JPH0595250A - Surface acoustic wave device - Google Patents

Surface acoustic wave device

Info

Publication number
JPH0595250A
JPH0595250A JP3253303A JP25330391A JPH0595250A JP H0595250 A JPH0595250 A JP H0595250A JP 3253303 A JP3253303 A JP 3253303A JP 25330391 A JP25330391 A JP 25330391A JP H0595250 A JPH0595250 A JP H0595250A
Authority
JP
Japan
Prior art keywords
acoustic wave
surface acoustic
electrode fingers
wave device
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3253303A
Other languages
Japanese (ja)
Other versions
JP3166235B2 (en
Inventor
Eiichi Fukiharu
栄一 吹春
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=17249417&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPH0595250(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP25330391A priority Critical patent/JP3166235B2/en
Publication of JPH0595250A publication Critical patent/JPH0595250A/en
Application granted granted Critical
Publication of JP3166235B2 publication Critical patent/JP3166235B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To suppress the lateral mode spurious radiation giving adverse effect onto the characteristic of the surface acoustic wave device. CONSTITUTION:The distance between bus bars 1A, 1B and 4A, 4B opposite to each other in a transducer formed on the surface of a piezoelectric substance is changed as lengths L1, L3 as to positive electrode fingers 2A, 2B, 2C attended with a change in the distance of a surface acoustic wave in the propagation direction and as lengths L2, L4 as to ground side electrode fingers 3A, 3B, 3C.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は弾性表面波装置に関し、
特に電極パターンの構造を変えて特性を改良した弾性表
面波装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface acoustic wave device,
In particular, the present invention relates to a surface acoustic wave device having characteristics improved by changing the structure of an electrode pattern.

【0002】[0002]

【従来の技術】従来の弾性表面波装置は図6に示すよう
に、入力側の+側バスバー21Aと接地側バスバー21
Bからなるトランスデューサおよび出力側の+側バスバ
ー24Aと接地側バスバー24Bからなるトランスデュ
ーサの少なくとも2個のトランスデューサが圧電基板の
表面に設けられている。また各バスバー21A,21B
は+側電極指22A〜22Cと接地側電極指23A〜2
3Cとが所定の間隔を保持して対向している。また、こ
の電極パターンの対向している部分の長さはL20はす
べて同じ長さである。出力側の電極指も同じ構造であ
る。今弾性表面波は電極指22Aから22C方向および
電極指25Aから25C方向へ伝搬するが、その伝搬方
向に対して長さL20は一定であった。図5はこの弾性
表面波装置の伝送特性を示している。すなわちfo例え
ば45MHzを中心に±0.1MHz程度の通過帯域を
有するが、この図5に見られるように、横モードスプリ
アス27が表れることがあった。
2. Description of the Related Art As shown in FIG. 6, a conventional surface acoustic wave device includes an input side + side bus bar 21A and a ground side bus bar 21.
At least two transducers, that is, a transducer made of B and a transducer made of + side bus bar 24A on the output side and a transducer made of ground side bus bar 24B, are provided on the surface of the piezoelectric substrate. In addition, each bus bar 21A, 21B
Are + side electrode fingers 22A to 22C and ground side electrode fingers 23A to 2C.
3C are opposed to each other with a predetermined gap. Further, the lengths of the facing portions of this electrode pattern are all the same for L20. The electrode fingers on the output side have the same structure. Now, the surface acoustic wave propagates from the electrode fingers 22A to 22C and from the electrode fingers 25A to 25C, but the length L20 is constant with respect to the propagation direction. FIG. 5 shows the transmission characteristics of this surface acoustic wave device. That is, fo has a pass band of about ± 0.1 MHz around 45 MHz, for example, but as shown in FIG. 5, the transverse mode spurious 27 may appear.

【0003】[0003]

【発明が解決しようとする課題】この従来の電極パター
ン構造を有する弾性表面波装置ではトランスデューサ間
の横モード結合によるスプリアスが発生し易く、弾性表
面波装置の特性に悪影響を及ぼすという欠点があった。
The surface acoustic wave device having the conventional electrode pattern structure has a drawback in that spurious due to transverse mode coupling between the transducers is likely to occur and adversely affects the characteristics of the surface acoustic wave device. ..

【0004】[0004]

【課題を解決するための手段】本発明の弾性表面波装置
は圧電基板の表面に+側バスバーのそれぞれにくしの歯
状に対向する電極指を所定の間隔で配置した少なくとも
2つ以上のトランスデューサを設けた弾性表面波装置に
おいて、前記+側電極指と接地側電極指の対向する1対
同士が弾性表面波の伝搬方向に対して垂直方向の長さを
弾性表面波が伝搬する方向への距離の変化にともない変
化させている。
In the surface acoustic wave device of the present invention, at least two or more transducers are provided on the surface of a piezoelectric substrate, in which electrode fingers facing each other in a comb tooth shape are arranged at predetermined intervals on each of the + side bus bars. In the surface acoustic wave device, the pair of the positive side electrode finger and the ground side electrode finger facing each other have a length in the direction perpendicular to the propagation direction of the surface acoustic wave in the propagation direction of the surface acoustic wave. It changes as the distance changes.

【0005】[0005]

【実施例】次に本発明について図面を参照して説明す
る。図1は本発明の第1の実施例の電極パターンを示す
平面図である。図1の実施例は圧電基板の表面に入力側
のトランスデューサとして+側バスバー1A,接地側バ
スバー1Bを有し、出力のトランスデューサとして+側
バスバー4A,接地側バスバー4Bを有している。ま
た、バスバー1A,1Bは+側電極指2A,2B,2C
(図では6本)と接地側電極指3A,3B,3Cとがそ
れぞれ所定の間隔を保持して対向している。出力側バス
バー4A,4Bの電極指も同様である。ここで対向して
いる部分の長さL5は電極指2Aと2Bとを比較すると
L1だけ変えており、電極指2Bと電極指2Cとを比較
するとL3だけ変えている。また接地側電極指3A,3
Bもこの電極指の両側の対向部分の長さがそれぞれL
2,L4だけ変えている。このように対向する電極指の
間隔は、弾性表面波の伝搬方向への距離の変化にともな
い変化させている。よって弾性表面波のバスバー部で反
射波を散乱し易くなるので、横モードの発生を防ぐこと
ができ、トランスデューサ間の横モード結合によるスプ
リアスをおさえることができる。図4は図1の電極パタ
ーンを使用したときの伝送特性を示す特性図を示してい
る。図4と図5を比較してわかるように、従来の電極パ
ターンを使用したときに発生していた横モードスプリア
スが、本発明の電極パターンを使用したときに抑圧され
消去されている。
The present invention will be described below with reference to the drawings. FIG. 1 is a plan view showing an electrode pattern according to the first embodiment of the present invention. The embodiment of FIG. 1 has a + side bus bar 1A and a ground side bus bar 1B as a transducer on the input side and a + side bus bar 4A and a ground side bus bar 4B as an output transducer on the surface of the piezoelectric substrate. In addition, the bus bars 1A, 1B have positive electrode fingers 2A, 2B, 2C.
(Six in the figure) and the ground-side electrode fingers 3A, 3B, 3C are opposed to each other with a predetermined space therebetween. The same applies to the electrode fingers of the output side bus bars 4A and 4B. Here, the length L5 of the facing portion is changed by L1 when comparing the electrode fingers 2A and 2B, and is changed by L3 when comparing the electrode fingers 2B and 2C. Also, the ground side electrode fingers 3A, 3
In B, the length of the facing portions on both sides of the electrode finger is L, respectively.
Only 2 and L4 are changed. In this way, the distance between the opposing electrode fingers is changed in accordance with the change in the distance in the propagation direction of the surface acoustic wave. Therefore, since the reflected wave is easily scattered by the bus bar portion of the surface acoustic wave, it is possible to prevent the generation of the transverse mode and suppress the spurious due to the transverse mode coupling between the transducers. FIG. 4 is a characteristic diagram showing transmission characteristics when the electrode pattern of FIG. 1 is used. As can be seen by comparing FIGS. 4 and 5, the transverse mode spurious generated when the conventional electrode pattern is used is suppressed and erased when the electrode pattern of the present invention is used.

【0006】次に本発明の第2の実施例を図2の電極パ
ターンの平面図、および図3に示す図2の電極パターン
の平面図および図3に示す図2の電極パターンの部分拡
大図により説明する。図2において入力側トランスデュ
ーサは+側バスバー7A,接地側バスバー7Bで構成さ
れ、出力側トランスデューサは+側バスバー10A,接
地側バスバー10Bで構成されている。ここで+側電極
指8Aと8Bは対向する面の長さが相違しており、両電
極指の間をテーパ状に間隔を変えている。設置側の電極
指9Aと9Bも対向する面の長さが相違しており、両電
極指の間をテーパ状に間隔を変えている。すなわち図3
に示すように、+側電極指8Aの内側から接地側電極指
9Aの対向する側に向かって長さL7,L8がテーパ状
にL7>L8としており、第1の実施例で説明したよう
に両方のバスバー部のL7,L8および後続の各位置で
反射波を散乱し易くして横モードの発生を防止してい
る。
A second embodiment of the present invention is a plan view of the electrode pattern of FIG. 2, a plan view of the electrode pattern of FIG. 2 shown in FIG. 3 and a partially enlarged view of the electrode pattern of FIG. 2 shown in FIG. Will be explained. In FIG. 2, the input side transducer is composed of the + side bus bar 7A and the ground side bus bar 7B, and the output side transducer is composed of the + side bus bar 10A and the ground side bus bar 10B. Here, the + side electrode fingers 8A and 8B have different lengths of the facing surfaces, and the distance between the two electrode fingers is changed in a tapered shape. The electrode fingers 9A and 9B on the installation side also have different lengths of the facing surfaces, and the distance between the two electrode fingers is changed in a tapered manner. That is, FIG.
As shown in, the lengths L7 and L8 are tapered from the inside of the + side electrode finger 8A toward the opposite side of the ground side electrode finger 9A such that L7> L8, and as described in the first embodiment. The reflected waves are easily scattered at L7 and L8 of both bus bar portions and each subsequent position to prevent generation of a transverse mode.

【0007】[0007]

【発明の効果】以上説明したように本発明は、+側およ
び接地側バスバーからなる一対のバスバーの対向する面
の伝搬方向と垂直方向の長さを弾性表面波の伝搬方向へ
の変化にともない変化させることにより、横モードスプ
リアスによる弾性表面波装置への悪影響を防ぐことがで
きるという効果がある。
As described above, according to the present invention, the length in the direction perpendicular to the propagation direction of the opposing surfaces of the pair of bus bars composed of the + side and the ground side bus bars changes in the propagation direction of the surface acoustic wave. By changing it, there is an effect that the adverse effect on the surface acoustic wave device due to the transverse mode spurious can be prevented.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1の実施例の平面図である。FIG. 1 is a plan view of a first embodiment of the present invention.

【図2】本発明の第2の実施例の平面図である。FIG. 2 is a plan view of a second embodiment of the present invention.

【図3】第2の実施例の部分拡大図である。FIG. 3 is a partially enlarged view of the second embodiment.

【図4】第1の実施例の特性図である。FIG. 4 is a characteristic diagram of the first embodiment.

【図5】従来例の特性図である。FIG. 5 is a characteristic diagram of a conventional example.

【図6】従来の弾性表面波装置の平面図である。FIG. 6 is a plan view of a conventional surface acoustic wave device.

【符号の説明】[Explanation of symbols]

1A,1B,4A,4B,7A,7B,10A,10B
バスバー 2A〜2C,5A〜5C,8A〜8C,11A〜11C
+側電極指 3A〜3C,6A〜6C,9A〜9C,12A〜12C
接地側電極指
1A, 1B, 4A, 4B, 7A, 7B, 10A, 10B
Bus bar 2A-2C, 5A-5C, 8A-8C, 11A-11C
+ Side electrode fingers 3A to 3C, 6A to 6C, 9A to 9C, 12A to 12C
Ground electrode finger

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 圧電基板の表面に+側バスバーのそれぞ
れにくしの歯状に対向する電極指を所定の間隔で配置し
た少なくとも2つ以上のトランスデューサを設けた弾性
表面波装置において、前記+側電極指と接地側電極指の
対向する1対同士が弾性表面波の伝搬方向に対して垂直
方向の長さを弾性表面波が伝搬する方向への距離の変化
にともない変化させていることを特徴とする弾性表面波
装置。
1. A surface acoustic wave device provided with at least two or more transducers on a surface of a piezoelectric substrate, wherein electrode fingers facing each other in a comb tooth shape are arranged at a predetermined interval on each of the + side bus bars. It is characterized in that a pair of facing electrode fingers and ground-side electrode fingers change the length in the direction perpendicular to the propagation direction of the surface acoustic wave as the distance in the surface acoustic wave propagation direction changes. And surface acoustic wave device.
【請求項2】 前記+側電極指と相対する前記接地側電
極指との間の間隙において、弾性表面波の電搬方向に対
して垂直方向の長さを弾性表面波が伝搬する方向への距
離の変化にともないテーパ状に前記長さを小さくしてい
ることを特徴とする請求項1記載の弾性表面波装置。
2. In the gap between the + side electrode finger and the ground side electrode finger facing the + side electrode finger, the length in the direction perpendicular to the carrying direction of the surface acoustic wave is the direction in which the surface acoustic wave propagates. The surface acoustic wave device according to claim 1, wherein the length is reduced in a taper shape with a change in distance.
JP25330391A 1991-10-01 1991-10-01 Surface acoustic wave device Expired - Fee Related JP3166235B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25330391A JP3166235B2 (en) 1991-10-01 1991-10-01 Surface acoustic wave device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25330391A JP3166235B2 (en) 1991-10-01 1991-10-01 Surface acoustic wave device

Publications (2)

Publication Number Publication Date
JPH0595250A true JPH0595250A (en) 1993-04-16
JP3166235B2 JP3166235B2 (en) 2001-05-14

Family

ID=17249417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25330391A Expired - Fee Related JP3166235B2 (en) 1991-10-01 1991-10-01 Surface acoustic wave device

Country Status (1)

Country Link
JP (1) JP3166235B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006186435A (en) * 2004-12-24 2006-07-13 Kyocera Corp Surface acoustic wave device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015198897A1 (en) 2014-06-23 2015-12-30 株式会社村田製作所 Elastic wave device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006186435A (en) * 2004-12-24 2006-07-13 Kyocera Corp Surface acoustic wave device
JP4601416B2 (en) * 2004-12-24 2010-12-22 京セラ株式会社 Surface acoustic wave device

Also Published As

Publication number Publication date
JP3166235B2 (en) 2001-05-14

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