JPH0612563B2 - Magnetic head for perpendicular magnetization - Google Patents
Magnetic head for perpendicular magnetizationInfo
- Publication number
- JPH0612563B2 JPH0612563B2 JP59277935A JP27793584A JPH0612563B2 JP H0612563 B2 JPH0612563 B2 JP H0612563B2 JP 59277935 A JP59277935 A JP 59277935A JP 27793584 A JP27793584 A JP 27793584A JP H0612563 B2 JPH0612563 B2 JP H0612563B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- magnetic
- magnetic pole
- recording
- ferromagnetic thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
Landscapes
- Magnetic Heads (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、垂直磁気気録方式の磁気記録装置、例えば、
計算機用ディスク、フロッピーディスク用の磁気ヘッド
に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a perpendicular magnetic recording type magnetic recording device, for example,
The present invention relates to magnetic heads for computer disks and floppy disks.
従来の技術 従来、磁気記録の分野においては、面内方向磁化が用い
られてきたが、近年の高密度化を進める中で、媒体の減
磁界の影響が大きくなり高密度特性を制限するようにな
ってきている。これに対して媒体層を記録波長に対して
薄くしたり、媒体を高抗磁力化する事によって減磁界の
影響を減少させ、高密度特性の改善を図ってきている。
しかし、薄膜化にはシグナル／ノイズ比（以下Ｓ／Ｎと
書く）強度、出力低下の点で、高抗磁力化にはヘッドの
記録効率の点で限りがある。2. Description of the Related Art Conventionally, in-plane direction magnetization has been used in the field of magnetic recording, but as the density has been increased in recent years, the influence of the demagnetizing field of the medium becomes large and the high density characteristics are limited. It has become to. On the other hand, the influence of demagnetizing field is reduced by making the medium layer thinner with respect to the recording wavelength and making the medium higher in coercive force to improve the high density characteristics.
However, there is a limit in thinning the film in terms of signal / noise ratio (hereinafter referred to as S / N) strength and output reduction, and in increasing the coercive force in terms of recording efficiency of the head.
そこで媒体面に対して垂直方向に磁化する方式が提案さ
れており、この方式によれば、本質的に高密度記録に適
している事がわかってきている。垂直記録方式として
は、媒体両側に主磁極と補助磁極を配置し、該補助磁極
に巻線を施して記録再生する方式（補助磁極励磁型）
と、主磁極に巻線を施し記録再生する方式（主磁極励磁
型）とがある。補助磁極励磁型は垂直磁化の記録再生に
適した構造であるが、構造上外部ノイズに弱く、又実用
化においては、媒体両側に磁極を配す為、システム構成
が複雑になる等の問題点を有しており、これらの点から
主磁極励磁型ヘッドでの効率改善に関する提案が活発で
ある。第４図は従来の主磁極励磁型ヘッドの一例を示し
たものであり、Fe-Ni系合金等の強磁性薄膜より成る主
磁極１は非磁性基板２ではさまれ、フェライト等の強磁
性体より成るＷ型ブロック３に磁気的に結合するように
配置されており、該強磁性体３に巻かれた巻線４によっ
て記録媒体８に記録再生を行なう。ここで、記録媒体８
は、Co-Cr等の垂直異方性膜５、パーマロイ等の軟磁性
薄膜６、ベース７等から成る。強磁性ブロック３はＷ型
にする事により、磁束の還流効果を高め、効率を良くす
るものである。Therefore, a method of magnetizing in the direction perpendicular to the medium surface has been proposed, and it has been found that this method is essentially suitable for high-density recording. As a perpendicular recording method, a main magnetic pole and an auxiliary magnetic pole are arranged on both sides of the medium, and recording and reproduction are performed by winding the auxiliary magnetic pole (auxiliary magnetic pole excitation type).
There is a method of applying a winding to the main magnetic pole to perform recording / reproducing (main magnetic pole excitation type). The auxiliary magnetic pole excitation type is a structure suitable for recording / reproducing of perpendicular magnetization, but is structurally vulnerable to external noise, and in practical use, since the magnetic poles are arranged on both sides of the medium, the system configuration becomes complicated. From these points, proposals for improving the efficiency of the main magnetic pole excitation type head are active. FIG. 4 shows an example of a conventional main magnetic pole excitation type head. The main magnetic pole 1 made of a ferromagnetic thin film such as Fe-Ni alloy is sandwiched by a non-magnetic substrate 2 and a ferromagnetic material such as ferrite. It is arranged so as to be magnetically coupled to the W-shaped block 3 composed of, and recording / reproducing is performed on the recording medium 8 by the winding 4 wound around the ferromagnetic body 3. Here, the recording medium 8
Is composed of a perpendicular anisotropic film 5 such as Co—Cr, a soft magnetic thin film 6 such as permalloy, a base 7 and the like. The ferromagnetic block 3 is W-shaped to enhance the flux return effect and improve efficiency.
発明が解決しようとする問題点 しかし、この様な構成では大きな巻線スペースを必要と
する為に、巻線部での磁束漏洩や還流効果の低減によっ
て効率が低下する。従ってこの様な主磁極励磁型ヘッド
では、記録再生の高効率化の為に出来るだけ強磁性体ブ
ロック３の主磁極の近傍にかつ、集中的に巻線を配する
事が望まれる。しかし第４図の構成では、強磁性体ブロ
ック先端近傍に集中的に巻線することが困難であり、又
ヘッド先端での巻線の作業性は非常に難しい。However, since a large winding space is required in such a configuration, the efficiency decreases due to the reduction of magnetic flux leakage and the circulation effect in the winding portion. Therefore, in such a main magnetic pole excitation type head, it is desirable to arrange the windings as close to the main magnetic pole of the ferromagnetic block 3 as possible and in a concentrated manner in order to improve the recording / reproducing efficiency. However, in the configuration shown in FIG. 4, it is difficult to concentrate the winding near the tip of the ferromagnetic block, and the workability of the winding at the tip of the head is very difficult.
以上の点より、高効率で且つ作業性の高い磁気ヘッドが
要望されている。From the above points, there is a demand for a magnetic head having high efficiency and high workability.
問題点を解決するための手段 本発明は、基板に非磁性材が充填された切り欠き溝で囲
まれた突部を設け、この突部の上に強磁性薄膜を設け、
非磁性材の上に強磁性薄膜を囲むように絶縁層で覆われ
たコイル層を設け、前記強磁性薄膜の上に主磁極を設け
た。Means for Solving the Problems The present invention provides a substrate with a protrusion surrounded by a notch groove filled with a non-magnetic material, and providing a ferromagnetic thin film on the protrusion.
A coil layer covered with an insulating layer was provided on the non-magnetic material so as to surround the ferromagnetic thin film, and a main magnetic pole was provided on the ferromagnetic thin film.
作用 以上のような構成により、主磁極の直立方向に沿って磁
束が主磁極に出入りする事ができるようになるととも
に、コイルを貫通する漏洩磁束を軽減する事できる。又
切り欠き溝に導電性材を充填することで、薄膜コイルの
端子取出口として利用可能で作業性が向上する。Operation With the above-described configuration, the magnetic flux can enter and exit the main magnetic pole along the upright direction of the main magnetic pole, and the leakage magnetic flux penetrating the coil can be reduced. Further, by filling the cutout groove with a conductive material, it can be used as a terminal lead-out port of the thin-film coil and the workability is improved.
実施例 本発明の一実施例の断面図を第１図に示す。フェライト
等の強磁性体より成る第１の基板９に、一部を残しその
周囲に所定形状の切り欠き溝１０を形成し、これにガラ
スやチタン酸バリウム等の非磁性体を充填しその表面を
平滑に仕上げ、第１の基板９上の切り欠き溝１０で囲ま
れた突部上にFe-Ni系合金等の強磁性薄膜１１を形成し
所定形状にパターン化する。ついで、強磁性薄膜１１の
周囲を巻回する薄膜コイル１２を上記非磁性体の上に、
Al,Cu,Au/Cr等の導電性薄膜にて強磁性薄膜１１との間
や、コイル１２間を絶縁層１３を介して形成し、その上
部面１４を同一平面に平滑化する。Example FIG. 1 is a sectional view of an example of the present invention. On a first substrate 9 made of a ferromagnetic material such as ferrite, a notched groove 10 of a predetermined shape is formed around the first substrate 9, and a non-magnetic material such as glass or barium titanate is filled in the notched groove 10. Is smoothed, a ferromagnetic thin film 11 of Fe-Ni alloy or the like is formed on the protrusion surrounded by the notch groove 10 on the first substrate 9 and patterned into a predetermined shape. Then, the thin film coil 12 wound around the ferromagnetic thin film 11 is placed on the non-magnetic material,
The conductive thin film of Al, Cu, Au / Cr or the like is formed between the ferromagnetic thin film 11 and the coil 12 via the insulating layer 13, and the upper surface 14 thereof is smoothed to the same plane.
次に非磁性材より成る第２の基板１５の記録媒体対向面
と異なる面に強磁性薄膜よりなる主磁極１６をパターン
形成し、非磁性材１５′でカバー後、第１の基板９の強
磁性薄膜１１及びコイル１２の上部面１４に、上記主磁
極１６の一端を媒体走向面に露呈し、かつ、他端を強磁
性薄膜１１と磁気的に結合する様、第２の基板１５を接
合する。Next, a main magnetic pole 16 made of a ferromagnetic thin film is patterned on a surface of the second substrate 15 made of a non-magnetic material, which is different from the surface facing the recording medium, and is covered with the non-magnetic material 15 '. The second substrate 15 is bonded to the magnetic thin film 11 and the upper surface 14 of the coil 12 so that one end of the main magnetic pole 16 is exposed to the medium strike surface and the other end is magnetically coupled to the ferromagnetic thin film 11. To do.
この様な構成にする事により、記録時には、薄膜コイル
１２に記録電流を流す事により発生した磁束は、強磁性
薄膜１１か主磁極１６に集中し、媒体の垂直磁化膜５を
磁化し、軟磁性層６を通って、第１の基板９の切り欠き
溝１０の外側へ流入しその中央部へ帰還するという閉磁
路的な動作をする。その際、第１の基板９に非磁性体１
０が充填された溝で囲まれた突部によって、あらゆる方
向からくる磁束を主磁極１６の直立方向に沿った方向に
矯正することができるので、主磁極１６に出入りする磁
束の数を多くする事ができるとともに、非磁性体の充填
された切り欠き溝１０は、うず巻状のコイル１２の下に
位置するためコイル１２の発生した磁束は第１の基板９
によってショートされることがないので、記録効率を大
巾に改善する。一方再生時においては、垂直磁化膜５に
記録された磁化によって、主磁極１６が磁化され、その
磁束は記録時と同様に閉磁路的に還流し、これを薄膜コ
イル１２にて検出する。この場合も非磁性体が充填され
た切り欠き溝１０の存在によって、再生効率は大巾に向
上する。With such a configuration, at the time of recording, the magnetic flux generated by passing the recording current through the thin film coil 12 is concentrated on the ferromagnetic thin film 11 or the main magnetic pole 16, magnetizes the perpendicular magnetization film 5 of the medium, and softens. A closed magnetic circuit-like operation is performed by passing through the magnetic layer 6 to the outside of the cutout groove 10 of the first substrate 9 and returning to the central portion thereof. At that time, the non-magnetic material 1 is formed on the first substrate 9.
Since the magnetic flux coming from any direction can be corrected in the direction along the upright direction of the main magnetic pole 16 by the protrusion surrounded by the groove filled with 0, the number of magnetic flux entering and leaving the main magnetic pole 16 is increased. In addition, since the notch groove 10 filled with the non-magnetic material is located below the spiral coil 12, the magnetic flux generated by the coil 12 is generated by the first substrate 9
Since it is not short-circuited, the recording efficiency is greatly improved. On the other hand, at the time of reproduction, the main magnetic pole 16 is magnetized by the magnetization recorded on the perpendicular magnetization film 5, and its magnetic flux recirculates like a closed magnetic path as at the time of recording, and this is detected by the thin film coil 12. In this case as well, the presence of the notch groove 10 filled with the non-magnetic material greatly improves the reproduction efficiency.
強磁性薄膜１１及び主磁極１６は、Fe-Ni系合金、ある
いは、Co-Nb-Zr系又はCo-Nb-Fe系のアモルファス合金の
薄膜を用い、製法は、電子ビーム蒸着法、メッキ法、ス
パッターリング法等を材質に合わせて、選択可能であ
る。The ferromagnetic thin film 11 and the main magnetic pole 16 are made of a thin film of Fe-Ni alloy or Co-Nb-Zr or Co-Nb-Fe amorphous alloy. The manufacturing method is electron beam evaporation method, plating method, The spattering method etc. can be selected according to the material.
又、主磁極１６のカバー１５′としては、第２の基板１
５と同一材の基板又は、SiO2，フォルステライト等の非
磁性薄膜を使用することが可能である。In addition, the cover 15 ′ of the main pole 16 is the second substrate 1
It is possible to use a substrate made of the same material as that of No. 5 or a non-magnetic thin film such as SiO 2 or forsterite.
第２図，第３図は、本発明の他の実施例の斜視図及び断
面図である。浮動式ヘッドの場合、媒体表面に対し若干
傾いて浮上しており、主磁極１６が媒体８に最も近接し
ていることが望まれる。この状態を実現するために、主
磁極１６の保護カバー１５′は第３図に示すように、Si
O2やフォルステライト等の非磁性薄膜を用いて極力薄く
形成している。2 and 3 are a perspective view and a sectional view of another embodiment of the present invention. In the case of a floating head, it is desired that the main magnetic pole 16 is closest to the medium 8 because it floats with a slight inclination with respect to the medium surface. In order to realize this state, the protective cover 15 'of the main pole 16 is made of Si as shown in FIG.
It is made as thin as possible using a non-magnetic thin film such as O 2 or forsterite.
又、非磁性材にて充填される切り欠き溝１０は、強磁性
薄膜１１をはさみ平行な２つの切欠き溝と、該２つの溝
に略直交し、同じく該強磁性薄膜１１をはさみ平行な２
つの溝１６より“＃”の字の形状に形成される。Further, the notch groove 10 filled with the non-magnetic material is provided with two parallel notch grooves sandwiching the ferromagnetic thin film 11 and substantially perpendicular to the two grooves, and also sandwiching the ferromagnetic thin film 11 in parallel. Two
The groove 16 is formed in a shape of "#".
これに、切り欠き溝の内、強磁性薄膜１１の周囲に非磁
性体を充填し、強磁性薄膜１１の周囲を除く領域の溝１
７には導電性材（Al,Cu等）を充填し、薄膜コイルの両
終端を各々導電性材の充填された切り欠き溝１７に配
し、コイルと電気的に結合する事で、外部引出口として
外部引出線との接続の作業性が高くなる。充填される導
電材は高温にて融解し流入せしめる。又は、ガラス、セ
ラミック等の非磁性体を充填せしめた後、必要な深さま
でエッチング法等により非磁性体を除去し、メッキ法等
によりCu,Alの導電性材を充填することによって形成す
ることが可能である。The non-magnetic material is filled in the periphery of the ferromagnetic thin film 11 in the cutout groove, and the groove 1 in the region excluding the periphery of the ferromagnetic thin film 11 is formed.
7 is filled with a conductive material (Al, Cu, etc.), and both ends of the thin film coil are arranged in the notch grooves 17 filled with the conductive material, respectively, and electrically coupled to the coil, so that external drawing The workability of connecting with an external lead wire as an outlet is improved. The filled conductive material is melted at a high temperature and allowed to flow in. Alternatively, it should be formed by filling a non-magnetic material such as glass or ceramic, removing the non-magnetic material to the required depth by etching, etc., and then filling it with a conductive material such as Cu or Al by plating. Is possible.
発明の効果 本発明は、基板に非磁性材が充填された切り欠き溝で囲
まれた突部を設け、この突部の上に強磁性薄膜を設け、
その強磁性薄膜の上に主磁極を設けた事により、主磁極
の直立方向に沿って磁束が主磁極に出入りする事ができ
るようになるとともに、コイルを貫通する漏洩磁束を軽
減する事できるので、高効率の記録再生を実現できると
ともに、絶縁層で覆われた薄膜コイルを非磁性材の上に
形成する事により基板と薄膜コイル間の絶縁性を著しく
向上させる事ができるので、再生信号や記録信号にノイ
ズが入る事はない。又、構造が簡単で、巻線を薄膜化す
る事により、繁雑な巻線作業を必要とせず、作業性が高
く、容易に量産が実現できる。Advantageous Effects of Invention The present invention provides a substrate with a protrusion surrounded by a notch groove filled with a non-magnetic material, and a ferromagnetic thin film is provided on the protrusion.
By providing the main magnetic pole on the ferromagnetic thin film, the magnetic flux can go in and out of the main magnetic pole along the upright direction of the main magnetic pole, and the leakage magnetic flux penetrating the coil can be reduced. In addition to realizing high-efficiency recording / reproducing, by forming a thin-film coil covered with an insulating layer on a non-magnetic material, it is possible to significantly improve the insulation between the substrate and the thin-film coil. There is no noise in the recording signal. Further, since the structure is simple and the winding is thinned, complicated winding work is not required, workability is high, and mass production can be easily realized.
第１図は本発明の第１実施例の垂直磁化用磁気ヘッドを
示す断面図、第２図は本発明の第２実施例における垂直
磁化用磁気ヘッドを示す斜視図、第３図は同断面図、第
４図は従来例の断面図である。 ９……第１の基板、１０……切り欠き部、１１……強磁
性薄膜、１２……薄膜コイル、１６……主磁極。FIG. 1 is a sectional view showing a perpendicular magnetization magnetic head according to a first embodiment of the present invention, FIG. 2 is a perspective view showing a perpendicular magnetization magnetic head according to a second embodiment of the present invention, and FIG. FIG. 4 and FIG. 4 are cross-sectional views of a conventional example. 9 ... First substrate, 10 ... Notch, 11 ... Ferromagnetic thin film, 12 ... Thin film coil, 16 ... Main magnetic pole.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭56−83826（ＪＰ，Ａ) 特開 昭54−27415（ＪＰ，Ａ) 特開 昭54−118214（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP-A-56-83826 (JP, A) JP-A-54-27415 (JP, A) JP-A-54-118214 (JP, A)
Claims (1)
充填した切り欠き溝と、この切り欠き溝で囲まれ、かつ
記録媒体側に突出した突部を設け、前記突部の記録媒体
側に強磁性薄膜を設け、前記非磁性材の上にしかも前記
強磁性薄膜を囲むように絶縁層で覆われた薄膜コイルを
設け、前記強磁性薄膜の記録媒体側に前記突部の突出方
向に沿って直立した主磁極を設けた事を特徴とする垂直
磁化用磁気ヘッド。1. A substrate formed of a magnetic material is provided with a notch groove filled with a non-magnetic material, and a protrusion surrounded by the notch groove and protruding toward the recording medium. The recording medium of the protrusion is provided. Side is provided with a ferromagnetic thin film, and a thin film coil covered with an insulating layer is provided on the non-magnetic material so as to surround the ferromagnetic thin film, and the protruding direction of the protrusion is provided on the recording medium side of the ferromagnetic thin film. A magnetic head for perpendicular magnetization, which is characterized in that a main magnetic pole standing upright is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59277935A JPH0612563B2 (en) | 1984-12-26 | 1984-12-26 | Magnetic head for perpendicular magnetization |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59277935A JPH0612563B2 (en) | 1984-12-26 | 1984-12-26 | Magnetic head for perpendicular magnetization |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61153806A JPS61153806A (en) | 1986-07-12 |
| JPH0612563B2 true JPH0612563B2 (en) | 1994-02-16 |
Family
ID=17590329
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59277935A Expired - Lifetime JPH0612563B2 (en) | 1984-12-26 | 1984-12-26 | Magnetic head for perpendicular magnetization |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0612563B2 (en) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5931769B2 (en) * | 1977-08-02 | 1984-08-04 | 松下電器産業株式会社 | Manufacturing method of thin film magnetic head |
| JPS5857809B2 (en) * | 1978-03-03 | 1983-12-22 | 松下電器産業株式会社 | Manufacturing method of thin film magnetic head |
| JPS6022406B2 (en) * | 1979-12-13 | 1985-06-01 | 富士通株式会社 | Perpendicular magnetic recording/reproducing head |
-
1984
- 1984-12-26 JP JP59277935A patent/JPH0612563B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61153806A (en) | 1986-07-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |