JPH06102056A - Optical rotation displacement detector - Google Patents

Optical rotation displacement detector

Info

Publication number
JPH06102056A
JPH06102056A JP27786992A JP27786992A JPH06102056A JP H06102056 A JPH06102056 A JP H06102056A JP 27786992 A JP27786992 A JP 27786992A JP 27786992 A JP27786992 A JP 27786992A JP H06102056 A JPH06102056 A JP H06102056A
Authority
JP
Japan
Prior art keywords
slit
disc
spiral
light receiving
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27786992A
Other languages
Japanese (ja)
Inventor
Tatsuki Goto
竜樹 後藤
Shigekazu Nakamura
繁和 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Copal Corp
Original Assignee
Nidec Copal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Copal Corp filed Critical Nidec Copal Corp
Priority to JP27786992A priority Critical patent/JPH06102056A/en
Publication of JPH06102056A publication Critical patent/JPH06102056A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To prevent flexural deformation while stabilizing detection output by reinforcing a rotary disc provided with a spiral slit. CONSTITUTION:The optical rotational displacement detector comprises a disc 1 rotary displaces around a rotary shaft 2, and a light source 5 and a light receiving element 7 disposed oppositely on the opposite sides thereof. A spiral slit 3 is made in the surface of the disc 1 along the peripheral direction thereof. The light source 5 projects light onto the disc 1. The light receiving element 7 has an elongated light receiving face 8 arranged in the radial direction of the disc 1. The light receiving face 8 receives light 9 transmitted through the slit 3 which moves in radial direction as the disc 1 rotates and produces a rotational displacement detection signal. Seams 4 are provided obliquely along the spiral direction of the slit 3 in order to reinforce the disc 1. Furthermore, effective opening of the slit 3 in radial direction is set constant along the spiral direction except the oblique seam parts 4 in order to stabilize detection output.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は光学式透過型の回転変位
検出装置に関する。より詳しくは、螺旋状にスリットが
形成された回転円盤の補強構造に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical transmission type rotational displacement detecting device. More specifically, the present invention relates to a reinforcing structure of a rotating disk having slits formed in a spiral shape.

【0002】[0002]

【従来の技術】従来から様々な形式の光学式回転変位検
出装置が知られている。例えば、特開昭60−2250
24号公報には螺旋状にスリットが形成された回転円盤
を利用した構造が開示されている。図5に示す様に、こ
の構造の光学式回転変位検出装置は、回転軸101を中
心にして回転可能に円盤102が取り付けられている。
円盤102は金属板等の遮光材料からなり、その表面に
は回転中心から周方向に沿って螺旋状のスリット103
がエッチングにより形成されている。円盤102に対面
してその上方には入射光を照射する為に光源104が固
定配置されている。光源104は円盤102の半径方向
領域をカバーする様に配列されている。又、円盤102
の下方には光源104と正対する位置に受光素子105
が固定配置されている。受光素子105は円盤102の
半径方向に沿って配置された長手形状の受光面106を
備えており、回転円盤102の回転変位に伴なって半径
方向に移動するスリット幅部からの透過光を受光し回転
変位の検出信号を出力する。
2. Description of the Related Art Conventionally, various types of optical rotational displacement detecting devices are known. For example, JP-A-60-2250
Japanese Unexamined Patent Publication No. 24 discloses a structure using a rotating disk having spiral slits. As shown in FIG. 5, in the optical rotational displacement detection device having this structure, a disc 102 is attached so as to be rotatable around a rotation shaft 101.
The disk 102 is made of a light-shielding material such as a metal plate, and has a spiral slit 103 on its surface along the circumferential direction from the center of rotation.
Are formed by etching. A light source 104 is fixedly arranged to face the disk 102 and to illuminate incident light above the disk 102. The light sources 104 are arranged so as to cover the radial region of the disc 102. Also, the disc 102
The light receiving element 105 is provided below the light source 104 at a position facing the light source 104.
Is fixedly placed. The light receiving element 105 is provided with a light receiving surface 106 having a longitudinal shape arranged along the radial direction of the disk 102, and receives the transmitted light from the slit width portion that moves in the radial direction with the rotational displacement of the rotary disk 102. Then, the rotational displacement detection signal is output.

【0003】図6に円盤102の回転角と検出信号との
関係を示す。円盤の回転に伴なって螺旋状のスリット幅
部を透過する光は長手形状の受光面に沿って移動する。
受光素子は透過光の受光位置に応じた検出信号を出力す
る。従って、回転角と検出信号はリニアな関係にある。
FIG. 6 shows the relationship between the rotation angle of the disc 102 and the detection signal. With the rotation of the disk, the light transmitted through the spiral slit width portion moves along the longitudinal light receiving surface.
The light receiving element outputs a detection signal according to the light receiving position of the transmitted light. Therefore, the rotation angle and the detection signal have a linear relationship.

【0004】[0004]

【発明が解決しようとする課題】再び図5に戻って発明
が解決しようとする課題を簡潔に説明する。螺旋状のス
リットの長さを延長する程検出角度範囲が拡大する。即
ち、検出角度範囲は螺旋の抜き角に比例している。しか
しながら、抜き角を大きくする程スリットの両側に分離
した円盤の各部分を連結する領域が少なくなり機械的強
度が減少する。この為、回転変位中金属板等からなる円
盤が撓み変形し検出誤差が生じるという課題がある。
The problem to be solved by the invention will be briefly described with reference to FIG. 5 again. The detection angle range is expanded as the length of the spiral slit is extended. That is, the detection angle range is proportional to the draft angle of the spiral. However, the larger the draft angle, the smaller the area connecting the respective parts of the disc separated on both sides of the slit, and the lower the mechanical strength. For this reason, there is a problem that a disk made of a metal plate or the like is flexibly deformed during the rotational displacement and a detection error occurs.

【0005】この対策として、金属板からなる円盤を透
明な樹脂板で裏打ちし補強する構造が考えられる。しか
しながら、この積層構造あるいはラミネート構造では製
造コストの上昇をもたらすとともに回転変位部材の重量
及び厚みが大きくなってしまうという欠点がある。ある
いは、透明ガラス材料等からなる円盤の表面にマスクを
介してアルミニウム等の金属遮光材料を真空蒸着し螺旋
状スリットを作成する構造も考えられる。しかしなが
ら、真空蒸着を用いるとやはり金属板のエッチング加工
に比べて製造コストが上昇するとともに、長期信頼性が
劣るいう欠点がある。
As a countermeasure against this, a structure in which a disk made of a metal plate is lined with a transparent resin plate and reinforced is considered. However, this laminated structure or laminated structure has a drawback that the manufacturing cost is increased and the weight and thickness of the rotary displacement member are increased. Alternatively, a structure is conceivable in which a metal light-shielding material such as aluminum is vacuum-deposited on the surface of a disk made of a transparent glass material or the like through a mask to form a spiral slit. However, the use of vacuum vapor deposition also raises the manufacturing cost as compared with the etching process of a metal plate, and has the drawbacks of low long-term reliability.

【0006】[0006]

【課題を解決するための手段】上述した従来の技術の課
題に鑑み、本発明は例えば金属薄板単体からなる回転円
盤自体に補強構造を付与する事を目的とする。かかる目
的を達成する為に以下の手段を講じた。即ち、本発明に
かかる光学式回転変位検出装置は基本的な構成要件とし
て移動部材とその両側に配置された固定光源及び固定受
光素子とを備えている。移動部材は回転変位する円盤か
らなりその表面周方向に沿って螺旋状のスリットがエッ
チングにより形成されている。固定光源は移動部材に対
してその半径方向領域をカバーする様に入射光を照射す
る。受光素子は円盤の半径方向に沿って配置された長手
形状の受光面を備えており、回転変位に伴なって半径方
向に移動するスリット幅部からの透過光を受光し回転変
位の検出信号を出力する。かかる構成において、スリッ
トの螺旋方向に沿って斜行する継ぎ目を入れ移動部材を
機械的に補強するという手段を講じた。さらに、継ぎ目
部分を除くスリット幅部の半径方向有効開口寸法を螺旋
方向に沿って常に等しくなる様にし、スリット透過光の
受光量を一定にするという手段を講じた。好ましくは、
前記継ぎ目はスリット幅部の螺旋方向中心線に関し対称
的にパタニングされている。
SUMMARY OF THE INVENTION In view of the above-mentioned problems of the prior art, it is an object of the present invention to provide a reinforcing structure to the rotating disk itself which is composed of a single thin metal plate. The following measures have been taken in order to achieve this object. That is, the optical rotational displacement detection device according to the present invention includes a moving member and a fixed light source and a fixed light receiving element arranged on both sides of the moving member as a basic constituent element. The moving member is composed of a disk which is rotationally displaced, and spiral slits are formed by etching along the circumferential direction of the surface. The fixed light source irradiates the moving member with incident light so as to cover its radial region. The light receiving element has a long-shaped light receiving surface arranged along the radial direction of the disk, receives the transmitted light from the slit width part that moves in the radial direction along with the rotational displacement, and detects the rotational displacement detection signal. Output. In such a structure, a means for mechanically reinforcing the moving member is provided by inserting a seam obliquely along the spiral direction of the slit. Further, a measure is taken so that the radial effective opening size of the slit width portion excluding the joint portion is always the same along the spiral direction, and the received amount of slit transmitted light is constant. Preferably,
The seam is symmetrically patterned with respect to the spiral center line of the slit width portion.

【0007】[0007]

【作用】本発明においては、螺旋状のスリットによって
区画された円盤の各領域は分離しておらず、継ぎ目によ
って互いに連結されている。従って、円盤の撓み変形を
抑制できるとともに、従来に比し螺旋の抜き角を大きく
とれるので回転検出角度範囲を拡大できる。この継ぎ目
はスリットの螺旋方向に沿って斜行しており、継ぎ目部
分を除いたスリット幅部の半径方向有効開口寸法を変位
方向に沿って常に等しくなる様にパタニングしている。
この為、回転変位する移動部材の位置に関わらず、スリ
ット幅部を透過した光の受光量は常に一定となる。従っ
て、連続回転変位中受光量に変動がないので安定した検
出出力を得る事ができる。
In the present invention, the areas of the disk defined by the spiral slit are not separated but are connected to each other by the seam. Therefore, the flexural deformation of the disk can be suppressed, and the draft angle of the spiral can be made larger than in the conventional case, so that the rotation detection angle range can be expanded. The seam is oblique along the spiral direction of the slit, and the radial effective opening dimension of the slit width portion excluding the seam portion is patterned so as to be always the same along the displacement direction.
Therefore, the amount of light received through the slit width portion is always constant regardless of the position of the moving member that is rotationally displaced. Therefore, the amount of received light does not change during the continuous rotational displacement, and a stable detection output can be obtained.

【0008】[0008]

【実施例】以下図面を参照して本発明の好適な実施例を
詳細に説明する。図1は本発明にかかる光学式回転変位
検出装置の構成を示す模式的な斜視図である。金属板等
の遮光性材料からなる円盤1は回転軸2に固着されてお
り回転変位可能である。この回転軸2は図示しない検出
対象物に接続されている。円盤1の表面には中心から周
方向に沿って徐々に拡大する螺旋状のスリット3が形成
されている。スリット3の螺旋方向に沿って斜行する継
ぎ目4が形成されており円盤1を機械的に補強する。ス
リット3の幅部有効開口寸法を大きくとる為、継ぎ目4
の幅は可能な限り狭くする事が好ましい。継ぎ目4とス
リット3は例えばエッチングにより同時に形成できる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described in detail below with reference to the drawings. FIG. 1 is a schematic perspective view showing a configuration of an optical rotational displacement detection device according to the present invention. A disk 1 made of a light-shielding material such as a metal plate is fixed to a rotary shaft 2 and can be rotationally displaced. The rotary shaft 2 is connected to a detection target (not shown). The surface of the disk 1 is formed with a spiral slit 3 that gradually expands from the center along the circumferential direction. A seam 4 obliquely extending along the spiral direction of the slit 3 is formed to mechanically reinforce the disc 1. In order to make the width 3 effective opening of the slit 3 large, the joint 4
It is preferable to make the width of the as narrow as possible. The seam 4 and the slit 3 can be simultaneously formed by etching, for example.

【0009】円盤1の上方には例えばLED等からなる
光源5が固定配置されている。この光源5はその表面に
固着された投光レンズ6を介して略平行な光を円盤1の
表面に照射する。一方円盤1の下方には光源5と整合し
て受光素子7が固定配置されている。その表面に設けら
れた受光面8は円盤1の半径方向に沿った長手形状を有
する。円盤1の回転変位に伴なって螺旋状スリット3幅
部からの透過光9は半径方向に移動し受光面8により受
光される。受光素子7は例えばPSD等の受光位置検出
素子からなり、一対の出力端子に差動信号A,Bを出力
する。即ち、出力信号A,Bは透過光9の受光位置に応
じて差動的に変化する。差動信号は演算回路10により
所定の演算処理(A−B)/(A+B)を施こされ、円
盤1の回転変位を表わす検出信号を出力する。
A light source 5 made of, for example, an LED is fixedly arranged above the disk 1. The light source 5 irradiates the surface of the disk 1 with substantially parallel light through a light projecting lens 6 fixed to the surface thereof. On the other hand, below the disk 1, a light receiving element 7 is fixedly arranged in alignment with the light source 5. The light-receiving surface 8 provided on the surface has a longitudinal shape along the radial direction of the disk 1. Along with the rotational displacement of the disk 1, the transmitted light 9 from the width of the spiral slit 3 moves in the radial direction and is received by the light receiving surface 8. The light receiving element 7 is formed of a light receiving position detecting element such as PSD, and outputs the differential signals A and B to a pair of output terminals. That is, the output signals A and B are differentially changed according to the light receiving position of the transmitted light 9. The differential signal is subjected to a predetermined arithmetic processing (AB) / (A + B) by the arithmetic circuit 10 and outputs a detection signal representing the rotational displacement of the disk 1.

【0010】図2にスリット3の拡大部分形状を示す。
継ぎ目4はスリット3の螺旋方向に沿って所定の間隔で
配列されている。個々の継ぎ目4は略V字形状を有して
おり、螺旋方向に沿って斜行している。又、スリット3
の螺旋方向中心線11に関し、V字形の継ぎ目4は対称
的にパタニングされている。本発明の特徴事項として、
継ぎ目4の部分を除くスリット3幅部の半径方向有効開
口寸法は、螺旋方向に沿って常に等しくなる様に設計さ
れている。例えば、今ある半径方向R1に着目すると、
スリット幅部の有効開口寸法は継ぎ目4の部分を除い
た、a+b+cで与えられる。他の半径方向R2に着目
すると、スリット幅部の有効開口寸法は継ぎ目4の部分
を除いたd+eで与えられる。この発明によれば、(a
+b+c)と(d+e)は等しい。
FIG. 2 shows an enlarged partial shape of the slit 3.
The seams 4 are arranged at predetermined intervals along the spiral direction of the slit 3. Each seam 4 has a substantially V-shape, and is oblique along the spiral direction. Also, slit 3
The V-shaped seam 4 is symmetrically patterned with respect to the spiral center line 11. As a feature of the present invention,
The effective opening size in the radial direction of the width portion of the slit 3 excluding the seam 4 is designed to be always the same along the spiral direction. For example, focusing on the existing radial direction R1,
The effective opening size of the slit width portion is given by a + b + c excluding the seam 4. Focusing on the other radial direction R2, the effective opening size of the slit width portion is given by d + e excluding the seam 4. According to this invention, (a
+ B + c) and (d + e) are equal.

【0011】例示として、半径方向R1,R2について
説明を行なったが、全ての半径方向に関しスリット幅部
の有効開口寸法は常に等しく設計されている。従って、
半径方向に沿って固定された受光素子の受光面は円盤1
の回転変位中、スリット幅部から一定の透過光量を連続
的に受光する。従って、スリット幅部を投影した受光ス
ポットの重心位置は、受光面に沿って連続的且つリニア
に変化し優れた直線性を得る事ができる。加えて、継ぎ
目4の線幅は機械的補強を行なう上で必要最小限の寸法
に設定されており、これにより遮られる透過光量の損失
分は極めて少ない。この為、従来と略同等の検出出力精
度を維持する事ができる。
As an example, the radial directions R1 and R2 have been described, but the effective opening size of the slit width portion is always designed to be the same in all radial directions. Therefore,
The light receiving surface of the light receiving element fixed along the radial direction is a disk 1
During the rotational displacement of, a constant amount of transmitted light is continuously received from the slit width portion. Therefore, the barycentric position of the light-receiving spot projected on the slit width portion changes continuously and linearly along the light-receiving surface, and excellent linearity can be obtained. In addition, the line width of the seam 4 is set to the minimum size required for mechanical reinforcement, and the loss of the amount of transmitted light blocked by this is extremely small. Therefore, it is possible to maintain the detection output accuracy that is substantially the same as the conventional one.

【0012】図3は本発明にかかる継ぎ目形状の他の実
施例を示す模式的な部分拡大図である。図2に示した実
施例と基本的に類似の形状を有しており、対応する部分
には対応する参照番号を付して理解を容易にしている。
図2に示した実施例と異なる点は、個々の継ぎ目4がV
字形状ではなく、X字形状にパタニングされている事で
ある。V字継ぎ目に比べ、X字継ぎ目はより機械的に均
衡のとれた補強構造を与える事ができる。この例におい
ても、全ての半径方向に関しスリット3幅部の有効開口
寸法は等しくなる様に設定されている。例えば、半径方
向R1の有効開口寸法はa+bで与えられ、半径方向R
2の有効開口寸法はc+d+eで与えられ、半径方向R
3の有効開口寸法はfで与えられるが、これらはみな等
しい。即ち、スリット3の半径方向幅寸法から継ぎ目2
本分の線幅寸法を差し引いたものになる。
FIG. 3 is a schematic partial enlarged view showing another embodiment of the joint shape according to the present invention. It has a shape basically similar to that of the embodiment shown in FIG. 2, and corresponding parts are given corresponding reference numerals to facilitate understanding.
The difference from the embodiment shown in FIG. 2 is that each seam 4 is V
It means that the pattern is not in a letter shape but in an X shape. Compared to V joints, X joints can provide a more mechanically balanced reinforcement structure. Also in this example, the effective opening sizes of the width portions of the slit 3 are set to be equal in all radial directions. For example, the effective aperture dimension in the radial direction R1 is given by a + b, and
The effective aperture dimension of 2 is given by c + d + e, and the radial direction R
The effective aperture size of 3 is given by f, but they are all equal. That is, from the radial width of the slit 3 to the joint 2
The line width for this line is subtracted.

【0013】図4は参考の為に、継ぎ目パタンの比較例
を示す。理解を容易にする為に、図2に示した本発明の
実施例と対応する部分には対応する参照番号を付してあ
る。この比較例においては、スリット3の螺旋方向に沿
って所定のピッチPで規則的に継ぎ目4が入れられてい
る。この配列ピッチPは受光面8の横手寸法Wと一致す
る様に設定されている。図から明らかな様に、継ぎ目4
の配列ピッチPを受光面8の横手寸法Wと等しく設定す
る事により、回転円盤1の位置に関わらず、受光面8に
対するスリット3幅部の有効投影面積は等しくなり、受
光量を一定にできる。しかしながら、本発明と異なり、
スリット3幅部の半径方向有効開口寸法は周期的に変化
する。従って、平均的にみると受光量は常に一定である
が、実際には揺らぎが生じており、検出出力に微妙な変
動が現われる。この為、本発明に比べると検出精度の点
で劣る。
FIG. 4 shows a comparative example of seam patterns for reference. For easy understanding, parts corresponding to those of the embodiment of the present invention shown in FIG. 2 are designated by corresponding reference numerals. In this comparative example, the seams 4 are regularly provided at a predetermined pitch P along the spiral direction of the slit 3. The array pitch P is set so as to match the lateral dimension W of the light receiving surface 8. As is clear from the figure, the seam 4
By setting the arrangement pitch P of the same as the lateral dimension W of the light receiving surface 8, the effective projection areas of the width portions of the slits 3 with respect to the light receiving surface 8 become equal regardless of the position of the rotating disk 1, and the light receiving amount can be made constant. . However, unlike the present invention,
The effective opening size in the radial direction of the width portion of the slit 3 changes periodically. Therefore, on average, the amount of received light is always constant, but fluctuations actually occur, and subtle fluctuations appear in the detection output. Therefore, the detection accuracy is lower than that of the present invention.

【0014】[0014]

【発明の効果】以上説明した様に、本発明によれば、金
属薄板等からなる回転円盤にエッチング形成された螺旋
状のスリットに対して継ぎ目を入れる事により円盤を機
械的に補強し撓みを抑制できるという効果がある。又、
スリットの螺旋方向に沿って継ぎ目を斜行させるととも
に、継ぎ目部分を除くスリット幅部の半径方向有効開口
寸法を螺旋方向に沿って常に等しくなる様にし、微妙な
揺らぎを除去して受光素子の検出出力を安定化できると
いう効果がある。
As described above, according to the present invention, the disc is mechanically reinforced and deflected by forming a joint in the spiral slit formed by etching in the rotary disc made of a thin metal plate or the like. The effect is that it can be suppressed. or,
In addition to skewing the seam along the spiral direction of the slit, the radial effective opening size of the slit width part excluding the seam is always the same along the spiral direction to remove subtle fluctuations and detect the light receiving element. This has the effect of stabilizing the output.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明にかかる光学式回転変位検出装置の構造
を示す模式的な斜視図である。
FIG. 1 is a schematic perspective view showing the structure of an optical rotational displacement detection device according to the present invention.

【図2】本発明の特徴的な要素である継ぎ目の形状を示
す拡大部分平面図である。
FIG. 2 is an enlarged partial plan view showing a shape of a joint which is a characteristic element of the present invention.

【図3】同じく継ぎ目の形状の他の例を示す拡大部分平
面図である。
FIG. 3 is an enlarged partial plan view showing another example of the shape of the seam.

【図4】継ぎ目形状の参考例を示す拡大部分平面図であ
る。
FIG. 4 is an enlarged partial plan view showing a reference example of a joint shape.

【図5】従来の光学式回転変位検出装置を示す斜視図で
ある。
FIG. 5 is a perspective view showing a conventional optical rotational displacement detection device.

【図6】従来の光学式回転変位検出装置の回転角と検出
信号との関係を示すグラフである。
FIG. 6 is a graph showing a relationship between a rotation angle and a detection signal of a conventional optical rotary displacement detection device.

【符号の説明】[Explanation of symbols]

1 円盤 2 回転軸 3 スリット 4 継ぎ目 5 光源 7 受光素子 8 受光面 9 透過光 10 演算回路 1 disk 2 rotating shaft 3 slit 4 seam 5 light source 7 light receiving element 8 light receiving surface 9 transmitted light 10 arithmetic circuit

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 回転変位する円盤からなりその表面周方
向に沿って螺旋状のスリットが形成された移動部材と、
該移動部材に入射光を照射する固定光源と、円盤の半径
方向に沿って配置された長手形状の受光面を備え回転変
位に伴なって半径方向に移動するスリット幅部からの透
過光を受光し回転変位の検出信号を出力する固定受光素
子とからなる光学式回転変位検出装置において、 スリットの螺旋方向に沿って斜行する継ぎ目を入れ移動
部材を補強するとともに、継ぎ目部分を除くスリット幅
部の半径方向有効開口寸法を螺旋方向に沿って常に等し
くなる様にしスリット透過光の受光量を一定にする事を
特徴とする光学式回転変位検出装置。
1. A moving member, which is composed of a disc that is rotationally displaced, and has a spiral slit formed along the circumferential direction of the surface thereof,
A fixed light source for irradiating the moving member with incident light and a longitudinal light receiving surface arranged along the radial direction of the disk are provided to receive transmitted light from a slit width portion that moves in the radial direction with rotational displacement. In an optical rotational displacement detection device consisting of a fixed light receiving element that outputs a rotational displacement detection signal, a movable member is reinforced by adding a seam obliquely along the spiral direction of the slit, and the slit width part excluding the seam part. An optical rotary displacement detection device characterized in that the effective aperture size in the radial direction is always made equal along the spiral direction so that the amount of received slit transmitted light is constant.
【請求項2】 継ぎ目は、スリット幅部の螺旋方向中心
線に関し対称的にパタニングされている事を特徴とする
請求項1記載の光学式回転変位検出装置。
2. The optical rotational displacement detection device according to claim 1, wherein the seam is symmetrically patterned with respect to a center line of the slit width portion in the spiral direction.
JP27786992A 1992-09-22 1992-09-22 Optical rotation displacement detector Pending JPH06102056A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27786992A JPH06102056A (en) 1992-09-22 1992-09-22 Optical rotation displacement detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27786992A JPH06102056A (en) 1992-09-22 1992-09-22 Optical rotation displacement detector

Publications (1)

Publication Number Publication Date
JPH06102056A true JPH06102056A (en) 1994-04-12

Family

ID=17589421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27786992A Pending JPH06102056A (en) 1992-09-22 1992-09-22 Optical rotation displacement detector

Country Status (1)

Country Link
JP (1) JPH06102056A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002323348A (en) * 2001-04-26 2002-11-08 Tamagawa Seiki Co Ltd Metal disk for rotation detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002323348A (en) * 2001-04-26 2002-11-08 Tamagawa Seiki Co Ltd Metal disk for rotation detector

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