JPH0587995A - Production of beryllium window for x-ray source - Google Patents
Production of beryllium window for x-ray sourceInfo
- Publication number
- JPH0587995A JPH0587995A JP27462291A JP27462291A JPH0587995A JP H0587995 A JPH0587995 A JP H0587995A JP 27462291 A JP27462291 A JP 27462291A JP 27462291 A JP27462291 A JP 27462291A JP H0587995 A JPH0587995 A JP H0587995A
- Authority
- JP
- Japan
- Prior art keywords
- beryllium
- outer frame
- metal
- ray source
- thin plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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- Measurement Of Radiation (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は各種のＸ線発生装置や放
射光発生装置に用いられるＸ線源用ベリリウム窓の製造
方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a beryllium window for an X-ray source used in various X-ray generators and radiant light generators.
【０００２】[0002]
【従来の技術】Ｘ線源用ベリリウム窓の製造に当たって
は、ベリリウムの箔又は薄板を外枠を構成するステンレ
ス鋼や銅などの金属に気密に接合することが必要であ
る。従来このための接合法としては、有機系接着剤によ
る接着、ろう付け、拡散接合等が知られている。しかし
近年Ｘ線の大出力化にともないベリリウム窓にて吸収さ
れるＸ線の発熱が大きくなってきたので、有機系接着剤
では気密な接合を維持できなくなるという問題が発生し
てきた。2. Description of the Related Art In manufacturing a beryllium window for an X-ray source, it is necessary to hermetically bond a beryllium foil or a thin plate to a metal such as stainless steel or copper constituting an outer frame. Conventionally, as a bonding method for this purpose, adhesion by an organic adhesive, brazing, diffusion bonding and the like are known. However, in recent years, as the output of X-rays has increased, the heat generated by the X-rays absorbed by the beryllium window has increased, and the problem has arisen that the organic adhesive cannot maintain airtight bonding.
【０００３】そこでろう付け法や拡散接合法が注目され
ているが、一般に行われている被接合体どうしを突き合
わせただけのろう付け法では、ベリリウムの表面にろう
が流れにくいので気密な接合が行いにくく、また強度も
充分ではないという問題があった。更にろう付けのため
の加熱によりベリリウムの箔又は薄板が変形したり再結
晶し、強度が低下するという問題もあった。Therefore, the brazing method and the diffusion bonding method have been attracting attention. However, in the commonly used brazing method in which the objects to be bonded are butted to each other, the brazing does not easily flow on the surface of beryllium, so that an airtight bonding is achieved. There is a problem that it is difficult to perform and the strength is not sufficient. Further, there is a problem that the beryllium foil or the thin plate is deformed or recrystallized by heating for brazing, and the strength is reduced.
【０００４】一方、拡散接合法は被接合体どうしを加圧
下において融点以下に加熱し、接合させる方法である。
しかしこの場合には被接合体のひとつひとつに加圧用治
具をセットしなければならぬうえ、外部から真空室内に
加圧用治具を導入しなければならないので装置が複雑化
する欠点があった。しかも高真空を保ちにくいのでベリ
リウムが酸化し易く、また広い面積を拡散接合した場合
には全ての接合面をリークタイトとすることが困難で、
信頼性に欠けるという問題もあった。On the other hand, the diffusion bonding method is a method in which the objects to be bonded are heated to below their melting points under pressure to bond them.
In this case, however, the pressing jig has to be set on each of the objects to be joined, and the pressing jig has to be introduced into the vacuum chamber from the outside, which has a drawback that the apparatus becomes complicated. Moreover, since it is difficult to maintain a high vacuum, beryllium easily oxidizes, and when diffusion bonding a large area, it is difficult to make all bonded surfaces leak tight.
There was also the problem of lack of reliability.
【０００５】[0005]
【発明が解決しようとする課題】本発明は上記した従来
の問題点を解決して、複雑な設備や治具を使用すること
なく、またベリリウムの箔又は薄板に変形、再結晶、酸
化等を生じさせることなくベリリウムを外枠に対して気
密で強固に接合させることができるＸ線源用ベリリウム
窓の製造方法を提供するために完成されたものである。SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems of the prior art and eliminates the use of complicated equipment or jigs and deformation, recrystallization, oxidation, etc. of beryllium foil or thin plate. The present invention has been completed in order to provide a method for manufacturing a beryllium window for an X-ray source, which can tightly and firmly bond beryllium to an outer frame without causing it.
【０００６】[0006]
【課題を解決するための手段】上記の課題は、金属製の
外枠の内側にインサート材を介在させてベリリウムの箔
又は薄板を入れ、その内側に外枠よりも熱膨張率が７×
10-7/ ℃以上大きい金属からなる押さえ部品をセット
し、全体を加熱して熱応力によりベリリウムを拡散接合
することを特徴とするＸ線源用ベリリウム窓の製造方法
により解決することができる。また上記の課題は、金属
製の外枠の内側にろう材を介在させてベリリウムの箔又
は薄板を入れ、その内側に外枠よりも熱膨張率が７×10
-7/ ℃以上大きい金属からなる押さえ部品を固定し、全
体を加熱してベリリウムをろう付け接合することを特徴
とするＸ線源用ベリリウム窓の製造方法により解決でき
る。[Means for Solving the Problems] The above-mentioned problems are solved by inserting a beryllium foil or a thin plate inside an outer frame made of metal with an insert material interposed therebetween, and having a coefficient of thermal expansion of 7 × more than that of the outer frame inside.
This can be solved by a method for manufacturing a beryllium window for an X-ray source, characterized in that a pressing part made of a metal having a size of 10 −7 / ° C. or more is set and the whole is heated to diffusely bond beryllium by thermal stress. In addition, the above-mentioned problem is that a beryllium foil or thin plate is put inside a metal outer frame with a brazing filler metal, and the coefficient of thermal expansion is 7 × 10 inside the outer frame.
This can be solved by a method for manufacturing a beryllium window for an X-ray source, which is characterized in that a pressing member made of a metal larger than −7 / ° C. or more is fixed and the whole is heated to braze and join the beryllium.
【０００７】[0007]
【実施例】以下にこれらの発明を図面を参照しつつ更に
詳細に説明する。図１は第１の発明の実施例を示すもの
で、１はステンレス鋼や銅などの金属からなる外枠、２
は必要に応じて使用されるインサート材又はろう材、３
はベリリウムの箔又は薄板、４は押さえ部品、５はバッ
クアップ部品である。第１の発明においては、この押さ
え部品４として外枠１やバックアップ部品５よりも熱膨
張率が７×10-7/ ℃以上大きい金属を使用する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in more detail below with reference to the drawings. FIG. 1 shows an embodiment of the first invention, in which 1 is an outer frame made of metal such as stainless steel or copper.
Is an insert material or brazing material that is used as necessary, 3
Is a beryllium foil or thin plate, 4 is a holding part, and 5 is a backup part. In the first invention, a metal whose coefficient of thermal expansion is greater than that of the outer frame 1 and the backup component 5 by 7 × 10 −7 / ° C. or more is used as the pressing component 4.
【０００８】外枠１やバックアップ部品５の材質として
例えばステンレス（SUS 304 、熱膨張率17.3×10-6/
℃) や無酸素銅 (C 1020、熱膨張率17.3×10-6/℃) を
使用した場合には、押さえ部品４の材質として7/3 黄銅
(熱膨張率19.9×10-6/ ℃) 、65/35 黄銅 (熱膨張率2
0.3×10-6/ ℃) 、6/4 黄銅 (熱膨張率20.8×10-6/
℃)、快削黄銅 (熱膨張率20.6×10-6/ ℃) 、ネーパル
黄銅 (熱膨張率21.2×10-6/℃) 等を使用することがで
きる。As a material for the outer frame 1 and the backup component 5, for example, stainless steel (SUS 304, coefficient of thermal expansion 17.3 × 10 -6 /
℃) or oxygen-free copper (C 1020, coefficient of thermal expansion 17.3 × 10 -6 / ℃) is used, the material of the holding part 4 is 7/3 brass.
(Coefficient of thermal expansion 19.9 × 10 -6 / ℃), 65/35 brass (coefficient of thermal expansion 2
0.3 x 10 -6 / ° C), 6/4 brass (coefficient of thermal expansion 20.8 x 10 -6 /
℃), free-cutting brass (coefficient of thermal expansion 20.6 × 10 -6 / ℃), Napal brass (coefficient of thermal expansion 21.2 × 10 -6 / ℃) and the like can be used.
【０００９】なお、外枠１やバックアップ部品５の材質
として例えばインバー、スーパーインバー、ステンレス
インバー、コバールのような低熱膨張率の金属を使用す
れば押さえ部品４との熱膨張率の差を更に大きくできる
のでより好ましい結果を得ることができる。いずれの発
明においても熱膨張率の差が７×10-7/ ℃未満であると
充分な熱応力を発生させることができないので好ましく
ない。If a metal having a low coefficient of thermal expansion such as Invar, Super Invar, stainless steel Invar, Kovar, etc. is used as the material of the outer frame 1 and the backup component 5, the difference in the coefficient of thermal expansion from the holding component 4 is further increased. Therefore, more preferable results can be obtained. In any of the inventions, if the difference in coefficient of thermal expansion is less than 7 × 10 −7 / ° C., sufficient thermal stress cannot be generated, which is not preferable.
【００１０】このような材質からなる押さえ部品４を図
１のように外枠１に嵌め、更にネジを切ってあるバック
アップ部品５を締めつけて固定したうえ、真空中または
不活性ガス中で加熱する。図３はそのための高周波誘導
加熱炉を示しているが、第１の発明では加熱手段は特に
限定されるものではない。なお図３において６は耐熱容
器、７は高周波誘導コイル、８は真空排気口、９はアル
ゴン、ヘリウム、窒素等の不活性ガス導入口、10は蓋で
ある。A pressing component 4 made of such a material is fitted to the outer frame 1 as shown in FIG. 1, and a screwed backup component 5 is tightened and fixed, and then heated in vacuum or in an inert gas. .. FIG. 3 shows a high frequency induction heating furnace therefor, but the heating means is not particularly limited in the first invention. In FIG. 3, 6 is a heat-resistant container, 7 is a high-frequency induction coil, 8 is a vacuum exhaust port, 9 is an inert gas inlet such as argon, helium, or nitrogen, and 10 is a lid.
【００１１】かくして加熱を行うと、押さえ部品４が他
の部品よりも大きく膨張するのでベリリウムの箔又は薄
板３の周囲は熱応力により強く外枠１に向かって押しつ
けられ、これによる高い圧力と温度とによってベリリウ
ムの箔又は薄板３の表面において他の部品との間に原子
の拡散が生じ、ベリリウムが気密に接合されたＸ線源用
ベリリウム窓を得ることができる。When the heating is performed in this way, the pressing component 4 expands more than other components, so that the periphery of the beryllium foil or the thin plate 3 is strongly pressed against the outer frame 1 by thermal stress, and the high pressure and temperature caused thereby. By the diffusion of atoms with other components on the surface of the beryllium foil or the thin plate 3 by and, a beryllium window for an X-ray source in which beryllium is hermetically bonded can be obtained.
【００１２】なお、ベリリウムの箔又は薄板３が薄くか
つ接合面積が大きく、しかも押さえ部品４と他の部品と
の熱膨張差が大きい場合には、冷却過程においてベリリ
ウムの箔又は薄板３が変形したり破壊されるおそれがあ
る。このため、図２に示すように例えばニッケルのよう
な熱膨張率がベリリウムに近い金属を中間材11としてイ
ンサート材又はろう材２の両側に配置しておけば、上記
の欠点の発生を防止することができる。When the beryllium foil or thin plate 3 is thin and has a large bonding area and the difference in thermal expansion between the pressing component 4 and other components is large, the beryllium foil or thin plate 3 is deformed during the cooling process. Or it may be destroyed. Therefore, as shown in FIG. 2, if a metal having a coefficient of thermal expansion close to beryllium, such as nickel, is placed on both sides of the insert material or the brazing material 2 as the intermediate material 11, the occurrence of the above defects can be prevented. be able to.
【００１３】第１および第２の発明では、図１又は図２
のようにセットされたものを図３のような高周波誘導加
熱炉において加熱する。このためにはまず耐熱容器６の
内部に被接合物を入れ、蓋10を閉じて高真空に排気し、
不活性ガスを導入する。この排気、不活性ガスの導入の
操作を数回繰り返して内部の酸素を充分に除去したう
え、高周波誘導コイル７に通電して真空中又は不活性ガ
ス中で被接合物を加熱する。In the first and second inventions, FIG. 1 or FIG.
The one set as above is heated in a high frequency induction heating furnace as shown in FIG. To do this, first put the objects to be joined in the heat resistant container 6, close the lid 10 and evacuate to high vacuum,
Inert gas is introduced. This operation of exhausting and introducing an inert gas is repeated several times to sufficiently remove oxygen in the interior, and then the high frequency induction coil 7 is energized to heat the object to be bonded in vacuum or in an inert gas.
【００１４】このように高周波誘導加熱を行えば、薄い
ベリリウムよりもバルク形状をした外枠１、押さえ部品
４、バックアップ部品５等が早く加熱されるのでベリリ
ウムの箔又は薄板３が高温になる前にろう材２が溶けて
均一なろう付けが行われる。従ってベリリウムに変形、
酸化、再結晶等を生じさせることなくろう付けを行わせ
ることが可能である。なおベリリウムに水冷した銅を接
触させることにより、ベリリウムの加熱をより確実に防
止することができる。なお以上に説明した第１の発明と
第２の発明は、組み合わせて実施することも可能である
ことはいうまでもない。When high-frequency induction heating is performed in this manner, the outer frame 1, the pressing component 4, the backup component 5, etc., which have a bulk shape, are heated faster than the thin beryllium, so that the beryllium foil or the thin plate 3 is heated to a high temperature. The brazing material 2 is melted and uniform brazing is performed. So transformed into beryllium,
It is possible to perform brazing without causing oxidation, recrystallization and the like. By contacting beryllium with water-cooled copper, beryllium can be more reliably prevented from being heated. It goes without saying that the first invention and the second invention described above can be implemented in combination.
【００１５】次に表１に示す種々の材質の組合せでベリ
リウム窓を製造した結果を表２に示す。窓の径は50mmで
あり、ベリリウム板の厚さは0.3mm 、中間材の厚さは0.
05mmである。１〜６は第１の発明の実施例であり、７〜
９は第２の発明の実施例である。また10は比較例であ
る。Next, Table 2 shows the results of manufacturing a beryllium window using various combinations of materials shown in Table 1. The diameter of the window is 50 mm, the thickness of the beryllium plate is 0.3 mm, and the thickness of the intermediate material is 0.
It is 05 mm. 1 to 6 are embodiments of the first invention, and 7 to
9 is an embodiment of the second invention. Further, 10 is a comparative example.
【００１６】[0016]
【表１】 [Table 1]
【００１７】[0017]
【表２】 [Table 2]
【００１８】[0018]
【発明の効果】以上に説明したように、本発明のＸ線源
用ベリリウム窓の製造方法によれば、接合部加圧用の治
具が不要であるので安価な設備で生産性良くベリリウム
窓の製造ができ、接合面にかかる圧力を一定とすること
ができるので均一かつ強固な接合ができる。またろう材
を使用することにより、更に強固な接合が可能である。
また本発明によればベリリウム箔やベリリウム薄板の熱
による変形、再結晶、酸化等を防止することができるの
で、強度やＸ線透過性に優れたＸ線源用ベリリウム窓を
製造することができる。よって本発明は従来の問題点を
解消したＸ線源用ベリリウム窓の製造方法として、産業
の発展に寄与するところは極めて大きいものがある。As described above, according to the method for manufacturing a beryllium window for an X-ray source of the present invention, a jig for pressurizing the joint is not required, so that the beryllium window can be manufactured with low cost and with good productivity. Since it can be manufactured and the pressure applied to the joint surface can be made constant, uniform and strong joint can be performed. Further, by using a brazing material, it is possible to make a stronger joint.
Further, according to the present invention, it is possible to prevent deformation, recrystallization, oxidation, etc. of a beryllium foil or a beryllium thin plate due to heat, so that a beryllium window for an X-ray source having excellent strength and X-ray transparency can be manufactured. .. Therefore, the present invention, as a method of manufacturing a beryllium window for an X-ray source that solves the conventional problems, has a great contribution to the industrial development.
【図１】本発明の実施例を示す断面図である。FIG. 1 is a sectional view showing an embodiment of the present invention.
【図２】本発明の他の実施例を示す断面図である。FIG. 2 is a sectional view showing another embodiment of the present invention.
【図３】本発明に使用される高周波誘導加熱炉の断面図
である。FIG. 3 is a sectional view of a high frequency induction heating furnace used in the present invention.
１ 外枠 ２ インサート材又はろう材 ３ ベリリウム箔または薄板 ４ 押さえ部品 ５ バックアップ部品 11 中間材 1 Outer frame 2 Insert material or brazing material 3 Beryllium foil or thin plate 4 Holding parts 5 Backup parts 11 Intermediate materials
Claims (2)
在させてベリリウムの箔又は薄板を入れ、その内側に外
枠よりも熱膨張率が７×10-7/ ℃以上大きい金属からな
る押さえ部品をセットし、全体を加熱して熱応力により
ベリリウムを拡散接合することを特徴とするＸ線源用ベ
リリウム窓の製造方法。1. A beryllium foil or a thin plate is put inside an outer frame made of metal with an insert material interposed, and the inside is made of a metal having a coefficient of thermal expansion larger than that of the outer frame by 7 × 10 −7 / ° C. or more. A method for manufacturing a beryllium window for an X-ray source, characterized in that a pressing part is set, and the whole is heated to diffusion-bond beryllium by thermal stress.
てベリリウムの箔又は薄板を入れ、その内側に外枠より
も熱膨張率が７×10-7/ ℃以上大きい金属からなる押さ
え部品を固定し、全体を加熱してベリリウムをろう付け
接合することを特徴とするＸ線源用ベリリウム窓の製造
方法。2. A beryllium foil or a thin plate is put inside a metal outer frame with a brazing filler metal, and the inside thereof is made of a metal having a coefficient of thermal expansion larger than that of the outer frame by 7 × 10 −7 / ° C. or more. A method for manufacturing a beryllium window for an X-ray source, which comprises fixing a pressing member and heating the whole to braze and bond beryllium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27462291A JP2695076B2 (en) | 1991-09-26 | 1991-09-26 | Method for manufacturing beryllium window for X-ray source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27462291A JP2695076B2 (en) | 1991-09-26 | 1991-09-26 | Method for manufacturing beryllium window for X-ray source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0587995A true JPH0587995A (en) | 1993-04-09 |
| JP2695076B2 JP2695076B2 (en) | 1997-12-24 |
Family
ID=17544290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27462291A Expired - Lifetime JP2695076B2 (en) | 1991-09-26 | 1991-09-26 | Method for manufacturing beryllium window for X-ray source |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2695076B2 (en) |
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|---|---|---|---|---|
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| US6357517B1 (en) | 1994-07-04 | 2002-03-19 | Denso Corporation | Cooling apparatus boiling and condensing refrigerant |
| US6527045B1 (en) | 1996-03-14 | 2003-03-04 | Denso Corporation | Cooling apparatus boiling and condensing refrigerant |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4601939B2 (en) * | 2003-10-31 | 2010-12-22 | 株式会社東芝 | Airtight connection structure of electron tube |
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1991
- 1991-09-26 JP JP27462291A patent/JP2695076B2/en not_active Expired - Lifetime
Cited By (7)
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|---|---|---|---|---|
| US6357517B1 (en) | 1994-07-04 | 2002-03-19 | Denso Corporation | Cooling apparatus boiling and condensing refrigerant |
| US6119767A (en) * | 1996-01-29 | 2000-09-19 | Denso Corporation | Cooling apparatus using boiling and condensing refrigerant |
| US6575230B1 (en) | 1996-01-29 | 2003-06-10 | Denso Corporation | Cooling apparatus using boiling and condensing refrigerant |
| US5832989A (en) * | 1996-03-14 | 1998-11-10 | Denso Corporation | Cooling apparatus using boiling and condensing refrigerant |
| US6076596A (en) * | 1996-03-14 | 2000-06-20 | Denso Corporation | Cooling apparatus for high-temperature medium by boiling and condensing refrigerant |
| US6527045B1 (en) | 1996-03-14 | 2003-03-04 | Denso Corporation | Cooling apparatus boiling and condensing refrigerant |
| US7004239B2 (en) | 1996-03-14 | 2006-02-28 | Denso Corporation | Cooling apparatus boiling and condensing refrigerant |
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| Publication number | Publication date |
|---|---|
| JP2695076B2 (en) | 1997-12-24 |
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