JPH06102291B2 - Automatic transfer device for workpieces - Google Patents

Automatic transfer device for workpieces

Info

Publication number
JPH06102291B2
JPH06102291B2 JP27334686A JP27334686A JPH06102291B2 JP H06102291 B2 JPH06102291 B2 JP H06102291B2 JP 27334686 A JP27334686 A JP 27334686A JP 27334686 A JP27334686 A JP 27334686A JP H06102291 B2 JPH06102291 B2 JP H06102291B2
Authority
JP
Japan
Prior art keywords
workpiece
carrying
carry
jig
posture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP27334686A
Other languages
Japanese (ja)
Other versions
JPS63127849A (en
Inventor
賢志 小谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP27334686A priority Critical patent/JPH06102291B2/en
Publication of JPS63127849A publication Critical patent/JPS63127849A/en
Publication of JPH06102291B2 publication Critical patent/JPH06102291B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】 産業上の利用分野 本発明は、被加工物の異なる2つの姿勢に対し、同一の
加工装置で加工を行なう場合の被加工物の搬送装置に関
するものである。
Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for transporting a workpiece when the workpiece is machined in two different postures.

従来の技術 第4図,第5図に搬送装置の従来例を示す。Conventional Technology FIGS. 4 and 5 show a conventional example of a transfer device.

第4図は、1個の被加工物保持治具に対し、被加工物を
搬入→第1加工→姿勢変換→第2加工→搬出と順次作業
する装置の構成を示す。第5図は、加工装置を2基設け
た回転テーブルによる被加工物の搬送装置の構成を示
す。この場合は、被加工物の搬入,第1加工,姿勢変
換,第2加工,搬出の各作業はすべて独立の同時作業と
なる。
FIG. 4 shows the configuration of an apparatus for sequentially carrying in a work piece into a work piece holding jig, in which the work piece is carried in → first machining → posture change → second machining → unloading. FIG. 5 shows a configuration of a work-piece transporting device using a rotary table provided with two processing devices. In this case, the work of carrying in the work, the first work, the posture change, the second work, and the carry-out work are all independent work at the same time.

発明が解決しようとする問題点 しかしながら、前記の従来構成では次の様な問題点を有
している。第4図に示す構成では、必要な作業が被加工
物の搬入→第1加工→姿勢変換→第2加工→搬出の順に
すべてシリーズにつながる作業となるため、連続的な高
速生産ができない。又、第5図に示す構成では、すべて
の作業が同時に行なわれるので連続的な高速生産が可能
であるが、同一の加工にもかかわらず、加工装置が2基
必要となるため、装置が大きく、高価なものになってし
まうという問題点を有していた。
Problems to be Solved by the Invention However, the above-described conventional configuration has the following problems. In the configuration shown in FIG. 4, the required work is a work that is connected to the series in the order of loading the workpiece → first machining → posture change → second machining → unloading, so continuous high-speed production is not possible. Further, in the configuration shown in FIG. 5, all the work is performed at the same time, so continuous high-speed production is possible. However, despite the same processing, two processing devices are required, so that the device is large. However, it has a problem that it becomes expensive.

本発明は前記従来の問題点を解決するもので、被加工物
の異なる2つの姿勢に対し同一の加工を行なう一基の加
工装置に対し、被加工物を第1加工姿勢,第2加工姿勢
交互に、かつ連続的に適用する搬送装置を提供する事を
目的とする。
The present invention solves the above-mentioned problems of the prior art, in which a workpiece is processed into a first machining posture and a second machining posture with respect to a single machining apparatus that performs the same machining on two different postures of the workpiece. It is an object of the present invention to provide a transfer device which is applied alternately and continuously.

問題点を解決するための手段 この目的を達成するために、本発明の自動搬送装置は、
被加工物を保持する治具を円周上等分割位置に5個配置
したテーブルと、前記テーブルを前記テーブル上の治具
2ピッチを1割出回転として間欠割出回転させる駆動装
置と、前記被加工物の治具に対し、被加工物を搬入する
搬入装置と、被加工物を搬出し姿勢を変換して1割出回
転後に前記搬入装置に対応する治具上に再搬入する姿勢
変換移載装置と、被加工物を搬出する搬出装置と、前記
テーブルの割出回転と同期して毎回被加工物を加工する
加工装置とを備え、前記搬入装置、前記加工装置、前記
搬出装置の順に1割出位置ごとに配置し、前記搬入装置
と前記搬出装置との間で前記加工装置のない側に前記姿
勢変換移載装置を配置し、前記搬入装置の作動と前記姿
勢変換移載装置が前記被加工物の姿勢を変換するために
搬出する動作とを2割出回転に1度ずつ同じ割出回転時
に行い、前記搬入装置が作動しない割出回転時に、前記
搬出装置の作動と前記姿勢変換移載装置が前記搬入装置
に対応する治具上に被加工物を再搬入する動作とを行う
ものである。
Means for Solving the Problems To achieve this object, the automatic carrier of the present invention comprises:
A table in which five jigs for holding a workpiece are arranged at equal divisional positions on the circumference, a drive device for intermittently rotating the table with two jigs on the table as one indexing rotation. A carrying-in device for carrying in a workpiece to a jig for a workpiece, and a posture conversion for carrying out the carrying-out posture of the workpiece and re-carrying it onto a jig corresponding to the carrying-in device after rotation for indexing. A transfer device, a carry-out device for carrying out the work piece, and a working device for working the work piece every time in synchronization with the indexing rotation of the table, the carrying-in device, the working device, and the carrying-out device. Arranged in order for each indexing position, the posture conversion transfer device is disposed between the carry-in device and the carry-out device on the side without the processing device, and the operation of the carry-in device and the posture conversion transfer device are performed. Is carried out to change the posture of the workpiece. The indexing rotation is performed once at the same indexing rotation, and the loading device does not operate during the indexing rotation. When the loading device operates and the posture conversion transfer device is processed on the jig corresponding to the loading device. The operation of reloading an item is performed.

作用 この構成によって、被加工物を加工装置に対し2つの加
工姿勢を交互にかつ連続的に搬送する事ができる。
Operation With this configuration, the workpiece can be conveyed to the processing apparatus in two processing postures alternately and continuously.

実施例 以下本発明の一実施例について図面に沿って説明する。
第1図は本発明の実施例における装置構成を示す。第2
図は具体的実施例の検査装置外観図である。第3図はそ
の動作チャート図である。
Embodiment An embodiment of the present invention will be described below with reference to the drawings.
FIG. 1 shows a device configuration in an embodiment of the present invention. Second
The figure is an external view of an inspection apparatus of a specific example. FIG. 3 is an operation chart diagram thereof.

第1図において、1はインデックステーブル、2は被加
工物保持治具で、奇数個(本実施例では5治具)がイン
デックステーブル1に等分割して取付けられている。3
はテーブル駆動装置で、テーブル1を治具2の2ピッチ
(本実施例では2/5回転)を1割出として間欠回転駆動
する。4は搬入装置、5は加工装置、6は搬出装置、7
は姿勢変換移載装置で、第1加工の済んだ被加工物を1
ピッチ隣りの治具2へ姿勢変換移載する。
In FIG. 1, 1 is an index table, 2 is a workpiece holding jig, and an odd number (5 jigs in this embodiment) is equally divided and attached to the index table 1. Three
Is a table driving device, which drives the table 1 intermittently with two pitches of the jig 2 (2/5 rotations in this embodiment) as one index. 4 is a carry-in device, 5 is a processing device, 6 is a carry-out device, 7
Is a posture change transfer device,
The posture is changed and transferred to the jig 2 adjacent to the pitch.

第2図は、水晶ウエハーのX線による検査装置である。
1はインデックステーブル、2は被加工物である水晶ウ
ェハーの位置決め保持治具であり、真空吸着により被加
工物の水晶ウェハーを保持する。3はテーブル駆動装置
で、テーブル1を治具2の2ピッチ(本実施例では2/5
回転)を1割出しとして間欠回転駆動する。4は搬入装
置で、パーツフィーダー等から1ケずつ供給された被加
工物をチャックおよび90°反転により治具2に搬入す
る。5は加工装置のX線照射装置である。6は搬出装置
で、被加工物をチャック及び180°反転し、装置外へ搬
出する。7は姿勢変換移載装置で、チャックおよび反転
により被加工物の水晶ウェハーを表裏反転し、1ピッチ
隣りの治具2に移載する。搬入装置4,搬出装置6,姿勢変
換移載装置7はギヤ連結により同期して、テーブル1の
2回割出しに対し、1回の動作を行なうものである。
FIG. 2 shows an X-ray inspection apparatus for a quartz wafer.
Reference numeral 1 is an index table, and 2 is a positioning and holding jig for a quartz wafer which is a workpiece, and holds the quartz wafer which is a workpiece by vacuum suction. Reference numeral 3 denotes a table driving device, which is a table 1 having two pitches of the jig 2 (in this embodiment, 2/5
Rotation) is indexed and intermittently driven. Reference numeral 4 denotes a carry-in device, which carries the workpieces, which are supplied one by one from a parts feeder or the like, into the jig 2 by chucking and reversing by 90 °. Reference numeral 5 is an X-ray irradiation device of the processing device. Reference numeral 6 denotes a carry-out device, which chucks and inverts the workpiece by 180 ° and carries it out of the device. Reference numeral 7 denotes a posture changing transfer device, which inverts the quartz wafer of the workpiece by chucking and reversing and transfers it to the jig 2 adjacent by one pitch. The carry-in device 4, the carry-out device 6, and the posture conversion transfer device 7 are synchronized with each other by gear coupling, and perform one operation for two-time indexing of the table 1.

以上のように構成された搬送装置について、以下その搬
送方法を第3図のチャートに沿って説明する。
The carrying method of the carrying device configured as described above will be described below with reference to the chart of FIG.

第3図において、(1)〜(11)は1割出回転毎のテーブ
ル1上の状態を示す。I〜Vはテーブル1上の5ケの治
具2の位置を示す。A〜Fは被加工物を示し、〜は
第1加工された被加工物を示し、 は第2加工された被加工物を示す。即ち、 により、被加工物Aの加工前、第1加工、第2加工の状
態を区別する。次に(1)〜(11)に沿って、テーブル上
に被加工物のない状態から順次説明する。(1)は治具2
のIに被加工物Aが搬入された状態を示す。この時テー
ブル上に先行するワークがあれば、治具2のIIIにおい
て第2加工、治具2のVからは第1加工済被加工物が姿
勢変換移載のため取出される。これを破線にて架空動作
として示す。(2)は治具ピッチの1回割出回転後で、被
加工物は第1加工が行なわれる。この時先行の被加工
物があれば、治具2のIIIから搬出され、治具2のIVに
は姿勢変換された被加工物が移載される。以下被加工物
および治具2という名称は省略し、単に記号にてA〜F,
I〜Vにて記す。(3)にては姿勢変換移載取出しされ、
IIに新しくBが搬入される。この時、IVにて先行被加工
物の第2加工が行なわれる。(4)にてはVに姿勢変換
移載搬入され、IIにてが第1加工され、IVからは先行
ワークの取出しが行なわれる。(5)において は第2加工され、IIからは姿勢変換移載取出しされ、
IIIに新しいCが搬入される。(6)にて は搬出、はIに姿勢変換移載搬入、は第1加工が行
なわれる。ここまでの5回割出回転によりテーブルは計
2回転(720°)の回転を行ない(6)において(1)と同様
の治具位置となる。以下同様に被加工物搬入位置におい
ては、新規被加工物の搬入と、第1加工済の被加工物の
姿勢変換移載搬入が交互に繰り返えされる。又加工位置
においては、第1加工と第2加工が交互に繰返され、搬
出位置にては、第1加工済の被加工物の姿勢変換移載取
出しと、第2加工終了の被加工物の搬出が交互の繰返さ
れ、10回の割出回転を経た(11)において、テーブル上
の治具配置および治具上の被加工物の状態がまったく同
様の(1)に戻る。(7)〜(11)はその過程を示す。
In FIG. 3, (1) to (11) show states on the table 1 for each indexing rotation. IV indicate the positions of the five jigs 2 on the table 1. A to F represent the workpieces, and ~ represent the first processed workpieces, Indicates the second processed object. That is, Are used to distinguish the state of the workpiece A before the machining, the state of the first machining, and the state of the second machining. Next, along with (1) to (11), description will be sequentially made from a state in which there is no workpiece on the table. (1) is jig 2
Item I indicates a state in which the workpiece A is loaded. At this time, if there is a preceding work on the table, the second processing is performed in the jig 2 of III, and the first processed workpiece is taken out from the V of the jig 2 for posture conversion transfer. This is shown as a fictitious motion with a broken line. In (2), the workpiece is subjected to the first machining after one rotation of the jig pitch for indexing. At this time, if there is a preceding work piece, it is carried out from III of the jig 2, and the work piece whose posture is changed is transferred to IV of the jig 2. Hereinafter, the names of the workpiece and the jig 2 will be omitted, and will be simply denoted by symbols A to F,
Notated as I to V. At (3), the posture change transfer is taken out,
B is newly introduced to II. At this time, the second machining of the preceding workpiece is performed at IV. At (4), the posture conversion transfer is carried in to V, the first processing is performed at II, and the preceding work is taken out at IV. At (5) Is second processed, and posture conversion transfer is taken out from II,
A new C is delivered to III. At (6) Is carried out, the posture conversion transfer is carried in to I, and the first processing is carried out. The table has been rotated a total of 2 times (720 °) by the indexing rotation of 5 times so far, and the jig position is the same as in (1) in (6). Similarly, at the workpiece carry-in position, the carry-in of a new workpiece and the posture conversion transfer carry-in of the first processed workpiece are alternately repeated. At the machining position, the first machining and the second machining are alternately repeated, and at the carry-out position, the posture conversion transfer and takeout of the first processed workpiece and the second finished machining object are carried out. The carrying out is repeated alternately, and after 10 times of indexing rotation (11), the jig arrangement on the table and the state of the workpiece on the jig return to exactly the same (1). (7) to (11) show the process.

発明の効果 以上のように本発明は、奇数治具の2ピッチ割出し回転
と、2回の割出しに対し、1回の搬入,姿勢変換移載,
搬出作業の組合せにより、毎回同一加工を行なう一基の
加工装置に対し、被加工物を2姿勢交互に連続的に適用
する搬送装置を実現できるものである。
EFFECTS OF THE INVENTION As described above, according to the present invention, for every two-pitch indexing rotation of an odd-numbered jig and once for indexing, one loading, posture conversion transfer,
By combining the unloading operations, it is possible to realize a transfer device that continuously applies two workpieces alternately to one processing device that performs the same processing each time.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の実施例における搬送装置の要部平面
図、第2図は本発明の実施例における検査装置の外観斜
視図、第3図は本発明の実施例における搬送方法を示す
搬送チャート、第4図および第5図は従来の装置構成を
示すブロック図である。 1……テーブル、2……被加工物保持治具、3……テー
ブル駆動装置、4……搬入装置、5……加工装置、6…
…搬出装置、7……姿勢変換移載装置。
FIG. 1 is a plan view of a main part of a transfer device according to an embodiment of the present invention, FIG. 2 is an external perspective view of an inspection device according to an embodiment of the present invention, and FIG. 3 is a transfer method showing a transfer method according to an embodiment of the present invention. Charts, FIG. 4 and FIG. 5 are block diagrams showing a conventional apparatus configuration. 1 ... Table, 2 ... Workpiece holding jig, 3 ... Table driving device, 4 ... Loading device, 5 ... Processing device, 6 ...
… Carry-out device, 7… Posture change transfer device.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】被加工物を保持する治具を円周上等分割位
置に5個配置したテーブルと、前記テーブルを前記テー
ブル上の治具2ピッチを1割出回転として間欠割出回転
させる駆動装置と、前記被加工物の治具に対し、被加工
物を搬入する搬入装置と、被加工物を搬出し姿勢を変換
して1割出回転後に前記搬入装置に対応する治具上に再
搬入する姿勢変換移載装置と、被加工物を搬出する搬出
装置と、前記テーブルの割出回転と同期して毎回被加工
物を加工する加工装置とを備え、前記搬入装置、前記加
工装置、前記搬出装置の順に1割出位置ごとに配置し、
前記搬入装置と前記搬出装置との間で前記加工装置のな
い側に前記姿勢変換移載装置を配置し、前記搬入装置の
作動と前記姿勢変換移載装置が前記被加工物の姿勢を変
換するために搬出する動作とを2割出回転に1度ずつ同
じ割出回転時に行い、前記搬入装置が作動しない割出回
転時に、前記搬出装置の作動と前記姿勢変換移載装置が
前記搬入装置に対応する治具上に被加工物を再搬入する
動作とを行う被加工物の自動搬送装置。
1. A table in which five jigs for holding a workpiece are arranged at equally divided positions on the circumference, and the table is intermittently indexed and rotated with the jig 2 pitches on the table as one indexing rotation. A drive device, a carry-in device for carrying in a work piece to the jig for the work piece, and a jig corresponding to the carry-in device after the work piece carry-out posture is changed to perform indexing rotation. The carrying-in device and the processing device, which are provided with a posture conversion transfer device for re-carrying in, a carrying-out device for carrying out the workpiece, and a processing device for processing the workpiece every time in synchronization with the indexing rotation of the table. , Arranged at each index position in the order of the carry-out device,
The posture changing transfer device is arranged between the carry-in device and the carry-out device on the side without the processing device, and the operation of the carry-in device and the posture changing transfer device change the posture of the workpiece. In order to carry out the operation of the carrying-out device and the posture changing transfer device to the carrying-in device during the indexing rotation in which the carrying-in device does not operate, the carrying-out operation is performed once every two indexing rotations. An automatic transfer device for the workpiece that performs the operation of reloading the workpiece on the corresponding jig.
JP27334686A 1986-11-17 1986-11-17 Automatic transfer device for workpieces Expired - Lifetime JPH06102291B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27334686A JPH06102291B2 (en) 1986-11-17 1986-11-17 Automatic transfer device for workpieces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27334686A JPH06102291B2 (en) 1986-11-17 1986-11-17 Automatic transfer device for workpieces

Publications (2)

Publication Number Publication Date
JPS63127849A JPS63127849A (en) 1988-05-31
JPH06102291B2 true JPH06102291B2 (en) 1994-12-14

Family

ID=17526614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27334686A Expired - Lifetime JPH06102291B2 (en) 1986-11-17 1986-11-17 Automatic transfer device for workpieces

Country Status (1)

Country Link
JP (1) JPH06102291B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001310819A (en) * 2000-04-27 2001-11-06 Matsushita Electric Ind Co Ltd Conveying method and conveying device
JP4398160B2 (en) * 2003-02-10 2010-01-13 本田技研工業株式会社 Method and apparatus for processing metal ring for endless metal belt
EP1598146B1 (en) 2003-02-10 2013-09-18 Honda Motor Co., Ltd. Method and device for polishing endless belt metal rings for continuously variable transmission

Also Published As

Publication number Publication date
JPS63127849A (en) 1988-05-31

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