JPH06124785A - Organic el element - Google Patents

Organic el element

Info

Publication number
JPH06124785A
JPH06124785A JP4270552A JP27055292A JPH06124785A JP H06124785 A JPH06124785 A JP H06124785A JP 4270552 A JP4270552 A JP 4270552A JP 27055292 A JP27055292 A JP 27055292A JP H06124785 A JPH06124785 A JP H06124785A
Authority
JP
Japan
Prior art keywords
organic
film
electrode
polymer film
laminated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4270552A
Other languages
Japanese (ja)
Inventor
Masahide Matsuura
正英 松浦
Tadashi Kusumoto
正 楠本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Idemitsu Kosan Co Ltd
Original Assignee
Idemitsu Kosan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idemitsu Kosan Co Ltd filed Critical Idemitsu Kosan Co Ltd
Priority to JP4270552A priority Critical patent/JPH06124785A/en
Publication of JPH06124785A publication Critical patent/JPH06124785A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To provide high light emitting efficiency, light emitting stability, the long service life and flexibility by setting a quantity of a foreign matter and a projecting material of not less than 1mum on an interface between a film and an electrode and a surface of the electrode not more than a specific value in the film. CONSTITUTION:The first electrode, an organic single layer part or an organic multilayer part having a light emitting material composed of an organic compound and the second electrode are arranged in order on a high polymer film. In the high polymer film, the total number of defects such as a foreign matter, a projecting material, a hole, and a pore of not less than 1mum on an interface between the high polymer film and the first electrode and a surface of the first electrode is set not more than 100 pieces in a conversion value per 1m<2>. Improvement in purity of a raw material of the high polymer film, improvement in the film creating environment (for example, use of a clean room), improvement in a film forming device (for example, improvement in flatness of a film forming part of the device), and purification by cleaning can be cited as the method.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、表示素子や発光素子等
として利用される有機EL(エレクトロルミネッセン
ス)素子に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an organic EL (electroluminescence) element used as a display element, a light emitting element or the like.

【0002】[0002]

【従来の技術】EL素子は、自己発光性であるため視認
性が高く、また完全固体素子であるため、耐衝撃性に優
れている等の特徴を有することから、発光材料として無
機および有機化合物を用いた種々のEL素子が研究、開
発されている。
2. Description of the Related Art EL elements have high visibility because they are self-luminous, and because they are completely solid elements, they have excellent impact resistance. A variety of EL devices using the are being researched and developed.

【0003】ところでEL素子の用途として、薄膜パネ
ル、ベルト状、円筒状等の種々の形状の例えば線、図
面、画像等の表示用途があり、このような用途に使用す
るEL素子を作製するには、基板として、薄くかつ可撓
性を有する高分子フィルムを基板として用いるのが好都
合である。例えば特開平2−251429号公報および
特開平2−253593号公報には、基板である高分子
フィルム上に透明導電性膜からなる電極を形成し、この
電極を一方の電極とし、対向するもう1つの電極との間
に有機化合物からなる発光層を含む単一または複数層を
設けることにより得られた可撓性の有機EL素子が開示
されている。この従来技術文献に記載の有機EL素子
は、基板温度をほぼ室温として作製できるので、高温に
よる基板の変形などの問題が生じないという利点を有す
る。
By the way, as applications of EL elements, there are various applications such as thin film panels, belt shapes, cylindrical shapes, etc. for displaying lines, drawings, images, etc., and for producing EL elements used for such applications. It is convenient to use a thin and flexible polymer film as the substrate. For example, in Japanese Unexamined Patent Publication Nos. 2-251429 and 2-253593, an electrode made of a transparent conductive film is formed on a polymer film which is a substrate, and this electrode is used as one electrode and another electrode facing the other electrode. A flexible organic EL device obtained by providing a single or multiple layers including a light emitting layer made of an organic compound between one electrode is disclosed. The organic EL device described in this prior art document can be manufactured at a substrate temperature of about room temperature, and therefore has an advantage that problems such as substrate deformation due to high temperature do not occur.

【0004】[0004]

【発明が解決しようとする課題】しかし上記従来技術文
献に記載の可撓性有機EL素子は、蛍光灯下で(明所に
おいて)発光を観測するのに、10V以上の印加電圧と
1A/cm2 以上の電流密度を必要とし、発光効率が不
十分である。また発光効率が不十分であることから、発
光安定性に劣り、素子寿命も短かく、実用面で問題があ
った。従って本発明の目的は、高い発光効率を有し、そ
の結果、発光安定性に優れ、素子寿命も長い可撓性有機
EL素子を提供することにある。
However, in the flexible organic EL element described in the above-mentioned prior art document, in order to observe light emission under a fluorescent lamp (in a bright place), an applied voltage of 10 V or more and 1 A / cm. It requires a current density of 2 or more and the luminous efficiency is insufficient. Further, since the luminous efficiency is insufficient, the luminous stability is inferior, the device life is short, and there is a problem in practical use. Therefore, an object of the present invention is to provide a flexible organic EL device having high luminous efficiency, resulting in excellent luminous stability and long device life.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するため
に検討を加えた結果、高分子フィルムまたは該高分子フ
ィルム上に有機または無機材料膜を積層した積層フィル
ムと、これらのフィルム上に設けられた電極とからなる
有機EL素子用支持基板において、上記フィルム内、上
記フィルムと上記電極との界面および上記電極表面にお
ける1μm以上の異物、突起物、穴、空孔などの欠陥の
合計数を1m2 当たりの換算値で100個以下とするこ
とにより、高い発光効率を有し、その結果発光安定性に
優れ、素子寿命も長い可撓性有機EL素子が得られるこ
とを見い出し、本発明を完成した。
As a result of studies to achieve the above object, a polymer film or a laminated film in which an organic or inorganic material film is laminated on the polymer film, and a film provided on these films are provided. In the support substrate for an organic EL device comprising the formed electrodes, the total number of defects such as foreign matter, protrusions, holes and holes of 1 μm or more in the film, the interface between the film and the electrode and the electrode surface is determined. It was found that a flexible organic EL device having a high luminous efficiency, excellent light emission stability, and a long device life can be obtained by setting the number of 100 or less converted per 1 m 2 and the present invention completed.

【0006】従って本発明は、高分子フィルム上に、第
1電極と、有機化合物からなる発光材料を有する有機単
層部または有機多層部と、第2電極とを順次設けてな
り、上記2つの電極の少なくとも一方の電極が透明また
は半透明である有機エレクトロルミネッセンス素子にお
いて、高分子フィルム内、高分子フィルムと第1電極と
の界面および第1電極の表面における1μm以上の異
物、突起物、穴、空孔などの欠陥の合計数が1m2 当た
りの換算値で100個以下であることを特徴とする有機
EL素子(以下、有機EL素子(A)という)を要旨と
するものである。
Therefore, according to the present invention, a first electrode, an organic single-layer portion or an organic multi-layer portion having a light emitting material made of an organic compound, and a second electrode are sequentially provided on a polymer film. In an organic electroluminescence device in which at least one of the electrodes is transparent or semi-transparent, foreign matter, protrusions, or holes of 1 μm or more in the polymer film, the interface between the polymer film and the first electrode, and the surface of the first electrode , The total number of defects such as vacancies is 100 or less in terms of a converted value per 1 m 2 (hereinafter, referred to as organic EL element (A)).

【0007】また本発明は、高分子フィルム上に有機ま
たは無機材料膜を積層した積層フィルム上に、第1電極
と、有機化合物からなる発光材料を有する有機単層部ま
たは有機多層部と、第2電極とを順次設けてなり、上記
2つの電極の少なくとも一方の電極が透明または半透明
である有機エレクトロルミネッセンス素子において、積
層フィルム内、積層フィルムと第1電極との界面および
第1電極の表面における1μm以上の異物、突起物、
穴、空孔などの欠陥の合計数が1m2 当たりの換算値で
100個以下であることを特徴とする有機EL素子(以
下、有機EL素子(B)という)を要旨とするものであ
る。
The present invention also provides a first electrode, an organic single-layer part or an organic multi-layer part having a light-emitting material composed of an organic compound, and a first electrode on a laminated film obtained by laminating an organic or inorganic material film on a polymer film. In an organic electroluminescence element, which comprises two electrodes in sequence, at least one of the two electrodes being transparent or semitransparent, in a laminated film, an interface between the laminated film and the first electrode, and a surface of the first electrode. Foreign matter of 1 μm or more, protrusions,
The gist is an organic EL element (hereinafter referred to as an organic EL element (B)) characterized in that the total number of defects such as holes and holes is 100 or less in terms of a converted value per 1 m 2 .

【0008】先ず本発明の有機EL素子(A)について
説明する。有機EL素子(A)において基板となる高分
子フィルムは、フィルム成形可能であれば特に限定はな
いが、透明性が高く、耐熱性の比較的高い材料が好まし
い。このような条件を満たす高分子フィルムとしては、
ポリエチレンテレフタレート(PET)、ポリカーボネ
ート(PC)、ポリエーテルスルホン(PES)、ポリ
エーテルエーテルケトン(PEEK)、ポリフッ化ビニ
ル(PFV)、ポリアクリレート(PA)、ポリプロピ
レン(PP)、ポリエチレン(PE)や、非晶質ポリオ
レフィン、フッ素系樹脂等が挙げられる。これらの高分
子フィルムの可撓性を十分に活用するためには、高分子
フィルムの膜厚は0.001μm〜1mmが好ましい。
First, the organic EL device (A) of the present invention will be described. The polymer film used as the substrate in the organic EL element (A) is not particularly limited as long as it can be formed into a film, but a material having high transparency and relatively high heat resistance is preferable. As a polymer film that satisfies such conditions,
Polyethylene terephthalate (PET), polycarbonate (PC), polyether sulfone (PES), polyether ether ketone (PEEK), polyvinyl fluoride (PFV), polyacrylate (PA), polypropylene (PP), polyethylene (PE), Amorphous polyolefins, fluororesins, etc. may be mentioned. In order to fully utilize the flexibility of these polymer films, the thickness of the polymer film is preferably 0.001 μm to 1 mm.

【0009】本発明の有機EL素子(A)においては、
上で詳述した高分子フィルム上に第1電極と、有機化合
物からなる発光材料を有する有機単層部または有機単層
部と、第2電極とを順次設けたものである。
In the organic EL device (A) of the present invention,
The first electrode, the organic single layer portion or the organic single layer portion having a light emitting material made of an organic compound, and the second electrode are sequentially provided on the polymer film described in detail above.

【0010】すなわち、本発明の有機EL素子(A)に
おいては、高分子フィルム上に設けた第1電極と、この
第1電極と対向する第2電極との間に有機化合物からな
る発光材料を有する有機単層部または有機多層部が介在
されている。そして上記2つの電極のうち、一方が陽極
を、他方が陰極を構成し、前者の陽極の材料としては、
例えば、仕事関数の大きい(4eV以上の)金属、合
金、電気伝導性化合物またはこれらの混合物が好ましく
用いられる。具体例としてはAu等の金属、CuI,I
TO,SnO2 、ZnO等の誘電性透明材料を挙げるこ
とができる。特にITOが、生産性、制御性の点から好
ましい。また陰極の材料としては、仕事関数の小さい
(4eV以下の)金属、合金、電気伝導性化合物、これ
らの混合物等が好ましく用いられる。具体例としては、
リチウム、ナトリウム、マグネシウム、銅、インジウ
ム、ナトリウム−カリウム合金、マグネシウム−銅混合
物、Al/Al2 3 等である。
That is, in the organic EL device (A) of the present invention, a light emitting material made of an organic compound is provided between the first electrode provided on the polymer film and the second electrode facing the first electrode. The organic single-layer part or the organic multi-layer part has is interposed. And, of the above two electrodes, one constitutes an anode and the other constitutes a cathode, and as the material of the former anode,
For example, a metal, an alloy, an electrically conductive compound having a high work function (4 eV or more), or a mixture thereof is preferably used. As a specific example, a metal such as Au, CuI, I
Dielectric transparent materials such as TO, SnO 2 and ZnO can be mentioned. In particular, ITO is preferable in terms of productivity and controllability. Further, as the material of the cathode, a metal, an alloy, an electrically conductive compound, a mixture thereof or the like having a small work function (4 eV or less) is preferably used. As a specific example,
Examples include lithium, sodium, magnesium, copper, indium, sodium-potassium alloy, magnesium-copper mixture, and Al / Al 2 O 3 .

【0011】特に高分子フィルム上に設けられる第1電
極の材料としてITOからなる導電性膜を用い、第1電
極を陽極として作用させるのが好ましい。
In particular, it is preferable to use a conductive film made of ITO as the material of the first electrode provided on the polymer film, and make the first electrode act as an anode.

【0012】本発明の有機EL素子(A)において、上
記2つの電極のうち少なくとも一方の電極は、透光性を
得るために透明または半透明であることを必須とする。
上記ITOからなる導電性膜は透明であるので、この点
でも高分子フィルム上にITOからなる導電性膜を陽極
として設けるのが好ましい。電極の膜厚は10nm〜1
μmが好ましく、光透過率を高める観点から、特に10
〜200nmとするのが好ましい。
In the organic EL device (A) of the present invention, it is essential that at least one of the above two electrodes is transparent or semitransparent in order to obtain translucency.
Since the conductive film made of ITO is transparent, it is preferable to provide the conductive film made of ITO as an anode on the polymer film also in this respect. The thickness of the electrode is 10nm-1
μm is preferable, and from the viewpoint of increasing the light transmittance, it is particularly preferably 10
It is preferable that the thickness is 200 nm.

【0013】本発明の有機EL素子(A)において、上
記2つの電極間に介在される有機単層部又は有機多層部
は、少なくとも有機化合物からなる発光層を有し、構成
態様としては、発光層のみからなるもの、発光層と正孔
注入層とからなるもの、電子注入層と発光層とからなる
もの、電子注入層と発光層と正孔注入層とからなるも
の、接着層と発光層と正孔注入層とからなるもの(特願
平3−104284号明細書)、これらの機能を有する
材料を混合したもの、あるいは高分子に分散したものな
どを挙げることができる。なお、多層構成の場合、この
有機多層部の構成順序は電極の極性により逆となっても
よい。
In the organic EL device (A) of the present invention, the organic single layer portion or the organic multilayer portion interposed between the two electrodes has at least a light emitting layer made of an organic compound. A layer only, a light emitting layer and a hole injection layer, an electron injection layer and a light emitting layer, an electron injection layer, a light emitting layer and a hole injection layer, an adhesive layer and a light emitting layer And a hole injection layer (Japanese Patent Application No. 3-104284), a mixture of materials having these functions, or a polymer dispersed therein. In the case of a multi-layer structure, the order of forming the organic multi-layer portion may be reversed depending on the polarities of the electrodes.

【0014】発生層、正孔注入層、電子注入層の材料は
従来公知の材料が用いられる。例えば、発光層の材料と
して使用可能な有機化合物としては、ベンゾチアゾール
系、ベンゾイミダゾール系、ベンゾオキサゾール系等の
蛍光増白剤、金属キレート化オキシノイド化合物、スチ
リルベンゼン系化合物、ジスチリルピラジン誘導体、芳
香族ジメチリジン化合物などが挙げられる。
As the materials of the generation layer, the hole injection layer and the electron injection layer, conventionally known materials are used. For example, as an organic compound that can be used as a material of the light emitting layer, a benzothiazole-based, benzimidazole-based, a benzoxazole-based fluorescent whitening agent, a metal chelated oxinoid compound, a styrylbenzene-based compound, a distyrylpyrazine derivative, an aromatic Group dimethylidene compounds and the like can be mentioned.

【0015】正孔注入層の材料としては、例えばトリア
ゾール誘導体、オキサジアゾール誘導体、イミダゾール
誘導体、ポリアリールアルカン誘導体、ピラゾリン誘導
体、ピラゾロン誘導体、フェニレンジアミン誘導体、ア
リールアミン誘導体、アミノ置換カルコン誘導体、オキ
サゾール誘導体、スチリルアントラセン誘導体、フルオ
レノン誘導体、ヒドラゾン誘導体、スチルベン誘導体、
シラザン誘導体、ポリシラン系化合物、アニリン系共重
合体、チオフェンオリゴマー等の特定の導電性高分子オ
リゴマー等をあげることができる。
Examples of the material for the hole injection layer include triazole derivatives, oxadiazole derivatives, imidazole derivatives, polyarylalkane derivatives, pyrazoline derivatives, pyrazolone derivatives, phenylenediamine derivatives, arylamine derivatives, amino-substituted chalcone derivatives and oxazole derivatives. , Styrylanthracene derivative, fluorenone derivative, hydrazone derivative, stilbene derivative,
Specific conductive polymer oligomers such as silazane derivatives, polysilane compounds, aniline copolymers, and thiophene oligomers can be used.

【0016】電子注入層の材料としては、ニトロ置換フ
ルオレノン誘導体、アントラキノジメタン誘導体、ジフ
ェニルキノン誘導体、チオピランジオキシド誘導体、ナ
フタレンペリレン等の複素環テトラカルボン酸無水物、
カルボジイミド、フレオレニリデンメタン誘導体、アン
トラキノジメタン誘導体、アントロン誘導体、オキサジ
アゾール誘導体、8−キノリノール誘導体その他特定の
電子伝達性化合物等を挙げることができる。
Examples of materials for the electron injection layer include nitro-substituted fluorenone derivatives, anthraquinodimethane derivatives, diphenylquinone derivatives, thiopyran dioxide derivatives, and heterocyclic tetracarboxylic acid anhydrides such as naphthaleneperylene.
Examples thereof include carbodiimide, fluorenylidene methane derivative, anthraquinodimethane derivative, anthrone derivative, oxadiazole derivative, 8-quinolinol derivative and other specific electron transfer compounds.

【0017】また特願平3−104284号明細書に記
載の有機多層部を構成する接着層の材料としては8−キ
ノリノール又はその誘導体の金属錯体、例えばトリス
(8−キノリノール)アルミニウム、ビス(8−キノリ
ノール)マグネシウム、ビス(ベンゾ−8−キノリノー
ル)亜鉛、ビス(2−メチル−8−キノリラート)アル
ミニウムオキシド、トリス(8−キノリノール)インジ
ウム、トリス(5−メチル−8−キノリノール)アルミ
ニウム、8−キノリノールリチウム、トリス(5−クロ
ロ−8−キノリノール)ガリウム、ビス(5−クロロ−
8−キノリノール)カルシウム、5,7−ジクロル−8
−キノリノールアルミニウム、トリス(5,7−ジブロ
モ−8−ヒドロキシキノリノール)アルミニウム等があ
る。
Further, as a material for the adhesive layer constituting the organic multilayer portion described in Japanese Patent Application No. 3-104284, a metal complex of 8-quinolinol or its derivative, such as tris (8-quinolinol) aluminum, bis (8). -Quinolinol) magnesium, bis (benzo-8-quinolinol) zinc, bis (2-methyl-8-quinolinolate) aluminum oxide, tris (8-quinolinol) indium, tris (5-methyl-8-quinolinol) aluminum, 8- Lithium quinolinol, tris (5-chloro-8-quinolinol) gallium, bis (5-chloro-)
8-quinolinol) calcium, 5,7-dichloro-8
-Quinolinol aluminum, tris (5,7-dibromo-8-hydroxyquinolinol) aluminum and the like.

【0018】有機単層部または有機多層部の作製法とし
ては、特に制限はなく、各種の物理的または化学的な薄
膜形成法を用いることができる。具体的には真空蒸着
法、昇華法、塗布法、キャスト法、スピンコート法、L
B法などがある。
The method for producing the organic single layer portion or the organic multilayer portion is not particularly limited, and various physical or chemical thin film forming methods can be used. Specifically, vacuum deposition method, sublimation method, coating method, casting method, spin coating method, L
There is B method.

【0019】本発明の有機EL素子(A)は、好ましく
は高分子フィルムや蒸着膜もしくは高分子フィルムと接
着層から成る封止フィルムにより封止することが好まし
い(特願平2−409017号、特願平3−26346
7号明細書)。このような封止をすることにより、有機
単層部または有機多層部の劣化防止が図られるだけでな
く、曲げ、撓みに対する素子の耐久性が向上する。
The organic EL device (A) of the present invention is preferably sealed with a sealing film composed of a polymer film, a vapor-deposited film or a polymer film and an adhesive layer (Japanese Patent Application No. 2-409017). Japanese Patent Application No. 3-26346
No. 7). Such sealing not only prevents deterioration of the organic single layer portion or the organic multilayer portion but also improves durability of the element against bending and bending.

【0020】上記構成からなる本発明の有機EL素子
(A)において、高分子フィルム内、高分子フィルムと
第1電極との界面および第1電極の表面における1μm
以上の異物、突起物、穴、空孔などの欠陥の合計数は1
2 当たりの換算値で100個以下に限定される。その
理由は、上記各種欠陥の合計数が1m2 当たりの換算値
で100個を超えると、後述の比較例によって例証され
ているように、発光効率が低く、発光安定性が劣るだけ
でなく、曲面などに変形すると短絡(ショート)等の問
題が生じるのに対し、1m2 当たりの換算値で100個
以下であると、発光効率、発光安定性ともに優れ、また
曲面などに変形しても性能が変化しないからである。各
種欠陥の合計数は1m2 当たりの換算値で70個以下で
あるのが特に好ましい。
In the organic EL device (A) of the present invention having the above structure, 1 μm in the polymer film, at the interface between the polymer film and the first electrode and on the surface of the first electrode.
The total number of defects such as foreign matter, protrusions, holes and holes is 1
It is limited to 100 or less in converted value per m 2 . The reason is that, when the total number of the above-mentioned various defects exceeds 100 in terms of a converted value per 1 m 2 , not only the luminous efficiency is low and the luminous stability is inferior, as exemplified by a comparative example described later. When deformed into a curved surface, etc., problems such as short-circuit (short circuit) will occur, but when it is 100 or less in terms of conversion value per 1 m 2 , luminous efficiency and luminous stability are excellent, and even when deformed into a curved surface, performance is improved. Is not changed. It is particularly preferable that the total number of various defects is 70 or less in converted value per 1 m 2 .

【0021】上記各種欠陥の合計数を1m2 当たりの換
算値で100個以下とする方法としては、高分子フィル
ム原料の純度の向上、フィルム作製環境の向上(例えば
クリーンルームの使用)、成膜装置の改良(例えば装置
のフィルム成形部の平坦度の向上)、洗浄による清浄化
などが挙げられ、これらの1種または複数種を適宜用い
ることができる。
As a method of reducing the total number of the above various defects to 100 or less in terms of a converted value per 1 m 2 , the purity of the polymer film raw material is improved, the film production environment is improved (for example, use of a clean room), the film forming apparatus. (For example, improving the flatness of the film molding portion of the apparatus), cleaning by cleaning, and the like, and one or more of these can be used appropriately.

【0022】なお、上記1μm以上の異物、突起物、
穴、空孔などの欠陥の合計数の測定法としては、顕微鏡
下での観察、電子顕微鏡による観察、走査型トンネル顕
微鏡による観察、触針式膜厚計もしくは表面粗さ計によ
る測定、単色光や白色光源を用いる基板の拡大投影や、
透過光の面内分布からの評価、光干渉計による評価、輻
射温度計による評価等がある。評価法としては、これら
のうち一つを用いればよいが、より精度を上げるには2
種以上の方法により行なうのが好ましい。
It should be noted that the above-mentioned foreign matter of 1 μm or more, protrusions,
The total number of defects such as holes and holes can be measured by observing under a microscope, observing with an electron microscope, observing with a scanning tunneling microscope, measuring with a stylus type film thickness meter or surface roughness meter, monochromatic light. Or magnified projection of a substrate using a white light source,
There are evaluations based on the in-plane distribution of transmitted light, evaluations using an optical interferometer, and evaluations using a radiation thermometer. One of these can be used as the evaluation method, but 2
It is preferable to use one or more methods.

【0023】本発明の有機EL素子(A)は、上述のよ
うに高分子フィルムと、該高分子フィルム上に設けた電
極とからなる支持基板における1μm以上の異物、突起
物、穴、空孔などの欠陥の合計数を1m2 当たりの換算
値で100個以下に限定することにより、高い発光効率
を有し、その結果発光安定性に優れ、素子寿命も長いと
いう顕著な効果が得られる。
The organic EL device (A) of the present invention comprises a polymer film and an electrode provided on the polymer film as described above, and a foreign substance, a protrusion, a hole or a hole of 1 μm or more in a supporting substrate. By limiting the total number of such defects to 100 or less in terms of a converted value per 1 m 2 , high luminous efficiency is obtained, and as a result, remarkable effects such as excellent luminous stability and long device life can be obtained.

【0024】次に本発明の有機EL素子(B)について
説明する。この有機EL素子(B)が、上述の有機EL
素子(A)と異なる点は、高分子フィルムの代りに、該
高分子フィルム上に有機または無機材料膜を積層した積
層フィルムを用いている点だけであり、他の要件は同一
である。従って上記積層フィルムについてのみ説明す
る。
Next, the organic EL device (B) of the present invention will be described. This organic EL element (B) is the organic EL element described above.
The element (A) is different from the element (A) only in that a laminated film in which an organic or inorganic material film is laminated on the polymer film is used instead of the polymer film, and other requirements are the same. Therefore, only the laminated film will be described.

【0025】本発明の有機EL素子(B)において、積
層フィルムは高分子フィルム上に有機または無機材料膜
を積層したものである。ここに高分子フィルムとして
は、前記有機EL素子(A)において用いられた高分子
フィルムと同種のものを用いることができる。そしてこ
の高分子フィルム上に積層される有機または無機材料膜
用の材料としては、高分子フィルム上にμmオーダーで
薄く積層できる材料であればいかなる材料でも良いが、
その具体例としては、エポキシ樹脂、ポリエステル、ウ
レタン樹脂、メラミン樹脂、ポリアクリレートなどの有
機樹脂、SiO2、Al2 3 、などの無機酸化物、S
iN4 などの無機窒化物などが挙げられる。これら有機
または無機材料の高分子フィルム上への積層は、塗布
法、蒸着法、スパッタ法などの任意の方法で行なわれ
る。
In the organic EL device (B) of the present invention, the laminated film is a polymer film laminated with an organic or inorganic material film. The polymer film used here may be the same as the polymer film used in the organic EL device (A). The material for the organic or inorganic material film laminated on the polymer film may be any material as long as it can be laminated thinly on the polymer film in the order of μm.
Specific examples thereof include organic resins such as epoxy resin, polyester, urethane resin, melamine resin and polyacrylate, inorganic oxides such as SiO 2 and Al 2 O 3 , S
Examples thereof include inorganic nitrides such as iN 4 . Lamination of these organic or inorganic materials on the polymer film is performed by any method such as a coating method, a vapor deposition method and a sputtering method.

【0026】本発明の有機EL素子(B)における積層
フィルムの膜厚は、積層フィルムの可撓性を十分に活用
するため、前記有機EL素子(A)における高分子フィ
ルムの膜厚と同様に0.001μm〜1mmであるのが
好ましい。
The thickness of the laminated film in the organic EL element (B) of the present invention is the same as the thickness of the polymer film in the organic EL element (A) in order to fully utilize the flexibility of the laminated film. It is preferably 0.001 μm to 1 mm.

【0027】有機EL素子(B)においても積層フィル
ム内、積層フィルムと第1電極との界面および第1電極
の表面における1μm以上の異物、突起物、穴、空孔な
どの欠陥の合計数が1m2 当たりの換算値で100個以
下に限定されているので、有機EL素子(A)と同様に
発光効率、発光安定性に優れ、また曲面などに変形して
も性能が変化しないという顕著な効果が奏せられる。
Also in the organic EL element (B), the total number of defects such as foreign matter, protrusions, holes, and voids of 1 μm or more in the laminated film, the interface between the laminated film and the first electrode, and the surface of the first electrode is large. Since it is limited to 100 or less in terms of converted value per 1 m 2, it is excellent in light emission efficiency and light emission stability like the organic EL element (A), and its performance does not change even when deformed into a curved surface. It is effective.

【0028】[0028]

【実施例】以下実施例により本発明を更に詳細に説明す
る。 実施例1 サイズ25mm×75mm、厚さ0.1mmの市販PE
S(ポリエーテルスルホン)フィルム(住友ベークライ
ト(株)製スミライトFS−1300)上に蒸着法に
て、サイズ20mm×70mm、厚さ200nmのIT
O膜を成膜した。得られたITO膜蒸着PESフィルム
からなる透明支持基板をクリーンルーム内でイソプロピ
ルアルコール(以下IPAという)中にて5分間、さら
に純水中にて5分間、超音波洗浄を行ない、次いでUV
オゾン洗浄を(株)サムコインターナショナル研究所製
の装置にて10分間行なった。オリンパス製顕微鏡BH
3−MJLを用いて、洗浄後の透明支持基板について1
μm以上の異物、突起物、穴、空孔などの欠陥の合計数
を測定を行なったところ、これらの合計数は1m2 当た
りの換算値で50個であった。
The present invention will be described in more detail with reference to the following examples. Example 1 Commercial PE having a size of 25 mm × 75 mm and a thickness of 0.1 mm
IT (size 20 mm × 70 mm, thickness 200 nm) on an S (polyethersulfone) film (Sumilite FS-1300 manufactured by Sumitomo Bakelite Co., Ltd.) by vapor deposition.
An O film was formed. The obtained transparent supporting substrate made of the ITO film-deposited PES film was subjected to ultrasonic cleaning in a clean room for 5 minutes in isopropyl alcohol (hereinafter referred to as IPA) and further for 5 minutes in pure water, and then UV.
Ozone cleaning was performed for 10 minutes using an apparatus manufactured by Samco International Laboratories Inc. Olympus Microscope BH
About the transparent support substrate after cleaning using 3-MJL 1
The total number of defects such as foreign matter having a size of μm or more, protrusions, holes, and holes was measured, and the total number was 50 per 1 m 2 in terms of conversion value.

【0029】このITO蒸着PESフィルムからなる透
明支持基板を市販の蒸着装置(日本真空技術(株)製)
の基本ホルダーに固定し、モリブデン製の抵抗加熱ボー
トにN,N′−ビス(3−メチルフェニル)−N,N′
−ジフェニル〔1,1′−ビフェニル〕−4,4′−ジ
アミン(以下TPDという)を200mg入れ、また違
うモリブデン製ボートに4,4′−ビス(2,2′−ジ
フェニルビニル)ビフェニル(以下DPVBiという)
を200mg入れて真空槽を1×10-4Paまで減圧し
た。その後TPD入りの前記ボートを215〜220℃
まで加熱し、TPDを蒸着速度0.1〜0.3nm/s
で透明支持基板上に蒸着して、膜厚60nmの正孔注入
層を成膜させた。この時のITO蒸着PESフィルム温
度は室温であった。これを真空槽より取り出すことな
く、正孔注入層の上に、もう一つのボートよりDPVB
iを発光層として40nm積層蒸着した。蒸着条件はボ
ート温度が240℃で蒸着速度は0.1〜0.3nm/
s、ITO蒸着PESフィルム温度は室温であった。こ
れを真空槽より取り出し、上記発光層の上にステンレス
スチール製のマスクを配置し、再び基板ホルダーに固定
した。次にモリブデン製ボートにトリス(8−キノリノ
−ル)アルミニウム(以下Alq3 という)を200m
g入れて真空槽に装着した。さらに、モリブデン製の抵
抗加熱ボートにマグネシウムリボン1gを入れ、またタ
ングステン製バスケットに銀ワイヤーを500mg入れ
蒸着した。その後、真空槽を1×10-4Paまで減圧し
てから、Alq3 の入ったモリブデンボートを230℃
まで加熱し0.01〜0.03nm/sの蒸着速度でモ
リブデンボートからAlq3 を接着層として20nm蒸
着した。さらに、タングステンバスケットから銀を0.
1nm/sの蒸着速度で蒸着し、同時に抵抗加熱法によ
りもう一方のモリブデンボートからマグネシウムを1.
4nm/sの蒸着速度でそれぞれ蒸着した。上記条件で
マグネシウムと銀の混合金属電極を150nm積層蒸着
し、対向電極とした。
A transparent supporting substrate made of this ITO vapor-deposited PES film is put on a commercially available vapor deposition apparatus (manufactured by Nippon Vacuum Technology Co., Ltd.).
Fixed to the base holder of N, N'N'-bis (3-methylphenyl) -N, N 'on a resistance heating boat made of molybdenum.
-Diphenyl [1,1'-biphenyl] -4,4'-diamine (hereinafter referred to as TPD) was put in 200 mg and 4,4'-bis (2,2'-diphenylvinyl) biphenyl (hereinafter DPVBi)
Was put into the vacuum chamber and the pressure in the vacuum chamber was reduced to 1 × 10 −4 Pa. Then, the boat with TPD is heated at 215 to 220 ° C.
To TPD and vapor deposition rate 0.1-0.3nm / s
Was vapor-deposited on the transparent supporting substrate to form a hole injection layer having a film thickness of 60 nm. At this time, the temperature of the ITO-deposited PES film was room temperature. Without removing this from the vacuum chamber, the DPVB
i was used as a light emitting layer, and 40 nm was laminated and deposited. The vapor deposition conditions are a boat temperature of 240 ° C. and a vapor deposition rate of 0.1 to 0.3 nm /
s, ITO vapor deposition PES film temperature was room temperature. This was taken out of the vacuum chamber, a stainless steel mask was placed on the light emitting layer, and it was fixed again to the substrate holder. Next, in a molybdenum boat, tris (8-quinolinol) aluminum (hereinafter referred to as Alq 3 ) 200 m
g and put in a vacuum chamber. Further, 1 g of a magnesium ribbon was placed in a resistance heating boat made of molybdenum, and 500 mg of a silver wire was placed in a tungsten basket and vapor-deposited. Then, the vacuum chamber was decompressed to 1 × 10 −4 Pa, and the molybdenum boat containing Alq 3 was heated to 230 ° C.
The Alq 3 molybdenum boat at a deposition rate of the heated 0.01~0.03nm / s up to 20nm deposited as an adhesive layer. In addition, silver was added to the tungsten basket in an amount of 0.
The vapor deposition was performed at a vapor deposition rate of 1 nm / s, and at the same time, 1.
Deposition was performed at a deposition rate of 4 nm / s. Under the above conditions, a mixed metal electrode of magnesium and silver was vapor-deposited in a thickness of 150 nm to form a counter electrode.

【0030】この様にして、PESフィルム上にITO
膜(透明導電性膜=陽極)、TPD膜(正孔注入層)、
DPVBi層(発光層)、Alq3 層(接着層)および
マグネシウムと銀の混合金属電極(陰極)を順次設けた
有機EL素子を得た。
In this way, ITO is formed on the PES film.
Film (transparent conductive film = anode), TPD film (hole injection layer),
An organic EL device in which a DPVBi layer (light emitting layer), an Alq 3 layer (adhesive layer) and a mixed metal electrode of magnesium and silver (cathode) were sequentially provided was obtained.

【0031】得られた有機EL素子を乾燥空気中で発光
させたところ、10V、15mA/cm2 で輝度350
cd/cm2 の均一発光が確認された。またこの有機E
L素子を円周7cmの円筒状および円周2.5cmの円
筒状にそれぞれ変形したが、いずれも上記と同様の性能
を維持していた。
When the obtained organic EL device was made to emit light in dry air, a brightness of 350 at 10 V and 15 mA / cm 2 was obtained.
A uniform light emission of cd / cm 2 was confirmed. Also this organic E
The L element was deformed into a cylindrical shape having a circumference of 7 cm and a cylindrical shape having a circumference of 2.5 cm, respectively, but each maintained the same performance as described above.

【0032】実施例2 PESフィルム(膜厚100μm)をベースフィルムと
した積層フィルム上にITOを成膜してある透明支持基
板(住友ベークライト(株)製)について実施例1と同
様にIPA洗浄、純水洗浄、UVオゾン洗浄を順次行な
った後、1μm以上の異物、突起物、穴、空孔などの欠
陥の合計数を実施例1と同様に測定した結果、これらの
合計数は1m2 当たりの換算値で20個であった。
Example 2 A transparent support substrate (manufactured by Sumitomo Bakelite Co., Ltd.) in which ITO was formed on a laminated film using a PES film (film thickness 100 μm) as a base film was washed with IPA in the same manner as in Example 1. After sequentially performing cleaning with pure water and UV ozone cleaning, the total number of defects such as foreign matter of 1 μm or more, protrusions, holes and holes was measured in the same manner as in Example 1, and the total number was 1 m 2 per 1 m 2 . The converted value was 20 pieces.

【0033】この透明支持基板を用いて実施例1と同様
の方法で、実施例1と同様の構成を有する有機EL素子
を作製した。得られた有機EL素子を乾燥空気中で発光
させたところ、10V、12mA/cm2 で輝度350
cd/cm2 の均一発光が認められた。また実施例1と
同様に、円筒状に変形しても性能に変化は生じなかっ
た。
Using this transparent support substrate, an organic EL device having the same structure as in Example 1 was prepared by the same method as in Example 1. When the obtained organic EL device was made to emit light in dry air, the brightness was 350 at 10 V and 12 mA / cm 2.
A uniform light emission of cd / cm 2 was observed. Also, as in Example 1, there was no change in performance even when deformed into a cylindrical shape.

【0034】実施例3 サイズ25mm×75mm、厚さ0.1mmのPET
(ポリエチレンテレフタレート)フィルム上に蒸着法に
て、サイズ20mm×70mm、厚さ200nmのIT
O膜を成膜した。得られたITO膜蒸着PETフィルム
からなる透明支持基板を、実施例1と同様に、IPA中
にて5分間、さらに純水中にて5分間超音波洗浄を行な
い、次いでUVオゾン洗浄を10分間行なった。洗浄後
の透明支持基板について実施例1と同様に1μm以上の
異物、突起物、穴、空孔などの欠陥の合計数を測定した
結果、これらの合計数は1m2 当たりの換算値で20個
であった。
Example 3 PET having a size of 25 mm × 75 mm and a thickness of 0.1 mm
(Polyethylene terephthalate) IT of size 20 mm x 70 mm and thickness 200 nm is formed on the film by vapor deposition.
An O film was formed. The obtained transparent support substrate made of the ITO film-deposited PET film was subjected to ultrasonic cleaning in IPA for 5 minutes and then in pure water for 5 minutes in the same manner as in Example 1, and then UV ozone cleaning for 10 minutes. I did. The total number of defects such as foreign matters, protrusions, holes, and holes having a size of 1 μm or more was measured on the transparent support substrate after washing in the same manner as in Example 1. As a result, the total number was 20 per 1 m 2 in terms of conversion value. Met.

【0035】洗浄後の透明支持基板を用いて、実施例1
と同様の方法で、実施例1と同様の構成を有する有機E
L素子を作製した。得られた有機EL素子を乾燥空気中
にて発光させた結果、10V、11mA/cm2 で輝度
350cd/m2 の均一発光が認められた。また実施例
1と同様に有機EL素子を円筒形に変形しても、上記性
能の低下は認められなかった。
Example 1 was carried out using the transparent supporting substrate after washing.
Organic E having the same structure as in Example 1 in the same manner as
An L element was produced. The obtained organic EL device was caused to emit light in dry air. As a result, uniform light emission with a brightness of 350 cd / m 2 was observed at 10 V and 11 mA / cm 2 . Further, even when the organic EL device was deformed into a cylindrical shape as in Example 1, no deterioration in the above performance was observed.

【0036】実施例4 実施例1にて作製した有機EL素子を、テフロンAF1
600(デュポン社製)を5wt%溶解してフロリナー
トFC−75(3M社製)へ含浸し引き上げ、空気中で
乾燥することにより約200μmの保護膜を成膜した。
そしてこの保護膜付き素子を大気中で発光させたところ
10V、15mA/cm2 で輝度350cd/m2 の均
一発光が確認された。また実施例1と同様に円筒形に変
形しても、上記性能の低下は認められなかった。
Example 4 The organic EL device produced in Example 1 was replaced with Teflon AF1.
5 wt% of 600 (manufactured by DuPont) was dissolved, impregnated in Fluorinert FC-75 (manufactured by 3M), pulled up, and dried in air to form a protective film of about 200 μm.
When this device with a protective film was caused to emit light in the atmosphere, uniform light emission with a brightness of 350 cd / m 2 was confirmed at 10 V and 15 mA / cm 2 . Further, even if the material was deformed into a cylindrical shape as in Example 1, no deterioration in the above performance was observed.

【0037】比較例1 実施例1と同様にしてPESフィルム上にITO膜を成
膜して得た透明支持基板について、実施例1で行なった
IPA洗浄、純水洗浄、UVオゾン洗浄を行なわずに、
実施例1と同様の方法で1μm以上の異物、突起物、
穴、空孔などの欠陥の合計数を測定した結果、これらの
合計数は1m2 当たりの換算値で150個であった。こ
の透明支持基板を用いて、実施例1と同様の方法で、実
施例1と同様の構成を有する有機EL素子を作製した。
得られた有機EL素子を乾燥空気中で発光させたとこ
ろ、10V、180mA/cm2 で輝度25cd/cm
2 の不均一発光が観察された。またこの有機EL素子を
実施例1と同様に円筒形に変形したところ短絡(ショー
ト)した。
Comparative Example 1 The transparent support substrate obtained by forming an ITO film on a PES film in the same manner as in Example 1 was not subjected to the IPA cleaning, pure water cleaning, and UV ozone cleaning performed in Example 1. To
In the same manner as in Example 1, foreign matter of 1 μm or more, protrusions,
As a result of measuring the total number of defects such as holes and holes, the total number was 150 in terms of conversion value per 1 m 2 . Using this transparent support substrate, an organic EL device having the same configuration as that of Example 1 was manufactured by the same method as that of Example 1.
When the obtained organic EL device was caused to emit light in dry air, the luminance was 25 cd / cm at 10 V and 180 mA / cm 2.
Two non-uniform emission were observed. When this organic EL device was deformed into a cylindrical shape in the same manner as in Example 1, a short circuit occurred.

【0038】[0038]

【発明の効果】以上のように本発明によれば、発光効
率、発光安定性に優れ、かつ種々の形状に変形しても性
質が変化しないので、これに限定されるものではない
が、薄膜パネル、ベルト状、円筒状などの各種形状を有
する表示素子として好適な有機EL素子が提供された。
As described above, according to the present invention, the luminous efficiency and the luminous stability are excellent, and the property does not change even when deformed into various shapes. Therefore, the thin film is not limited to this. An organic EL device suitable as a display device having various shapes such as a panel, a belt, and a cylinder is provided.

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 高分子フィルム上に、第1電極と、有機
化合物からなる発光材料を有する有機単層部または有機
多層部と、第2電極とを順次設けてなり、上記2つの電
極の少なくとも一方の電極が透明または半透明である有
機エレクトロルミネッセンス素子において、 高分子フィルム内、高分子フィルムと第1電極との界面
および第1電極の表面における1μm以上の異物、突起
物、穴、空孔などの欠陥の合計数が1m2 当たりの換算
値で100個以下であることを特徴とする有機EL素
子。
1. A first electrode, an organic single-layer part or an organic multi-layer part having a light-emitting material made of an organic compound, and a second electrode are sequentially provided on a polymer film, and at least one of the two electrodes is provided. In an organic electroluminescence device in which one electrode is transparent or semi-transparent, a foreign substance, a protrusion, a hole, or a pore of 1 μm or more in the polymer film, the interface between the polymer film and the first electrode, and the surface of the first electrode An organic EL element having a total number of defects such as 100 or less in terms of a converted value per 1 m 2 .
【請求項2】 高分子フィルム上に有機または無機材料
膜を積層した積層フィルム上に、第1電極と、有機化合
物からなる発光材料を有する有機単層部または有機多層
部と、第2電極とを順次設けてなり、上記2つの電極の
少なくとも一方の電極が透明または半透明である有機エ
レクトロルミネッセンス素子において、 積層フィルム内、積層フィルムと第1電極との界面およ
び第1電極の表面における1μm以上の異物、突起物、
穴、空孔などの欠陥の合計数が1m2 当たりの換算値で
100個以下であることを特徴とする有機EL素子。
2. A first electrode, an organic single layer part or an organic multi-layer part having a light emitting material composed of an organic compound, and a second electrode on a laminated film in which an organic or inorganic material film is laminated on a polymer film. An organic electroluminescent element in which at least one of the above-mentioned two electrodes is transparent or semi-transparent, 1 μm or more in the laminated film, at the interface between the laminated film and the first electrode and on the surface of the first electrode. Foreign matter, protrusions,
An organic EL device characterized in that the total number of defects such as holes and holes is 100 or less in terms of a converted value per 1 m 2 .
【請求項3】 高分子フィルムが透明性と可撓性を有
し、膜厚が0.001μm〜1mmである高分子フィル
ムからなる、請求項1または2記載の有機EL素子。
3. The organic EL device according to claim 1, wherein the polymer film has transparency and flexibility and is made of a polymer film having a thickness of 0.001 μm to 1 mm.
【請求項4】 高分子フィルム上に積層される有機また
は無機材料膜が、有機高分子材料または無機酸化物もし
くは窒化物からなる、請求項2に記載の有機EL素子。
4. The organic EL device according to claim 2, wherein the organic or inorganic material film laminated on the polymer film is made of an organic polymer material or an inorganic oxide or nitride.
【請求項5】 高分子フィルムまたは積層フィルム上に
設けられる第1電極がITOからなる透明導電性膜であ
る、請求項1または2に記載の有機EL素子。
5. The organic EL device according to claim 1, wherein the first electrode provided on the polymer film or the laminated film is a transparent conductive film made of ITO.
JP4270552A 1992-10-08 1992-10-08 Organic el element Pending JPH06124785A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4270552A JPH06124785A (en) 1992-10-08 1992-10-08 Organic el element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4270552A JPH06124785A (en) 1992-10-08 1992-10-08 Organic el element

Publications (1)

Publication Number Publication Date
JPH06124785A true JPH06124785A (en) 1994-05-06

Family

ID=17487770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4270552A Pending JPH06124785A (en) 1992-10-08 1992-10-08 Organic el element

Country Status (1)

Country Link
JP (1) JPH06124785A (en)

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