JPH059657Y2 - - Google Patents

Info

Publication number
JPH059657Y2
JPH059657Y2 JP16351786U JP16351786U JPH059657Y2 JP H059657 Y2 JPH059657 Y2 JP H059657Y2 JP 16351786 U JP16351786 U JP 16351786U JP 16351786 U JP16351786 U JP 16351786U JP H059657 Y2 JPH059657 Y2 JP H059657Y2
Authority
JP
Japan
Prior art keywords
light
voltage
optical fiber
side optical
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP16351786U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6370084U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16351786U priority Critical patent/JPH059657Y2/ja
Publication of JPS6370084U publication Critical patent/JPS6370084U/ja
Application granted granted Critical
Publication of JPH059657Y2 publication Critical patent/JPH059657Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
  • Measurement Of Current Or Voltage (AREA)
JP16351786U 1986-10-27 1986-10-27 Expired - Lifetime JPH059657Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16351786U JPH059657Y2 (enrdf_load_stackoverflow) 1986-10-27 1986-10-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16351786U JPH059657Y2 (enrdf_load_stackoverflow) 1986-10-27 1986-10-27

Publications (2)

Publication Number Publication Date
JPS6370084U JPS6370084U (enrdf_load_stackoverflow) 1988-05-11
JPH059657Y2 true JPH059657Y2 (enrdf_load_stackoverflow) 1993-03-10

Family

ID=31091786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16351786U Expired - Lifetime JPH059657Y2 (enrdf_load_stackoverflow) 1986-10-27 1986-10-27

Country Status (1)

Country Link
JP (1) JPH059657Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7643861B2 (ja) 2020-10-30 2025-03-11 株式会社荏原製作所 基板処理装置においてカセットからの基板の取り出しタイミングを決定する方法、装置、プログラム、および基板処理装置

Also Published As

Publication number Publication date
JPS6370084U (enrdf_load_stackoverflow) 1988-05-11

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