JPH0593740A - Probe card mounting mechanism - Google Patents
Probe card mounting mechanismInfo
- Publication number
- JPH0593740A JPH0593740A JP25376791A JP25376791A JPH0593740A JP H0593740 A JPH0593740 A JP H0593740A JP 25376791 A JP25376791 A JP 25376791A JP 25376791 A JP25376791 A JP 25376791A JP H0593740 A JPH0593740 A JP H0593740A
- Authority
- JP
- Japan
- Prior art keywords
- probe card
- mounting plate
- card mounting
- probe
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ウエハのプローブ測定
に用いられるプローバのプローブ・カード取り付け機構
に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe card mounting mechanism for a prober used for measuring a probe on a wafer.
【０００２】[0002]
【従来の技術】従来、プローブ・カードの交換は、プロ
ーブ・カード取り付けプレートを図３に示すように垂直
に近い位に上げ、作業者がプローブ・カードを手で押さ
えながら交換していた。2. Description of the Related Art Conventionally, when replacing a probe card, the probe card mounting plate was raised to a position close to a vertical position as shown in FIG. 3 and an operator held the probe card by hand for replacement.
【０００３】[0003]
【発明が解決しようとする課題】しかし、従来のプロー
ブ・カードの交換は、プローブ・カード取り付けプレー
トを上げて交換するため、プローブ・カードの取り付け
に誤差が生じやすく、再現性が悪く、作業工数も多くな
っていた。However, in the conventional replacement of the probe card, since the probe card mounting plate is lifted and replaced, an error is likely to occur in the mounting of the probe card, the reproducibility is poor, and the number of man-hours is reduced. Was also increasing.
【０００４】また、不安定な状態でプローブ・カードを
交換するため、プローブ・カードを落し破損する恐れが
あるという問題を有していた。Further, since the probe card is exchanged in an unstable state, there is a problem that the probe card may be dropped and damaged.
【０００５】そこで、本発明は従来のこのような問題点
を解決するためプローブ・カード取り付けプレート上面
よりプローブ・カードの交換を可能にするプローブ・カ
ード取り付け機構を提供する事を目的とする。SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a probe card mounting mechanism which enables replacement of the probe card from the upper surface of the probe card mounting plate in order to solve the conventional problems.
【０００６】[0006]
【課題を解決するための手段】上記課題を解決するため
本発明は、プローブ・カード取り付けプレートにプロー
ブ・カード下面から信号を受け取り、プローブ・カード
取り付けプレート上面に信号を伝送する信号伝達機構を
付けたプローブ・カード取り付け機構を設け、プローブ
・カードをプローブ・カード取り付けプレート上面から
交換、取り付けができる事を特徴とする。In order to solve the above-mentioned problems, the present invention provides a probe card mounting plate with a signal transmission mechanism for receiving a signal from the lower surface of the probe card and transmitting the signal to the upper surface of the probe card mounting plate. The probe card attachment mechanism is provided, and the probe card can be replaced and attached from the top of the probe card attachment plate.
【０００７】[0007]
【実施例】以下に本発明について実施例に基ずき、図面
と共に詳細に説明する。The present invention will be described below in detail with reference to the drawings based on the embodiments.
【０００８】図１は、本発明のプローブ・カード取り付
け機構の断面図であり、図２は、本発明のプローブ・カ
ード取り付け機構の上面図である。FIG. 1 is a sectional view of the probe card mounting mechanism of the present invention, and FIG. 2 is a top view of the probe card mounting mechanism of the present invention.
【０００９】また、図３は従来のプローブ・カード交換
方法の説明図であり、図４は、従来のプローブ・カード
取り付け機構の断面図を示す。FIG. 3 is an explanatory view of a conventional probe card replacement method, and FIG. 4 is a sectional view of a conventional probe card mounting mechanism.
【００１０】従来は、図４に示すようにプロー・カード
１は、プローブ・カード取り付けプレート３の下面にプ
ローブ・カード固定部８によって取り付けられていた。Conventionally, as shown in FIG. 4, the probe card 1 is attached to the lower surface of the probe card attachment plate 3 by the probe card fixing portion 8.
【００１１】また、従来の信号伝達機構９は、信号がプ
ローブ針２から得られ、プローブ・カード取り付けプレ
ート３にプローブ・カード固定部８で固定されたプロー
ブ・カード１の上面から５グラムから１０グラムで縮む
伸縮接触ピン４に伝送され、さらに、前記伸縮接触ピン
４からウエハ測定装置の測定端子に伝送されるという機
構になっていた。Further, in the conventional signal transmission mechanism 9, a signal is obtained from the probe needle 2, and 5 grams to 10 grams from the upper surface of the probe card 1 fixed to the probe card mounting plate 3 by the probe card fixing portion 8 are used. The mechanism is such that it is transmitted to the telescopic contact pin 4 that contracts in grams and is further transmitted from the telescopic contact pin 4 to the measurement terminal of the wafer measuring device.
【００１２】本発明は図１に示すように、プローブ・カ
ード取り付けプレート３にプローブ・カード２の下面か
ら伸縮接触ピン４で信号を受け取り、プローブ・カード
取り付けプレート３の上面の伸縮接触ピン４に信号を伝
送する信号伝達機構５を取り付けたものである。According to the present invention, as shown in FIG. 1, the telescopic contact pin 4 on the upper surface of the probe card mounting plate 3 receives the signal from the lower surface of the probe card 2 by the telescopic contact pin 4 on the probe card mounting plate 3. A signal transmission mechanism 5 for transmitting a signal is attached.
【００１３】本発明では、上記プローブ・カード取り付
けプレート３に凸形のプローブ・カード１をプローブ・
カード取り付けプレート３の上面に乗せ、ネジなどの固
定具７で固定することになる。In the present invention, the convex probe card 1 is mounted on the probe card mounting plate 3 as described above.
It is placed on the upper surface of the card mounting plate 3 and fixed by a fixture 7 such as a screw.
【００１４】本発明での信号は、プローブ針２から得ら
れ、凸形のプローブ・カード１の信号伝達部１０から信
号伝達機構５の伸縮接触ピン４で受け取り、プローブ・
カード取り付けプレート３上面の伸縮接触ピン４からウ
エハ測定装置の測定端子に伝送されるという流れにな
る。The signal in the present invention is obtained from the probe needle 2, received from the signal transmitting portion 10 of the convex probe card 1 by the telescopic contact pin 4 of the signal transmitting mechanism 5,
The flow is transmitted from the telescopic contact pins 4 on the upper surface of the card mounting plate 3 to the measurement terminals of the wafer measuring device.
【００１５】上記本発明のプローブ・カード取り付け機
構でのプローブ・カード１の交換、取り付けの手順を以
下に述べる。The procedure for replacing and mounting the probe card 1 in the probe card mounting mechanism of the present invention will be described below.
【００１６】まず初めに、図２に示したプローブ・カー
ド１を固定してあるネジなどの固定具７を外し、プロー
ブ・カード取り付けプレート３からプローブ・カード１
を取り出す。First, a fixing tool 7 such as a screw for fixing the probe card 1 shown in FIG. 2 is removed, and the probe card mounting plate 3 is used to remove the probe card 1 from the probe card mounting plate 3.
Take out.
【００１７】次に、新しいプローブ・カード１をプロー
ブ・カード取り付けプレート３の上面に置き、ネジなど
の固定具７でプローブ・カード１を固定すれば作業完了
である。Next, a new probe card 1 is placed on the upper surface of the probe card mounting plate 3 and the probe card 1 is fixed with a fixture 7 such as a screw, and the work is completed.
【００１８】[0018]
【発明の効果】以上述べたように本発明によれば、プロ
ーブ・カードをプローブ・カード取り付けプレート上面
で交換可能にした事により、プローブ・カードの交換に
よる再現性が向上し、作業工数も減らす事ができる。As described above, according to the present invention, since the probe card can be exchanged on the upper surface of the probe card mounting plate, the reproducibility by exchanging the probe card is improved and the number of working steps is reduced. I can do things.
【図１】本発明のプローブ・カード取り付け機構の断面
図。FIG. 1 is a cross-sectional view of a probe card mounting mechanism of the present invention.
【図２】本発明のプローブ・カード取り付け機構の上面
図。FIG. 2 is a top view of the probe card attachment mechanism of the present invention.
【図３】従来のプローブ・カード交換方法の説明図。FIG. 3 is an explanatory diagram of a conventional probe card replacement method.
【図４】従来のプローブ・カード取り付け機構の断面
図。FIG. 4 is a cross-sectional view of a conventional probe card attachment mechanism.
１・・・プローブ・カード ２・・・プローブ針 ３・・・プローブ・カード取り付けプレート ４・・・伸縮接触ピン ５・・・信号伝達機構 ６・・・プローバ ７・・・固定具 ８・・・プローブ・カード固定部 ９・・・従来の信号伝達機構 １０・・・信号伝達部 1 ... probe card 2 ... probe needle 3 ... probe card mounting plate 4 ... expanding contact pin 5 ... signal transmission mechanism 6 ... prober 7 ... fixing tool 8 ...・ Probe / card fixing part 9 ・ ・ ・ Conventional signal transmission mechanism 10 ・ ・ ・ Signal transmission part
Claims (1)
ローブ・カード下面から信号を受け取り、プローブ・カ
ード取り付けプレート上面に信号を伝送する信号伝達機
構を設ける事により、プローブ・カードをプローブ・カ
ード取り付けプレート上面から取り付け可能な事を特徴
とするプローブ・カード取り付け機構。1. A probe card is mounted on the probe card mounting plate by providing a signal transmission mechanism for receiving a signal from the lower surface of the probe card on the probe card mounting plate and transmitting the signal on the upper surface of the probe card mounting plate. A probe card attachment mechanism that can be attached.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25376791A JPH0593740A (en) | 1991-10-01 | 1991-10-01 | Probe card mounting mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25376791A JPH0593740A (en) | 1991-10-01 | 1991-10-01 | Probe card mounting mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0593740A true JPH0593740A (en) | 1993-04-16 |
Family
ID=17255861
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25376791A Pending JPH0593740A (en) | 1991-10-01 | 1991-10-01 | Probe card mounting mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0593740A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009289303A (en) * | 2008-05-27 | 2009-12-10 | Pioneer Electronic Corp | Recorded medium reproducing device |
| CN105372459A (en) * | 2014-08-14 | 2016-03-02 | 汉民科技股份有限公司 | Probe card structure and assembling and replacing method thereof |
| CN107315097A (en) * | 2016-04-27 | 2017-11-03 | 旺矽科技股份有限公司 | Probe card, assembling method thereof and probe module replacing method |
-
1991
- 1991-10-01 JP JP25376791A patent/JPH0593740A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009289303A (en) * | 2008-05-27 | 2009-12-10 | Pioneer Electronic Corp | Recorded medium reproducing device |
| CN105372459A (en) * | 2014-08-14 | 2016-03-02 | 汉民科技股份有限公司 | Probe card structure and assembling and replacing method thereof |
| JP2016042088A (en) * | 2014-08-14 | 2016-03-31 | 漢民科技股▲ふん▼有限公司 | Probe card structure and methods for assembling and replacing the same |
| CN107315097A (en) * | 2016-04-27 | 2017-11-03 | 旺矽科技股份有限公司 | Probe card, assembling method thereof and probe module replacing method |
| CN107315097B (en) * | 2016-04-27 | 2020-06-02 | 旺矽科技股份有限公司 | Probe card, assembling method thereof and probe module replacing method |
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