JPH0613835A - Chip type piezoelectric resonator - Google Patents

Chip type piezoelectric resonator

Info

Publication number
JPH0613835A
JPH0613835A JP4191569A JP19156992A JPH0613835A JP H0613835 A JPH0613835 A JP H0613835A JP 4191569 A JP4191569 A JP 4191569A JP 19156992 A JP19156992 A JP 19156992A JP H0613835 A JPH0613835 A JP H0613835A
Authority
JP
Japan
Prior art keywords
resonator element
electrodes
electrode
resonator
holding plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4191569A
Other languages
Japanese (ja)
Other versions
JP3079783B2 (en
Inventor
Yasuhiro Tanaka
康廣 田中
Masaya Wajima
正哉 輪島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP04191569A priority Critical patent/JP3079783B2/en
Publication of JPH0613835A publication Critical patent/JPH0613835A/en
Application granted granted Critical
Publication of JP3079783B2 publication Critical patent/JP3079783B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To improve the connecting reliability between a resonator element and an external electrode by forming a lead-out electrode in a belt-shaped range covering the end face of the resonator element through the middle position between the inner surface of a recessed part of a holding plate and the tip of the electrode extending from the other end side of the resonator element. CONSTITUTION:The width W of each of lead-out electrodes 13 and 14 is set larger than the distance W1 covering one of both ends of a resonator element 1 through the inner surfaces of the recessed parts 5a and 6a of the holding plates 5 and 6. At the same time, the width W is set smaller than the distance W2 covering one of both ends of the element 1 through the tips of electrodes 3 and 4 extending from the other end of the element 1. In other words, W1<W<W2 is satisfied. Thus, the width W is set and therefore, the side parts of the areas of both electrode 3 and 4 that are disconnected most easily can be connected by the electrodes 13 and 14. Even if the disconnection 3a occurs at a part near the adhering part of both electrodes 3 and 4, for example, the electrodes 3 and 4 can be surely connected to the external electrodes via the electrode 13 and 24.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はチップ型圧電共振子、特
に薄型電子機器などに使用できる薄型のチップ型圧電共
振子に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chip type piezoelectric resonator, and more particularly to a thin chip type piezoelectric resonator that can be used in thin electronic devices.

【0002】[0002]

【従来の技術】従来、チップ型圧電共振子として図1,
図2に示されるものが知られている。この圧電共振子
は、エネルギー閉じ込め型厚み滑り振動モードの共振子
素子1と、保持板5,6と、封止板7,8とで構成され
ている。共振子素子1は長方形の薄板状圧電セラミック
ス板よりなる圧電基板2を備え、圧電基板2にはその長
手方向に分極処理が施されている。圧電基板2の表面の
一端側から全長の略2/3の領域まで一方の電極3を形
成するとともに、圧電基板2の裏面の他端側から全長の
略2/3の領域まで他方の電極4を形成してある。保持
板5,6はアルミナセラミックスのような高強度材料で
形成されており、圧電基板2と同一厚み,同一長さに形
成されている。保持板5,6は共振子素子1の電極3,
4を形成した両側面に接着され、共振子素子1との対向
面には振動空間を確保するための凹部5a,6aが形成
されている。封止板7,8も保持板5,6と同様な材料
で形成されており、接着一体化された共振子素子1およ
び保持板5,6の上下両面に接着され、内部を密封して
いる。共振子素子1の電極3,4が引き出された端面お
よびこれに隣接する両端部上下面には、上記電極3,4
とそれぞれ導通する外部電極9,10が蒸着等の手段に
よって形成されている。
2. Description of the Related Art Conventionally, as a chip type piezoelectric resonator, as shown in FIG.
The one shown in FIG. 2 is known. This piezoelectric resonator includes an energy trap type thickness shear vibration mode resonator element 1, holding plates 5 and 6, and sealing plates 7 and 8. The resonator element 1 is provided with a piezoelectric substrate 2 made of a rectangular thin piezoelectric ceramic plate, and the piezoelectric substrate 2 is polarized in its longitudinal direction. One electrode 3 is formed from one end side of the front surface of the piezoelectric substrate 2 to a region of approximately ⅔ of the total length, and the other electrode 4 is formed from the other end side of the back surface of the piezoelectric substrate 2 to a region of approximately ⅔ of the total length. Has been formed. The holding plates 5 and 6 are made of a high-strength material such as alumina ceramics, and have the same thickness and the same length as the piezoelectric substrate 2. The holding plates 5 and 6 are electrodes 3 of the resonator element 1.
Concave portions 5a and 6a for securing a vibration space are formed on the opposite surfaces of the resonator element 1 which are bonded to both side surfaces forming the groove 4. The sealing plates 7 and 8 are also made of the same material as that of the holding plates 5 and 6, and are bonded to the upper and lower surfaces of the resonator element 1 and the holding plates 5 and 6 that are bonded and integrated to seal the inside. . The electrodes 3 and 4 of the resonator element 1 are provided on the end face from which the electrodes 3 and 4 are drawn out and on the upper and lower faces of both ends adjacent to the end face.
The external electrodes 9 and 10 which are electrically connected to the respective electrodes are formed by means such as vapor deposition.

【0003】上記チップ型圧電共振子の場合、端面側に
露出している共振子素子1の電極3,4の表面積はその
厚み分しかないので、この電極3,4と外部電極9,1
0との接触面積が非常に小さく、接続が不十分で断線し
やすく、信頼性が低いという問題があった。
In the case of the above chip type piezoelectric resonator, since the surface areas of the electrodes 3 and 4 of the resonator element 1 exposed on the end face side are equal to the thickness thereof, the electrodes 3 and 4 and the external electrodes 9 and 1 are formed.
There is a problem that the contact area with 0 is very small, the connection is insufficient, the wire is easily broken, and the reliability is low.

【0004】そこで、図3,図4のように共振子素子1
と保持板5,6とを接着した段階で、その上面に共振子
素子1の電極3,4と外部電極9,10とを接続するた
めの引出電極11,12を帯状に形成したものが提案さ
れている。この場合には、電極3,4の端面だけでな
く、側面から引出電極11,12を介して外部電極9,
10と導通するので、信頼性を高めることができる。
Therefore, as shown in FIGS. 3 and 4, the resonator element 1
It is proposed that the lead electrodes 11 and 12 for connecting the electrodes 3 and 4 of the resonator element 1 and the external electrodes 9 and 10 are formed in a strip shape on the upper surface of the bonding plate and the holding plates 5 and 6 which are bonded to each other. Has been done. In this case, in addition to the end faces of the electrodes 3 and 4, the external electrodes 9 and
Since it is electrically connected to 10, reliability can be improved.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、上記の
ように引出電極11,12を設けても、電極3,4の接
着部付近に断線3a(図4参照)が発生すると、電極
3,4と外部電極9,10とが確実に導通しないことが
あった。電極3,4の接着部付近に断線3aが発生する
のは、保持板5,6の接着時の応力が電極3,4に加わ
るためであると考えられる。そこで、本発明の目的は、
共振子素子や保持板などの構造を変更せずに、共振子素
子の電極と外部電極との接続信頼性を高めることができ
るチップ型圧電共振子を提供することにある。
However, even if the extraction electrodes 11 and 12 are provided as described above, if the disconnection 3a (see FIG. 4) occurs in the vicinity of the bonded portion of the electrodes 3 and 4, the electrodes 3 and 4 are connected to each other. In some cases, the external electrodes 9 and 10 were not surely conducted. It is considered that the disconnection 3a is generated in the vicinity of the bonded portions of the electrodes 3 and 4 because the stress when the holding plates 5 and 6 are bonded is applied to the electrodes 3 and 4. Therefore, the purpose of the present invention is to
An object of the present invention is to provide a chip-type piezoelectric resonator capable of improving the connection reliability between the electrodes of the resonator element and the external electrodes without changing the structures of the resonator element and the holding plate.

【0006】[0006]

【課題を解決するための手段】上記目的を達成するた
め、本発明は、圧電基板の一側面の一端部側から延びる
電極と他側面の他端部側から延びる電極とが一部で対向
するように形成された共振子素子と、共振子素子の電極
を設けた両側面に接着され、共振子素子との対向面に振
動空間形成用の凹部を設けた保持板と、上記共振子素子
および保持板の上下両面に接着された封止板と、上記封
止板のうち少なくとも共振子素子の端面側に形成され、
共振子素子の電極と導通する外部電極とを備えたチップ
型圧電共振子において、互いに接着された共振子素子と
保持板との両端部の上面および下面の少なくとも1面
に、共振子素子の電極と外部電極とを接続するための引
出電極が帯状に形成され、この引出電極の幅は、共振子
素子の端面から、保持板の凹部内側面と共振子素子の反
対側より延びる電極の先端との中間位置までの範囲に設
定されていることを特徴とする。
In order to achieve the above object, according to the present invention, an electrode extending from one end of one side surface of a piezoelectric substrate and an electrode extending from the other end of the other side surface are partially opposed to each other. A resonator element formed as described above, a holding plate bonded to both side surfaces provided with electrodes of the resonator element, and provided with a recess for forming a vibration space on a surface facing the resonator element, and the resonator element and A sealing plate adhered to both upper and lower surfaces of the holding plate, and formed on at least the end face side of the resonator element of the sealing plate,
In a chip-type piezoelectric resonator including an electrode of a resonator element and an external electrode electrically connected to the resonator element, an electrode of the resonator element is provided on at least one of the upper surface and the lower surface of both ends of the resonator element and the holding plate bonded to each other. The extraction electrode for connecting the external electrode and the external electrode is formed in a strip shape, and the width of the extraction electrode is defined by the end surface of the resonator element and the tip of the electrode extending from the inner surface of the recess of the holding plate and the opposite side of the resonator element. It is characterized in that the range is set to the intermediate position of.

【0007】引出電極を共振子素子の一端から、保持板
の凹部内側面と共振子素子の反対側から延びる電極の先
端との中間位置までの範囲に帯状に形成する、換言する
と、引出電極を断線しやすい箇所を覆うように幅広に形
成することにより、共振子素子の電極の接着部付近に断
線が発生しても、引出電極を介して外部電極へ確実に導
通させることができる。なお、引出電極の幅を共振子素
子の一端から、保持板の凹部内側面と共振子素子の反対
側から延びる電極の先端との中間位置までの範囲にした
理由は、もし保持板の凹部内側面より幅狭であると、電
極の接着部付近に断線が発生した場合に導通が計れなく
なるからであり、一方引出電極を共振子素子の反対側か
ら延びる電極の先端位置まで幅広とすると、共振子素子
の両方の電極が導通してしまうからである。
The extraction electrode is formed in a band shape in a range from one end of the resonator element to an intermediate position between the inner surface of the concave portion of the holding plate and the tip of the electrode extending from the opposite side of the resonator element. In other words, the extraction electrode is formed. By forming a wide portion so as to cover the portion where the wire breakage is likely to occur, even if the wire breakage occurs near the bonded portion of the electrode of the resonator element, it is possible to surely conduct electricity to the external electrode through the extraction electrode. The reason for setting the width of the extraction electrode in the range from one end of the resonator element to the intermediate position between the inner surface of the recess of the holding plate and the tip of the electrode extending from the side opposite to the resonator element is This is because if the width is narrower than the side surface, electrical continuity cannot be measured if a wire breakage occurs near the bonded part of the electrode.On the other hand, if the extraction electrode is widened to the tip position of the electrode extending from the opposite side of the resonator element, resonance will occur. This is because both electrodes of the child element become conductive.

【0008】[0008]

【実施例】図5,図6は本発明にかかるチップ型圧電共
振子の一例を示し、従来例(図1〜図4)と同一部品に
は同一符号を付して説明を省略する。なお、図5,図6
には封止板7,8を省略してある。
FIG. 5 and FIG. 6 show an example of a chip type piezoelectric resonator according to the present invention. The same parts as those of the conventional example (FIGS. 1 to 4) are designated by the same reference numerals and their description is omitted. 5 and 6
The sealing plates 7 and 8 are omitted.

【0009】本発明の圧電共振子の特徴は、共振子素子
1の電極3,4と外部電極9,10とを接続するために
帯状に形成される引出電極13,14の幅が、共振子素
子1の一端から、保持板5,6の凹部5a,6aの内側
面と共振子素子1の他端側から延びる電極3,4の先端
との中間位置までの範囲にある点である。即ち、図6に
おいて、引出電極13,14の幅寸法Wは、共振子素子
1の一端から保持板5,6の凹部5a,6aの内側面ま
での距離W1 より広く、共振子素子1の一端から共振子
素子1の他端側から延びる電極3,4の先端までの距離
2 より狭い。これを式で表すと、次のようになる。
The piezoelectric resonator of the present invention is characterized in that the width of the lead-out electrodes 13 and 14 formed in a strip shape for connecting the electrodes 3 and 4 of the resonator element 1 and the external electrodes 9 and 10 is such that This is a point in the range from one end of the element 1 to an intermediate position between the inner side surfaces of the concave portions 5a, 6a of the holding plates 5, 6 and the tips of the electrodes 3, 4 extending from the other end side of the resonator element 1. That is, in FIG. 6, the width dimension W of the extraction electrodes 13 and 14 is wider than the distance W 1 from one end of the resonator element 1 to the inner side surfaces of the recesses 5a and 6a of the holding plates 5 and 6, and It is shorter than the distance W 2 from one end to the tips of the electrodes 3 and 4 extending from the other end of the resonator element 1. This can be expressed as follows.

【0010】[0010]

【数1】W1 <W<W2 [Equation 1] W 1 <W <W 2

【0011】このように引出電極13,14の幅Wを設
定すると、電極3,4の最も断線しやすい箇所の側部を
引出電極13,14で接続することができ、たとえ電極
3,4の接着部付近に断線3aが発生しても、引出電極
13,14を介して外部電極9,10へ確実に導通させ
ることができる。
By setting the width W of the extraction electrodes 13 and 14 in this manner, the side portions of the electrodes 3 and 4 where the wire breakage is most likely can be connected by the extraction electrodes 13 and 14, even if the electrodes 3 and 4 are connected. Even if the disconnection 3a occurs in the vicinity of the bonded portion, it can be surely conducted to the external electrodes 9 and 10 via the extraction electrodes 13 and 14.

【0012】なお、上記引出電極13,14は共振子素
子1と保持板5,6とを接着した後で蒸着等の公知の方
法で形成される。即ち、共振子素子1および保持板5,
6上にマスクを載せ、金属粒子を上面の所定箇所に付着
させて引出電極13,14を形成するのであるが、この
時、金属粒子の一部が凹部5a,6aの内側にも回り込
み、図6に示すように引出電極13,14と導通した電
極部13aが形成される場合がある。この場合には、電
極部13aが断線部3aを覆うとともに、電極3,4か
ら外部電極9,10へ到る導電通路が広くなるので、接
続信頼性がさらに向上するという利点がある。
The lead electrodes 13 and 14 are formed by a known method such as vapor deposition after the resonator element 1 and the holding plates 5 and 6 are bonded. That is, the resonator element 1 and the holding plate 5,
The mask is placed on 6 and the extraction electrodes 13 and 14 are formed by adhering the metal particles to predetermined positions on the upper surface. At this time, a part of the metal particles also wraps around inside the recesses 5a and 6a. As shown in FIG. 6, an electrode portion 13a that is electrically connected to the extraction electrodes 13 and 14 may be formed. In this case, the electrode portion 13a covers the disconnection portion 3a and the conductive path from the electrodes 3 and 4 to the external electrodes 9 and 10 is widened, so that there is an advantage that the connection reliability is further improved.

【0013】[0013]

【発明の効果】以上の説明で明らかなように、本発明に
よれば、引出電極を共振子素子の端面から、保持板の凹
部内側面と共振子素子の他端側から延びる電極の先端と
の中間位置までの範囲に帯状に形成したので、引出電極
で共振子素子の電極の断線しやすい箇所を覆うことがで
き、共振子素子の電極と外部電極との接続信頼性を高め
ることができる。また、引出電極の幅を変更するのみ
で、共振子素子や保持板の構造を変更する必要がないの
で、製造コストが上昇しない。
As is apparent from the above description, according to the present invention, the extraction electrode is provided with the end face of the resonator element, the inner surface of the recess of the holding plate, and the tip of the electrode extending from the other end side of the resonator element. Since it is formed in a band shape in the range up to the intermediate position, the extraction electrode can cover the portion of the resonator element electrode where the electrode is easily broken, and the connection reliability between the resonator element electrode and the external electrode can be improved. . Further, since it is not necessary to change the structure of the resonator element or the holding plate only by changing the width of the extraction electrode, the manufacturing cost does not increase.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明にかかるチップ型圧電共振子の一例の斜
視図である。
FIG. 1 is a perspective view of an example of a chip-type piezoelectric resonator according to the present invention.

【図2】図1に示された圧電共振子の分解斜視図であ
る。
FIG. 2 is an exploded perspective view of the piezoelectric resonator shown in FIG.

【図3】図1の圧電共振子における共振子素子および保
持板の斜視図である。
FIG. 3 is a perspective view of a resonator element and a holding plate in the piezoelectric resonator of FIG.

【図4】図3の一部の拡大斜視図である。FIG. 4 is an enlarged perspective view of a part of FIG.

【図5】本発明にかかる圧電共振子の共振子素子および
保持板の斜視図である。
FIG. 5 is a perspective view of a resonator element and a holding plate of the piezoelectric resonator according to the present invention.

【図6】図5の一部の拡大斜視図である。FIG. 6 is an enlarged perspective view of a part of FIG.

【符号の説明】[Explanation of symbols]

1 共振子素子 2 圧電基板 3,4 電極 3a 断線部 5,6 保持板 7,8 封止板 9,10 外部電極 13,14 引出電極 DESCRIPTION OF SYMBOLS 1 Resonator element 2 Piezoelectric substrate 3,4 Electrode 3a Disconnection part 5,6 Holding plate 7,8 Sealing plate 9,10 External electrode 13,14 Extraction electrode

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】圧電基板の一側面の一端部側から延びる電
極と他側面の他端部側から延びる電極とが一部で対向す
るように形成された共振子素子と、共振子素子の電極を
設けた両側面に接着され、共振子素子との対向面に振動
空間形成用の凹部を設けた保持板と、上記共振子素子お
よび保持板の上下両面に接着された封止板と、上記封止
板のうち少なくとも共振子素子の端面側に形成され、共
振子素子の電極と導通する外部電極とを備えたチップ型
圧電共振子において、 互いに接着された共振子素子と保持板との両端部の上面
および下面の少なくとも1面に、共振子素子の電極と外
部電極とを接続するための引出電極が帯状に形成され、
この引出電極の幅は、共振子素子の端面から、保持板の
凹部内側面と共振子素子の反対側より延びる電極の先端
との中間位置までの範囲に設定されていることを特徴と
するチップ型圧電共振子。
1. A resonator element in which an electrode extending from one end of one side of a piezoelectric substrate and an electrode extending from the other end of the other side of the piezoelectric substrate are partially opposed to each other, and an electrode of the resonator element. A holding plate bonded to both side surfaces provided with a concave portion for forming a vibration space on a surface facing the resonator element, and sealing plates bonded to both upper and lower surfaces of the resonator element and the holding plate, In a chip-type piezoelectric resonator that is formed on at least the end face side of the resonator element of the sealing plate and includes an external electrode that is electrically connected to the electrode of the resonator element, both ends of the resonator element and the holding plate bonded to each other Lead-out electrodes for connecting the electrodes of the resonator element and the external electrodes are formed in strips on at least one of the upper and lower surfaces of the portion,
The width of the extraction electrode is set in the range from the end face of the resonator element to the intermediate position between the inner surface of the recess of the holding plate and the tip of the electrode extending from the opposite side of the resonator element. Type piezoelectric resonator.
JP04191569A 1992-06-24 1992-06-24 Chip type piezoelectric resonator Expired - Fee Related JP3079783B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP04191569A JP3079783B2 (en) 1992-06-24 1992-06-24 Chip type piezoelectric resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP04191569A JP3079783B2 (en) 1992-06-24 1992-06-24 Chip type piezoelectric resonator

Publications (2)

Publication Number Publication Date
JPH0613835A true JPH0613835A (en) 1994-01-21
JP3079783B2 JP3079783B2 (en) 2000-08-21

Family

ID=16276853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP04191569A Expired - Fee Related JP3079783B2 (en) 1992-06-24 1992-06-24 Chip type piezoelectric resonator

Country Status (1)

Country Link
JP (1) JP3079783B2 (en)

Also Published As

Publication number Publication date
JP3079783B2 (en) 2000-08-21

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