JPH0594611A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPH0594611A
JPH0594611A JP27620091A JP27620091A JPH0594611A JP H0594611 A JPH0594611 A JP H0594611A JP 27620091 A JP27620091 A JP 27620091A JP 27620091 A JP27620091 A JP 27620091A JP H0594611 A JPH0594611 A JP H0594611A
Authority
JP
Japan
Prior art keywords
film
magnetic recording
recording medium
cocr
nip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27620091A
Other languages
Japanese (ja)
Inventor
Masamichi Tagami
勝通 田上
Shinzo Tsuboi
眞三 坪井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP27620091A priority Critical patent/JPH0594611A/en
Publication of JPH0594611A publication Critical patent/JPH0594611A/en
Pending legal-status Critical Current

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  • Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To provide a magnetic recording medium having high out-put power and excellent recording density characteristic by increasing coercive force from region thin in film thickness in a CoCr alloy film medium formed on a NiP coated substrate. CONSTITUTION:The NiP coating film 4 is formed on the substrate 1, furthermore the primary coating film 2, which contains Si or Si contg. element of one or more kind among B, Ta, Ti, P and C, is formed and the alloy thin film 3 containing mainly CoCr is formed on the primary coating film.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、薄膜型磁気記録媒体に
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film magnetic recording medium.

【0002】[0002]

【従来の技術】近年、フレキシブル磁気ディスク装置、
ハ―ド磁気ディスク、オ―ディオ用磁気テ―プ装置、V
TR用磁気テ―プ装置等の磁気記録装置で、小型化、高
密度化が進められている。磁気記録における高密度化は
主として磁気記録媒体の磁性層の高保磁力化と薄層化と
によって実現されている。従来使用されている媒体は、
磁性体微粒子を高分子バインダ中に分散させたものをベ
―スフィルム上に塗布した、いわゆる塗布型磁気記録媒
体である。最近、これらの記録密度を1〜2桁ほど向上
できる記録方式が注目されている。ここに用いられる記
録媒体としては、膜面に垂直に磁気異方性を有する媒体
が用いられ、スパッタまたは蒸着などによって形成され
る。これらの媒体の記録密度および再生出力を決める磁
気特性としては、垂直磁気異方性、保磁力等がある。保
磁力に関しては保磁力の増大によって高出力が得られて
いる。
2. Description of the Related Art In recent years, flexible magnetic disk devices,
Hard magnetic disk, audio magnetic tape device, V
Magnetic recording devices such as magnetic tape devices for TR are being miniaturized and increased in density. Higher densities in magnetic recording have mainly been realized by increasing the coercive force and thinning the magnetic layers of magnetic recording media. Conventionally used media are
This is a so-called coating type magnetic recording medium in which magnetic particles are dispersed in a polymer binder and coated on a base film. Recently, a recording system that can improve the recording density by about one to two digits has attracted attention. As the recording medium used here, a medium having magnetic anisotropy perpendicular to the film surface is used, and is formed by sputtering or vapor deposition. Perpendicular magnetic anisotropy, coercive force, and the like are magnetic characteristics that determine the recording density and reproduction output of these media. Regarding coercive force, high output is obtained by increasing coercive force.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、NiP
被覆基板上に作製したCoCr系合金膜の保磁力は、膜
厚の薄い領域で小さく、磁気ヘッドで再生した場合出力
が小さい問題がある。膜厚の大きい領域では保磁力が大
きくなるが、記録再生損失により十分な特性を得ること
ができなかった。本発明の目的は、このような従来の問
題点を解決して、NiP被覆基体上に作製したCoCr
系合金膜媒体において、膜厚の薄い領域における保磁力
が大きく、高出力で優れた記録密度特性を有する磁気記
録媒体を提供することにある。
However, the NiP
The CoCr alloy film formed on the coated substrate has a small coercive force in a thin film region, and has a problem that the output is small when reproduced by a magnetic head. Although the coercive force becomes large in the region where the film thickness is large, sufficient characteristics could not be obtained due to recording / reproducing loss. The object of the present invention is to solve the above-mentioned conventional problems and to provide a CoCr film formed on a NiP-coated substrate.
It is an object of the present invention to provide a magnetic recording medium having a high coercive force in a thin film region, a high output, and an excellent recording density characteristic in a system alloy film medium.

【0004】[0004]

【課題を解決するための手段】本発明は、NiP被覆基
体上に、SiもしくはSiにB、Ge、Ta、Ti、
P、Cのうち1種以上の元素を含む下地膜が形成され、
該下地膜上にCoCrを主成分とする合金薄膜が形成さ
れていることを特徴とする磁気記録媒体である。磁気記
録媒体膜は、CoCrを主成分とする合金薄膜である。
なお、本発明の磁気記録媒体は、通常、磁気記録媒体上
に保護膜および潤滑層を施す。下地膜および磁気記録媒
体の作製法としては、スパッタ法、蒸着法、イオンビ―
ムスパッタ法などがある。保護膜としては、ダイヤモン
ド状カ―ボン、グラファイト状カ―ボン、Siもしくは
シリコン酸化膜、シリコン窒化膜などがある。
SUMMARY OF THE INVENTION The present invention is directed to Si or Si with B, Ge, Ta, Ti, on a NiP coated substrate.
A base film containing at least one element of P and C is formed,
A magnetic recording medium is characterized in that an alloy thin film containing CoCr as a main component is formed on the underlayer. The magnetic recording medium film is an alloy thin film whose main component is CoCr.
The magnetic recording medium of the present invention is usually provided with a protective film and a lubricating layer on the magnetic recording medium. The underlying film and the magnetic recording medium are manufactured by the sputtering method, the vapor deposition method and the ion beam method.
There is a musputter method. Examples of the protective film include diamond-like carbon, graphite-like carbon, Si or silicon oxide film, and silicon nitride film.

【0005】[0005]

【作用】磁気記録媒体として、CoCrを主成分とする
合金薄膜を用い、これらの下地膜として、NiP被覆基
体上にSiもしくはSiにB、Ta、Ti、P、Cのう
ち1つ以上の元素を含む下地膜を用いると、膜厚の薄い
領域でも保磁力が大きくなる。
An alloy thin film containing CoCr as a main component is used as a magnetic recording medium, and as a base film for these, at least one element selected from Si, Si, B, Ta, Ti, P, and C is formed on a NiP-coated substrate. If a base film containing is used, the coercive force becomes large even in a thin film region.

【0006】[0006]

【実施例】以下に、本発明の実施例について詳細に説明
する。 実施例1〜7,比較例 図1に本実施例による磁気記録媒体の構成を示す。基体
1にはA1合金基板を用い、その上にNiP被覆膜4が
形成されている。NiP被覆膜4上にスパッタ法により
表1記載のSiまたはSi合金下地膜を表1記載の膜厚
で形成した。この後、それぞれの下地膜の上に、同一の
スパッタ条件で膜厚500オングストロ―ムのCoCr
Ta膜を形成した。また、従来例として、下地膜のない
NiP被覆基板上に直接CoCr膜およびCoCrTa
膜を形成した磁気記録媒体を作製し、実施例と比較し
た。表1に、これらの磁気記録媒体の膜面に垂直な保磁
力を示した。
EXAMPLES Examples of the present invention will be described in detail below. Examples 1 to 7 and Comparative Example FIG. 1 shows the structure of the magnetic recording medium according to this example. An A1 alloy substrate is used as the substrate 1, and a NiP coating film 4 is formed on the substrate. On the NiP coating film 4, the Si or Si alloy base film shown in Table 1 was formed by the sputtering method to have the film thickness shown in Table 1. After that, CoCr having a film thickness of 500 angstrom was formed on each underlayer under the same sputtering conditions.
A Ta film was formed. In addition, as a conventional example, a CoCr film and a CoCrTa film are directly formed on a NiP-coated substrate without a base film.
A magnetic recording medium having a film formed was prepared and compared with the examples. Table 1 shows the coercive force perpendicular to the film surface of these magnetic recording media.

【0007】[0007]

【表1】 ────────────────────────────────── 下地膜 膜厚 垂直保磁力 (オングストロ―ム) (Oe) ────────────────────────────────── 実施例1 Si 600 1200 実施例2 Si−1at%B 700 1350 実施例3 Si−1at%Ge 800 1500 実施例4 Si−1at%P 1000 1600 実施例5 Si−2at%Ta 1000 1450 実施例6 Si−3at%Ti 1000 1400 実施例7 Si−2at%C 1000 1550 比較例 NiP被覆基板 下地膜なし 800 ──────────────────────────────────[Table 1] ────────────────────────────────── Underlayer film thickness Perpendicular coercive force (angstrom) (Oe) ────────────────────────────────── Example 1 Si 600 1200 Example 2 Si-1 at% B 700 1350 Example 3 Si-1 at% Ge 800 1500 Example 4 Si-1 at% P 1000 1600 Example 5 Si-2 at% Ta 1000 1450 Example 6 Si-3 at% Ti 1000 1400 Example 7 Si-2 at% C 1000 1550 Comparative example NiP coated substrate No base film 800 ───────────────────────────────────

【0008】[0008]

【発明の効果】以上、説明したように、本発明によれば
CoCr系合金薄膜の膜厚が小さな領域でも保磁力が大
きく、高密度、高出力の磁気記録媒体が得られる。
As described above, according to the present invention, a magnetic recording medium having a high coercive force and a high density and a high output can be obtained even in a region where the thickness of the CoCr alloy thin film is small.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の断面図である。FIG. 1 is a sectional view of an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 基体 2 SiもしくはSi合金膜の下地膜 3 CoCr合金膜 4 NiP被覆膜 1 Substrate 2 Base film of Si or Si alloy film 3 CoCr alloy film 4 NiP coating film

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 NiP被覆基体上に、SiもしくはSi
にB、Ge、Ta、Ti、P、Cのうち1種以上の元素
を含む下地膜が形成され、該下地膜上にCoCrを主成
分とする合金薄膜が形成されていることを特徴とする磁
気記録媒体。
1. Si or Si on a NiP coated substrate
Is formed with a base film containing at least one element of B, Ge, Ta, Ti, P and C, and an alloy thin film containing CoCr as a main component is formed on the base film. Magnetic recording medium.
JP27620091A 1991-09-30 1991-09-30 Magnetic recording medium Pending JPH0594611A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27620091A JPH0594611A (en) 1991-09-30 1991-09-30 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27620091A JPH0594611A (en) 1991-09-30 1991-09-30 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH0594611A true JPH0594611A (en) 1993-04-16

Family

ID=17566084

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27620091A Pending JPH0594611A (en) 1991-09-30 1991-09-30 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH0594611A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60214417A (en) * 1984-04-11 1985-10-26 Hitachi Ltd Vertical magnetic recording medium

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60214417A (en) * 1984-04-11 1985-10-26 Hitachi Ltd Vertical magnetic recording medium

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