe 23 attached to the block 22, and the movement axis 32 of the weighted probe 23 and the optical axis 33 coincide with each other. Installed. As shown in FIG. 1, the laser light source 27 is fixed to the block 22 by the two sides of the V groove of the V block 51 attached to the upper surface 22b of the block 22 so that the V-shape faces the upper surface 22b, and the V block. This is performed by sandwiching the peripheral surface of the laser light source 27 with the plate surface of the plate spring 52 arranged so as to cover the upper end of the V-shape of 51.

A through hole 53 which forms an optical path is formed in the block 22 so as to face the emission port 27a of the laser light source 27. The opening of the through hole 53 on the lower surface 22a side of the block 22 is located at the central portion surrounded by the rectangular frame-shaped groove 42 on the weighted probe mounting surface 41a. By removing the weighted probe 23 from the block 22, the visible light laser emitted from the laser light source 27 passes through the through hole 53,
Irradiate the weighted plane 17a. FIG. 3 schematically shows the positional relationship between the visible light laser 54 emitted from the laser light source 27 and the weighted probe 23.

Next, a description will be given of a case where the pressure tester 55 having the above-described structure is used to perform a pressure test on the minute load-bearing object 31 such as a minute spherical contact used in a bead connector. Pressure tester 55 to weight probe 2
In the state where 3 is removed, the minute weighted object 31 is attached to the weighting plane 17a.
Place on top. The power of the laser light source 27 is turned on, and the weighted plane 17a is irradiated with the visible light laser. At the laser spot position formed by the visible light laser on the weighted plane 17a, XY
By moving the stage 12, the minute weighted object 31
To position. At this time, if the beam diameter of the visible light laser is narrowed to the same extent as the size of the minute weighted object 31 and positioning is performed so that the outer shape of the minute weighted object 31 is exactly within the laser spot, positioning is simple and highly accurate. It can be performed.

Next, the vacuum pump is operated to move the weighted probe 23 to the positioning key 47, on the peripheral surface of the disk portion 46 thereof.
The weighted probe mounting surface 41a is vacuum-sucked and mounted on the weighted probe mounting surface 41a in a state of being positioned by being pressed against both butting surfaces 47a and 48a of 48. Then, by moving the Z stage 21, the weighted probe 23 is brought closer to the minute weighted object 31. The movement axis 32 of the weighted probe 23 and the laser light source 2
7 is aligned with the optical axis 33, the small weighted object 3
The center of No. 1 is pressed by the tip portion 23a of the weighted probe 23, and the required pressurizing test is performed accurately.

In the embodiment shown in FIGS. 1 and 2, the vacuum probe is used as a means for detachably attaching the weight probe 23 to the block 22, but the present invention is not limited to this, and the disk portion 46 of the weight probe 23 is not limited to this. The block 22 and the block 22 may be formed of, for example, a magnet, and may be attached by being attracted by a magnetic force.

[0023]

As described above, according to the present invention, the weight probe can be detached from the pressure tester, and when mounting the probe, the weight probe can be positioned so that the axis of movement of the weight probe is always constant. A laser light source that emits a visible light laser that irradiates a plane is attached to the upper side of the weighted probe with its moving axis aligned with the optical axis.

Therefore, if the weighted object is positioned at the laser spot position formed on the weighted plane, the weighted probe and the weighted object can be aligned with each other. Positioning with the weighted probe can be performed, and even if the size of the minute weighted object varies, the minute weighted object is always positioned on the axis of movement of the weighted probe. It is possible to always easily obtain good alignment accuracy of.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of a pressure tester according to the present invention.

FIG. 2 is a diagram for explaining details of main parts of FIG.

FIG. 3 is a diagram for explaining the positional relationship between a visible light laser and a weighted probe in one embodiment of the pressure tester according to the present invention.

FIG. 4 is a perspective view showing an example of a conventional pressure tester.

5A and 5B are views for explaining a positioning state of an object to be weighted in the conventional pressure tester shown in FIG.

FIG. 6 is a diagram for explaining a positioning state of a weighted object in another example of the conventional pressure tester.

FIG. 7 is a diagram for explaining a positioning state due to variations in the size of the weighted object in the conventional pressure tester shown in FIG.

[Explanation of symbols]

 12 XY stage 17a Weighted plane 23 Weighted probe 27 Laser light source 31 Micro weighted object

Claims (1)

[Claims] 1. A pressure tester for testing a micro object to be weighted arranged on a weighting plane attached to an XY stage by pressing a weighting probe against the weighting plane from above to test the weighting probe. Attaching means for detachably attaching to the pressure tester, positioning means for keeping the weight probe moving axis constant when attaching the weight probe to the pressure tester by the attaching means, and the pressure tester And a laser light source which is mounted on the upper side of the weighted probe and has an optical axis coincident with the axis of movement of the weighted probe and emits a visible light laser that illuminates the weighted plane. Machine.