JPH06124562A - Floating head slider and rotary disk memory device - Google Patents

Floating head slider and rotary disk memory device

Info

Publication number
JPH06124562A
JPH06124562A JP27398792A JP27398792A JPH06124562A JP H06124562 A JPH06124562 A JP H06124562A JP 27398792 A JP27398792 A JP 27398792A JP 27398792 A JP27398792 A JP 27398792A JP H06124562 A JPH06124562 A JP H06124562A
Authority
JP
Japan
Prior art keywords
positive pressure
bearing surface
slider
cross rail
pressure generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27398792A
Other languages
Japanese (ja)
Other versions
JP2874484B2 (en
Inventor
Yoshinori Takeuchi
芳徳 竹内
Kenji Mori
健次 森
Masaaki Matsumoto
真明 松本
Koji Agari
宏司 上利
Takemasa Shimizu
丈正 清水
Eisei Togawa
衛星 戸川
Yasuo Kojima
康生 小島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP27398792A priority Critical patent/JP2874484B2/en
Priority to US08/135,442 priority patent/US5430591A/en
Publication of JPH06124562A publication Critical patent/JPH06124562A/en
Application granted granted Critical
Publication of JP2874484B2 publication Critical patent/JP2874484B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To adjust the floating posture of the slider by providing contracted parts where the rail width once narrows from the front to the rear end on an inflow side from the center in the longitudinal direction on a pair of positive pressure floating surfaces of both sides of the slider. CONSTITUTION:The shape of side rails 17 for improving a yaw angle characteristic and the negative pressure acting on a negative pocket part 19 lessen the influence of the bearing effect of the inflow side on the rear flow of the contracted parts 21. A bearing surface 24 of the rear part has the characteristic of a nearly independent plane bearing. The constricted parts 21 are provided on the inside side of the center in the longitudinal direction of the slider 12, by which the adjustment of the floating posture of the slider 12 by adjusting the increase of the area of the bearing surface 14 of the rear part or its position is enable.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、磁気ディスク装置等の
ように、走行する記憶媒体面上を微小な浮上隙間で浮上
する浮動ヘッドスライダ及び回転円板記憶装置に係り、
特に浮上面形状を改良し、リニア、ロータリー等のアク
セス機構によらず任意の半径位置での浮上量を概ね一定
にし、スライダの浮上特性を向上した浮動ヘッドスライ
ダとそのスライダを搭載した回転円板記憶装置に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a floating head slider and a rotating disk storage device, such as a magnetic disk device, which floats over a surface of a traveling storage medium with a minute floating gap.
In particular, the floating surface shape has been improved, and the flying height at any radial position has been made almost constant regardless of the access mechanism such as linear or rotary, and the flying head slider with improved flying characteristics of the slider and the rotating disk equipped with the slider. Regarding a storage device.

【0002】[0002]

【従来の技術】従来の技術を磁気ディスク装置を例にと
って示す。従来の正圧を利用した磁気ディスク装置用浮
動ヘッドスライダとして、例えば特開平2-101688号公報
に記載のテーパフラット形スライダがある。このスライ
ダは傾斜面と平面部からなるセンターレールと2本のサ
イドレールとからなる。センターレールは流入側幅が狭
く、流出端幅が広くなり、流出端の端面にトランスデュ
ーサが搭載されている。サイドレールは前端における幅
を越えず、流出端まで達しておらず、各レールは幅がほ
ぼ一定のブリード部を介し隔離された構造である。
2. Description of the Related Art A conventional technique will be described by taking a magnetic disk device as an example. As a conventional floating head slider for a magnetic disk device utilizing positive pressure, there is, for example, a taper flat slider described in Japanese Patent Laid-Open No. 2-101688. This slider is composed of a center rail composed of an inclined surface and a plane portion and two side rails. The center rail has a narrow inflow side width and a wide outflow end width, and a transducer is mounted on the end face of the outflow end. The side rails do not exceed the width at the front end and do not reach the outflow end, and each rail has a structure in which it is isolated via a bleed portion having a substantially constant width.

【0003】類似の例として特開平4-17176号の開示が
ある。この公知例は3つの浮上面が前後に分離され、流
入側の両側端にテーパフラットレールを配置し、中央流
出端部にのみ平板レールがある構造である。
A similar example is disclosed in Japanese Patent Laid-Open No. 4-17176. In this known example, three air bearing surfaces are separated into front and rear, tapered flat rails are arranged at both ends on the inflow side, and a flat plate rail is provided only at the central outflow end.

【0004】また、従来の負圧利用浮動ヘッドスライダ
として、特開昭60-101781号公報に記載されたものがあ
る。この公知例におけるスライダはそのクロスレール流
出側に負圧発生用の負圧ポケットを設け、スライダの両
サイドに設けたサイドレールの長手方向中央部のレール
幅を流入側、流出側より狭くした構造である。
A conventional floating head slider using negative pressure is disclosed in Japanese Patent Laid-Open No. 60-101781. The slider in this known example is provided with a negative pressure pocket for generating negative pressure on the cross rail outflow side, and the rail width of the central portion in the longitudinal direction of the side rails provided on both sides of the slider is narrower than the inflow side and the outflow side. Is.

【0005】類似の例として米国特許第5062017
号公報に記載されたものがある。この公知例は、負圧凹
部の両サイドのサイドレールのくびれ位置を流入端から
約1/3にし、くびれの幅をレール幅の約1/2にし、
くびれ及びクロスレールの深さは負圧凹部より浅い第2
の段差で構成する構造である。
As a similar example, US Pat. No. 5,062,017
There is one described in the publication. In this known example, the constriction positions of the side rails on both sides of the negative pressure recess are set to about 1/3 from the inflow end, and the constriction width is set to about 1/2 of the rail width.
Constriction and cross rail depth shallower than negative pressure recess 2nd
It is a structure composed of steps.

【0006】その他の類似の例として米国特許第480
2042号公報に記載されたものがある。この公知例
は、スライダの流出端に全幅に渡ってヘッド部さらにク
ロスバーを設けた構造である。負圧凹部は、流出端まで
達しておらずヘッド部又はクロスバーの前に横溝を設け
ている。
Another similar example is US Pat. No. 480.
There is one described in Japanese Patent No. 2042. This known example has a structure in which a head portion and a cross bar are provided over the entire width at the outflow end of the slider. The negative pressure recess does not reach the outflow end and has a lateral groove in front of the head portion or the crossbar.

【0007】又、別のその他の類似の例として特開昭6
0−211671号公報に記載されたものがある。この
公知例はスライダの両サイドに設けた正圧サイドレール
と負圧凹部をグルーブにより分離し、負圧凹部はバッフ
ァパッドにより形成するする構造である。
Another similar example is disclosed in Japanese Patent Laid-Open No.
There is one described in Japanese Patent Application Laid-Open No. 0-211671. This known example has a structure in which a positive pressure side rail provided on both sides of the slider and a negative pressure recess are separated by a groove, and the negative pressure recess is formed by a buffer pad.

【0008】これらスライダを搭載するアクセス機構と
して従来、ディスクの半径方向に直線的に移動して位置
決めするリニア方式と回転軸を中心に揺動して所定の半
径位置に位置決めするロータリー方式がある。
Conventionally, as an access mechanism for mounting these sliders, there are a linear system for linearly moving and positioning in the radial direction of the disk and a rotary system for oscillating around a rotation shaft to position at a predetermined radial position.

【0009】[0009]

【発明が解決しようとする課題】磁気ディスク装置は、
小形化、大容量化の傾向にある。その実現手段の一つと
して記録の面密度を高める方法がある。面密度は線密度
とトラック密度からなり、特に線密度を高めるために、
スライダの浮上量は狭小化する必要があり、ディスク上
のトラックから他のトラックへの移動動作であるシーク
時の加振や、円板うねりによる加振等各種外乱に対し、
浮上量変化を小さく押える必要がある。
The magnetic disk drive is
There is a trend toward smaller size and larger capacity. As one of the means for realizing this, there is a method of increasing the areal density of recording. Area density consists of linear density and track density.
The flying height of the slider needs to be narrowed, and it is possible to prevent various disturbances such as vibration at the time of seek, which is a movement operation from a track on the disk to another track, and vibration due to the waviness of the disk.
It is necessary to keep the change in the flying height small.

【0010】さらに、再生ヘッドに高密度記録に適した
磁気抵抗素子(以下、MRヘッドと称する)を用いた場
合や、小形ディスク装置で採用され始めた内周と外周の
線記録密度を一定にする一定密度記録においては、ディ
スク上の任意の位置の浮上量を一定にする技術が重要に
なる。実用的には内周の浮上量に対し他の位置の浮上量
が100%から120%の範囲であることが要求され
る。
Furthermore, when a magnetoresistive element (hereinafter referred to as an MR head) suitable for high-density recording is used in the reproducing head, or when the inner and outer linear recording densities which have begun to be adopted in a small disk device are kept constant. In the constant density recording, the technique of making the flying height constant at any position on the disk is important. Practically, the flying height at other positions is required to be in the range of 100% to 120% with respect to the flying height at the inner circumference.

【0011】そのためには、スライダの基本浮上特性の
内、ディスクの内周と外周の速度差による浮上量の変化
(以下、浮上の速度特性と称する。)がない、または小
さい特性やディスク回転時のディスク接線方向に対する
スライダ長手方向とのなす角(以下、ヨー角と称す
る。)が付いた時のスライダ浮上量の低下(以下、ヨー
角特性と称する。)がない又は小さい特性が要求され
る。
To this end, among the basic flying characteristics of the slider, there is no or small change in the flying height due to the speed difference between the inner circumference and the outer circumference of the disk (hereinafter referred to as the flying speed characteristics), or when the disk rotates. There is no or a small characteristic that the slider flying height is not lowered (hereinafter referred to as yaw angle characteristic) when an angle (hereinafter, referred to as yaw angle) formed by the slider tangential direction with respect to the disk tangential direction is provided. .

【0012】ところが、上述した正圧のみを使う従来技
術、例えば、特開平2-101688号公報に記載のテーパフラ
ット形スライダでは、一般的に正圧力が速度と共に増加
するために、浮上の速度特性が悪く、内周と外周の速度
が2倍になると、浮上量は約1.5から1.6倍とな
り、リニア方式アクセス機構では、ディスクの内外周で
浮上量を一定にすることは不可能である。また、ヨー角
特性も悪く、ヨー角が付いたときのスライダ浮上量の低
下も大きい。
However, in the conventional technique using only the positive pressure described above, for example, in the taper flat slider described in Japanese Patent Laid-Open No. 2-101688, the positive pressure generally increases with the velocity, and therefore the flying velocity characteristic is increased. When the inner and outer velocities double, the flying height increases from about 1.5 to 1.6 times, and it is impossible for the linear access mechanism to keep the flying height constant on the inner and outer circumferences of the disk. Is. In addition, the yaw angle characteristic is poor, and the slider flying height when the yaw angle is attached is greatly reduced.

【0013】従来ロータリー方式では、外周側の浮上の
速度特性による浮上量の増加をヨー角特性による浮上量
の低下で相殺して浮上量を一定にする方法が取られてい
たが、浮上量変動の観点から見ると、シーク動作中には
スライダに流入する気体はディスク速度に対しシーク速
度分だけヨー角が加わる(以下シーク時ヨー角と称
す。)こととなり、大きな浮上量低下を招く。今後、低
浮上量の系においてはディスクとの接触頻度が急増し、
最悪の場合、接触による損傷が発生し問題となる点につ
いて考慮がされていなかった。つまり、浮上量を一定に
保ち且つ、浮上量変動を小さく押える点が考慮されてい
なかった。特開平4-17176号公報についても同様であ
る。
In the conventional rotary system, a method has been adopted in which an increase in the flying height due to the floating speed characteristic on the outer peripheral side is offset by a decrease in the flying height due to the yaw angle characteristic to make the flying height constant. From the point of view of the above, during the seek operation, the gas flowing into the slider is added with a yaw angle corresponding to the seek speed with respect to the disk speed (hereinafter referred to as a seek yaw angle), which causes a large decrease in the flying height. In the future, the frequency of contact with the disk will increase rapidly in low flying height systems,
In the worst case, no consideration was given to the problem of contact damage. That is, the fact that the flying height can be kept constant and fluctuations in the flying height can be kept small has not been taken into consideration. The same applies to Japanese Patent Laid-Open No. 4-17176.

【0014】一方、浮上の速度特性の改良の手段として
負圧を利用する方法が有る。従来のサイドレール後端に
ヘッドを搭載する負圧利用浮動ヘッドスライダとして、
たとえば特開昭60-101781号公報に記載したものがあ
る。この公知例では、サイドレールが一定幅のテーパフ
ラット形で問題だったヨー角特性の改善を正圧レールの
中央部幅を狭く前後の幅を十分広く取る形状で実現して
いる。
On the other hand, there is a method of utilizing a negative pressure as a means for improving the floating velocity characteristic. As a floating head slider using negative pressure with a head mounted on the rear end of a conventional side rail,
For example, there is one described in JP-A-60-101781. In this publicly known example, the improvement of the yaw angle characteristic, which was a problem with the side rail having a constant flat width, is realized by a shape in which the central width of the positive pressure rail is narrow and the front and rear widths are sufficiently wide.

【0015】しかし、このためサイドレールの実質的レ
ール中心間距離が縮小し、スライダ長手方向回転軸回り
の空気膜剛性(ロール剛性と称す)が、実質的レール中
心間距離の約2乗に比例して減少する。又、くびれ位置
より流出側が平板軸受化することによっても、空気膜反
力自体の低下を招き、ロール剛性が低下する。ロール剛
性の低下はシーク時のシーク加速度によってスライダ重
心と回転中心の違い起因したロール方向の浮上量低下
(以下加速度沈み込みと称す)を増大し、最悪の場合、
ディスクとの接触による損傷が発生し問題となる点につ
いて考慮がされていなかった。この方式の負圧利用スラ
イダではヨー角特性とロール剛性がトレードオフの関係
にあり両立が困難であった。また、ロール剛性の低下
は、スライダの加工、組み立てで発生するスライダ幅方
向の誤差に対して大きな浮上量の変化又は低下をもたら
し、生産の観点から問題で有る。
However, for this reason, the substantial rail-center distance of the side rails is reduced, and the air film rigidity (referred to as roll rigidity) around the rotation axis in the slider longitudinal direction is proportional to the square of the substantial rail-center distance. And then decrease. Further, by making the outflow side from the constricted position a flat plate bearing, the air film reaction force itself is lowered, and the roll rigidity is lowered. The decrease in roll rigidity increases the decrease in flying height in the roll direction due to the difference between the center of gravity of the slider and the center of rotation due to the seek acceleration during seek (hereinafter referred to as acceleration depression), and in the worst case,
No consideration was given to the problem of damage caused by contact with the disk. With this type of negative pressure slider, there is a trade-off between yaw angle characteristics and roll rigidity, making it difficult to achieve both. Further, the decrease in roll rigidity causes a large change or decrease in the flying height with respect to the error in the slider width direction that occurs during slider processing and assembly, which is a problem from the viewpoint of production.

【0016】又、負圧利用スライダの他の課題は負圧溝
深さを浅くすることと負圧力調整手段を持つことであ
る。負圧溝は形状的に機械加工できないため、イオンミ
リング等の加工法によって行う必要が有るが、加工レイ
トが約1μm毎時(一般的イオンミリングの場合)と遅
いため、加工時間を要する。そのため、加工時間短縮の
ため、負圧溝深さは一段で、深くても10μm前後が望
ましい。しかし、前述の公知例では負圧部の流入側にク
ロスレールが全幅に渡って設けているため、必要な浮上
の速度特性を得るためには負圧溝深さを20μm前後と
深くする必要が有り、加工時間増加及び、加工精度悪化
の点で問題であった。必要以上の負圧力は浮上の速度特
性を満たさないばかりか正圧レールの浮上特性劣化(例
えばテーパ部への塵付着等)により、浮上量低下を加速
し、最悪の場合ディスクとの接触による損傷が発生し問
題となる点が考慮がされていなかった。
Another problem of the slider utilizing negative pressure is to make the depth of the negative pressure groove shallow and to have a negative pressure adjusting means. Since the negative pressure groove cannot be machined geometrically, it is necessary to perform it by a processing method such as ion milling, but since the processing rate is as slow as about 1 μm / hour (in the case of general ion milling), processing time is required. Therefore, in order to shorten the processing time, the depth of the negative pressure groove is one step, and it is desirable that the depth is about 10 μm at the deepest. However, in the above-mentioned known example, since the cross rail is provided over the entire width on the inflow side of the negative pressure portion, it is necessary to make the negative pressure groove depth as deep as about 20 μm in order to obtain the required floating velocity characteristics. Yes, there was a problem in that the processing time increased and the processing accuracy deteriorated. Excessive negative pressure not only does not satisfy the levitation speed characteristics, but also deteriorates the levitation characteristics of the positive pressure rail (for example, adhesion of dust to the taper part, etc.), which accelerates the decrease in the levitation amount and, in the worst case, damage due to contact with the disk. Was not taken into consideration.

【0017】又、コンタクトスタートストップ時、クロ
スレールがディスク面を粗さ、突起を削理、発塵の原因
になることや、浮上中クロスレール部に進入した塵埃の
排出部がなくクロスレール流入側端部への付着成長やク
ロスレール部への進入による塵埃を介した接触によるデ
ィスク面の損傷の問題点が考慮されていなかった。
Further, at the time of contact start / stop, the cross rail causes roughness of the disk surface, cutting of protrusions and dust generation, and there is no discharge part for dust entering the cross rail part during floating, and the cross rail enters the cross rail. No consideration was given to the problem of damage to the disk surface due to contact growth through dust on the side edges and contact with the cross rail.

【0018】米国特許第5062017号もほぼ同様で
ある。但し、サイドレールのくびれ部及びクロスレール
部と負圧部の深さを異なって構成している。これには2
種類のマスクを使って2回加工する必要が有り、マスク
の位置合わせや深さ加工誤差による浮上特性ばらつき、
又製作時間による加工コスト増加等の点で問題となる点
について考慮がされていなかった。クロスレールの深さ
が1〜2μmと浅く塵埃の問題は同様である。
US Pat. No. 5,062,2017 is substantially the same. However, the constricted portions of the side rails, the cross rail portion, and the negative pressure portion have different depths. 2 for this
It is necessary to process two times using different types of masks, and variations in levitation characteristics due to mask alignment and depth processing errors,
Moreover, no consideration was given to the problem that the processing cost increases due to the manufacturing time. The depth of the cross rail is 1-2 μm and the problem of dust is similar.

【0019】その他の負圧利用スライダとしての米国特
許第4802042号、特開昭60−211671号等
の公知例は、ヨー角特性に対する配慮がされておらず、
浮上量変動の点で問題が有る。ロータリー方式の場合は
浮上量を一定にすることもできず問題であった。
Other known negative pressure sliders, such as US Pat. No. 4,802,042 and Japanese Patent Laid-Open No. 60-211671, do not consider the yaw angle characteristic.
There is a problem in the variation of the flying height. In the case of the rotary method, the flying height cannot be kept constant, which is a problem.

【0020】本発明の目的は、スライダの浮上の速度特
性と、ヨー角特性が優れ、アクセス機構の方式によらず
ディスク上の任意の位置の浮上量をほぼ一定にし、且つ
浮上量変動を小さく押え安定浮上する低浮上量に適した
浮動ヘッドスライダ及び、本スライダを搭載した回転円
板記憶装置を提供することにある。
An object of the present invention is that the flying speed characteristic of the slider and the yaw angle characteristic are excellent, the flying height at any position on the disk is made almost constant regardless of the method of the access mechanism, and the fluctuation of the flying height is small. It is an object of the present invention to provide a floating head slider that is suitable for a low flying height that allows stable lifting of a presser foot, and a rotating disk storage device equipped with this slider.

【0021】また、本発明の他の目的は、浮き上がり特
性が良好で耐摺動性に優れ、また、スライダ流入側気体
軸受面への塵埃付着を回避し低浮上量に適した浮動ヘッ
ドスライダ及び、本スライダを搭載した回転円板記憶装
置を提供することにある。
Another object of the present invention is to provide a floating head slider suitable for a low flying height by avoiding dust from adhering to the gas bearing surface on the slider inflow side, which has good floating characteristics and excellent sliding resistance. The object of the present invention is to provide a rotating disk storage device equipped with this slider.

【0022】また、本発明のさらに他の目的は、負圧力
調節手段により溝加工の容易な加工性に優れた浮動ヘッ
ドスライダを提供することにある。
Still another object of the present invention is to provide a floating head slider which is easy to form a groove by negative pressure adjusting means and is excellent in workability.

【0023】[0023]

【課題を解決するための手段】本発明は上記目的を達成
するために、回転する記憶媒体に対向して配置したスラ
イダの気体軸受面が両サイドの一対の正圧発生面と、前
記正圧発生面の流入側で前記正圧発生面間を同一平面内
でつなぐクロスレールとを有し、前記クロスレールの後
方に前記正圧発生面と前記クロスレールで囲まれた逆ス
テップ状の凹部を有する負圧利用形の浮動ヘッドスライ
ダにおいて、前記一対の正圧浮上面は、前方から後端に
向かってレール幅が一旦狭まるくびれ部を有し、後端に
向かってレール幅が広がり、且つ両サイド後端まで達し
ない構造を持ち、スライダの気体軸受面の流出部の中央
に前記一対の正圧浮上面と略同一面の中央正圧浮上面を
有し、前記中央正圧浮上面は流出部のみで孤立しておら
ず、流入側に達する手段を持ち、前記中央正圧発生面の
後端にトランスデューサを搭載することにより達成され
る。
In order to achieve the above object, the present invention provides a pair of positive pressure generating surfaces on both sides of a gas bearing surface of a slider which is arranged to face a rotating storage medium, and the positive pressure generating surface. A cross rail that connects the positive pressure generation surfaces in the same plane on the inflow side of the generation surface, and a reverse step-shaped recess surrounded by the positive pressure generation surface and the cross rail behind the cross rail. In the floating head slider utilizing negative pressure, the pair of positive pressure air bearing surfaces has a constricted portion in which the rail width once narrows from the front to the rear end, the rail width widens toward the rear end, and both sides are formed. It has a structure that does not reach the rear end, and has a central positive pressure floating surface that is substantially the same as the pair of positive pressure floating surfaces at the center of the outflow portion of the gas bearing surface of the slider, and the central positive pressure floating surface is isolated only at the outflow portion. Not reach the inflow side It has means is achieved by mounting the transducer on the rear end of the central positive pressure generating surfaces.

【0024】また、回転する記憶媒体に対向して配置し
たスライダの気体軸受面が両サイドの一対の正圧発生面
と、前記正圧発生面の流入側で前記正圧発生面間を同一
平面内でつなぐクロスレールとを有し、前記クロスレー
ルの後方に前記正圧発生面と前記クロスレールで囲まれ
た逆ステップ状の凹部を有する負圧利用形の浮動ヘッド
スライダにおいて、前記一対の正圧浮上面は、前方から
後端に向かってレール幅が一旦狭まるくびれ部を有し、
後端に向かってレール幅が広がり、且つ両サイド後端ま
で達しない構造を持ち、前記中央正圧浮上面がスライダ
の幅方向中央部に前記凹部を2分割する前記クロスレー
ルから気体軸受面の流出部中央に延びる中央正圧浮上面
を有し、前記中央正圧浮上面は、スライダ長さ方向中央
から流出側で浮上面幅が広がる構造を持つことによって
も達成される。
Further, the gas bearing surfaces of the slider arranged so as to face the rotating storage medium have a pair of positive pressure generating surfaces on both sides, and the positive pressure generating surfaces are flush with each other on the inflow side of the positive pressure generating surfaces. A negative pressure utilizing type floating head slider having a cross rail connected to the inside of the cross rail, and having the positive pressure generating surface and a recess of a reverse step surrounded by the cross rail at the rear of the cross rail. The pressure-bearing surface has a constricted portion where the rail width once narrows from the front to the rear end,
The rail has a structure in which the rail width is widened toward the rear end and does not reach the rear ends of both sides, and the central positive pressure air bearing surface divides the recess into two parts in the widthwise central part of the slider. It is also achieved by having a central positive pressure air bearing surface extending to the center of the portion, and the central positive pressure air bearing surface having a structure in which the air bearing surface width widens from the center in the slider length direction to the outflow side.

【0025】さらに、回転する記憶媒体に対向して配置
したスライダの気体軸受面が両サイドの一対の正圧発生
面と、前記正圧発生面の流入側で前記正圧発生面間を同
一平面内でつなぐクロスレールとを有し、前記クロスレ
ールの後方に前記正圧発生面と前記クロスレールで囲ま
れた逆ステップ状の凹部を有する負圧利用形の浮動ヘッ
ドスライダにおいて、前記一対の正圧浮上面は、前方か
ら後端に向かって浮上面幅が一旦狭まるくびれ部を有
し、後端に向かって浮上面幅が広がり、且つ両サイド後
端まで達しない構造を持ち、スライダの幅方向中央部に
前記逆ステップ状の凹部を2分割する前記クロスレール
から気体軸受面の流出部中央に延びる中央正圧浮上面を
有し、前記中央正圧浮上面は、スライダ長さ方向中央か
ら流出側で浮上面幅が広がる構造を持ち、前記クロスレ
ールに前記凹部から前端に通じる一つ以上の凹部と同一
深さの溝を設け、前記中央正圧発生面の後端にトランス
デューサを搭載したことによっても達成される。
Further, the gas bearing surfaces of the slider arranged to face the rotating storage medium are on the same plane between the pair of positive pressure generating surfaces and the positive pressure generating surfaces on the inflow side of the positive pressure generating surfaces. A negative pressure utilizing type floating head slider having a cross rail connected to the inside of the cross rail, and having the positive pressure generating surface and a recess of a reverse step surrounded by the cross rail at the rear of the cross rail. The pressure-bearing surface has a constriction where the width of the air bearing surface narrows from the front to the rear end, the width of the air bearing surface widens toward the rear end, and does not reach the rear ends of both sides. The central positive pressure air bearing surface extends from the cross rail that divides the reverse step-shaped recess into two parts to the center of the outflow portion of the gas bearing surface, and the central positive pressure air bearing surface is on the outflow side from the center in the slider length direction. Air bearing surface width Has a spread structure, said provided grooves in one or more recesses of the same depth leading to the front end from the recess to the cross rail also achieved by mounting the transducer on the rear end of the central positive pressure generating surfaces.

【0026】さらに、前記一対の正圧浮上面は、外側が
ほぼ直線で前記凹部に接する側が前方から後端に向かっ
て浮上面幅が一旦狭まるくびれ部を有し、後端に向かっ
て浮上面幅が広がり、且つ両サイド後端まで達しない構
造を持つことによっても達成される。
Further, the pair of positive pressure air bearing surfaces has a constricted portion whose outside is substantially straight and whose side contacting with the recess is such that the width of the air bearing surface is narrowed from the front to the rear end. It is also achieved by having a structure in which the width is wide and does not reach the rear ends of both sides.

【0027】また、前述の一対の正圧浮上面は、前方か
ら後端に向かって浮上面幅が一旦狭まるくびれ部を有
し、後端に向かって浮上面幅が広がり、その後端はスラ
イダサイドから鈍角で流出端中央に向かう線分を有し、
両サイド後端まで達しない構造を持つ事によっても達成
される。
The pair of positive pressure air bearing surfaces has a constricted portion where the air bearing surface width is once narrowed from the front to the rear end, the air bearing surface width is widened toward the rear end, and the rear end is from the slider side. It has a line segment that goes to the center of the outflow end at an obtuse angle,
It is also achieved by having a structure that does not reach the rear ends of both sides.

【0028】また、前記クロスレールに設けた溝は溝幅
がその後流の凹部の最大幅の1/2以下であることによ
っても、又、前記溝幅は凹部流出側の前記一対の正圧発
生面と前記中央正圧発生面間の最小幅より狭く構成して
も達成される。
Also, the groove provided on the cross rail has a groove width of ½ or less of the maximum width of the recess in the subsequent flow, and the groove width is the positive pressure generation on the outflow side of the recess. It is also achieved by making the width narrower than the minimum width between the surface and the central positive pressure generating surface.

【0029】回転する記憶媒体に対向して配置したスラ
イダの気体軸受面が両サイドの一対の正圧発生面と、前
記正圧発生面の流入側で前記正圧発生面間を同一平面内
でつなぐクロスレールとを有し、前記クロスレールの後
方に前記正圧発生面と前記クロスレールで囲まれた逆ス
テップ状の凹部を有する負圧利用形の浮動ヘッドスライ
ダにおいて、前記一対の正圧浮上面は、前方から後端に
向かって浮上面幅が一旦狭まるくびれ部を有し、後端に
向かって浮上面幅が広がり、その後端はスライダサイド
から鈍角で流出端中央に向かう線分を有し、両サイド後
端まで達しない構造を持ち、スライダの幅方向中央部に
前記凹部を2分割する前記クロスレールから気体軸受面
の流出部中央に延びる中央正圧浮上面を有し、前記中央
正圧浮上面は、スライダ長さ方向中央から流出側で浮上
面幅が広がる構造を持ち、前記クロスレールの前記中央
正圧浮上面に沿って前記凹部から前端に通じる凹部と同
一深さの溝を設け、前記溝の外側のクロスレールから流
出側に延びた半島部を設け、前記中央正圧発生面の後端
にトランスデューサを搭載したことによっても達成され
る。
The gas bearing surfaces of the slider, which are arranged to face the rotating storage medium, have a pair of positive pressure generating surfaces on both sides, and on the inflow side of the positive pressure generating surfaces, the positive pressure generating surfaces are in the same plane. A pair of positive pressure air bearing surfaces, wherein a pair of positive pressure air bearing surfaces are provided, the negative pressure utilizing floating head slider having a connecting cross rail, and having the positive pressure generating surface and a reverse step-shaped recess surrounded by the cross rail at the rear of the cross rail. Has a constriction in which the air bearing surface width narrows from the front to the rear end, the air bearing surface width widens toward the rear end, and the rear end has a line segment from the slider side toward the center of the outflow end at an obtuse angle. , A structure that does not reach the rear ends of both sides, and has a central positive pressure floating surface that extends from the cross rail that divides the recess into two into the center of the outflow portion of the gas bearing surface in the widthwise central portion of the slider. The upper surface is The cross-section has a structure in which the width of the air bearing surface widens from the center in the longitudinal direction to the outflow side, and a groove having the same depth as the recess communicating from the recess to the front end is provided along the central positive pressure air bearing surface of the cross rail, and outside the groove. It is also achieved by providing a peninsula part extending from the cross rail to the outflow side and mounting a transducer at the rear end of the central positive pressure generating surface.

【0030】回転する記憶媒体に対向して配置したスラ
イダの気体軸受面が両サイドの一対の正圧発生面と、前
記正圧発生面の流入側で前記正圧発生面間を同一平面内
でつなぐクロスレールとを有し、前記クロスレールの後
方に前記正圧発生面と前記クロスレールで囲まれた逆ス
テップ状の凹部を有する負圧利用形の浮動ヘッドスライ
ダにおいて、前記一対の正圧浮上面は、前方から後端に
向かって浮上面幅が一旦狭まるくびれ部を有し、後端に
向かって浮上面幅が広がり、両サイド後端まで達しない
構造を持ち、スライダの幅方向中央部に前記凹部を2分
割し、気体軸受面の流出部中央に延び、流出側で浮上面
幅が広がる構造の中央正圧浮上面を有し、スライダの荷
重点より流出側では前記中央正圧浮上面の面積が前記両
サイドの正圧発生面の面積の和より小さいことによって
も達成される。
The gas bearing surfaces of the slider, which are arranged so as to face the rotating storage medium, have a pair of positive pressure generating surfaces on both sides, and on the inflow side of the positive pressure generating surfaces, the positive pressure generating surfaces are in the same plane. A pair of positive pressure air bearing surfaces, wherein a pair of positive pressure air bearing surfaces are provided, the negative pressure utilizing floating head slider having a connecting cross rail, and having the positive pressure generating surface and a reverse step-shaped recess surrounded by the cross rail at the rear of the cross rail. Has a constriction where the air bearing surface width narrows from the front to the rear end, the air bearing surface width expands toward the rear end, and does not reach the rear ends of both sides. The concave portion is divided into two and extends to the center of the outflow portion of the gas bearing surface, and has a central positive pressure air bearing surface of a structure in which the width of the air bearing surface widens on the outflow side, and the area of the central positive pressure air bearing surface on the outflow side from the load point of the slider. Is positive pressure on both sides Also achieved by a smaller than the sum of the areas.

【0031】回転する記憶媒体に対向して配置した、ト
ランスデューサを搭載したスライダと、該スライダの前
記記憶媒体との対向面に形成され該記憶媒体の回転に伴
う気体流により発生する正の圧力によりスライダを浮上
させる気体軸受面を備えた浮動ヘッドスライダにおいて
前記スライダは前端、後端を有し、前記気体軸受面の
両サイドに一対の正圧発生面を配置し前記正圧発生面
は、スライダ後端まで達しず、その正圧発生面後端はス
ライダサイドから鈍角でスライダ流出端中央に向かう線
分を有し、前記気体軸受面の中央後端に中央正圧発生面
が配置され、前記中央正圧発生面後端にトランスヂュー
サを搭載したことによっても達成される。
The slider mounted with the transducer, which is arranged so as to face the rotating storage medium, and the positive pressure generated by the gas flow formed on the surface of the slider facing the storage medium and accompanying the rotation of the storage medium In a floating head slider having a gas bearing surface for flying a slider, the slider has a front end and a rear end, and a pair of positive pressure generating surfaces are arranged on both sides of the gas bearing surface, and the positive pressure generating surface is a slider. The positive pressure generating surface does not reach the rear end, and the positive pressure generating surface rear end has a line segment from the slider side toward the slider outflow end center at an obtuse angle, and the central positive pressure generating surface is arranged at the central rear end of the gas bearing surface. This can also be achieved by mounting a transducer on the rear end of the central positive pressure generating surface.

【0032】前記気体軸受レールのくびれ部位置はスラ
イダ長手方向中央より前端側に設けたことによっても達
成される。
The constricted portion position of the gas bearing rail can also be achieved by providing it on the front end side with respect to the center in the slider longitudinal direction.

【0033】前記気体軸受レールの後端部の両サイド端
のスライダ後端からの距離は前記気体軸受レールの後端
部のスライダ中央側のスライダ後端からの距離より長い
ことによっても達成される。
The distance between both side ends of the rear end of the gas bearing rail from the slider rear end is longer than the distance from the slider rear end on the slider center side of the rear end of the gas bearing rail. .

【0034】さらに、上記の浮動ヘッドスライダを回転
円板記憶装置に装着することによっても達成される。
Further, this can be achieved by mounting the above floating head slider on a rotating disk storage device.

【0035】[0035]

【作用】本発明によれば、スライダの両サイドの一対の
正圧浮上面に長手方向中央から流入側に前方から後端に
向かってレール幅が一旦狭まるくびれ部を設け、後端に
向かってレール幅が広がり且つ両サイド後端まで達しな
い構造により、くびれ部より後方は前方の影響を受けず
ほぼ平板軸受特性をとり、従来のテーパフラット形に比
べて速度の増加により発生する浮上力は小さくなる。一
方、流入側はクロスレールを含み正圧発生が大きく本構
成によると速度の増加により、スライダの浮上姿勢角は
大きくなる。すると、流出端迄達していない浮上面の隙
間は増大し、その分くびれ部後方で発生する浮上力は小
さくなる。その結果、クロスレール後方の逆ステップ状
の凹部に働く負圧力は小さくても、中央正圧浮上面後端
の浮上量は負圧力の発生が小さい低速度で速く浮上し、
その後、速度の増加による負圧力の増加と正圧の浮上力
が釣合うように働き浮上量変化を押える様に作用する。
According to the present invention, the pair of positive pressure air bearing surfaces on both sides of the slider are provided with a constricted portion on the inflow side from the center in the longitudinal direction to narrow the rail width from the front to the rear end. Due to the structure that widens and does not reach the rear end of both sides, the rear part of the constricted part is not affected by the front part and has almost flat plate bearing characteristics, and the levitation force generated by the increase in speed is smaller than the conventional taper flat type Become. On the other hand, the inflow side includes a cross rail and a large amount of positive pressure is generated. With this configuration, the flying posture angle of the slider is increased due to the increase in speed. Then, the gap on the air bearing surface that has not reached the outflow end increases, and the levitation force generated behind the constricted portion decreases accordingly. As a result, even if the negative pressure acting on the reverse step-shaped concave portion behind the cross rail is small, the levitation amount at the rear end of the center positive pressure air bearing surface quickly flies at a low speed at which negative pressure is small,
After that, the increase in negative pressure due to the increase in speed and the levitation force of positive pressure work in a balanced manner to suppress the change in the levitation amount.

【0036】又、スライダの両サイドの一対の正圧浮上
面に長手方向中央から流入側に前方から後端に向かって
レール幅が一旦狭まるくびれ部を設け、後端に向かって
レール幅が広がる構造により、ヨー角が無い場合の正圧
浮上面の有効面積とヨー角が有る場合の正圧浮上面の有
効面積の変化を小さく押える効果が有る。通常、ヨー角
が付いた場合流入側の浮上面の浮上量が低下するが、ス
ライダ中央側へのレール幅の広がりはその浮上面の浮上
力増加に働き、スライダの幅方向の傾きを抑制する作用
が有る。特に、両サイド後端まで達しないで、正圧浮上
面後端をサイドから流出端中央に向けた線分を持つよう
に構成することにより、ヨー角が無い場合よりヨー角が
有る場合の方がくびれ部後方のレール長を長くすること
ができ、ヨー角による浮上量低下を押えるように作用す
る。
Further, the pair of positive pressure air bearing surfaces on both sides of the slider is provided with a constricted portion on the inflow side from the center in the longitudinal direction to narrow the rail width from the front to the rear end, and the rail width is widened toward the rear end. As a result, there is an effect of suppressing a small change in the effective area of the positive pressure air bearing surface when there is no yaw angle and the effective area of the positive pressure air bearing surface when there is a yaw angle. Normally, when the yaw angle is attached, the flying height of the air bearing surface on the inflow side decreases, but the spread of the rail width toward the slider center side increases the flying force of the air bearing surface and suppresses the slider widthwise inclination. It has an effect. In particular, by configuring the rear end of the positive pressure air bearing surface to have a line segment from the side to the center of the outflow end without reaching the rear end of both sides, it is better to have a yaw angle than without a yaw angle. The rail length behind the constricted portion can be lengthened, which acts to suppress the reduction in the flying height due to the yaw angle.

【0037】さらに、一対の正圧浮上面をスライダ流出
端まで達しない構造で、中央正圧浮上面幅をトランスデ
ューサ搭載可能幅にする構造により、スライダ浮上中の
最小浮上量位置を中央正圧浮上面の流出端にでき、ロー
ル方向の浮上量変動に対する抗する力を一対の正圧浮上
面によるロール剛性が担当するためスライダ幅に対する
中央正圧浮上面流出端幅の比だけ変動しにくく作用す
る。特に、両サイドの正圧浮上面後端のサイドの位置を
スライダの姿勢とシーク時のシーク方向加速度とスライ
ダロール剛性とスライダ形状によって決るスライダのロ
ール方向回転しても、中央正圧浮上面流出端の浮上量よ
り下がらないように選び、サイドから中央正圧浮上面流
出端に向けた線分を持つように構成することにより、最
低浮上量の可能性を中央正圧浮上面流出端と決定でき、
且つ、ロール剛性を高める事を可能にする。
Further, the structure in which the pair of positive pressure air bearing surfaces does not reach the slider outflow end, and the width of the center positive pressure floating surface is set to a width in which the transducer can be mounted, the minimum flying height position during slider flying is flown out of the center positive pressure floating surface. Since the roll rigidity by the pair of positive pressure air bearing surfaces is responsible for the force against the fluctuation of the flying height in the roll direction, the ratio of the central positive pressure air bearing surface outflow end width to the slider width hardly acts. In particular, even if the position of the rear side of the positive pressure air bearing surface on both sides is determined by the posture of the slider, the seek direction acceleration during seek, the slider roll rigidity, and the slider roll direction, the center positive pressure air bearing surface outflow end By selecting it so that it does not fall below the flying height, and by configuring it to have a line segment from the side toward the center positive pressure air bearing surface outflow end, the possibility of the minimum flying height can be determined as the center positive pressure air bearing surface outflow end,
It also makes it possible to increase roll rigidity.

【0038】又、クロスレールに設けた負圧発生用凹部
から前端に通じる溝は、逆ステップ状の凹部への流体の
流入のバイパス機能をはたし、凹部での流体の膨張を調
節する。その結果、発生する負圧を軽減し、調節するこ
とを可能とする。さらに、溝で負圧力を軽減、調整する
ことによって、凹部深さを浅くでき、溝深さを凹部と同
じとすることによって、一回の加工で加工の時間短縮を
可能とする。さらに、クロスレールの正圧領域に対し溝
部は負圧領域となるため流入側から進入する塵埃のう
ち、中央よりを進む塵埃はクロスレール部を回避し溝を
つうかして排出する作用をする。
Further, the groove extending from the negative pressure generating concave portion provided on the cross rail to the front end has a bypass function of the inflow of the fluid into the concave portion having the reverse step shape, and regulates the expansion of the fluid in the concave portion. As a result, the negative pressure generated can be reduced and adjusted. Further, by reducing and adjusting the negative pressure in the groove, the depth of the recess can be made shallow, and by making the groove depth the same as that of the recess, it is possible to shorten the processing time with one processing. Further, since the groove portion is a negative pressure area with respect to the positive pressure area of the cross rail, among the dust that enters from the inflow side, the dust that advances from the center has a function of avoiding the cross rail portion and discharging through the groove. .

【0039】又、溝の隣のクロスレールに設けた流出側
への半島部は、溝からの流体の進入を防ぎ半島部とクロ
スレールで囲まれた凹部での負圧力発生を安定化する作
用が有る。半島部を付けることによって発生負圧力を一
定にすると溝幅を広く出来る作用が有る。
Also, the peninsula portion on the outflow side provided on the cross rail adjacent to the groove prevents the fluid from entering from the groove and stabilizes the generation of negative pressure in the recess surrounded by the peninsula portion and the cross rail. There is. If the negative pressure generated is made constant by attaching the peninsula part, the groove width can be widened.

【0040】荷重点から後方において中央正圧浮上面の
面積を両サイドの正圧浮上面の面積より小さくすること
は主の浮上力を両サイドの正圧浮上面に担当させ、中央
正圧浮上面に発生する正圧力を押えるため前述の浮上の
速度特性をさらに低負圧力で実現する作用が有る。中央
正圧浮上面の正圧力はピッチ剛性確保、円板追従性の確
保する作用をする。
Making the area of the central positive pressure air bearing surface smaller than the areas of the positive pressure air bearing surfaces on both sides behind the load point causes the main levitation force to be applied to the positive pressure air bearing surfaces on both sides, and is generated on the central positive pressure air bearing surface. Since the positive pressure is suppressed, it has the effect of realizing the above-mentioned floating velocity characteristics at a lower negative pressure. Positive pressure on the center positive pressure air bearing surface acts to secure pitch rigidity and disc followability.

【0041】[0041]

【実施例】以下、本発明の実施例を図面を用いて詳細に
説明する。
Embodiments of the present invention will now be described in detail with reference to the drawings.

【0042】図1は、本発明のスライダの第1の実施例
を示す斜視図である。この図1において、回転する記憶
媒体に対向して配置するスライダ12の気体軸受面13
は両サイドに一対の正圧発生面(以下サイドレールと称
す。)17を配置している。サイドレール17は流入側
の傾斜面14と平面部15からなり、流入端から流出端
に向かってレール幅が一旦狭まるくびれ部21を持つ。
くびれ部21は、スライダ12の長手方向中央より流入
側に設けている。本実施例ではレールの両側の幅を変化
させている。その角度は磁気ディスク装置に搭載した場
合のヨー角と最内周でのシーク時ヨー角の和と同程度で
あり、内側の角度を大きくしている。くびれ部21の流
出側の幅方向に広がりを持った後部軸受面24はサイド
レール後端22で終っておりスライダの流出端まで達し
ない構造である。
FIG. 1 is a perspective view showing a first embodiment of the slider of the present invention. In FIG. 1, the gas bearing surface 13 of the slider 12 arranged to face the rotating storage medium.
Has a pair of positive pressure generating surfaces (hereinafter referred to as side rails) 17 on both sides. The side rail 17 is composed of an inflow-side inclined surface 14 and a flat surface portion 15, and has a constricted portion 21 in which the rail width once narrows from the inflow end to the outflow end.
The constricted portion 21 is provided on the inflow side with respect to the longitudinal center of the slider 12. In this embodiment, the width of both sides of the rail is changed. The angle is about the same as the sum of the yaw angle when mounted on the magnetic disk device and the seek yaw angle at the innermost circumference, and the inner angle is increased. The rear bearing surface 24, which is widened in the width direction on the outflow side of the constricted portion 21, ends at the rear end 22 of the side rail and does not reach the outflow end of the slider.

【0043】サイドレール17の間の流入側にクロスレ
ール18を設け、クロスレール18とサイドレール17
で囲まれた逆ステップ状凹部(以下負圧ポケット部と称
す。)19を形成する。クロスレール18の流入側にも
傾斜面14を形成している。スライダ幅方向中央には負
圧ポケット部19を2分し流入端から流出端に達する中
央正圧発生面(以下センターレールと称す。)20を設
けている。センタレール20に沿って負圧ポケット部1
9から流入端に達する負圧ポケット部19と同じ深さの
溝16をクロスレール18に設けている。
A cross rail 18 is provided on the inflow side between the side rails 17, and the cross rail 18 and the side rail 17 are provided.
An inverse step-shaped recess (hereinafter referred to as a negative pressure pocket portion) 19 surrounded by is formed. The inclined surface 14 is also formed on the inflow side of the cross rail 18. A central positive pressure generating surface (hereinafter referred to as a center rail) 20 that divides the negative pressure pocket portion 19 into two and extends from the inflow end to the outflow end is provided at the center of the slider width direction. Negative pressure pocket 1 along the center rail 20
The cross rail 18 is provided with a groove 16 having the same depth as the negative pressure pocket portion 19 extending from 9 to the inflow end.

【0044】センターレール20の幅は流入側は狭く
(例えば約100μm)ほぼ平行としスライダの中央か
ら流出端側の広がり部26から三角形状に広がり流出端
に達する構造としている。センターレール20の流出端
後端にトランスデューサ11が搭載されている。負圧ポ
ケット19、溝16はイオンミリング等で加工されその
深さは約10μm以下と浅く形成している。又、傾斜面
14は深さ加工後行った例である。
The width of the center rail 20 is narrow on the inflow side (for example, about 100 μm) and substantially parallel to each other, so that the center rail 20 extends from the center of the slider in a triangular shape from the widened portion 26 on the outflow end side to reach the outflow end. The transducer 11 is mounted on the rear end of the outflow end of the center rail 20. The negative pressure pocket 19 and the groove 16 are processed by ion milling or the like to have a shallow depth of about 10 μm or less. In addition, the inclined surface 14 is an example after the depth processing.

【0045】次に、上述した本発明の第1の実施例の動
作を図2、図3を用いて説明する。
Next, the operation of the above-described first embodiment of the present invention will be described with reference to FIGS.

【0046】図2は本発明の第1の実施例の圧力分布の
斜視図である。図3は本発明の第1の実施例の圧力分布
の側面図である。記録媒体の回転に伴う空気流は、スラ
イダの流入側に設けた傾斜面14で圧縮され、圧力上昇
し、両側の空気流はサイドレール17を進み、スライダ
幅方向中央部を除く空気流はクロスレール18を経て逆
ステップ状に広がった負圧ポケット部19で膨張し雰囲
気圧力より低い圧力即ち負圧になり、流出端へ進む。流
入側溝16から流入した空気流は圧力上昇せずに直接負
圧ポケット部19へ進み、負圧ポケット部19で発生す
る負圧を減らす様に働く。センタレール20は、レール
幅の狭い流入側では両側の負圧ポケット部19の負圧の
影響で負圧となり、広がり部26を持つ流出側でのみ正
圧を発生する。サイドレール17を進む空気流はくびれ
部17によるレール幅の減少によるサイドフローと負圧
ポケットへの流れ込みにより、急激な圧力降下をおこ
し、その後後部軸受面24で再び圧力は上昇し、サイド
レール後端22で一旦弱い負圧になり雰囲気圧力に戻
る。
FIG. 2 is a perspective view of the pressure distribution of the first embodiment of the present invention. FIG. 3 is a side view of the pressure distribution of the first embodiment of the present invention. The airflow accompanying the rotation of the recording medium is compressed by the inclined surface 14 provided on the inflow side of the slider and the pressure rises, the airflows on both sides proceed on the side rails 17, and the airflow except the central portion in the slider width direction crosses. It expands in the negative pressure pocket portion 19 which spreads in the reverse step shape via the rail 18 and becomes a pressure lower than the atmospheric pressure, that is, a negative pressure, and advances to the outflow end. The air flow that has flowed in from the inflow side groove 16 proceeds directly to the negative pressure pocket portion 19 without increasing the pressure, and works to reduce the negative pressure generated in the negative pressure pocket portion 19. The center rail 20 has a negative pressure on the inflow side where the rail width is narrow due to the negative pressure of the negative pressure pocket portions 19 on both sides, and generates a positive pressure only on the outflow side having the widened portion 26. The air flow traveling through the side rail 17 causes a sharp pressure drop due to the side flow due to the reduction of the rail width due to the constricted portion 17 and the inflow into the negative pressure pocket, after which the pressure rises again at the rear bearing surface 24, and after the side rail. At the end 22, a weak negative pressure is once returned to the atmospheric pressure.

【0047】本実施例によれば、スライダの両サイドの
一対のサイドレール17は装置ヨー角に対応した流入端
からくびれ部21まで先狭まり部とくびれ部21からサ
イドレール後端22までの先広がりの後部軸受面24の
構成により、ヨー角の有無によるくびれ部21を通る平
行線で囲まれたサイドレール17の面積の変化を小さく
し、ヨー角特性を向上している。さらに、スライダの内
側のレール幅変化の角度を大きくし、ヨー角がついて気
体が流入する側のサイドレール17の後部軸受面22の
正圧の発生を大きくし、ヨー角が有る場合、スライダの
幅方向に圧力中心が移動し、スライダ長手方向中心軸回
りのモーメントが発生しスライダが傾くのを防止してい
る。
According to this embodiment, the pair of side rails 17 on both sides of the slider are tapered from the inflow end corresponding to the device yaw angle to the constricted portion 21 and from the narrowed portion and the constricted portion 21 to the side rail rear end 22. Due to the configuration of the expanded rear bearing surface 24, the change in the area of the side rail 17 surrounded by the parallel line passing through the constricted portion 21 due to the presence or absence of the yaw angle is reduced, and the yaw angle characteristic is improved. Further, the angle of the rail width change inside the slider is increased to increase the generation of positive pressure on the rear bearing surface 22 of the side rail 17 on the side where the gas flows in due to the yaw angle. This prevents the slider from tilting due to the movement of the center of pressure in the width direction and the generation of a moment about the central axis in the slider longitudinal direction.

【0048】図8は本発明のスライダのヨー角特性を説
明する説明図である。本発明のスライダは従来のテーパ
フラット形、従来の負圧形より浮上量低下を小さく押え
ることができる。
FIG. 8 is an explanatory view for explaining the yaw angle characteristic of the slider of the present invention. The slider of the present invention can suppress the lowering of the flying height less than the conventional taper flat type and the conventional negative pressure type.

【0049】ヨー角特性の向上のためのサイドレール1
7の形状と負圧ポケット部19に働く負圧はくびれ部2
1の後流への流入側の軸受作用の影響を減少させる。後
部軸受面24はほぼ独立した平板軸受の特性をとる。く
びれ部21を、スライダ12の長手方向中央より流入側
に設けることにより、後部軸受面24の面積の増加を、
又位置の調節によりスライダ12の浮上姿勢を調節する
ことができる。その結果、従来のテーパフラット形に比
べて速度の増加により発生する浮上力は小さくなる。一
方、クロスレール18の流入側にも傾斜面14を設け、
流入部の正圧発生を大きくする構造は速度の増加と共
に、スライダの浮上姿勢角を大きくする。すると、主の
正圧力を担当しているレールサイド17のサイドレール
後端22の浮上量は増大し、その分くびれ部後方で発生
する浮上力は小さくなる。
Side rail 1 for improving the yaw angle characteristic
7 and the negative pressure acting on the negative pressure pocket portion 19 is the constricted portion 2
1 reduces the effect of bearing action on the inflow side to the wake. The rear bearing surface 24 has the characteristics of a substantially independent plate bearing. By providing the constricted portion 21 on the inflow side from the longitudinal center of the slider 12, the area of the rear bearing surface 24 can be increased.
Further, the flying posture of the slider 12 can be adjusted by adjusting the position. As a result, the levitation force generated by the increase in speed becomes smaller than that in the conventional taper flat type. On the other hand, the inclined surface 14 is also provided on the inflow side of the cross rail 18,
The structure for increasing the positive pressure generation in the inflow portion increases the flying posture angle of the slider as the speed increases. Then, the levitation amount of the side rail rear end 22 of the rail side 17 that is in charge of the main positive pressure increases, and the levitation force generated behind the constricted portion decreases accordingly.

【0050】図7は本発明スライダの速度特性を説明す
る説明図である。従来のテーパフラット形に対し、本発
明のスライダは負圧ポケット部19の負圧力の小さな領
域でセンターレール20の流出端の浮上速度特性の改善
と調節が可能となる。
FIG. 7 is an explanatory diagram for explaining the velocity characteristic of the slider of the present invention. In contrast to the conventional taper flat type, the slider of the present invention can improve and adjust the floating speed characteristic of the outflow end of the center rail 20 in a region where the negative pressure of the negative pressure pocket portion 19 is small.

【0051】小さな負圧力の利用は押付荷重に対する負
圧力の割合を小さくし、実用化の問題であった負圧ポケ
ット部19の深さ等、負圧ポケット部19の寸法のばら
つきに起因した負圧力変化を小さく押え、浮上量、浮上
特性のばらつきを押える効果が有る。また、浮上中の負
圧力による集塵作用を押る効果もある。浮上中の傾斜面
14への塵埃付着による正圧軸受特性劣化時のディスク
面への損傷を押える効果もある。またコンタクトスター
トストップ方式において非動作時の衝撃によるスライダ
が、媒体を叩くことを防ぐことができる。その結果、従
来の正圧スライダと同様コンタクトスタートストップ方
式で負圧利用スライダを利用することを可能とする。
The use of a small negative pressure reduces the ratio of the negative pressure to the pressing load, and the negative pressure caused by variations in the dimensions of the negative pressure pocket 19 such as the depth of the negative pressure pocket 19 which has been a problem in practical use. This has the effect of suppressing pressure changes small and suppressing variations in flying height and flying characteristics. It also has the effect of pushing the dust collecting action due to the negative pressure during floating. There is also an effect of suppressing damage to the disk surface when the characteristics of the positive pressure bearing are deteriorated due to the adhesion of dust to the floating inclined surface 14. Further, in the contact start / stop method, it is possible to prevent the slider from hitting the medium due to a shock when not operating. As a result, it becomes possible to use the negative pressure utilizing slider by the contact start / stop method like the conventional positive pressure slider.

【0052】クロスレール18に設けた負圧ポケット部
19から前端に通じる溝16は、負圧ポケット部19へ
流入する流体のバイパス機能を果たし、負圧ポケット部
19での流体の膨張を調節する。その結果、発生する負
圧を軽減し、調節することを可能とする。
The groove 16 extending from the negative pressure pocket portion 19 provided on the cross rail 18 to the front end serves as a bypass function for the fluid flowing into the negative pressure pocket portion 19 and adjusts the expansion of the fluid in the negative pressure pocket portion 19. . As a result, the negative pressure generated can be reduced and adjusted.

【0053】図4は本発明の第1の実施例を構成する負
圧ポケット部19の深さと負圧力の関係を示す説明図で
ある。この図において、浮上の速度特性が向上する深さ
4μm以上では負圧ポケット部19の深さの増加に従い
負圧力が減少する。例えば負圧力を2gfに軽減するの
に溝無しの場合20μm深さを必要とするが、溝16を
設ける場合(この検討例では溝幅200μm)10μm
と半分の深さで実現できる。
FIG. 4 is an explanatory view showing the relationship between the depth of the negative pressure pocket portion 19 and the negative pressure constituting the first embodiment of the present invention. In this figure, the negative pressure decreases as the depth of the negative pressure pocket portion 19 increases at a depth of 4 μm or more where the floating velocity characteristic is improved. For example, in order to reduce the negative pressure to 2 gf, a depth of 20 μm is required without a groove, but with a groove 16 (groove width 200 μm in this study example) 10 μm
And can be realized with half the depth.

【0054】又、図5は本発明の第1の実施例を構成す
るスライダの溝幅と負圧力の関係を示す説明図である。
この図において、深さ一定の場合である。溝16の溝幅
を適当に選ぶことによって負圧力の調節が可能である。
(例えば溝幅を100μm設けることによって負圧力を
半分にすることができる。)溝16を負圧ポケット部1
9と同じ深さにすれば、一回で加工できる。
FIG. 5 is an explanatory diagram showing the relationship between the groove width and the negative pressure of the slider which constitutes the first embodiment of the present invention.
In this figure, the depth is constant. The negative pressure can be adjusted by appropriately selecting the groove width of the groove 16.
(For example, the negative pressure can be halved by providing the groove width of 100 μm.) The groove 16 is formed in the negative pressure pocket portion 1.
If the depth is the same as 9, it can be processed at once.

【0055】図6は本発明の第1の実施例を構成するス
ライダの溝幅、負圧ポケット部深さと浮上速度特性を説
明した説明図である。この図において、縦軸は内外周の
ディスク速度に対する浮上量の比である。従来の溝無し
の場合、負圧ポケット部19の深さが20μmより浅い
と、浮上量比が100%以下となり、最悪の場合外周側
で浮上しなくなるのに対し、溝16ありでは深さ6μm
以上で任意の特性を選ぶことができる。その結果、負圧
力を小さくし、スライダを安定に浮上させ、加工時間の
短縮によるコスト低減の効果と、深さ精度の向上による
特性の安定化の効果が有る。さらに、クロスレール18
の正圧領域に対し溝16は負圧領域となるため、流入側
から進入する塵埃のうち、中央よりを進む塵埃はクロス
レール18を回避し溝16を通過して排出する塵埃排出
効果が有る。
FIG. 6 is an explanatory view for explaining the groove width, the negative pressure pocket depth and the flying speed characteristic of the slider which constitutes the first embodiment of the present invention. In this figure, the vertical axis is the ratio of the flying height to the disk speed on the inner and outer circumferences. In the conventional case without a groove, if the depth of the negative pressure pocket portion 19 is shallower than 20 μm, the flying height ratio becomes 100% or less, and in the worst case, it does not fly on the outer peripheral side, whereas with the groove 16 the depth is 6 μm.
As described above, any characteristic can be selected. As a result, the negative pressure is reduced, the slider is stably floated, the cost is reduced by shortening the processing time, and the characteristics are stabilized by improving the depth accuracy. Furthermore, cross rail 18
Since the groove 16 becomes a negative pressure area with respect to the positive pressure area of the above, there is a dust discharging effect of discharging dust passing from the center out of the dust entering from the inflow side, avoiding the cross rail 18 and passing through the groove 16. .

【0056】図9は本発明の第1の実施例のロール方向
浮上変動を示すスライダ後方から見た説明図である。こ
の図において、シーク動作時、アクセス機構が矢印30
で示す半径方向に加速度αで移動すると、スライダ12
の質量の中心Gには慣性力F=mαが図示の方向に作用
する。この慣性力によって生ずるスライダ12のロール
方向の回転による浮上量変動Δhは、スライダの質量の
中心Gからスライダ12を支持する支持体の回転中心P
までの距離をLg、流出端浮上量h2で浮上中の空気軸
受のロール方向復元バネ剛性をKrとすると、近似的に
(1)式で表される。
FIG. 9 is an explanatory view showing the fluctuation of the flying height in the roll direction according to the first embodiment of the present invention, as viewed from the rear of the slider. In this figure, the access mechanism indicates the arrow 30 during seek operation.
When the slider 12 is moved in the radial direction by the acceleration α,
An inertial force F = mα acts on the center G of the mass of in the direction shown in the figure. The flying height variation Δh due to the rotation of the slider 12 in the roll direction, which is caused by this inertial force, is due to the rotation center P of the support body that supports the slider 12 from the center G of the slider mass.
Is approximately Lg, and the roll direction restoring spring rigidity of the air bearing that is floating at the outflow end flying height h2 is Kr, approximately expressed by equation (1).

【0057】 Δh=mαLgLy/Kr …(1) Lyはスライダの幅方向中心からの距離である。Δh = mαLgLy / Kr (1) Ly is the distance from the center of the slider in the width direction.

【0058】スライダの端(距離Ls)での浮上量変動
とセンターレール20の端(距離Lc)の浮上量変動の
比は Δhs/Δhc=Ls/Lc …(2) となり、サイドレールが流出端まである場合はスライダ
の端が浮上量変動が最大で最小浮上量となり、センター
レール20の端は距離の比だけ浮上量変動は小さい。
The ratio of the fluctuation of the flying height at the end of the slider (distance Ls) and the fluctuation of the flying height at the end of the center rail 20 (distance Lc) is Δhs / Δhc = Ls / Lc (2), and the side rail is the outflow end. In the above case, the flying height variation at the end of the slider is the maximum and the flying height variation is the minimum, and the flying height variation at the end of the center rail 20 is small by the distance ratio.

【0059】図10は本発明のスライダの第1の実施例
の浮上姿勢との関係を示す。この図において、スライダ
12は気体軸受のくさび効果で浮上するので、流入側が
角度θaだけ持ち上がって浮上している。この浮上量変
動状態でセンターレール20の端の浮上量(h2−Δh
c)と同一の面はab面またそれ以下の浮上量の領域は
a、b、dである。
FIG. 10 shows the relationship between the slider and the flying posture of the first embodiment of the present invention. In this figure, since the slider 12 floats due to the wedge effect of the gas bearing, the inflow side is lifted up by the angle θa and floats up. In this flying height variation state, the flying height (h2-Δh) at the end of the center rail 20.
The surface which is the same as that of c) is the ab surface, and the regions of the flying height below that are a, b and d.

【0060】図11は図10に示す領域をスライダ気体
軸受面で示したもので、この図において、三角形A、
B、Dの領域がセンターレール20の端の浮上量(h2
−Δhc)以下になる領域であり、サイドレール17の
後端22をスライダ12の流出端(A)から(B)以上
に流入方向に移動し、三角形ABDを除く領域に配置す
ることによってシーク動作時も常にセンターレール20
の端が最小浮上量にできる。
FIG. 11 shows the region shown in FIG. 10 by the slider gas bearing surface. In this figure, a triangle A,
Areas B and D are the flying height of the end of the center rail 20 (h2
-[Delta] hc) or less, and the rear end 22 of the side rail 17 is moved in the inflow direction from the outflow end (A) of the slider 12 to (B) or more and is arranged in an area excluding the triangle ABD to perform a seek operation. Center rail 20 always
The minimum flying height can be set at the edge of.

【0061】(B)点の条件はスライダ流出端から
(B)までの距離をxとすると x≧(Δhs−Δhc)/tanθa ≧(1−Lc/Ls)Δhs/tanθa …(3) であり、角度と距離の比により変わる。
The condition at the point (B) is x ≧ (Δhs−Δhc) / tan θa ≧ (1−Lc / Ls) Δhs / tan θa (3) where x is the distance from the slider outflow end to (B). , It depends on the ratio of angle and distance.

【0062】次に、浮上量変動の大きさを示す空気軸受
のロール方向復元バネ剛性Krはほぼ浮上量に逆比例す
る。(B)の浮上量は hx=h2+x・tanθa …(4) となり、空気軸受のロール方向復元バネ剛性をKrは Kr∞h2/hx=1/{1+(1−Lc/Ls)Δhs/h2} …(5) となり、剛性は各レールの距離の比の項(1−Lc/L
s)とスライダの端の浮上量変動と流出端浮上量の比Δ
hs/h2だけ減少するに留まる。例えばLc/Ls=
1/3とし、Δhsを流出端浮上量の20%を考えると
剛性krは15/17に減少するだけで、センターヘッ
ド20端の浮上量変動はΔhc=17/45Δhsに低
減できる。サイドレール後端22を図11の線分ABに
沿って配置する斜め線分部25設けると剛性の減少はさ
らに小さくできる。
Next, the roll direction restoring spring rigidity Kr of the air bearing, which shows the magnitude of the flying height variation, is almost inversely proportional to the flying height. The flying height of (B) is hx = h2 + x · tan θa (4), and the roll direction restoring spring rigidity of the air bearing Kr is Kr∞h2 / hx = 1 / {1+ (1-Lc / Ls) Δhs / h2}. ... (5), and the rigidity is the term of the ratio of the distance of each rail (1-Lc / L
s) and the ratio of the flying height fluctuation at the slider end to the outflow end flying height Δ
It only decreases by hs / h2. For example, Lc / Ls =
Considering that 1/3 and Δhs is 20% of the outflow end flying height, the rigidity kr can be reduced to 15/17, and the fluctuation of the flying height at the end of the center head 20 can be reduced to Δhc = 17 / 45Δhs. The rigidity can be further reduced by providing the diagonal line segment portion 25 in which the rear end 22 of the side rail is arranged along the line segment AB in FIG.

【0063】図12は本発明のスライダの第1の実施例
における加速度沈み込み特性を説明する説明図である。
この図から分かるように、本実施例は、従来のスライダ
に比べて浮上量を格段に向上させることができる。
FIG. 12 is an explanatory view for explaining the acceleration depression characteristic in the slider of the first embodiment of the present invention.
As can be seen from this figure, the flying height can be greatly improved in this embodiment as compared with the conventional slider.

【0064】荷重点から後方において、センターレール
20の面積を両サイドのサイドレール17の面積の和よ
り小さくすることは主の浮上力をサイドレール17に担
当させ事になりロール剛性自体を大きくすることができ
る。又、センターレール20に発生する正圧力を押える
ため前述の速度特性をさらに低負圧力で実現する作用が
有る。センターレール20の正圧力はピッチ剛性確保、
円板追従性の確保する作用をする。
When the area of the center rail 20 is made smaller than the sum of the areas of the side rails 17 on both sides behind the load point, the main levitation force is taken over by the side rails 17 and the roll rigidity itself is increased. be able to. Further, since the positive pressure generated in the center rail 20 is suppressed, there is an effect that the above-mentioned speed characteristic is realized with a further lower negative pressure. The positive pressure of the center rail 20 ensures pitch rigidity,
It acts to secure the disc following ability.

【0065】図13は本発明の第2の実施例を示す斜視
図である。この実施例はサイドレール17の外側を直線
で構成した例である。くびれ部21の前後のレール幅変
化の角度は両側の変化の角度の和と同程度である。サイ
ドレール17の外側を直線で構成した事によって、実質
的レール中心間距離を大きくできロール剛性を向上でき
る。又、気体軸受面の形状を単純化し、加工時の寸法誤
差による浮上量のばらつきを押える効果がある。
FIG. 13 is a perspective view showing a second embodiment of the present invention. This embodiment is an example in which the outside of the side rail 17 is formed by a straight line. The angle of change in rail width before and after the constricted portion 21 is approximately the same as the sum of the angles of change in both sides. By forming the outside of the side rail 17 with a straight line, the distance between the rail centers can be substantially increased and the roll rigidity can be improved. Further, there is an effect that the shape of the gas bearing surface is simplified and variations in the flying height due to dimensional errors during processing are suppressed.

【0066】図14は本発明の第2の実施例のヨー角特
性を説明する平面図である。この実施例は特にサイドレ
ール17のサイドレール後端22後端をサイドから流出
端中央に向けた斜め線分部25を持つように構成したも
のである。このように構成したことにより、ヨー角が無
い場合のくびれ部21からサイドレール後端22までの
長さLoに対し、ヨー角が有る場合のくびれ部21から
サイドレール後端22までの長さLθyを長くすること
ができる。これにより、発生正圧力を大きくできるの
で、ヨー角による浮上量低下をさらに押える効果があ
る。
FIG. 14 is a plan view for explaining the yaw angle characteristic of the second embodiment of the present invention. In this embodiment, in particular, the rear end of the side rail rear end 22 of the side rail 17 has a diagonal line segment 25 extending from the side toward the center of the outflow end. With this configuration, the length Lo from the constricted portion 21 to the side rail rear end 22 when there is no yaw angle to the length Lo from the constricted portion 21 to the side rail rear end 22 when there is a yaw angle. Lθy can be lengthened. As a result, the generated positive pressure can be increased, which has the effect of further suppressing the decrease in the flying height due to the yaw angle.

【0067】図15は図14に示す本発明の第2の実施
例の溝幅と他の寸法の関係を示す説明図である。この図
において、先の実施例を含めて、溝16の幅eをサイド
レール後端22の内側とセンターレール20の最小距離
fより小さく設けている。又、溝16の幅eを負圧ポケ
ット部19の最大幅gの半分以下に設けている。この構
成により、負圧ポケット部19に負圧を安定に発生する
事ができる。
FIG. 15 is an explanatory view showing the relationship between the groove width and other dimensions of the second embodiment of the present invention shown in FIG. In this figure, the width e of the groove 16 is set to be smaller than the minimum distance f between the inside of the rear end 22 of the side rail and the center rail 20, including the above-described embodiment. Further, the width e of the groove 16 is set to be half or less of the maximum width g of the negative pressure pocket portion 19. With this configuration, negative pressure can be stably generated in the negative pressure pocket portion 19.

【0068】さらに、一対の正圧浮上面をスライダ流出
端まで達しない構造で、中央正圧浮上面幅をトランスデ
ューサ搭載可能幅にする構造により、スライダ浮上中の
最小浮上量位置を中央正圧浮上面の流出端にでき、ロー
ル方向の浮上量変動に対する抗する力を一対の正圧浮上
面によるロール剛性が担当するためスライダ幅に対する
中央正圧浮上面流出端幅の比だけ変動しにくく作用す
る。特に、両サイドの正圧浮上面後端のサイドの位置を
スライダの姿勢とシーク時のシーク方向加速度とスライ
ダロール剛性とスライダ形状によって決るスライダのロ
ール方向回転しても、中央正圧浮上面流出端の浮上量よ
り下がらないように選び、サイドから中央正圧浮上面流
出端に向けた線分を持つように構成することにより、最
低浮上量の可能性を中央正圧浮上面流出端と決定でき、
且つ、ロール剛性を高める事を可能にする。サイドレ−
ル17は流入側の傾斜面14と平面部15からなり、流
入端から流出端に向かってレール幅が一旦狭まるくびれ
部21を持つ。本実施例ではレールの両側の幅を変化さ
せている。
Further, the structure in which the pair of positive pressure air bearing surfaces does not reach the slider outflow end, and the width of the center positive pressure air bearing surface is set to the transducer mountable width, allows the minimum flying height position during slider flying to flow out to the center positive pressure air bearing surface. Since the roll rigidity by the pair of positive pressure air bearing surfaces is responsible for the force against the fluctuation of the flying height in the roll direction, the ratio of the central positive pressure air bearing surface outflow end width to the slider width hardly acts. In particular, even if the position of the rear side of the positive pressure air bearing surface on both sides is determined by the posture of the slider, the seek direction acceleration during seek, the slider roll rigidity, and the slider roll direction, the center positive pressure air bearing surface outflow end By selecting it so that it does not fall below the flying height, and by configuring it to have a line segment from the side toward the center positive pressure air bearing surface outflow end, the possibility of the minimum flying height can be determined as the center positive pressure air bearing surface outflow end,
It also makes it possible to increase roll rigidity. Side Ray
The rail 17 includes an inclined surface 14 on the inflow side and a flat surface portion 15, and has a constricted portion 21 in which the rail width once narrows from the inflow end toward the outflow end. In this embodiment, the width of both sides of the rail is changed.

【0069】図16は本発明の第3の実施例を示す斜視
図である。この実施例において、溝16は負圧ポケット
部19とほぼ同じ深さの面と傾斜面14とほぼ同じ傾斜
面とから構成され、溝16の外側にクロスレール18か
ら流出側へ突き出た半島部23を設けた例である。溝1
6の形状は塵埃排出効果を高める効果がある。傾斜面1
4の加工を気体軸受面の深さ加工の先に行うため、逆の
加工順序により生ずる傾斜面14形状誤差を低減でき、
加工時間を短縮できる効果が有る。また溝16の隣の半
島部23は溝16からの流体の進入を防ぎ半島部23と
クロスレール18で囲まれた負圧ポケット部19での負
圧力発生を安定化する作用が有る。半島部23を付ける
ことによって、発生負圧力を一定にすると溝16の溝幅
を広くできる効果がある。
FIG. 16 is a perspective view showing the third embodiment of the present invention. In this embodiment, the groove 16 is composed of a surface having substantially the same depth as the negative pressure pocket portion 19 and an inclined surface substantially the same as the inclined surface 14, and the peninsular portion protruding outside the groove 16 from the cross rail 18 to the outflow side. This is an example in which 23 is provided. Groove 1
The shape of 6 has the effect of enhancing the dust discharging effect. Slope 1
Since the machining of 4 is performed before the depth machining of the gas bearing surface, the shape error of the inclined surface 14 caused by the reverse machining sequence can be reduced,
It has the effect of shortening the processing time. The peninsula portion 23 adjacent to the groove 16 has a function of preventing the fluid from entering from the groove 16 and stabilizing the generation of negative pressure in the negative pressure pocket portion 19 surrounded by the peninsula portion 23 and the cross rail 18. By providing the peninsula portion 23, it is possible to widen the groove width of the groove 16 when the generated negative pressure is made constant.

【0070】図17は本発明の第4の実施例を示す平面
図である。この実施例は溝16をクロスレール18の中
間に付けた例である。本構成でも同様の効果がある。ま
た、サイドレール後端22に切り欠き部27を設けた例
でもある。この切り欠き部27を設けることによって、
サイドレール後端22の流出側に発生する負圧力を増加
させる。その結果、速度特性を向上させる効果がある。
FIG. 17 is a plan view showing the fourth embodiment of the present invention. In this embodiment, the groove 16 is provided in the middle of the cross rail 18. This configuration also has the same effect. It is also an example in which the notch 27 is provided at the rear end 22 of the side rail. By providing this cutout portion 27,
The negative pressure generated on the outflow side of the side rail rear end 22 is increased. As a result, there is an effect of improving speed characteristics.

【0071】図18は本発明の第5の実施例を示す平面
図である。この実施例は溝16と溝幅を非平行に構成し
た例である。本構成でも同様の効果がある。サイドレー
ル17の傾斜面14の幅を短くできるので、塵埃排出効
果を高める効果がある。
FIG. 18 is a plan view showing the fifth embodiment of the present invention. This embodiment is an example in which the groove 16 and the groove width are not parallel to each other. This configuration also has the same effect. Since the width of the inclined surface 14 of the side rail 17 can be shortened, there is an effect of enhancing the dust discharging effect.

【0072】図19は本発明の第6の実施例を示す平面
図である。この実施例は溝16が傾斜面14の途中まで
で終っている例である。加工深さは一定で溝16の入口
側の気体流入断面積を調整できるので溝幅を広く調節で
きる効果が有る。又、半島部23は幅が変化していても
よい。
FIG. 19 is a plan view showing the sixth embodiment of the present invention. This embodiment is an example in which the groove 16 ends halfway along the inclined surface 14. Since the processing depth is constant and the gas inflow cross-sectional area on the inlet side of the groove 16 can be adjusted, the groove width can be adjusted widely. In addition, the peninsula portion 23 may have a varying width.

【0073】図20は図19のI−I矢視断面図であ
る。負圧ポケット部19の深さ加工の段差面の角度θe
を30度から60度にした例である。他の実施例も含め
角度θeを小さくすると、負圧ポケット部19の深さの
ばらつきによる負圧力の変化と正圧レールの正圧力の変
化が相殺されて浮上量変化を小さくする効果が有る。
FIG. 20 is a sectional view taken along the line II of FIG. Depth machining step of negative pressure pocket 19 Angle θe
In this example, the angle is changed from 30 degrees to 60 degrees. Decreasing the angle θe including the other embodiments has the effect of offsetting the change in the negative pressure due to the variation in the depth of the negative pressure pocket portion 19 and the change in the positive pressure on the positive pressure rail, thereby reducing the change in the flying height.

【0074】図21は本発明の第7の実施例を示す斜視
図である。この実施例はクロスレール18に溝を設けな
い場合である。負圧ポケット部19の深さを深くする必
要が有るがそれ以外は同様の効果がある。
FIG. 21 is a perspective view showing the seventh embodiment of the present invention. In this embodiment, the cross rail 18 is not provided with a groove. It is necessary to increase the depth of the negative pressure pocket portion 19, but other than that, the same effect is obtained.

【0075】図22は本発明の第8の実施例を示す平面
図である。図23は図22の側面図である。この実施例
は気体軸受面13のサイドレール17とセンターレール
20を平面とした例である。流入側にチャンファ28を
設けている。傾斜面14を加工精度向上、時間短縮の効
果が有る。その他は同様の効果が有る。
FIG. 22 is a plan view showing the eighth embodiment of the present invention. FIG. 23 is a side view of FIG. In this embodiment, the side rails 17 and the center rail 20 of the gas bearing surface 13 are flat. A chamfer 28 is provided on the inflow side. This has the effects of improving the processing accuracy of the inclined surface 14 and shortening the time. Others have similar effects.

【0076】図24は本発明の第9の実施例を示す平面
図である。図25は図24の側面図である。この実施例
は溝16をクロスレール18の中央に1つ設け、センタ
ーレール20をクロスレール18の手前までとした例で
ある。溝16の溝幅を広げ、溝幅のばらつきに対する浮
上量の変化を減らすことができる他は同様の効果が有
る。
FIG. 24 is a plan view showing the ninth embodiment of the present invention. FIG. 25 is a side view of FIG. This embodiment is an example in which one groove 16 is provided at the center of the cross rail 18 and the center rail 20 is located just before the cross rail 18. The same effect is obtained except that the groove width of the groove 16 can be widened to reduce the change in the flying height due to the variation in the groove width.

【0077】図26は本発明の第10の実施例を示す平
面図である。図27は図26のII−II矢視断面図であ
る。この実施例は溝16をサイドレール17の側に設け
たこと及び、サイドレール後端22に斜め線分部を持た
ない例である。性能は少し落ちるが同様の効果が有る。
FIG. 26 is a plan view showing the tenth embodiment of the present invention. 27 is a sectional view taken along the line II-II of FIG. This embodiment is an example in which the groove 16 is provided on the side rail 17 side and the side rail rear end 22 does not have an oblique line segment portion. The performance is slightly reduced, but there is a similar effect.

【0078】図28は本発明のスライダを搭載したリニ
ア形磁気ディスク装置を示す図である。この図におい
て、キャリッジ44にガイドアーム43が結合され、該
ガイドアーム44にトランスデューサ支持装置42が連
結され、該トランスデューサ支持装置42の先端部にト
ランスデューサ11を搭載したスライダ12が装着され
ている。スライダ12はボイスコイルモータ45で駆動
され回転する記録媒体41の半径方向に進退する。本実
施例により内外周間の任意の位置の浮上量を概ね一定に
することができ浮上量変動が小さく安定に浮上するため
スライダの浮上量の微小化が可能となり記録媒体の高密
度記憶を実現できた。
FIG. 28 is a diagram showing a linear type magnetic disk device equipped with the slider of the present invention. In this drawing, a guide arm 43 is connected to a carriage 44, a transducer support device 42 is connected to the guide arm 44, and a slider 12 having a transducer 11 mounted thereon is attached to the tip of the transducer support device 42. The slider 12 moves forward and backward in the radial direction of the recording medium 41 which is driven by the voice coil motor 45 and rotates. According to the present embodiment, the flying height at any position between the inner and outer circumferences can be made substantially constant, and the flying height fluctuation is small and the flying height is stable, so that the flying height of the slider can be made small and high density storage of the recording medium is realized. did it.

【0079】図29は本発明のスライダを搭載したロー
タリー(インライン)形の磁気ディスク装置を一部断面
にて示す斜視図である。このキャリッジ44に結合され
たトランスデューサ支持装置42の先端部にトランスデ
ューサ11を搭載したスライダ12が装着されている。
本実施例によっても同様の効果が得られた。
FIG. 29 is a perspective view showing a rotary (in-line) type magnetic disk device equipped with the slider of the present invention in a partial cross section. The slider 12 having the transducer 11 mounted thereon is attached to the tip of the transducer support device 42 coupled to the carriage 44.
Similar effects were obtained also in this example.

【0080】[0080]

【発明の効果】以上説明したように、本発明によればス
ライダの浮上の速度特性を概ね一定にし、ヨー角特性が
優れ、アクセス機構の方式によらずディスク上の任意の
位置の浮上量をほぼ一定にすることができる。
As described above, according to the present invention, the flying velocity characteristic of the slider is substantially constant, the yaw angle characteristic is excellent, and the flying amount at any position on the disk can be controlled regardless of the access mechanism. It can be almost constant.

【0081】さらに、シーク時の加速度による浮上量変
動を小さい押え安定浮上するスライダを得ることができ
る。また、浮き上がり特性が良好で耐摺動性に優れ、ま
た、スライダ流入側気体軸受面への塵埃付着を回避する
ことができる。
Further, it is possible to obtain a slider that suppresses the fluctuation of the flying height due to the acceleration at the time of seek and stably flies. Further, the floating characteristic is good and the sliding resistance is excellent, and it is possible to avoid dust from adhering to the slider inflow side gas bearing surface.

【0082】また、負圧力調節手段により溝加工の容易
な加工性に優れた効果が有る。
Further, by the negative pressure adjusting means, there is an effect that the groove is easily machined and excellent in workability.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明のスライダの第1の実施例を示す斜視図
である。
FIG. 1 is a perspective view showing a first embodiment of a slider of the present invention.

【図2】図1に示す本発明のスライダの第1の実施例の
圧力分布状態を示す斜視図である。
2 is a perspective view showing a pressure distribution state of the first embodiment of the slider of the present invention shown in FIG. 1. FIG.

【図3】図2に示す圧力分布の側面図である。FIG. 3 is a side view of the pressure distribution shown in FIG.

【図4】図1に示す本発明のスライダの第1の実施例を
構成する負圧ポケット部の深さと負圧力の関係を示す特
性図である。
FIG. 4 is a characteristic diagram showing the relationship between the depth of the negative pressure pocket portion and the negative pressure which constitute the first embodiment of the slider of the present invention shown in FIG.

【図5】図1に示す本発明のスライダの第1の実施例を
構成する溝幅と負圧力の関係を示す特性図である。
5 is a characteristic diagram showing the relationship between the groove width and the negative pressure which constitutes the first embodiment of the slider of the present invention shown in FIG.

【図6】図1に示す本発明のスライダの第1の実施例を
構成する溝幅、負圧ポケット部深さと浮上速度特性を示
す特性図である。
FIG. 6 is a characteristic diagram showing a groove width, a negative pressure pocket portion depth and a flying speed characteristic which constitute the first embodiment of the slider of the present invention shown in FIG.

【図7】図1に示す本発明のスライダの第1の実施例の
速度特性を説明する特性図である。
FIG. 7 is a characteristic diagram illustrating velocity characteristics of the slider according to the first embodiment of the present invention shown in FIG.

【図8】図1に示す本発明のスライダの第1の実施例の
ヨー角特性を説明する特性図である。
FIG. 8 is a characteristic diagram for explaining the yaw angle characteristic of the first embodiment of the slider of the present invention shown in FIG.

【図9】図1に示す本発明のスライダの第1の実施例の
ロール方向浮上変動を示すスライダ後方から見た説明図
である。
FIG. 9 is an explanatory view showing the fluctuation in the roll direction of the slider according to the first embodiment of the present invention shown in FIG. 1, as seen from the rear of the slider.

【図10】図1に示す本発明のスライダの第1の実施例
のスライダ浮上姿勢との関係を示す側面図である。
10 is a side view showing the relationship between the slider flying posture of the first embodiment of the slider of the present invention shown in FIG. 1. FIG.

【図11】図10に示すスライダ気体軸受面の領域を示
す平面図である。
11 is a plan view showing a region of a slider gas bearing surface shown in FIG.

【図12】図1に示す本発明のスライダの第1の実施例
の加速度沈み込み特性を説明する特性図である。
FIG. 12 is a characteristic diagram illustrating the acceleration depression characteristic of the first embodiment of the slider of the present invention shown in FIG.

【図13】本発明のスライダの第2の実施例を示す斜視
図である。
FIG. 13 is a perspective view showing a second embodiment of the slider of the present invention.

【図14】本発明のスライダの第2の実施例のヨー角特
性を説明する平面図である。
FIG. 14 is a plan view illustrating the yaw angle characteristic of the second embodiment of the slider of the present invention.

【図15】図14に示す本発明のスライダの第2の実施
例の溝幅と他の寸法の関係を示す平面図である。
15 is a plan view showing the relationship between the groove width and other dimensions of the second embodiment of the slider of the present invention shown in FIG.

【図16】本発明のスライダの第3の実施例を示す斜視
図である。
FIG. 16 is a perspective view showing a third embodiment of the slider of the present invention.

【図17】本発明のスライダの第4の実施例を示す平面
図である。
FIG. 17 is a plan view showing a fourth embodiment of the slider of the present invention.

【図18】本発明のスライダの第5の実施例を示す平面
図である。
FIG. 18 is a plan view showing a fifth embodiment of the slider of the present invention.

【図19】本発明のスライダの第6の実施例を示す平面
図である。
FIG. 19 is a plan view showing a sixth embodiment of the slider of the present invention.

【図20】図19に示す本発明のスライダの第6の実施
例I−I矢視断面図である。
20 is a sectional view of the slider of the present invention shown in FIG. 19 taken along the line II of the sixth embodiment.

【図21】本発明のスライダの第7の実施例を示す斜視
図である。
FIG. 21 is a perspective view showing a seventh embodiment of the slider of the present invention.

【図22】本発明のスライダの第8の実施例を示す平面
図である。
FIG. 22 is a plan view showing an eighth embodiment of the slider of the present invention.

【図23】図22に示す本発明のスライダの第8の実施
例の側面図である。
FIG. 23 is a side view of the eighth embodiment of the slider of the present invention shown in FIG.

【図24】本発明のスライダの第9の実施例を示す平面
図である。
FIG. 24 is a plan view showing a ninth embodiment of the slider of the present invention.

【図25】図24に示す本発明のスライダの第9の実施
例の側面図である。
25 is a side view of the ninth embodiment of the slider of the present invention shown in FIG. 24. FIG.

【図26】本発明のスライダの第10の実施例を示す平
面図である。
FIG. 26 is a plan view showing a tenth embodiment of the slider of the present invention.

【図27】図26に示す本発明のスライダの第10の実
施例のII−II矢視断面図である。
27 is a cross-sectional view taken along the line II-II of the tenth embodiment of the slider of the present invention shown in FIG.

【図28】本発明のスライダを搭載した磁気ディスク装
置の一例を示す縦断面図である。
FIG. 28 is a vertical cross-sectional view showing an example of a magnetic disk device equipped with the slider of the present invention.

【図29】本発明のスライダを搭載した磁気ディスク装
置の他の例を一部断面にて示す斜視図である。
FIG. 29 is a perspective view showing another example of a magnetic disk device equipped with the slider of the present invention in a partial cross section.

【符号の説明】[Explanation of symbols]

1…磁気ヘッド、2…スライダ、3…気体軸受面、4…
傾斜面、5…平面部、6…ブリード部、7…サイドレー
ル、8…クロスレール、9…負圧ポケット、10…セン
ターレール、11…トランスデューサ、12…スライ
ダ、13…気体軸受面、14…傾斜面、15…平面部、
16…溝、17…サイドレール(正圧発生面)、18…
クロスレール、19…負圧発生凹部、20…センターレ
ール(中央正圧発生面)、21…くびれ部、22…サイ
ド正圧発生面後端、23…半島部、24…後部軸受面、
25…斜め線分部、26…センターレール広がり部、2
7…切り欠き部、28…チャンファ、41…記録媒体、
42…トランスデューサ支持装置、43…ガイドアー
ム、44…キャリッジ、45…ボイスコイルモータ。
1 ... Magnetic head, 2 ... Slider, 3 ... Gas bearing surface, 4 ...
Inclined surface, 5 ... Plane part, 6 ... Bleed part, 7 ... Side rail, 8 ... Cross rail, 9 ... Negative pressure pocket, 10 ... Center rail, 11 ... Transducer, 12 ... Slider, 13 ... Gas bearing surface, 14 ... Inclined surface, 15 ... plane part,
16 ... Groove, 17 ... Side rail (positive pressure generating surface), 18 ...
Cross rail, 19 ... Negative pressure generating concave portion, 20 ... Center rail (center positive pressure generating surface), 21 ... Constricted portion, 22 ... Side positive pressure generating surface rear end, 23 ... Peninsula portion, 24 ... Rear bearing surface,
25 ... Diagonal line segment part, 26 ... Center rail spread part, 2
7 ... notch part, 28 ... chamfer, 41 ... recording medium,
42 ... Transducer support device, 43 ... Guide arm, 44 ... Carriage, 45 ... Voice coil motor.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 上利 宏司 神奈川県小田原市国府津2880番地 株式会 社日立製作所ストレージシステム事業部内 (72)発明者 清水 丈正 神奈川県小田原市国府津2880番地 株式会 社日立製作所ストレージシステム事業部内 (72)発明者 戸川 衛星 神奈川県小田原市国府津2880番地 株式会 社日立製作所ストレージシステム事業部内 (72)発明者 小島 康生 神奈川県小田原市国府津2880番地 株式会 社日立製作所ストレージシステム事業部内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Koji Kami 2880 Kunizu, Odawara, Kanagawa Stock Company Hitachi Storage Systems Division (72) Inventor Takemasa Shimizu 2880 Kunizu, Odawara, Kanagawa Hitachi, Ltd. In-house Storage Systems Division (72) Inventor Satellite Togawa Satellite 2880, Kozu, Odawara City, Kanagawa Stock Company Hitachi Storage Systems Division (72) Inventor Yasushi Kojima 2880, Kozu, Odawara City, Kanagawa Hitachi Storage Systems Business Department

Claims (14)

【特許請求の範囲】[Claims] 【請求項1】回転する記憶媒体に対向して配置したスラ
イダの気体軸受面が、両サイドの一対の正圧発生面と、
前記正圧発生面の流入側で前記正圧発生面間を同一平面
内でつなぐクロスレールとを有し、前記クロスレールの
後方に前記正圧発生面と前記クロスレールで囲まれた逆
ステップ状の凹部を有する負圧利用形の浮動ヘッドスラ
イダにおいて、前記一対の正圧浮上面は、前方から後端
に向かってレール幅が一旦狭まるくびれ部を有し、後端
に向かってレール幅が広がり、且つ両サイド後端まで達
しない構造を持ち、スライダの気体軸受面の流出部の中
央に前記一対の正圧浮上面と略同一面の中央正圧浮上面
を有し、前記中央正圧発生面の後端にトランスデューサ
を搭載したことを特徴とする浮動ヘッドスライダ。
1. A gas bearing surface of a slider, which is arranged to face a rotating storage medium, has a pair of positive pressure generating surfaces on both sides.
A cross rail connecting the positive pressure generating surfaces in the same plane on the inflow side of the positive pressure generating surface, and a reverse step shape surrounded by the positive pressure generating surface and the cross rail behind the cross rail. In the negative pressure utilizing type floating head slider having the concave portion of, the pair of positive pressure air bearing surfaces has a constricted portion where the rail width once narrows from the front to the rear end, and the rail width widens toward the rear end. Moreover, it has a structure that does not reach the rear ends of both sides, and has a central positive pressure air bearing surface that is substantially the same as the pair of positive pressure air bearing surfaces at the center of the outflow portion of the gas bearing surface of the slider. A floating head slider that is equipped with a transducer at its end.
【請求項2】回転する記憶媒体に対向して配置したスラ
イダの気体軸受面が両サイドの一対の正圧発生面と、前
記正圧発生面の流入側で前記正圧発生面間を同一平面内
でつなぐクロスレールとを有し、前記クロスレールの後
方に前記正圧発生面と前記クロスレールで囲まれた逆ス
テップ状の凹部を有する負圧利用形の浮動ヘッドスライ
ダにおいて、前記一対の正圧浮上面は、前方から後端に
向かって浮上面幅が一旦狭まるくびれ部を有し、後端に
向かって浮上面幅が広がり、且つ両サイド後端まで達し
ない構造を持ち、スライダの幅方向中央部に前記凹部を
2分割する前記クロスレールから気体軸受面の流出部中
央に延びる中央正圧浮上面を有し、前記中央正圧浮上面
は、スライダ長さ方向中央から流出側で浮上面幅が広が
る構造を持ち前記中央正圧発生面の後端にトランスデュ
ーサを搭載したことを特徴とする浮動ヘッドスライダ。
2. A pair of positive pressure generating surfaces on both sides of a gas bearing surface of a slider which is arranged so as to face a rotating storage medium, and a flat surface between the positive pressure generating surfaces on the inflow side of the positive pressure generating surfaces. A negative pressure utilizing type floating head slider having a cross rail connected to the inside of the cross rail, and having the positive pressure generating surface and a recess of a reverse step surrounded by the cross rail at the rear of the cross rail. The pressure-bearing surface has a constriction where the width of the air bearing surface narrows from the front to the rear end, the width of the air bearing surface widens toward the rear end, and does not reach the rear ends of both sides. The central positive pressure air bearing surface extends from the cross rail that divides the recess into two parts to the center of the outflow portion of the gas bearing surface, and the central positive pressure air bearing surface has an air bearing surface width on the outflow side from the center in the slider length direction. It has a structure that expands Floating head slider, characterized in that mounting the transducer on the rear end of HisashiTadashi圧 generating surface.
【請求項3】回転する記憶媒体に対向して配置したスラ
イダの気体軸受面が両サイドの一対の正圧発生面と、前
記正圧発生面の流入側で前記正圧発生面間を同一平面内
でつなぐクロスレールとを有し、前記クロスレールの後
方に前記正圧発生面と前記クロスレールで囲まれた逆ス
テップ状の凹部を有する負圧利用形の浮動ヘッドスライ
ダにおいて、前記一対の正圧浮上面は、前方から後端に
向かって浮上面幅が一旦狭まるくびれ部を有し、後端に
向かって浮上面幅が広がり、且つ両サイド後端まで達し
ない構造を持ち、スライダの幅方向中央部に前記逆ステ
ップ状の凹部を2分割する前記クロスレールから気体軸
受面の流出部中央に延びる中央正圧浮上面を有し、前記
中央正圧浮上面は、スライダ長さ方向中央から流出側で
浮上面幅が広がる構造を持ち、前記クロスレールに前記
凹部から前端に通じる一つ以上の凹部と同一深さの溝を
設け、前記中央正圧発生面の後端にトランスデューサを
搭載したことを特徴とする浮動ヘッドスライダ。
3. A pair of positive pressure generating surfaces on both sides of a gas bearing surface of a slider arranged facing a rotating storage medium, and the positive pressure generating surfaces on the inflow side of the positive pressure generating surface are flush with each other. A negative pressure utilizing type floating head slider having a cross rail connected to the inside of the cross rail, and having the positive pressure generating surface and a recess of a reverse step surrounded by the cross rail at the rear of the cross rail. The pressure-bearing surface has a constriction where the width of the air bearing surface narrows from the front to the rear end, the width of the air bearing surface widens toward the rear end, and does not reach the rear ends of both sides. The central positive pressure air bearing surface extends from the cross rail that divides the reverse step-shaped recess into two parts to the center of the outflow portion of the gas bearing surface, and the central positive pressure air bearing surface is on the outflow side from the center in the slider length direction. Wider air bearing surface A floating head slider characterized in that a groove having the same depth as one or more recesses communicating from the recess to the front end is provided in the cross rail, and a transducer is mounted at the rear end of the central positive pressure generating surface. .
【請求項4】回転する記憶媒体に対向して配置したスラ
イダの気体軸受面が両サイドの一対の正圧発生面と、前
記正圧発生面の流入側で前記正圧発生面間を同一平面内
でつなぐクロスレールとを有し、前記クロスレールの後
方に前記正圧発生面と前記クロスレールで囲まれた逆ス
テップ状の凹部を有する負圧利用形の浮動ヘッドスライ
ダにおいて、前記一対の正圧浮上面は、外側がほぼ直線
で前記凹部に接する側が前方から後端に向かって浮上面
幅が一旦狭まるくびれ部を有し、後端に向かって浮上面
幅が広がり、且つ両サイド後端まで達しない構造を持
ち、スライダの幅方向中央部に前記逆ステップ状の凹部
を2分割する前記クロスレールから気体軸受面の流出部
中央に延びる中央正圧浮上面を有し、前記中央正圧浮上
面は、スライダ長さ方向中央から流出側で浮上面幅が広
がる構造を持ち、前記クロスレールに前記凹部から前端
に通じる一つ以上の凹部と同一深さの溝を設け、前記中
央正圧発生面の後端にトランスデューサを搭載したこと
を特徴とする浮動ヘッドスライダ。
4. A pair of positive pressure generating surfaces on both sides of a gas bearing surface of a slider arranged facing a rotating storage medium, and the positive pressure generating surfaces on the inflow side of the positive pressure generating surface are flush with each other. A negative pressure utilizing type floating head slider having a cross rail connected to the inside of the cross rail, and having the positive pressure generating surface and a recess of a reverse step surrounded by the cross rail at the rear of the cross rail. The pressure-bearing surface has a constriction where the outside is substantially straight and the side in contact with the recess is such that the width of the air-bearing surface is once narrowed from the front to the rear end. It has a structure that does not reach, and has a central positive pressure air bearing surface that extends from the cross rail that divides the reverse step-shaped recess into two in the widthwise central portion of the slider to the center of the outflow portion of the gas bearing surface. , Slider length The cross-rail has a structure in which the width of the air bearing surface widens from the center toward the outflow side, and a groove having the same depth as one or more recesses leading from the recess to the front end is provided in the cross rail, and a transducer is provided at the rear end of the central positive pressure generating surface. A floating head slider characterized by being equipped with.
【請求項5】回転する記憶媒体に対向して配置したスラ
イダの気体軸受面が両サイドの一対の正圧発生面と、前
記正圧発生面の流入側で前記正圧発生面間を同一平面内
でつなぐクロスレールとを有し、前記クロスレールの後
方に前記正圧発生面と前記クロスレールで囲まれた逆ス
テップ状の凹部を有する負圧利用形の浮動ヘッドスライ
ダにおいて、前記一対の正圧浮上面は、前方から後端に
向かって浮上面幅が一旦狭まるくびれ部を有し、後端に
向かって浮上面幅が広がり、その後端はスライダサイド
から鈍角で流出端中央に向かう線分を有し、両サイド後
端まで達しない構造を持ち、スライダの幅方向中央部に
前記凹部を2分割する前記クロスレールから気体軸受面
の流出部中央に延びる中央正圧浮上面を有し、前記中央
正圧浮上面は、スライダ長さ方向中央から流出側で浮上
面幅が広がる構造を持ち、前記クロスレールに前記凹部
から前端に通じる一つ以上の凹部と同一深さの溝を設
け、前記中央正圧発生面の後端にトランスデューサを搭
載したことを特徴とする浮動ヘッドスライダ。
5. A pair of positive pressure generating surfaces on both sides of a gas bearing surface of a slider arranged facing a rotating storage medium, and the positive pressure generating surfaces on the inflow side of the positive pressure generating surface are flush with each other. A negative pressure utilizing type floating head slider having a cross rail connected to the inside of the cross rail, and having the positive pressure generating surface and a recess of a reverse step surrounded by the cross rail at the rear of the cross rail. The pressure-bearing surface has a constriction where the width of the air bearing surface narrows from the front to the rear end, the width of the air bearing surface widens toward the rear end, and the rear end forms a line segment from the slider side toward the center of the outflow end at an obtuse angle. And a central positive pressure air bearing surface extending from the cross rail that divides the recess into two into the center of the outflow portion of the gas bearing surface, and has a structure that does not reach the rear ends of both sides. Positive pressure air bearing surface The cross-rail has a structure in which the air-bearing surface width widens from the center in the lengthwise direction on the outflow side, and the cross rail is provided with a groove having the same depth as one or more recesses leading from the recess to the front end. A floating head slider that is equipped with a transducer at its end.
【請求項6】回転する記憶媒体に対向して配置したスラ
イダの気体軸受面が両サイドの一対の正圧発生面と、前
記正圧発生面の流入側で前記正圧発生面間を同一平面内
でつなぐクロスレールとを有し、前記クロスレールの後
方に前記正圧発生面と前記クロスレールで囲まれた逆ス
テップ状の凹部を有する負圧利用形の浮動ヘッドスライ
ダにおいて、前記一対の正圧浮上面は、前方から後端に
向かって浮上面幅が一旦狭まるくびれ部を有し、後端に
向かって浮上面幅が広がり、その後端はスライダサイド
から鈍角で流出端中央に向かう線分を有し、両サイド後
端まで達しない構造を持ち、スライダの幅方向中央部に
前記凹部を2分割する前記クロスレールから気体軸受面
の流出部中央に延びる中央正圧浮上面を有し、前記中央
正圧浮上面は、スライダ長さ方向中央から流出側で浮上
面幅が広がる構造を持ち、前記クロスレールに前記凹部
から前端に通じる一つ以上の凹部と同一深さの溝を設
け、前記溝幅がその後流の凹部最大幅の1/2以下であ
り、前記中央正圧発生面の後端にトランスデューサを搭
載したことを特徴とする浮動ヘッドスライダ。
6. A pair of positive pressure generating surfaces on both sides of a gas bearing surface of a slider arranged facing a rotating storage medium, and the positive pressure generating surfaces on the inflow side of the positive pressure generating surface are flush with each other. A negative pressure utilizing type floating head slider having a cross rail connected to the inside of the cross rail, and having the positive pressure generating surface and a recess of a reverse step surrounded by the cross rail at the rear of the cross rail. The pressure-bearing surface has a constriction where the width of the air bearing surface narrows from the front to the rear end, the width of the air bearing surface widens toward the rear end, and the rear end forms a line segment from the slider side toward the center of the outflow end at an obtuse angle. And a central positive pressure air bearing surface extending from the cross rail that divides the recess into two into the center of the outflow portion of the gas bearing surface, and has a structure that does not reach the rear ends of both sides. Positive pressure air bearing surface The cross rail has a structure in which the width of the air bearing surface widens on the outflow side from the center in the longitudinal direction, and the cross rail is provided with a groove having the same depth as one or more recesses leading from the recess to the front end, and the groove width is a recess having a wake. A floating head slider having a width equal to or less than ½ of the maximum width and having a transducer mounted at the rear end of the central positive pressure generating surface.
【請求項7】回転する記憶媒体に対向して配置したスラ
イダの気体軸受面が両サイドの一対の正圧発生面と、前
記正圧発生面の流入側で前記正圧発生面間を同一平面内
でつなぐクロスレールとを有し、前記クロスレールの後
方に前記正圧発生面と前記クロスレールで囲まれた逆ス
テップ状の凹部を有する負圧利用形の浮動ヘッドスライ
ダにおいて、前記一対の正圧浮上面は、前方から後端に
向かって浮上面幅が一旦狭まるくびれ部を有し、後端に
向かって浮上面幅が広がり、その後端はスライダサイド
から鈍角で流出端中央に向かう線分を有し、両サイド後
端まで達しない構造を持ち、スライダの幅方向中央部に
前記凹部を2分割する前記クロスレールから気体軸受面
の流出部中央に延びる中央正圧浮上面を有し、前記中央
正圧浮上面は、スライダ長さ方向中央から流出側で浮上
面幅が広がる構造を持ち、前記クロスレールに前記凹部
から前端に通じる一つ以上の凹部と同一深さの溝を設
け、前記溝幅は凹部流出側の前記一対の正圧発生面と前
記中央正圧発生面間の最小幅より狭く構成し、前記中央
正圧発生面の後端にトランスデューサを搭載したことを
特徴とする浮動ヘッドスライダ。
7. A pair of positive pressure generating surfaces on both sides of a gas bearing surface of a slider arranged facing a rotating storage medium, and the positive pressure generating surfaces on the inflow side of the positive pressure generating surface are flush with each other. A negative pressure utilizing type floating head slider having a cross rail connected to the inside of the cross rail, and having the positive pressure generating surface and a recess of a reverse step surrounded by the cross rail at the rear of the cross rail. The pressure-bearing surface has a constriction where the width of the air bearing surface narrows from the front to the rear end, the width of the air bearing surface widens toward the rear end, and the rear end forms a line segment from the slider side toward the center of the outflow end at an obtuse angle. And a central positive pressure air bearing surface extending from the cross rail that divides the recess into two into the center of the outflow portion of the gas bearing surface, and has a structure that does not reach the rear ends of both sides. Positive pressure air bearing surface The cross-rail has a structure in which the air-bearing surface width widens from the center in the length direction on the outflow side, and the cross rail is provided with a groove having the same depth as one or more recesses leading from the recess to the front end. A floating head slider characterized in that the transducer is mounted at the rear end of the central positive pressure generating surface, the width being narrower than the minimum width between the pair of positive pressure generating surfaces and the central positive pressure generating surface.
【請求項8】回転する記憶媒体に対向して配置したスラ
イダの気体軸受面が両サイドの一対の正圧発生面と、前
記正圧発生面の流入側で前記正圧発生面間を同一平面内
でつなぐクロスレールとを有し、前記クロスレールの後
方に前記正圧発生面と前記クロスレールで囲まれた逆ス
テップ状の凹部を有する負圧利用形の浮動ヘッドスライ
ダにおいて、前記一対の正圧浮上面は、前方から後端に
向かって浮上面幅が一旦狭まるくびれ部を有し、後端に
向かって浮上面幅が広がり、その後端はスライダサイド
から鈍角で流出端中央に向かう線分を有し、両サイド後
端まで達しない構造を持ち、スライダの幅方向中央部に
前記凹部を2分割する前記クロスレールから気体軸受面
の流出部中央に延びる中央正圧浮上面を有し、前記中央
正圧浮上面は、スライダ長さ方向中央から流出側で浮上
面幅が広がる構造を持ち、前記クロスレールの前記中央
正圧浮上面に沿って前記凹部から前端に通じる凹部と同
一深さの溝を設け、前記溝の外側のクロスレールから流
出側に延びた半島部を設け、前記中央正圧発生面の後端
にトランスデューサを搭載したことを特徴とする浮動ヘ
ッドスライダ。
8. A pair of positive pressure generating surfaces on both sides of a gas bearing surface of a slider arranged facing a rotating storage medium, and a flat surface between the positive pressure generating surfaces on the inflow side of the positive pressure generating surfaces. A negative pressure utilizing type floating head slider having a cross rail connected to the inside of the cross rail, and having the positive pressure generating surface and a recess of a reverse step surrounded by the cross rail at the rear of the cross rail. The pressure-bearing surface has a constriction where the width of the air bearing surface narrows from the front to the rear end, the width of the air bearing surface widens toward the rear end, and the rear end forms a line segment from the slider side toward the center of the outflow end at an obtuse angle. And a central positive pressure air bearing surface extending from the cross rail that divides the recess into two into the center of the outflow portion of the gas bearing surface, and has a structure that does not reach the rear ends of both sides. Positive pressure air bearing surface The cross-section has a structure in which the width of the air bearing surface widens from the center in the longitudinal direction to the outflow side, and a groove having the same depth as the recess communicating from the recess to the front end is provided along the central positive pressure air bearing surface of the cross rail, and outside the groove. The floating head slider, wherein a peninsular portion extending from the cross rail to the outflow side is provided, and a transducer is mounted at the rear end of the central positive pressure generating surface.
【請求項9】回転する記憶媒体に対向して配置したスラ
イダの気体軸受面が両サイドの一対の正圧発生面と、前
記正圧発生面の流入側で前記正圧発生面間を同一平面内
でつなぐクロスレールとを有し、前記クロスレールの後
方に前記正圧発生面と前記クロスレールで囲まれた逆ス
テップ状の凹部を有する負圧利用形の浮動ヘッドスライ
ダにおいて、前記一対の正圧浮上面は、前方から後端に
向かって浮上面幅が一旦狭まるくびれ部を有し、後端に
向かって浮上面幅が広がり、両サイド後端まで達しない
構造を持ち、スライダの幅方向中央部に前記凹部を2分
割し、気体軸受面の流出部中央に延び、流出側で浮上面
幅が広がる構造の中央正圧浮上面を有し、スライダの荷
重点より流出側では前記中央正圧浮上面の面積が前記両
サイドの正圧発生面の面積の和より小さいことを特徴と
する浮動ヘッドスライダ。
9. A pair of positive pressure generating surfaces on both sides of a gas bearing surface of a slider arranged facing a rotating storage medium, and the positive pressure generating surfaces on the inflow side of the positive pressure generating surface are flush with each other. A negative pressure utilizing type floating head slider having a cross rail connected to the inside of the cross rail, and having the positive pressure generating surface and a recess of a reverse step surrounded by the cross rail at the rear of the cross rail. The pressure-bearing surface has a constriction where the width of the air bearing surface gradually narrows from the front to the rear end, the width of the air bearing surface widens toward the rear end, and does not reach the rear ends of both sides. Has a central positive pressure air bearing surface that is divided into two parts, extends to the center of the outflow portion of the gas bearing surface, and the air bearing surface width widens on the outflow side, and the central positive pressure air bearing surface is on the outflow side from the load point of the slider. Area of positive pressure generated on both sides Floating head slider, wherein the smaller than the sum of the areas.
【請求項10】回転する記憶媒体に対向して配置した、
トランスデューサを搭載したスライダと、該スライダの
前記記憶媒体との対向面に形成され該記憶媒体の回転に
伴う気体流により発生する正の圧力によりスライダを浮
上させる気体軸受面を備えた浮動ヘッドスライダにおい
て、前記スライダは前端、後端を有し、前記気体軸受面
の両サイドに一対の正圧発生面を配置し前記正圧発生面
は、スライダ後端まで達しず、その正圧発生面後端はス
ライダサイドから鈍角でスライダ流出端中央に向かう線
分を有し、前記気体軸受面の中央後端に中央正圧発生面
が配置され、前記中央正圧発生面後端にトランスヂュー
サを搭載したことを特徴とする浮動ヘッドスライダ。
10. Arranged to face a rotating storage medium,
A floating head slider comprising: a slider on which a transducer is mounted; and a gas bearing surface which is formed on a surface of the slider facing the storage medium and which is floated by a positive pressure generated by a gas flow accompanying the rotation of the storage medium. The slider has a front end and a rear end, and a pair of positive pressure generating surfaces are arranged on both sides of the gas bearing surface, and the positive pressure generating surface does not reach the slider rear end, and the positive pressure generating surface rear end. Has an obtuse line segment from the slider side to the center of the slider outflow end, the central positive pressure generating surface is arranged at the central rear end of the gas bearing surface, and the transducer is mounted at the rear end of the central positive pressure generating surface. A floating head slider characterized in that
【請求項11】前記気体軸受レールのくびれ部位置はス
ライダ前端、後端の中央より前端側に設けたことを特徴
とする請求項1乃至請求項10に記載の浮動ヘッドスラ
イダ。
11. The floating head slider according to claim 1, wherein the constricted portion of the gas bearing rail is provided closer to the front end side than the center of the slider front end and rear end.
【請求項12】前記気体軸受レールの後端部の両サイド
端のスライダ後端からの距離は前記気体軸受レールの後
端部のスライダ中央側のスライダ後端からの距離より長
いことを特徴とする請求項1乃至請求項11に記載の浮
動ヘッドスライダ。
12. The distance between both side ends of the rear end of the gas bearing rail from the slider rear end is longer than the distance from the slider rear end on the slider center side of the rear end of the gas bearing rail. The floating head slider according to any one of claims 1 to 11.
【請求項13】前記気体軸受面の正圧発生面の全面が平
面であることを特徴とする請求項1乃至請求項12に記
載の浮動ヘッドスライダ。
13. The floating head slider according to claim 1, wherein the entire positive pressure generating surface of the gas bearing surface is a flat surface.
【請求項14】請求項1乃至請求項13に記載の浮動ヘ
ッドスライダが装着されていることを特徴とする回転円
板記憶装置。
14. A rotating disk storage device, wherein the floating head slider according to claim 1 is mounted.
JP27398792A 1992-10-13 1992-10-13 Floating head slider and rotating disk storage device Expired - Lifetime JP2874484B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP27398792A JP2874484B2 (en) 1992-10-13 1992-10-13 Floating head slider and rotating disk storage device
US08/135,442 US5430591A (en) 1992-10-13 1993-10-13 Negative pressure flying head slider having siderails with narrow width portion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27398792A JP2874484B2 (en) 1992-10-13 1992-10-13 Floating head slider and rotating disk storage device

Publications (2)

Publication Number Publication Date
JPH06124562A true JPH06124562A (en) 1994-05-06
JP2874484B2 JP2874484B2 (en) 1999-03-24

Family

ID=17535364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27398792A Expired - Lifetime JP2874484B2 (en) 1992-10-13 1992-10-13 Floating head slider and rotating disk storage device

Country Status (1)

Country Link
JP (1) JP2874484B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5550692A (en) * 1994-09-29 1996-08-27 Seagate Technology, Inc. Proximity recording air bearing slider design with waist offset
EP0747890A1 (en) * 1995-06-06 1996-12-11 Seagate Technology, Inc. Center rail slider for proximity recording
US7154709B2 (en) 2000-04-12 2006-12-26 Seagate Technology Llc Slider with recessed pressurization surfaces

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5550692A (en) * 1994-09-29 1996-08-27 Seagate Technology, Inc. Proximity recording air bearing slider design with waist offset
EP0747890A1 (en) * 1995-06-06 1996-12-11 Seagate Technology, Inc. Center rail slider for proximity recording
US7154709B2 (en) 2000-04-12 2006-12-26 Seagate Technology Llc Slider with recessed pressurization surfaces

Also Published As

Publication number Publication date
JP2874484B2 (en) 1999-03-24

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