JPH0599464A - Air shower device - Google Patents
Air shower deviceInfo
- Publication number
- JPH0599464A JPH0599464A JP26019191A JP26019191A JPH0599464A JP H0599464 A JPH0599464 A JP H0599464A JP 26019191 A JP26019191 A JP 26019191A JP 26019191 A JP26019191 A JP 26019191A JP H0599464 A JPH0599464 A JP H0599464A
- Authority
- JP
- Japan
- Prior art keywords
- air
- shower device
- air shower
- dust
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Ventilation (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明はＬＳＩ製造ラインに構築
されたクリーンリーム中に人が入室する場合，入室者の
着衣表面に付着している塵埃を払い落すためのエアシャ
ワー装置に関し、特に０．１μｍクラスの塵埃量が問題
とされる高性能クリーンルームに設置するエアシャワー
装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air shower device for removing dust adhering to a clothing surface of a room occupant when a room enters a clean ream constructed on an LSI manufacturing line, and particularly The present invention relates to an air shower device to be installed in a high-performance clean room in which a dust amount of 1 μm class is a problem.
【０００２】[0002]
【従来の技術】従来のエアシャワーは、図５の側面断面
図（ａ）および正面断面図（ｂ）に示すように、エアを
送り出す送風ファン３１と、エア中の塵埃をろ過するフ
ィルター３２と、径が２０〜４０ｍｍ程度の穴を有しエ
ア吹き出すパンカールーバー３３と、パンカールーバー
３３を回転させる回転翼３４とを有している。図６は図
５のＡ部の側面断面図（ａ）および背面図（ｂ）であ
る。2. Description of the Related Art In a conventional air shower, as shown in a side sectional view (a) and a front sectional view (b) of FIG. 5, an air blowing fan 31 and a filter 32 for filtering dust in the air are provided. It has a bunker louver 33 having a hole with a diameter of about 20 to 40 mm and blowing out air, and a rotary blade 34 for rotating the bunker louver 33. FIG. 6 is a side sectional view (a) and a rear view (b) of the portion A of FIG.
【０００３】送風ファン３１により送り出されたエア
は、フィルター３２により塵埃を除去され、パンカール
ーバー３３より吹き出す。このエアを清浄度の高いクリ
ーム入室前に浴びることで、入室者の着衣表面に付着し
ている塵埃を払い落とすものである。また、パンカール
ーバー３３は回転翼３４により角度θで首振り回転し、
クリーンルーム入室者着衣表面の広い範囲にエアを吹き
つける。これにより、クリーンルーム入室者の除塵効果
を高めている（例えば特願昭６１−８９４６０）。The air blown out by the blower fan 31 has dust removed by a filter 32 and is blown out by a pan curl bar 33. By exposing this air to the cream with high cleanliness before entering the room, the dust adhering to the clothing surface of the person entering the room is removed. Further, the bunker bar 33 swings and rotates at an angle θ by the rotor blades 34,
Air is blown to a wide area of the clothes surface of the person who enters the clean room. This enhances the dust removal effect for those who enter the clean room (for example, Japanese Patent Application No. 61-89460).
【０００４】[0004]
【発明が解決しようとする課題】着衣表面に付着してい
る塵埃には、摩擦力、静電気力、ファンデルワールス力
といった力が働き、これが塵埃を着衣表面に引きつけて
いる。塵埃の除去には、この力よりも大きな反対向きの
力を塵埃に作用させる必要があり、エアシャワーの場
合、吹出すエアの圧力を増すことで対応可能である。The dust adhering to the clothing surface is subjected to forces such as frictional force, electrostatic force and van der Waals force, which attract the dust to the clothing surface. In order to remove dust, it is necessary to apply a force in the opposite direction, which is larger than this force, to the dust, and in the case of an air shower, it can be dealt with by increasing the pressure of the air blown out.
【０００５】しかしながら、従来のエアシャワー装置で
は、エアの送出駆動源として空調用のファンを使用して
おり、これにより、送出エアの圧力を増大するにはファ
ンが大型化してしまい、更に、エアシャワー装置の筺体
構造も、エア圧に耐える様に強化する必要があり、結果
的にエアシャワー装置全体が大型化してしまう問題点が
あった。However, in the conventional air shower device, the air-conditioning fan is used as a drive source for sending out air, so that the fan becomes large in size to increase the pressure of the sent-out air. The housing structure of the shower device also needs to be strengthened so as to withstand the air pressure, and as a result, there is a problem that the size of the entire air shower device becomes large.
【０００６】[0006]
【課題を解決するための手段】本発明のエアシャワー装
置は、エア源をクリーンルーム内に供給されている清浄
圧縮エアに求め、この清浄圧縮エアを吹出すノズルと、
ノズルを首振り運動させる回転機構と、清浄圧縮エアを
ノズルに導くための配管及びバルブとを有している。SUMMARY OF THE INVENTION An air shower device according to the present invention requires an air source to be clean compressed air supplied into a clean room, and blows out the clean compressed air.
It has a rotating mechanism for swinging the nozzle, a pipe and a valve for introducing clean compressed air to the nozzle.
【０００７】[0007]
【実施例】次に本発明について図面を参照して説明す
る。図１は本発明の一実施例のエアシャワー装置の側面
断面図（ａ）および正面断面図（ｂ）である。本実施例
は従来のエアシャワー装置におけるパンカールーバーの
代りに１／４インチ径のステンレス製ノズル１１備え、
このノズル１１の各々にライン送気されている圧縮エア
が配管１２により供給される。圧縮エアはコンプレッサ
ー１３、フィルター１４により約８ｋｇ／ｃｍ2 Ｇに加
圧され、かつ０．２μｍ以上の塵埃を除去された清浄な
空気である。また、図２は図１のＢ部を示す図である。
その側面断面図（ａ）および背面図（ｂ）に示すよう
に、ノズル１１はステンレス部分に続いてプラスチック
チューブ１５が接続され、ウォーム１６ａおよびウォー
ムギア１６ｂにより角度θの首振り回転運動を行い、ジ
ェットの吹出し方向を連続的に変えることができる。The present invention will be described below with reference to the drawings. FIG. 1 is a side sectional view (a) and a front sectional view (b) of an air shower device according to an embodiment of the present invention. The present embodiment is provided with a stainless nozzle 11 having a diameter of 1/4 inch instead of the bunker bar in the conventional air shower device.
The compressed air that is line-fed to each of the nozzles 11 is supplied through a pipe 12. The compressed air is clean air that has been pressurized to about 8 kg / cm 2 G by the compressor 13 and the filter 14 and has removed dust of 0.2 μm or more. Further, FIG. 2 is a diagram showing a portion B of FIG.
As shown in the side cross-sectional view (a) and the rear view (b), the nozzle 11 is connected to the stainless steel part and the plastic tube 15, and the worm 16a and the worm gear 16b perform the swinging motion of the angle θ, and the jet The blowing direction of can be continuously changed.
【０００８】本実施例のエアシャワー装置入口には入室
者を検知する赤外線検知装置１７を備え、この信号によ
りバルブ１８を開いて圧縮エアの供給を自動的に開始さ
せ、またノズル１１の回転機構１６を作動させ、またバ
ルブ１８を閉止させるタイマー１９を作動させる。タイ
マー１９は一定時間（約２０秒）作動の後、バルブ１８
を閉止する信号と共にエアシャワー装置出口の自動ドア
１０を作動させる信号も発する。上記した本実施例のエ
アシャワー装置の動作を図３のフローチャートに示して
おく。An infrared detector 17 for detecting a person entering the room is provided at the entrance of the air shower device of this embodiment, and a valve 18 is opened by this signal to automatically start the supply of compressed air, and a rotating mechanism of the nozzle 11 is provided. 16 and also the timer 19 which closes the valve 18. After the timer 19 operates for a certain time (about 20 seconds), the valve 18
A signal for activating the automatic door 10 at the outlet of the air shower device is also issued together with the signal for closing the door. The operation of the air shower device of this embodiment described above is shown in the flow chart of FIG.
【０００９】また、表１に本発明の効果を示すデータを
掲げる。本データはＡ４版のクリーンルーム用無発塵紙
を同程度の塵埃で汚染し、従来型エアシャワー装置およ
び本発明のエアシャワー装置により除塵し、その後、ク
リーンルーム中で紙の表面に残留，付着している塵埃量
を測定したものである。本表により、効果は明らかであ
る。Table 1 shows data showing the effects of the present invention. This data shows that dust-free paper for A4 size cleanrooms was contaminated with dust of the same level, dust was removed by the conventional air shower device and the air shower device of the present invention, and then it remained and adhered to the surface of the paper in the clean room. It is a measurement of the amount of dust present. From this table, the effect is clear.
【００１０】[0010]
【表１】 [Table 1]
【００１１】なお、ジェット吹付け面（パンカールーバ
ーのノズルより３０ｃｍ）における風速は、従来型エア
シャワーでは、４．８ｍ／Ｓ，本発明のエアシャワーで
は１５．６ｍ／Ｓである。また、測定器はＰＭＳ社製Ｌ
ＰＣ−１０１パーティクルカウンターを使用した。The wind velocity on the jet spray surface (30 cm from the nozzle of the pan curl bar) is 4.8 m / S in the conventional air shower and 15.6 m / S in the air shower of the present invention. The measuring device is L made by PMS.
A PC-101 particle counter was used.
【００１２】以上述べたように、清浄圧縮エアが小径の
ノズルより噴出することにより、従来型エアシャワー装
置に比し、吹付け面積は狭くなるが、スポット的に高
速，高圧のジェットが生じ、これにより、従来型の塵埃
除去力よりも大きな力を発生させることができる。ま
た、ノズルは従来型と同様、回転する機構を有してお
り、吹付け面積の縮小化を補っている。また、本実施例
は、従来の装置に比べ、約３倍の風速を持つジェットが
得られ、除塵能力は約４倍程度の向上が見られた。As described above, when the clean compressed air is ejected from the small-diameter nozzle, the spraying area is narrower than that of the conventional air shower device, but a high-speed, high-pressure jet is generated spotwise, Thereby, it is possible to generate a force larger than the conventional dust removing force. Further, the nozzle has a rotating mechanism like the conventional type, which compensates for the reduction of the spraying area. In addition, in this example, a jet having a wind speed about 3 times higher than that of the conventional apparatus was obtained, and the dust removal capacity was improved about 4 times.
【００１３】図４は本発明の応用例を示す断面図であ
る。本応用例は、クリーンルーム間のＬＳＩウエハーロ
ットの自動搬送システムに本発明のエアシャワー装置を
設けたものである。搬送車２１は搬送レール２２に沿っ
て自走し、ステーションと呼ばれる図に示すクリーンル
ームの一つのエリアに外部から進入する。従来、こうし
たステーションではクリーンルーム外より搬送車が進入
するにもかかわらず、適切な塵埃除去を行っていなかっ
た。FIG. 4 is a sectional view showing an application example of the present invention. In this application example, the air shower device of the present invention is provided in an automatic transfer system for an LSI wafer lot between clean rooms. The carrier 21 travels along the carrier rail 22 and enters from outside into one area of a clean room shown in the drawing, which is called a station. Conventionally, such a station has not properly removed dust even if a transport vehicle enters from outside the clean room.
【００１４】本応用例では、ステーション部分を間仕切
壁２３で仕切り、実施例１で説明したと同様のエアシャ
ワー装置を搬送車の停止場所に設けたものである。本応
用例におけるエアシャワー装置の設置場所はレール２２
間の距離、搬送車２１の走行スペース確保等の制約を受
けるため、従来型のエアシャワー装置ではその設置が難
しかった。本応用例では本発明のエアシャワー装置がコ
ンパクトかつ強力である利点を生かし、ここに応用した
ものである。In this application example, the station portion is partitioned by the partition wall 23, and the air shower device similar to that described in the first embodiment is provided at the stop position of the carrier vehicle. The installation location of the air shower device in this application example is the rail 22.
It is difficult to install the conventional air shower device due to restrictions such as the distance between them and the securing of a traveling space for the transport vehicle 21. In this application example, the air shower device of the present invention is applied here by taking advantage of its compactness and strength.
【００１５】[0015]
【発明の効果】以上説明した様に本発明はエアシャワー
装置内のファン、フィルターを廃止し、代ってクリーン
ルームに供給される清浄な圧縮エアをエア源として、こ
の圧縮エアを小径ノズルから噴出させることで、装置の
大型化を抑えつつ強力なシャワー効果を得、塵埃除去効
率を高める効果を有する。As described above, the present invention eliminates the fan and the filter in the air shower device, and instead uses the clean compressed air supplied to the clean room as the air source, and ejects this compressed air from the small diameter nozzle. By doing so, it is possible to obtain a strong showering effect while suppressing an increase in the size of the apparatus, and to improve the dust removal efficiency.
【図１】本発明の一実施例を示す図で、同図（ａ）は側
面断面図，同図（ｂ）は正面断面図である。FIG. 1 is a view showing an embodiment of the present invention, in which FIG. 1 (a) is a side sectional view and FIG. 1 (b) is a front sectional view.
【図２】図１のＢ部を示す詳細図で、同図（ａ）は側面
断面図，同図（ｂ）は背面図である。2 is a detailed view showing a portion B of FIG. 1, where FIG. 2 (a) is a side sectional view and FIG. 2 (b) is a rear view.
【図３】本発明の一実施例の動作を示すフローチャート
である。FIG. 3 is a flowchart showing the operation of one embodiment of the present invention.
【図４】本発明の応用例を示す断面図である。FIG. 4 is a cross-sectional view showing an application example of the present invention.
【図５】従来のエアシャワー装置を示す図で、同図
（ａ）は側面断面図，同図（ｂ）は正面断面図である。5A and 5B are views showing a conventional air shower device, in which FIG. 5A is a side sectional view and FIG. 5B is a front sectional view.
【図６】図５のＡ部を示す詳細図で、同図（ａ）は側面
断面図，同図（ｂ）は背面図である。FIG. 6 is a detailed view showing a portion A of FIG. 5, where FIG. 6 (a) is a side sectional view and FIG. 6 (b) is a rear view.
１１ ノズル １２ 配管 １３ コンプレッサー １４ フィルター １５ プラスチックチューブ １６ 回転機構 １６ａ ウォーム １６ｂ ウォームギヤ １７ 赤外線検知装置 １８ バルブ １９ タイマー １０ 自動ドア ２１ 搬送車 ２２ 搬送レール ２３ 間仕切壁 ２４ ノズル ２５ 配管 ２６ プラスチックチューブ ２７ バルブ ３１ 送風ファン ３２ フィルター ３３ パンカールーバー ３４ 回転翼 11 Nozzle 12 Piping 13 Compressor 14 Filter 15 Plastic Tube 16 Rotation Mechanism 16a Worm 16b Worm Gear 17 Infrared Detector 18 Valve 19 Timer 10 Automatic Door 21 Transport Vehicle 22 Transport Rail 23 Partition Wall 24 Nozzle 25 Pipe 26 Plastic Tube 27 Valve 31 Fan Fan 32 Filter 33 Punk Rover 34 Rotor
Claims (4)
てエアを吹きつけ、着衣に付着した塵埃を払い落すエア
シャワー装置において、エアを圧縮するコンプレッサー
と、この圧縮エアの除塵を行うフィルターと、この除塵
化されたエアを入室者に吹きつけるための複数のノズル
を備えたことを特徴とするエアシャワー装置。1. In an air shower device for blowing air toward a person entering a clean room to remove dust adhering to clothes, a compressor for compressing air, a filter for removing the compressed air, and An air shower device comprising a plurality of nozzles for blowing dust-removed air to an occupant.
方向を変化させる回転機構をそれぞれのノズルに設けた
請求項１記載のエアシャワー装置。2. The air shower device according to claim 1, wherein each nozzle is provided with a rotation mechanism that swings and rotates the nozzle to change a jetting direction of air.
及びバルブを備えた請求項１記載のエアシャワー装置。3. The air shower device according to claim 1, further comprising a pipe and a valve for guiding the compressed air to the nozzle.
し圧縮エアの自動吹き出し及び停止を行う検知装置を有
する請求項１記載のエアシャワー装置。4. The air shower device according to claim 1, further comprising a detection device that detects the entry of a person entering the clean room and automatically blows and stops compressed air.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26019191A JPH0599464A (en) | 1991-10-08 | 1991-10-08 | Air shower device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26019191A JPH0599464A (en) | 1991-10-08 | 1991-10-08 | Air shower device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0599464A true JPH0599464A (en) | 1993-04-20 |
Family
ID=17344597
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26019191A Pending JPH0599464A (en) | 1991-10-08 | 1991-10-08 | Air shower device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0599464A (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5692954A (en) * | 1994-05-09 | 1997-12-02 | Samsung Electronics Co., Ltd. | Air-shower system for a clean room |
| KR20160064181A (en) | 2013-10-02 | 2016-06-07 | 도미따 세이야꾸 가부시끼가이샤 | Three-pack type dialysis agent containing acetic acid and acetic acid salt |
| US10595775B2 (en) | 2013-11-27 | 2020-03-24 | Medtronic, Inc. | Precision dialysis monitoring and synchronization system |
| US10994064B2 (en) | 2016-08-10 | 2021-05-04 | Medtronic, Inc. | Peritoneal dialysate flow path sensing |
| US11154648B2 (en) | 2013-01-09 | 2021-10-26 | Medtronic, Inc. | Fluid circuits for sorbent cartridge with sensors |
| US11213616B2 (en) | 2018-08-24 | 2022-01-04 | Medtronic, Inc. | Recharge solution for zirconium phosphate |
| US11219880B2 (en) | 2013-11-26 | 2022-01-11 | Medtronic, Inc | System for precision recharging of sorbent materials using patient and session data |
| US11642654B2 (en) | 2016-11-29 | 2023-05-09 | Medtronic, Inc | Zirconium oxide module conditioning |
| US11679186B2 (en) | 2016-09-09 | 2023-06-20 | Mozarc Medical Us Llc | Peritoneal dialysis fluid testing system |
| US11759557B2 (en) | 2011-04-29 | 2023-09-19 | Mozarc Medical Us Llc | Adaptive system for blood fluid removal |
| US11857712B2 (en) | 2013-01-09 | 2024-01-02 | Mozarc Medical Us Llc | Recirculating dialysate fluid circuit for measurement of blood solute species |
| US11883794B2 (en) | 2017-06-15 | 2024-01-30 | Mozarc Medical Us Llc | Zirconium phosphate disinfection recharging and conditioning |
| US11883576B2 (en) | 2016-08-10 | 2024-01-30 | Mozarc Medical Us Llc | Peritoneal dialysis intracycle osmotic agent adjustment |
| US11965763B2 (en) | 2021-11-12 | 2024-04-23 | Mozarc Medical Us Llc | Determining fluid flow across rotary pump |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01212849A (en) * | 1988-02-22 | 1989-08-25 | Takenaka Komuten Co Ltd | Separated part blowing type air shower and control thereof |
| JPH02293552A (en) * | 1989-05-01 | 1990-12-04 | Dan Sangyo Kk | Air shower room |
-
1991
- 1991-10-08 JP JP26019191A patent/JPH0599464A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01212849A (en) * | 1988-02-22 | 1989-08-25 | Takenaka Komuten Co Ltd | Separated part blowing type air shower and control thereof |
| JPH02293552A (en) * | 1989-05-01 | 1990-12-04 | Dan Sangyo Kk | Air shower room |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5692954A (en) * | 1994-05-09 | 1997-12-02 | Samsung Electronics Co., Ltd. | Air-shower system for a clean room |
| US11759557B2 (en) | 2011-04-29 | 2023-09-19 | Mozarc Medical Us Llc | Adaptive system for blood fluid removal |
| US11857712B2 (en) | 2013-01-09 | 2024-01-02 | Mozarc Medical Us Llc | Recirculating dialysate fluid circuit for measurement of blood solute species |
| US11154648B2 (en) | 2013-01-09 | 2021-10-26 | Medtronic, Inc. | Fluid circuits for sorbent cartridge with sensors |
| KR20160064181A (en) | 2013-10-02 | 2016-06-07 | 도미따 세이야꾸 가부시끼가이샤 | Three-pack type dialysis agent containing acetic acid and acetic acid salt |
| US11219880B2 (en) | 2013-11-26 | 2022-01-11 | Medtronic, Inc | System for precision recharging of sorbent materials using patient and session data |
| US11471100B2 (en) | 2013-11-27 | 2022-10-18 | Medtronic, Inc. | Precision dialysis monitoring and synchonization system |
| US11471099B2 (en) | 2013-11-27 | 2022-10-18 | Medtronic, Inc. | Precision dialysis monitoring and synchronization system |
| US10595775B2 (en) | 2013-11-27 | 2020-03-24 | Medtronic, Inc. | Precision dialysis monitoring and synchronization system |
| US10994064B2 (en) | 2016-08-10 | 2021-05-04 | Medtronic, Inc. | Peritoneal dialysate flow path sensing |
| US11883576B2 (en) | 2016-08-10 | 2024-01-30 | Mozarc Medical Us Llc | Peritoneal dialysis intracycle osmotic agent adjustment |
| US11679186B2 (en) | 2016-09-09 | 2023-06-20 | Mozarc Medical Us Llc | Peritoneal dialysis fluid testing system |
| US11642654B2 (en) | 2016-11-29 | 2023-05-09 | Medtronic, Inc | Zirconium oxide module conditioning |
| US11883794B2 (en) | 2017-06-15 | 2024-01-30 | Mozarc Medical Us Llc | Zirconium phosphate disinfection recharging and conditioning |
| US11213616B2 (en) | 2018-08-24 | 2022-01-04 | Medtronic, Inc. | Recharge solution for zirconium phosphate |
| US11965763B2 (en) | 2021-11-12 | 2024-04-23 | Mozarc Medical Us Llc | Determining fluid flow across rotary pump |
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