JPH0587935B2 - - Google Patents
Info
- Publication number
- JPH0587935B2 JPH0587935B2 JP62025832A JP2583287A JPH0587935B2 JP H0587935 B2 JPH0587935 B2 JP H0587935B2 JP 62025832 A JP62025832 A JP 62025832A JP 2583287 A JP2583287 A JP 2583287A JP H0587935 B2 JPH0587935 B2 JP H0587935B2
- Authority
- JP
- Japan
- Prior art keywords
- ion
- ions
- mesh
- potential
- electron multiplier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 150000002500 ions Chemical class 0.000 claims description 57
- 238000001514 detection method Methods 0.000 claims description 2
- 239000012535 impurity Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000004949 mass spectrometry Methods 0.000 description 2
- 238000011088 calibration curve Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- -1 oxygen ion Chemical class 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62025832A JPS63193452A (ja) | 1987-02-05 | 1987-02-05 | 二次イオン質量分析計 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62025832A JPS63193452A (ja) | 1987-02-05 | 1987-02-05 | 二次イオン質量分析計 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63193452A JPS63193452A (ja) | 1988-08-10 |
| JPH0587935B2 true JPH0587935B2 (enExample) | 1993-12-20 |
Family
ID=12176832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62025832A Granted JPS63193452A (ja) | 1987-02-05 | 1987-02-05 | 二次イオン質量分析計 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63193452A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9920711D0 (en) * | 1999-09-03 | 1999-11-03 | Hd Technologies Limited | High dynamic range mass spectrometer |
-
1987
- 1987-02-05 JP JP62025832A patent/JPS63193452A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63193452A (ja) | 1988-08-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Fite et al. | Collisions of electrons with hydrogen atoms. I. Ionization | |
| Medhe | Mass spectrometry: detectors review | |
| Richter et al. | Linearity tests for secondary electron multipliers used in isotope ratio mass spectrometry | |
| Cottrell et al. | Characteristics of a multichannel electrooptical detection system and its application to the analysis of large molecules by fast atom bombardment mass spectrometry | |
| Barnes IV et al. | Recent advances in detector-array technology for mass spectrometry | |
| JPS5917500B2 (ja) | 中性粒子検出装置 | |
| US2769911A (en) | Mass spectrometer for analysing substances or indicating a small amount of a determined substance | |
| Vermeulen et al. | A versatile detection system for a broad range magnetic spectrograph | |
| Gruntman et al. | H atom detection and energy analysis by use of thin foils and TOF technique | |
| EP0193311A2 (en) | Ion detector | |
| White et al. | Positive Ion Counting for Mass Spectrometer Beam Currents of 10^− 14 to 10^− 19 Ampere | |
| US3244876A (en) | Mass spectrometric apparatus having a detector comprising two hall effect devices connected in tandem | |
| US5541409A (en) | High resolution retarding potential analyzer | |
| JPH0587935B2 (enExample) | ||
| Orunesajo et al. | A multi-mass and multi-hit two-camera 3D ion momentum imaging system | |
| Hvelplund et al. | Equilibrium charge distributions of light ions in helium, measured with a position-sensitive open electron multiplier | |
| Stern et al. | Ion chambers for fluorescence and laboratory EXAFS detection | |
| CN210155340U (zh) | 基于能量粒子穿透特性测量离子束粒子成分的能量分析器 | |
| US6593567B1 (en) | Ion mobility spectrometer having extended linear dynamic range | |
| Knott et al. | A large 2D PSD for thermal neutron detection | |
| US4179608A (en) | Right/left assignment in drift chambers and proportional multiwire chambers (PWC's) using induced signals | |
| CN212871466U (zh) | 一种无损检测极紫外激光脉冲能量及光束空间位置的装置 | |
| JPH04122882A (ja) | 荷電粒子測定装置および光強度波形測定装置 | |
| JP2000082439A (ja) | 飛行時間型質量分析計 | |
| Berthelier et al. | High resolution focal plane detector for a space-borne magnetic mass spectrometer |