JPH0629771A - Surface acoustic wave converter - Google Patents

Surface acoustic wave converter

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Publication number
JPH0629771A
JPH0629771A JP17978592A JP17978592A JPH0629771A JP H0629771 A JPH0629771 A JP H0629771A JP 17978592 A JP17978592 A JP 17978592A JP 17978592 A JP17978592 A JP 17978592A JP H0629771 A JPH0629771 A JP H0629771A
Authority
JP
Japan
Prior art keywords
electrode
surface acoustic
acoustic wave
sound absorbing
absorbing material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17978592A
Other languages
Japanese (ja)
Inventor
Hideto Wago
秀人 和合
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maruyasu Industries Co Ltd
Original Assignee
Maruyasu Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Maruyasu Industries Co Ltd filed Critical Maruyasu Industries Co Ltd
Priority to JP17978592A priority Critical patent/JPH0629771A/en
Publication of JPH0629771A publication Critical patent/JPH0629771A/en
Pending legal-status Critical Current

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  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To prevent each comb tooth(electrode finger) of an an input electrode from being easily disconnected and to improve the group delay characteristic and the amplitude characteristic for frequency. CONSTITUTION:An input electrode 21 which consists of base parts 21a and 21b and electrode fingers 21c and 21d and constitutes a weighting surface acoustic wave converter and an output electrode 22 constituting a normal surface acoustic wave converter are arranged on a piezoelectric substrate 20. Parts of electrode fingers 21c and 21d which do not cross of the input electrode 21 are linearly coated with a sound absorbing material 25 across electrode fingers 21c and 21d, and the edge part of the surface acoustic wave propagation path between the input electrode 21 and the output electrode 22 is coated with a sound absorbing material 26. Thus, unnecessary surface acoustic waves due to multipath reflection or a diffraction phenomenon are absorbed to suppress ripple, undulation, or the like in the group delay characteristic and the amplitude characteristic for frequency. The sound absorbing material 25 increases the strength of parts of electrode fingers 21c and 21d without an influence upon generation of a surface acoustic wave.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、電気信号を一旦弾性表
面波に変換するとともに同弾性表面波を再度電気信号に
変換して出力することにより、入力した電気信号の特性
を変更して出力する弾性表面波変換器に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention changes the characteristics of an input electric signal and outputs it by once converting the electric signal into a surface acoustic wave and again converting the surface acoustic wave into an electric signal and outputting the electric signal. The present invention relates to a surface acoustic wave converter.

【0002】[0002]

【従来の技術】従来、この種の装置は、例えば図6に示
すように、圧電体基盤10上に交差長を異ならせた櫛歯
状の入力電極11と前記入力電極11に対向させた櫛歯
状の出力電極12とを設けるとともに、入力電極11お
よび出力電極12の各外側に吸音材13,14をそれぞ
れ塗布してなり、入力電極11に発振器15からの高周
波信号を入力して、出力電極12に接続した抵抗16か
ら帯域制限され所定の周波数特性を有する出力信号を得
るようにしていた。
2. Description of the Related Art Conventionally, as shown in FIG. 6, for example, a device of this kind has a comb-teeth-shaped input electrode 11 having different crossing lengths on a piezoelectric substrate 10 and a comb facing the input electrode 11. A tooth-shaped output electrode 12 is provided, and sound absorbing materials 13 and 14 are applied to the outer sides of the input electrode 11 and the output electrode 12, respectively. The high frequency signal from the oscillator 15 is input to the input electrode 11 and output. A resistor 16 connected to the electrode 12 is used to obtain an output signal that is band-limited and has a predetermined frequency characteristic.

【0003】[0003]

【発明が解決しようとする課題】しかし、上記従来の装
置にあっては、入力電極11自体における多重反射や、
同入力電極11と出力電極との間の多重反射などによ
り、周波数に対する群遅延特性および振幅特性にリップ
ル、うねり等が発生するという問題があった。また、回
折現象によっても、周波数に対する群遅延特性および振
幅特性にリップル、うねり等が発生するという問題があ
った。さらに、入力電極11の各櫛歯は、製造時などに
しばしば断線することがあった。本発明は上記問題に対
処するためになされたもので、入力電極の各櫛歯が容易
に断線されないようにするとともに、周波数に対する群
遅延特性および振幅特性が良好となる弾性表面波変換器
を提供することにある。
However, in the above-mentioned conventional device, multiple reflection in the input electrode 11 itself,
There is a problem that ripples and undulations occur in the group delay characteristic and the amplitude characteristic with respect to frequency due to multiple reflection between the input electrode 11 and the output electrode. Further, due to the diffraction phenomenon, there is a problem that ripples, undulations, etc. occur in the group delay characteristic and the amplitude characteristic with respect to the frequency. Further, the comb teeth of the input electrode 11 are often broken during manufacture. The present invention has been made to solve the above problems, and provides a surface acoustic wave converter that prevents each comb tooth of an input electrode from being easily broken and that has good group delay characteristics and amplitude characteristics with respect to frequency. To do.

【0004】[0004]

【課題を解決するための手段】上記目的を達成するため
に、上記請求項1に係る発明の構成上の特徴は、入力電
極の交差してない櫛歯部分に吸音材を各櫛歯に交差させ
て線状に塗布したことにある。
In order to achieve the above-mentioned object, the structural feature of the invention according to claim 1 is that a sound absorbing material is crossed over each comb tooth at the comb tooth portion where the input electrodes do not intersect. It was applied in a linear manner.

【0005】また、上記請求項2に係る発明の構成上の
特徴は、前記請求項1に係る発明に係る弾性表面波変換
器において、入力電極と出力電極との間の弾性表面波の
伝搬路の縁部に第2の吸音材を塗布したことにある。
Further, the constitutional feature of the invention according to claim 2 is that in the surface acoustic wave converter according to the invention according to claim 1, the propagation path of a surface acoustic wave between an input electrode and an output electrode. The second sound absorbing material is applied to the edge of the.

【0006】[0006]

【発明の作用・効果】上記のように構成した請求項1に
係る発明においては、前記塗布された吸音材が、入力電
極部における多重反射や、同入力電極と出力電極との間
の多重反射を抑制するので、周波数に対する群遅延特性
および振幅特性におけるリップル、うねり等を小さく抑
えられる。また、入力電極の交差してない櫛歯部分は弾
性表面波を発生するためには寄与しておらず、前記塗布
された吸音材が同櫛歯部分の断線を防止するので、弾性
表面波の発生に影響を与えることなく、前記吸音材は櫛
歯部分の強度を高くする。その結果、前記請求項1に係
る発明によれば、周波数に対する群遅延特性および振幅
特性が良好になるとともに、入力電極の各櫛歯が容易に
断線されないようになる。
In the invention according to claim 1 configured as described above, the applied sound absorbing material has multiple reflections at the input electrode portion or multiple reflections between the input electrode and the output electrode. Is suppressed, ripples, undulations, etc. in the group delay characteristic and the amplitude characteristic with respect to the frequency can be suppressed to be small. Further, the comb-teeth portion where the input electrodes do not intersect does not contribute to the generation of the surface acoustic wave, and the applied sound absorbing material prevents the breakage of the comb-teeth portion. The sound absorbing material increases the strength of the comb tooth portion without affecting the generation. As a result, according to the invention of claim 1, the group delay characteristic and the amplitude characteristic with respect to the frequency are improved, and the comb teeth of the input electrode are not easily broken.

【0007】また、上記のように構成した請求項2に係
る発明においては、前述のような作用とともに、第2の
吸音材が、回折現象による周波数に対する群遅延特性お
よび振幅特性におけるリップル、うねり等の発生を防止
する。その結果、前記請求項2に係る発明によれば、前
記請求項1に係る発明よりも、周波数に対する群遅延特
性および振幅特性がさらに良好になる。
Further, in the invention according to claim 2 configured as described above, in addition to the above-described action, the second sound absorbing material causes the second sound absorbing material to have ripples, undulations, etc. in the group delay characteristic and the amplitude characteristic with respect to the frequency due to the diffraction phenomenon. To prevent the occurrence of. As a result, according to the invention of claim 2, the group delay characteristic and the amplitude characteristic with respect to frequency are further improved as compared with the invention of claim 1.

【0008】[0008]

【実施例】以下、本発明の一実施例を図面を用いて説明
すると、図1は同実施例に係る弾性表面波変換器を概略
的に示した平面図である。この弾性表面波変換器は、Li
NbO3,LiTaO3,水晶などの圧電材料を直方体状に形成した
圧電基盤20を備えている。圧電基盤20上には、入力
電極21および出力電極22が相対向して設けられてい
て、弾性表面波W1が入力電極21から出力電極22に伝
搬されるようになっている。入力電極21は平行に延設
された一対の基部21a,21bと各基部21a,21
bからそれぞれ垂直に延設された多数の電極指21c,
21dとからなる櫛歯状に形成されており、各電極指2
1c,21d間の交差長を異ならせて重み付け弾性表面
波変換器を構成している。出力電極22は平行に延設さ
れた一対の基部22a,22bと各基部22a,22b
からそれぞれ垂直に延設された少数の電極指22c,2
2dとからなる櫛歯状に形成されており、各電極指21
c,21d間の交差長を一定にして正規型弾性表面波変
換器を構成している。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a plan view schematically showing a surface acoustic wave converter according to the embodiment. This surface acoustic wave converter is
The piezoelectric substrate 20 has a rectangular parallelepiped shape made of a piezoelectric material such as NbO 3 , LiTaO 3 , and quartz. An input electrode 21 and an output electrode 22 are provided on the piezoelectric substrate 20 so as to face each other, and a surface acoustic wave W1 is propagated from the input electrode 21 to the output electrode 22. The input electrode 21 includes a pair of bases 21a and 21b extending in parallel and the bases 21a and 21b.
a plurality of electrode fingers 21c extending vertically from b,
21d, and each electrode finger 2
The weighted surface acoustic wave converter is configured by changing the crossing length between 1c and 21d. The output electrode 22 includes a pair of bases 22a and 22b extending in parallel and the bases 22a and 22b.
A small number of electrode fingers 22c, 2 vertically extending from the
2d and the electrode fingers 21 are formed in a comb shape.
A normal type surface acoustic wave converter is configured with a constant intersection length between c and 21d.

【0009】入力電極21及び出力電極22の各外側に
は吸音材(ダンパー材)23,24がそれぞれ塗布され
ている。入力電極21の交差してない電極指21c,2
1dすなわち櫛歯部分には、複数の線状に形成した吸音
材25,25…が各電極指21c,21dに交差するよ
うに略等間隔で塗布され、各吸音材の25,25…の両
端は入力電極21の基部21a,21bと吸音材23に
接続されている。さらに、入力電極21と出力電極22
との間の弾性表面波の伝搬路上であってその縁部には一
対の吸音材26,26が塗布されている。
Sound absorbing materials (damper materials) 23 and 24 are applied to the outer sides of the input electrode 21 and the output electrode 22, respectively. Electrode fingers 21c and 2 that do not intersect the input electrode 21
1d, that is, the comb tooth portions, a plurality of linear sound absorbing materials 25, 25 ... Are applied at substantially equal intervals so as to intersect the electrode fingers 21c, 21d, and both ends of each sound absorbing material 25, 25. Are connected to the base portions 21 a and 21 b of the input electrode 21 and the sound absorbing material 23. Further, the input electrode 21 and the output electrode 22
A pair of sound absorbing materials 26, 26 are applied to the edge of the propagation path of the surface acoustic wave between and.

【0010】このように構成した弾性表面波変換器の使
用状態においては、入力電極21の基部21a,21b
に高周波発振器27が接続されるとともに出力電極22
の基部22a,22b間には抵抗28が接続されて、抵
抗28の両端から出力信号を得るようにする。これによ
り、高周波発振器27からの高周波電気信号は入力電極
21にて弾性表面波W1に変換され、同弾性表面波W1が出
力電極22に伝搬されて同電極22にてふたたび電気信
号に変換されて出力される。この場合、入力された高周
波信号は、入力電極21、出力電極22などにより、帯
域制限されかつ所定の周波数特性をもつ信号に変換され
て出力されることになる。
When the surface acoustic wave converter thus constructed is in use, the base portions 21a and 21b of the input electrode 21 are in use.
And a high frequency oscillator 27 is connected to the output electrode 22.
A resistor 28 is connected between the bases 22a and 22b of the so as to obtain an output signal from both ends of the resistor 28. As a result, the high frequency electric signal from the high frequency oscillator 27 is converted into the surface acoustic wave W1 by the input electrode 21, the surface acoustic wave W1 is propagated to the output electrode 22, and is converted into the electric signal again by the same electrode 22. Is output. In this case, the input high frequency signal is converted into a signal having a band-limited and predetermined frequency characteristic by the input electrode 21, the output electrode 22, etc., and then output.

【0011】このような弾性表面波変換器の作動状態に
おいては、吸音材23,25,26は入力電極21から
出力されて圧電基盤20上を伝搬する不要弾性表面波W
2,W3を吸収し、吸音材24は出力電極22から出力さ
れて圧電基盤20上を伝搬する不要弾性表面波W4を吸収
する。特に、吸音材25は入力電極21の電極指21
c,21dの多重反射による不要な弾性表面波を吸収す
る効果があり、吸音材26は回折現象による不要な弾性
表面波を吸収する効果がある。
In such an operating state of the surface acoustic wave transducer, the sound absorbing materials 23, 25 and 26 are unnecessary surface acoustic waves W which are output from the input electrode 21 and propagate on the piezoelectric substrate 20.
2, W3 is absorbed, and the sound absorbing material 24 absorbs the unnecessary surface acoustic wave W4 output from the output electrode 22 and propagating on the piezoelectric substrate 20. Particularly, the sound absorbing material 25 is the electrode finger 21 of the input electrode 21.
There is an effect of absorbing unnecessary surface acoustic waves due to multiple reflections of c and 21d, and the sound absorbing material 26 has an effect of absorbing unnecessary surface acoustic waves due to the diffraction phenomenon.

【0012】このような吸音材25,26による吸音効
果を図2〜5を用いて説明すると、図2は吸音材23,
24を設けた状態で吸音材25,26を用いない場合
(従来技術)における周波数に対する遅延時間特性を示
しており、図3は破線により同状態で吸音材25のみを
用いた場合(吸音材26を用いない場合)における同遅
延時間特性を示し、かつ実線により同状態で両吸音材2
5,26を用いた場合における同遅延特性を示してい
る。これによれば、吸音材25により全体的な遅延特性
のリップル、うねりなどが抑制され、かつ吸音材26に
より図3の一点鎖線で囲んだ部分の遅延特性のリップ
ル、うねりなどが特に抑制されることが理解できる。ま
た、図4は実線により吸音材23,24を設けた状態で
吸音材25,26を用いない場合(従来技術)における
周波数に対する振幅特性を示し、かつ破線により前記振
幅特性を縦方向の目盛りを10倍にして示しており、図
5は実線により同状態で吸音材25,26を用いた場合
における同振幅特性を示し、かつ破線により前記振幅特
性を縦方向の目盛りを10倍にして示している。これに
よれば、吸音材25,26により振幅特性の全体的なリ
ップル、うねりなどが抑制されることが理解できる。
The sound absorbing effect of the sound absorbing materials 25 and 26 will be described with reference to FIGS. 2 to 5. FIG.
24 shows a delay time characteristic with respect to frequency in the case where the sound absorbing materials 25 and 26 are not used (prior art) with 24 provided, and FIG. 3 shows a case where only the sound absorbing material 25 is used in the same state by a broken line (the sound absorbing material 26 The same delay time characteristics (in the case of not using
5 shows the same delay characteristic when 5, 26 are used. According to this, the sound absorbing material 25 suppresses ripples and undulations of the overall delay characteristic, and the sound absorbing material 26 particularly suppresses ripples and undulations of the delay characteristic in the portion surrounded by the one-dot chain line in FIG. I understand. Further, FIG. 4 shows the amplitude characteristics with respect to frequency in the case where the sound absorbing materials 25 and 26 are not used (prior art) with the solid lines provided with solid lines, and the amplitude characteristics are plotted in the vertical direction with broken lines. 5 shows the same amplitude characteristics when the sound absorbing materials 25 and 26 are used in the same state by a solid line, and the amplitude characteristics are shown by a 10 times scale in the vertical direction by a broken line. There is. According to this, it can be understood that the sound absorbing materials 25 and 26 suppress the overall ripple and undulation of the amplitude characteristic.

【0013】また、上記実施例によれば、吸音材25は
入力電極21の電極指21c,21dの交差してない部
分に設けられており、同部分は弾性表面波を発生するた
めには寄与していない。一方、この吸音材25は前記部
分の強度を高めて製造行程時などにおける断線を防止す
る。したがって、吸音材25により、弾性表面波の発生
に影響を与えることなく、入力電極21の電極指21
c,21dが容易に破断されないようになって、この弾
性表面波変換器の歩留まりを向上させることができる。
Further, according to the above-described embodiment, the sound absorbing material 25 is provided at the portion where the electrode fingers 21c and 21d of the input electrode 21 do not intersect, and this portion contributes to the generation of the surface acoustic wave. I haven't. On the other hand, the sound absorbing material 25 enhances the strength of the above-mentioned portion and prevents disconnection during the manufacturing process. Therefore, the sound absorbing material 25 does not affect the generation of surface acoustic waves, and the electrode fingers 21 of the input electrode 21 are not affected.
Since c and 21d are not easily broken, the yield of this surface acoustic wave converter can be improved.

【0014】なお、上記実施例においては、入力電極2
1を対称形に構成して電極指21c,21dの交差しな
い部分が対称に現れるようにしたので、吸音材25を対
称に設けたが、電極指21c,21dの交差しない部分
を対称に設けないで一方に偏位させた場合には、吸音材
25を前記一方すなわち電極指21c,21dが交差し
ない部分のみに設けるようにする。
In the above embodiment, the input electrode 2
Since 1 is configured symmetrically so that the portions where the electrode fingers 21c and 21d do not intersect appear symmetrically, the sound absorbing material 25 is provided symmetrically, but the portions where the electrode fingers 21c and 21d do not intersect are not provided symmetrically. When the sound absorbing member 25 is deviated to one side, the sound absorbing material 25 is provided only on the one side, that is, a portion where the electrode fingers 21c and 21d do not intersect.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の一実施例を示す弾性表面波変換器の
平面概略図である。
FIG. 1 is a schematic plan view of a surface acoustic wave converter according to an embodiment of the present invention.

【図2】 従来技術における周波数に対する遅延時間の
特性グラフである。
FIG. 2 is a characteristic graph of delay time with respect to frequency in the related art.

【図3】 破線により吸音材25のみを用いた場合にお
ける前記遅延時間特性を示し、かつ実線により吸音材2
5,26を用いた場合における同遅延特性を示したグラ
フである。
FIG. 3 shows the delay time characteristics when only the sound absorbing material 25 is used by a broken line, and the sound absorbing material 2 is shown by a solid line.
5 is a graph showing the same delay characteristics when 5, and 26 are used.

【図4】 実線により従来技術における周波数に対する
振幅特性を示し、かつ破線により同振幅特性を縦方向の
目盛りを10倍にして示したグラフである。
FIG. 4 is a graph in which a solid line shows the amplitude characteristic with respect to the frequency in the conventional technique, and a broken line shows the same amplitude characteristic with a scale of 10 in the vertical direction.

【図5】 実線により吸音材25,26を用いた場合に
おける前記振幅特性を示し、かつ破線により同振幅特性
を縦方向の目盛りを10倍にして示したグラフである。
FIG. 5 is a graph in which a solid line shows the amplitude characteristics when the sound absorbing materials 25 and 26 are used, and a broken line shows the same amplitude characteristics with a scale of 10 in the vertical direction.

【図6】 従来の弾性表面波変換器の平面概略図であ
る。
FIG. 6 is a schematic plan view of a conventional surface acoustic wave converter.

【符号の説明】[Explanation of symbols]

20…圧電基盤、21…入力電極、22…出力電極、2
3〜26…吸音材。
20 ... Piezoelectric substrate, 21 ... Input electrode, 22 ... Output electrode, 2
3 to 26 ... Sound absorbing material.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 圧電体基盤上に交差長を異ならせた櫛歯
状の入力電極と前記入力電極に対向させた櫛歯状の出力
電極とを設けてなる弾性表面波変換器において、前記入
力電極の交差してない櫛歯部分に吸音材を各櫛歯に交差
させて線状に塗布したことを特徴とする弾性表面波変換
器。
1. A surface acoustic wave converter having a comb-teeth-shaped input electrode having different crossing lengths and a comb-teeth-shaped output electrode opposed to the input electrode on a piezoelectric substrate. A surface acoustic wave converter characterized in that a sound absorbing material is linearly applied so as to intersect the comb teeth at the comb teeth where the electrodes do not intersect.
【請求項2】 前記請求項1に記載した弾性表面波変換
器において、前記入力電極と出力電極との間の弾性表面
波の伝搬路の縁部に吸音材を塗布したことを特徴とする
弾性表面波変換器。
2. The surface acoustic wave converter according to claim 1, wherein a sound absorbing material is applied to an edge portion of a surface acoustic wave propagation path between the input electrode and the output electrode. Surface wave converter.
JP17978592A 1992-07-07 1992-07-07 Surface acoustic wave converter Pending JPH0629771A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17978592A JPH0629771A (en) 1992-07-07 1992-07-07 Surface acoustic wave converter

Applications Claiming Priority (1)

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JP17978592A JPH0629771A (en) 1992-07-07 1992-07-07 Surface acoustic wave converter

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JPH0629771A true JPH0629771A (en) 1994-02-04

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8723082B2 (en) 2004-07-09 2014-05-13 Fronius International Gmbh Device for transporting a welding wire

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8723082B2 (en) 2004-07-09 2014-05-13 Fronius International Gmbh Device for transporting a welding wire

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