JPH06117597A - Method of maintaining pipe line - Google Patents

Method of maintaining pipe line

Info

Publication number
JPH06117597A
JPH06117597A JP4268510A JP26851092A JPH06117597A JP H06117597 A JPH06117597 A JP H06117597A JP 4268510 A JP4268510 A JP 4268510A JP 26851092 A JP26851092 A JP 26851092A JP H06117597 A JPH06117597 A JP H06117597A
Authority
JP
Japan
Prior art keywords
pipe
pipes
joint
pipe line
decreased
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4268510A
Other languages
Japanese (ja)
Inventor
Kenichiro Kojima
賢一郎 小島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sekisui Chemical Co Ltd
Original Assignee
Sekisui Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sekisui Chemical Co Ltd filed Critical Sekisui Chemical Co Ltd
Priority to JP4268510A priority Critical patent/JPH06117597A/en
Publication of JPH06117597A publication Critical patent/JPH06117597A/en
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L57/00Protection of pipes or objects of similar shape against external or internal damage or wear

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Joints With Pressure Members (AREA)

Abstract

PURPOSE:To use a pipe line in which a plurality of pipes are connected by joints, for a long time by turning pipes at suitable time intervals (every time when the wall thickness of the bottom part of a pipe is decreased by a predetermined value) so that the bottoms of the pipes are shifted upward. CONSTITUTION:In a pipe line in which hard vinyl chloride resin pipes 1, 1 are connected together by means of a hard vinyl chloride joint 2, at a stage such that the wall thickness of the bottom of the pipe a is more or less decreased by a fluid passing through the pipe line for a long time, A blind nut 23 on the joint 2 is loosened so as turn the pipes 1, 1 by an angle of 180deg. Accordingly, the bottom of each of the pipes 1 whose wall thickness is decreased, is located right above, and in this condition, the blind nut 23 is fastened to for refixing the pipes 1, 1. Accordingly, the pipe line can be used for a long time, and accordingly, this process is cheaper than the conventional process in which pipes are replaced with new ones.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、化学プラント等におけ
る配管の維持保全方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for maintaining and maintaining piping in a chemical plant or the like.

【0002】[0002]

【従来の技術】従来、化学プラント等における配管にお
いては、硬質塩化ビニル樹脂管、ポリエチレン樹脂管、
ライニング鋼管、FRP管等が使用されている。化学プ
ラント等における配管においては、水道管や排水管等と
比較して、配管内を流れる流体が強酸性や強アルカリ性
である場合や、流体が高温高圧である場合等過酷な条件
で使用される場合が多く、腐食或いは管壁の肉の厚さの
減少等の劣化が発生し易い。又、流体にはスケールを多
量に含む場合もあり、スケールによる磨耗の為に管壁肉
の厚さが減少することもある。
2. Description of the Related Art Conventionally, in piping in a chemical plant or the like, a hard vinyl chloride resin pipe, a polyethylene resin pipe,
Lining steel pipes, FRP pipes, etc. are used. In pipes in chemical plants, etc., compared to water pipes, drain pipes, etc., it is used under severe conditions such as when the fluid flowing in the pipe is strongly acidic or alkaline, or when the fluid is at high temperature and high pressure. In many cases, corrosion or deterioration such as reduction in wall thickness of the pipe wall is likely to occur. Further, the fluid may contain a large amount of scale, and the thickness of the tube wall may be reduced due to abrasion by the scale.

【0003】このような配管では、管内を流体が充満し
ない状態で流れる場合には、流体が接する部分、即ち管
の底部の部分のみが極端に肉の厚さが減少し、減少が激
しいときは、流体が漏洩する等の事故が発生する。従っ
て、管の底部の肉の厚さがある程度減少した段階で管を
取り替えることが行われている。
In such a pipe, when the fluid flows in the pipe without being filled with the fluid, only the portion in contact with the fluid, that is, the bottom portion of the pipe has an extremely thin wall thickness. , An accident such as fluid leakage will occur. Therefore, the tube is replaced when the thickness of the bottom wall of the tube is reduced to some extent.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、このよ
うに管の底部の肉の厚さがある程度減少した段階で管を
取り替えるのは、管の底部以外の大部分が殆ど変化して
いないのに管を丸ごと取り替えることとなり、経済的で
はない。
However, when the thickness of the bottom wall of the pipe is reduced to some extent in this way, the pipe is replaced because the pipe is almost unchanged except for the bottom. Will be replaced entirely, which is not economical.

【0005】本発明は、従来のこのような問題点に着目
してなされたものであって、その目的とするところは、
上記の問題を解決し、管の底部の肉の厚さがある程度減
少した段階でも管を丸ごと取り替える必要のない配管の
維持保全方法を提供するにある。
The present invention has been made by paying attention to such a conventional problem, and its purpose is to:
It is an object of the present invention to solve the above problems and provide a method for maintaining and maintaining a pipe that does not require replacement of the entire pipe even when the thickness of the bottom wall of the pipe is reduced to some extent.

【0006】[0006]

【課題を解決するための手段】上記目的を達成するため
に、本発明に係る配管の維持保全方法は、複数本の管が
継手により接続された配管において、適宜な時期に管を
回動させることにより管の底部を最下方位置から上方に
移動させることを特徴とするものである。
In order to achieve the above object, a method of maintaining and maintaining a pipe according to the present invention is to rotate a pipe at a proper time in a pipe in which a plurality of pipes are connected by a joint. Thus, the bottom of the pipe is moved upward from the lowermost position.

【0007】本発明方法において、管を回動させる適宜
な時期としては、管の材質、管内を流動する流体の性質
にもよるが、管の底部の肉の厚さがある程度減少した時
期であって、管を回動させるのは周期的に実施されるの
が望ましい。
In the method of the present invention, the proper time for rotating the tube depends on the material of the tube and the nature of the fluid flowing in the tube, but it is the time when the thickness of the bottom wall of the tube is reduced to some extent. Thus, it is desirable to rotate the tube periodically.

【0008】又、本発明方法において、管を回動させる
ために、わざわざ配管から管を外さなくてもすむよう
に、管は容易に回動できるような継手により接続される
のが望ましい。
Further, in the method of the present invention, it is desirable that the pipes are connected by a joint that allows the pipes to be easily rotated so that the pipes do not have to be detached from the pipes in order to rotate the pipes.

【0009】又、本発明方法において、管の回動の程度
としては、管内の流体の量が多いときは、管を180度
程度回動させて管の底部が真上に来るように管を回動さ
せる必要があるし、管内の流体の量が少ないときは、管
を90度程度回動させて管の底部が真横に来る程度に回
動させればよい。
In the method of the present invention, the degree of rotation of the pipe is such that when the amount of fluid in the pipe is large, the pipe is rotated about 180 degrees so that the bottom of the pipe is directly above. It is necessary to rotate the pipe, and when the amount of fluid in the pipe is small, the pipe may be rotated by about 90 degrees so that the bottom of the pipe is located just beside.

【0010】[0010]

【作用】本発明に係る配管の維持保全方法は、複数本の
管が継手により接続された配管において、適宜な時期に
管を回動させることにより管の底部を最下方位置から上
方に移動させるものであるから、管の底部の肉の厚さが
ある程度減少した段階で管を回動させることにより管を
長期間にわたり使用でき、管を丸ごと取り替える従来方
法に比し遙かに経済的である。
According to the pipe maintenance and maintenance method of the present invention, in a pipe in which a plurality of pipes are connected by a joint, the bottom of the pipe is moved upward from the lowermost position by rotating the pipe at an appropriate time. Therefore, the pipe can be used for a long period of time by rotating the pipe when the thickness of the bottom wall of the pipe is reduced to some extent, and it is much more economical than the conventional method of replacing the whole pipe. .

【0011】[0011]

【実施例】次に、本発明の実施例を、図面を参照しなが
ら、説明する。図1は、本発明方法を実施する配管の一
部を拡大して示す断面図である。
Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 is an enlarged sectional view showing a part of a pipe for carrying out the method of the present invention.

【0012】図1において、1、1は硬質塩化ビニル樹
脂管、2は硬質塩化ビニル樹脂製継手である。継手2は
フランジ付き受け口21と雄ねじ付き受け口22と袋ナ
ット23からなり、袋ナット23の内鍔231がフラン
ジ付き受け口21のフランジ211に係止され、袋ナッ
ト23が雄ねじ付き受け口22の雄ねじにねじ込まれる
ことによりフランジ付き受け口21と雄ねじ付き受け口
22とが接続されている。尚、雄ねじ付き受け口22の
フランジ付き受け口21との境界面には環状溝221が
穿設され、環状溝221内にPVDF製のOリング22
2が嵌合されている。
In FIG. 1, 1 and 1 are hard vinyl chloride resin pipes and 2 is a hard vinyl chloride resin joint. The joint 2 includes a flanged socket 21, a male screw socket 22 and a cap nut 23. An inner collar 231 of the cap nut 23 is locked to the flange 211 of the flange socket 21, and the cap nut 23 is attached to the male thread of the male screw socket 22. The flanged receptacle 21 and the male threaded receptacle 22 are connected by being screwed. An annular groove 221 is formed in the boundary surface of the male screw receiving opening 22 and the flanged receiving opening 21, and the PVDF O-ring 22 is formed in the annular groove 221.
2 is fitted.

【0013】一方の管1の端部が継手2のフランジ付き
受け口21内に挿入接着され、他方の管1の端部が継手
2の雄ねじ付き受け口22内に挿入接着されることによ
り双方の管1、1が接続され、管路が形成されている。
The ends of one pipe 1 are inserted and adhered into the flanged receiving port 21 of the joint 2, and the ends of the other pipe 1 are inserted and adhered into the male screw receiving port 22 of the joint 2 so that both pipes are connected. 1, 1 are connected to form a conduit.

【0014】このような状態で管路内に長期間流体が流
れることにより、図2(a)に示すように、管1の底部
の肉の厚さがある程度減少した段階で、継手2の袋ナッ
ト23を緩めて管1、1を矢印で示すように180度回
動させることにより肉の厚さが減少した管1の底部を図
2(b)に示すように、真上に来るようにする。このよ
うな状態で袋ナット23を締めつけて管1、1を固定し
使用する。尚、図2において、3は管1内を流れる流体
である。
As shown in FIG. 2 (a), when the thickness of the bottom wall of the pipe 1 is reduced to a certain extent as a result of the fluid flowing in the pipe line in such a state for a long time, the bag of the joint 2 is closed. Loosen the nut 23 and rotate the pipes 1 and 1 by 180 degrees as shown by the arrow so that the bottom portion of the pipe 1 whose thickness is reduced is located right above as shown in FIG. 2 (b). To do. In this state, the cap nut 23 is tightened to fix the pipes 1 and 1 for use. In FIG. 2, 3 is a fluid flowing in the pipe 1.

【0015】図3は、図1に示す継手2のOリング22
2を使用する代わりに断面形状W形のパッキン223を
使用した例を示しており、このように断面形状W形のパ
ッキン223を使用した場合には、叙上のように、継手
2の袋ナット23を緩めて管1、1を回動する際に管
1、1内からの流体の漏れを少なくすることができる。
FIG. 3 is an O-ring 22 of the joint 2 shown in FIG.
2 shows an example in which a packing 223 having a W-shaped cross section is used instead of the packing nut 223. When the packing 223 having a W-shaped cross section is used, as described above, the cap nut of the joint 2 is It is possible to reduce fluid leakage from the inside of the pipes 1 and 1 when the pipes 1 and 1 are rotated by loosening the pipe 23.

【0016】図4に示すように、継手2のフランジ付き
受け口21及び雄ねじ付き受け口22に夫々矢印マーク
212、223を付けておき、これを基準として、フラ
ンジ付き受け口21に角度目盛り213を付けておけば
管1を所望の角度に回動することができる。
As shown in FIG. 4, arrow marks 212 and 223 are provided on the flanged receiving port 21 and the male screw receiving port 22 of the joint 2, respectively, and with this as a reference, the flanged receiving port 21 is provided with an angle scale 213. The tube 1 can be rotated at a desired angle.

【0017】図5には別の配管の態様を示し、図5に示
す配管では、水平方向に配管されている管1にエルボ継
手2aを介して縦方向に配管された管1aが接続されて
おり、管1の底部の肉の厚さがある程度減少した段階
で、継手2aの袋ナット23aを緩めて管1及び雄ねじ
付き受け口21aを回動し、管1の底部を上方に移動さ
せる。
FIG. 5 shows another aspect of piping. In the piping shown in FIG. 5, a pipe 1a which is vertically piped is connected to a pipe 1 which is horizontally piped through an elbow joint 2a. When the thickness of the bottom wall of the pipe 1 is reduced to some extent, the cap nut 23a of the joint 2a is loosened to rotate the pipe 1 and the male threaded receptacle 21a to move the bottom of the pipe 1 upward.

【0018】図6には、管1を回動し易いように、管1
に把手3を取り付けた例を示している。図7には、図6
のように把手3を管1に取り付ける代わりに、把手3b
を継手2bのフランジ付き受け口21bに取り付けた例
を示している。
FIG. 6 shows the pipe 1 so that the pipe 1 can be easily rotated.
An example is shown in which the handle 3 is attached to the. In FIG.
Instead of attaching the handle 3 to the tube 1 as shown in
Shows an example in which is attached to the flanged receiving port 21b of the joint 2b.

【0019】尚、把手3、3bを管1や継手2bに取り
付ける手段としては、接着剤を使用して接着してもよい
し、バンド等で固定してもよい。図8には、図1のフラ
ンジ付き受け口21の代わりに、フランジ付きフランジ
継手21cを使用した例を示し、この場合には、フラン
ジ付きフランジ継手21cのフランジ211cに、一端
にフランジ11cを有する管1cのフランジ11cを接
続することにより、管1と管1cとを接続するものであ
る。この場合においても、管1と管1cとの底部の肉の
厚さがある程度減少した段階で、継手2cの袋ナット2
3cを緩めて管1、1cを回動し、管1、1cの底部を
上方に移動させる。
As a means for attaching the grips 3 and 3b to the pipe 1 and the joint 2b, they may be adhered by using an adhesive or fixed by a band or the like. FIG. 8 shows an example in which a flanged flange joint 21c is used instead of the flanged socket 21 of FIG. 1, and in this case, a pipe having a flange 11c at one end is formed on the flange 211c of the flanged flange joint 21c. By connecting the flange 11c of 1c, the pipe 1 and the pipe 1c are connected. Also in this case, the cap nut 2 of the joint 2c is provided at a stage where the thickness of the bottom portions of the pipe 1 and the pipe 1c is reduced to some extent.
Loosen 3c and rotate the tubes 1 and 1c to move the bottoms of the tubes 1 and 1c upward.

【0020】図9には、管1の支持されないスパンが長
い場合に、管1をサポート4により支持する態様を示し
ており、サポート4の支持管41の内径は管1の外径よ
りも若干大きくすることにより、管1を回動し易くして
ある。尚、42は4硬質塩化ビニル樹脂製支持管41を
保護するステンレス製の保護管、43はサポート4のス
テンレス製台である。
FIG. 9 shows a mode in which the pipe 1 is supported by the support 4 when the unsupported span of the pipe 1 is long. The inner diameter of the support pipe 41 of the support 4 is slightly smaller than the outer diameter of the pipe 1. By increasing the size, the tube 1 can be easily rotated. In addition, 42 is a stainless protective tube for protecting the support tube 41 made of 4 hard vinyl chloride resin, and 43 is a stainless base of the support 4.

【0021】図10には、配管の他の例を示しており、
この例においては、下段の大口径の管1dの配管の上方
に小口径の管1eの配管が設けられている。下段の大口
径の管1dの配管では、管1dの中途部に管1dを回動
し易いように把手3が取付けられ、管1d、1dはT形
継手2dにより接続されている。T形継手2dには管1
dの回動角度が分かるように角度目盛り213が表示さ
れている。
FIG. 10 shows another example of piping.
In this example, the pipe of the small-diameter pipe 1e is provided above the pipe of the large-diameter pipe 1d in the lower stage. In the pipe of the large diameter pipe 1d in the lower stage, a handle 3 is attached to the middle of the pipe 1d so that the pipe 1d can be easily rotated, and the pipes 1d and 1d are connected by a T-shaped joint 2d. Pipe 1 for T-joint 2d
An angle scale 213 is displayed so that the turning angle of d can be seen.

【0022】T形継手2dの立上分岐管21dには垂直
管1fの下端が接続され、垂直管1fの上端は上段配管
のT形継手2eの垂下分岐管21eに接続されている。
上段配管のT形継手2eには、T形継手2eを回動し易
いように把手3eが設けられている。上段配管のT形継
手2eを介して管1eが接続され、管1eの中途部は天
井5から垂下されたサポート4eにより支持され、管1
eの他端はエルボ継手2fの一端に接続され、エルボ継
手2fの他端は垂直管1fに接続されている。エルボ継
手2fには把手3fが設けられている。
The lower end of the vertical pipe 1f is connected to the rising branch pipe 21d of the T-joint 2d, and the upper end of the vertical pipe 1f is connected to the hanging branch pipe 21e of the T-joint 2e of the upper stage pipe.
The T-shaped joint 2e of the upper pipe is provided with a handle 3e so that the T-shaped joint 2e can be easily rotated. The pipe 1e is connected via the T-shaped joint 2e of the upper stage pipe, and the midway portion of the pipe 1e is supported by the support 4e hanging from the ceiling 5,
The other end of e is connected to one end of the elbow joint 2f, and the other end of the elbow joint 2f is connected to the vertical pipe 1f. The elbow joint 2f is provided with a handle 3f.

【0023】図10に示す配管においては、下段の大口
径の管1dの底部の肉の厚さがある程度減少した段階
で、継手2dの袋ナット23dを緩めて把手3を使用し
て管1d、1dを回動し、管1d、1dの底部を上方に
移動させる。回動角度は継手2dの角度目盛り213に
より分かる。又、上段配管の管1eの底部の肉の厚さが
ある程度減少した段階で、継手2eの袋ナット23eを
緩めて把手3eを使用して管1eを回動し、管1eの底
部を上方に移動させる。
In the pipe shown in FIG. 10, when the thickness of the bottom portion of the large diameter pipe 1d in the lower stage is reduced to some extent, the cap nut 23d of the joint 2d is loosened and the handle 3 is used to pipe 1d, Rotate 1d to move the bottom of the tubes 1d, 1d upward. The rotation angle can be known by the angle scale 213 of the joint 2d. Also, when the thickness of the bottom wall of the upper pipe 1e has decreased to some extent, the cap nut 23e of the joint 2e is loosened, and the pipe 1e is rotated using the handle 3e to move the bottom of the pipe 1e upward. To move.

【0024】[0024]

【発明の効果】本発明に係る配管の維持保全方法におい
ては、複数本の管が継手により接続された配管におい
て、適宜な時期に管を回動させることにより管の底部を
最下方位置から上方に移動させるものであるから、管の
底部の肉の厚さがある程度減少した段階で管を回動させ
ることにより管を長期間にわたり使用でき、管を丸ごと
取り替える従来方法に比し遙かに経済的である。
In the method for maintaining and maintaining a pipe according to the present invention, in a pipe in which a plurality of pipes are connected by a joint, the pipe is rotated at an appropriate time so that the bottom of the pipe is moved upward from the lowermost position. Since the pipe is moved to the bottom, the pipe can be used for a long period of time by rotating the pipe when the thickness of the bottom of the pipe has decreased to a certain extent, and it is much more economical than the conventional method of replacing the whole pipe. Target.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明方法を実施する配管の一部を拡大して示
す要部断面図。
FIG. 1 is an enlarged cross-sectional view of an essential part showing a part of a pipe for carrying out the method of the present invention.

【図2】(a)は管の底部の肉の厚さが減少した状態を
示す断面図、(b)は管を回動した状態を示す断面図。
FIG. 2A is a cross-sectional view showing a state where the thickness of the bottom wall of the pipe is reduced, and FIG. 2B is a cross-sectional view showing a state where the pipe is rotated.

【図3】配管の一部を拡大して示す要部断面図。FIG. 3 is an enlarged cross-sectional view of a main part showing a part of the pipe.

【図4】他の配管例の一部を拡大して示す要部断面図。FIG. 4 is an enlarged cross-sectional view of a main part of another example of piping.

【図5】他の配管例の一部を示す正面図。FIG. 5 is a front view showing a part of another example of piping.

【図6】(a)は他の配管例の一部を示す正面図、
(b)はその断面図。
FIG. 6 (a) is a front view showing a part of another example of piping,
(B) is the sectional view.

【図7】他の配管例の一部を示す正面図。FIG. 7 is a front view showing a part of another example of piping.

【図8】他の配管例の一部を拡大して示す断面図。FIG. 8 is a cross-sectional view showing an enlarged part of another example of piping.

【図9】(a)は他の配管例の一部を拡大して示す要部
切欠正面図、(b)はその要部切欠側面図。
FIG. 9A is a front view of a main part cutaway showing an enlarged view of a part of another piping example, and FIG.

【図10】他の配管例の正面図。FIG. 10 is a front view of another example of piping.

【符号の説明】[Explanation of symbols]

1、1c、1d、1e、1f 管 2、2c、2d、2e、2f 継手 23 袋ナット 3、3b 把手 1, 1c, 1d, 1e, 1f Pipe 2, 2c, 2d, 2e, 2f Joint 23 Cap nut 3, 3b Handle

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 複数本の管が継手により接続された配管
において、適宜な時期に管を回動させることにより管の
底部を最下方位置から上方に移動させることを特徴とす
る配管の維持保全方法。
1. Maintenance and maintenance of a pipe, characterized in that, in a pipe in which a plurality of pipes are connected by a joint, the bottom of the pipe is moved upward from the lowermost position by rotating the pipes at an appropriate time. Method.
JP4268510A 1992-10-07 1992-10-07 Method of maintaining pipe line Pending JPH06117597A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4268510A JPH06117597A (en) 1992-10-07 1992-10-07 Method of maintaining pipe line

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4268510A JPH06117597A (en) 1992-10-07 1992-10-07 Method of maintaining pipe line

Publications (1)

Publication Number Publication Date
JPH06117597A true JPH06117597A (en) 1994-04-26

Family

ID=17459512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4268510A Pending JPH06117597A (en) 1992-10-07 1992-10-07 Method of maintaining pipe line

Country Status (1)

Country Link
JP (1) JPH06117597A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008190043A (en) * 2002-07-22 2008-08-21 Ebara Corp Substrate holder and plating equipment
US9506162B2 (en) 2002-06-21 2016-11-29 Ebara Corporation Electrochemical deposition method
US9593430B2 (en) 2002-07-22 2017-03-14 Ebara Corporation Electrochemical deposition method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9506162B2 (en) 2002-06-21 2016-11-29 Ebara Corporation Electrochemical deposition method
JP2008190043A (en) * 2002-07-22 2008-08-21 Ebara Corp Substrate holder and plating equipment
JP4669020B2 (en) * 2002-07-22 2011-04-13 株式会社荏原製作所 Substrate holder and electrolytic plating apparatus
US9593430B2 (en) 2002-07-22 2017-03-14 Ebara Corporation Electrochemical deposition method
US9624596B2 (en) 2002-07-22 2017-04-18 Ebara Corporation Electrochemical deposition method

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