JPH06143125A - Correcting jig for double face polishing machine - Google Patents

Abstract

PURPOSE:To facilitate handling and prevent the rolling-in for a hand into a meshed part between an internal gear and a sun gea, as for a correcting jig for correcting each degree of flatness of the upper and lower surface plates used for a double face polishing machine. CONSTITUTION:A correcting jig for double face polishing machine is constituted so as to rotate and revolve through the meshing with a sun gear 7 and an internal gear 8 between an upper surface plate 5 and a lower surface plate 6 which revolve on the same axis line and corrects each degree of flatness of the upper and lower surface plates, and a projection part 4 covering the meshed part 9 between the sun gear and the internal gear is formed on the outer periphery of the correcting jig 1. Since the meshed part 9 is covered, the rolling-in can be prevented, and by using the projection part 4 as handle in handling, workability in installation can be improved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flatness correcting jig for upper and lower surface plates used in a double side polishing machine for semiconductor materials and the like.

[0002]

2. Description of the Related Art In recent years, with respect to glass, disks, semiconductor wafers and the like that require high processing accuracy, a planet carrier for holding a workpiece is sandwiched between upper and lower surface plates, and this carrier is 2. Description of the Related Art A double-sided polishing machine that meshes with an internal gear and a sun gear and rotates or revolves to polish a workpiece has come to be widely used.

When polishing is carried out by such a polishing machine, the upper and lower surface plates are also worn and the flatness is lowered. Therefore, it is necessary to correct this. In that case, a conventional correction jig as shown in FIG.
I was using 11. As shown in FIG. 4 (A), this is a gear having a flower-shaped hole 12 in the center, and the carrier is removed after polishing or the like so that the sun gear 17 and the internal gear 18 can be engaged therewith. Install them as a set (see Fig. B), rotate and revolve them, and set the upper and lower surface plates 15,1
It corrects the flatness of 6.

[0004]

However, as shown in FIG. 2A, there is a gap between the upper surface plate and the internal gear.
There is a risk that there is a risk of getting your hands caught in the meshing part between the correction jig and the internal gear from this gap when mounting or driving. Further, generally, the correction jig is made of cast iron, and each has about 3 to 5 kg, and there is no handle for handling.
There was also a problem that the workability of transportation and mounting was lacking.

Incidentally, as a technique for preventing the upper surface plate and the internal gear from being caught in the gap in the conventional double-sided polishing machine,
There is one described in JP-A-2-205475. This has a cover installed on the upper surface plate side of the double-sided processing machine so as to cover a gap between the surface plate and the internal gear, and has a mechanism for removing fingers etc. by the cover by rotating the upper surface plate. It is a thing. However, this was related to the safety measures of the polishing machine, not the safety measures when using the correction jig.

[0006]

Means for Solving the Problems The correction jig of the present invention has been made to solve the above problems and is characterized in that it is provided between an upper surface plate and a lower surface plate which rotate on the same axis. so,
It is a correction jig that meshes with the sun gear and internal gear to rotate and revolve, and corrects the flatness of the upper and lower stools. It has been formed.

[0007]

An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows a correction jig 1 of the present invention.
Is a plan view and (B) is a sectional view. As shown in the drawing, it has a gear-like shape with a flower-shaped hole 2 in the center, and has teeth 3 on the outer circumference.
Has a convex portion 4 formed at the center in the thickness direction.

In use, as shown in FIG. 2, between the upper surface plate 5 and the lower surface plate 6 which can rotate on the same axis, the sun gear 7 in the center of the polishing machine and a cylinder arranged concentrically with the sun gear 7 are disposed. The internal gear 8 is mounted so as to mesh with both. At this time, since the convex portion 4 is formed in a brim shape on the entire outer periphery of the correction jig, the convex portion 4 covers the meshing portion 9 located below the convex portion. The width of the convex portion 4 is sufficient as long as it covers the meshing portion when mounted. The correction jig is sandwiched between the upper surface plate 5 and the lower surface plate 6, and the sun gear 7, the internal gear 8 and the lower surface plate 6 are rotated clockwise, and the upper surface plate 5 is rotated counterclockwise. Polishes the upper and lower surface plates while rotating and revolving to correct the flatness.

As described above, since the convex portion which covers the meshing portion of the correction jig is formed, the hand or the like does not directly contact the meshing portion, and the entanglement during driving can be prevented.
Further, since the convex portion can be used as a handle when handling the correction jig, it can be mounted without touching the meshing portion as a matter of course for transportation, and workability can be greatly improved.

[0010]

[Test Example] Using the jig having the above configuration, an attempt was made to actually correct the surface plate. The test conditions are as follows. (Test 1) Width of convex part: 5 mm Thickness of convex part: 5 mm Number of machining: 3000 times (Test 2) Width of convex part: 20 mm Thickness of convex part: 5 mm Number of machining: 2500 times

As a result, in any of the above tests,
There were no accidents involving hands or the like.

[0012]

As described above, according to the correction jig of the present invention, by providing the convex portion which covers the meshing portion with the sun gear or the internal gear, it is possible to prevent accidents involving hands and the like. By using this convex portion as a handle during handling, workability during transportation and mounting can be improved.

[Brief description of drawings]

FIG. 1 shows a correction jig of the present invention, in which (A) is a plan view and (B) is a sectional view.

FIG. 2 is a partial cross-sectional view showing a mounted state of the correction jig of the present invention.

FIG. 3 is a view for explaining a mounting state of a conventional correction jig,
(A) is a plan view and (B) is a sectional view.

[Explanation of symbols]

 1,11 Correction jig 2,12 hole 3 Teeth 4 Convex part 5,15 Upper surface plate 6,16 Lower surface plate 7,17 Sun gear 8,18 Internal gear 9 Interlocking part 10 Clearance

Claims (1)

[Claims] 1. A correction jig for correcting the flatness of the upper and lower surface plates by meshing with a sun gear and an internal gear to rotate and revolve between an upper surface plate and a lower surface plate that rotate on the same axis. A correction jig for a double-sided polishing machine, characterized in that a convex portion is formed on an outer peripheral portion of the correction jig to cover a meshing portion with a sun gear and an internal gear.