JPH0586676B2 - - Google Patents
Info
- Publication number
- JPH0586676B2 JPH0586676B2 JP59013024A JP1302484A JPH0586676B2 JP H0586676 B2 JPH0586676 B2 JP H0586676B2 JP 59013024 A JP59013024 A JP 59013024A JP 1302484 A JP1302484 A JP 1302484A JP H0586676 B2 JPH0586676 B2 JP H0586676B2
- Authority
- JP
- Japan
- Prior art keywords
- strain
- sensitive resistor
- electrodes
- insulating layer
- resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
- H10D48/50—Devices controlled by mechanical forces, e.g. pressure
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59013024A JPS60157264A (ja) | 1984-01-26 | 1984-01-26 | 歪センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59013024A JPS60157264A (ja) | 1984-01-26 | 1984-01-26 | 歪センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60157264A JPS60157264A (ja) | 1985-08-17 |
| JPH0586676B2 true JPH0586676B2 (enrdf_load_stackoverflow) | 1993-12-13 |
Family
ID=11821567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59013024A Granted JPS60157264A (ja) | 1984-01-26 | 1984-01-26 | 歪センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60157264A (enrdf_load_stackoverflow) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56164582A (en) * | 1980-05-23 | 1981-12-17 | Hitachi Ltd | Semiconductor piezo-electric element and manufacture thereof |
| SE8107825L (sv) * | 1981-06-01 | 1982-12-02 | Koppers Co Inc | Eldfordrojande material |
| JPS5930034A (ja) * | 1982-08-13 | 1984-02-17 | Tokyo Keiki Co Ltd | 圧力計受圧器 |
| JPS6037177A (ja) * | 1983-08-09 | 1985-02-26 | Nec Corp | 半導体圧力センサ |
-
1984
- 1984-01-26 JP JP59013024A patent/JPS60157264A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60157264A (ja) | 1985-08-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4311980A (en) | Device for pressure measurement using a resistor strain gauge | |
| US10775248B2 (en) | MEMS strain gauge sensor and manufacturing method | |
| US4500864A (en) | Pressure sensor | |
| US8230746B2 (en) | Combined type pressure gauge, and manufacturing method of combined type pressure gauge | |
| KR101232613B1 (ko) | 금속 다이아프램을 구비한 후막형 압력측정센서 및 상기 압력측정센서의 제조방법 | |
| US10378989B2 (en) | Method for producing a sensor element by means of laser structuring | |
| EP0316343A1 (en) | PRESSURE SENSORS ISOLATED FROM THE PRESSURE MEDIUM. | |
| KR100959005B1 (ko) | 금속 압력다이어프램이 구비된 압력측정센서 및 상기압력측정센서의 제조방법 | |
| CN112362203A (zh) | 适应多种封装方式的高温压力传感器芯片及制造方法 | |
| CN213812675U (zh) | 实现无引线封装的高温压力传感器芯片 | |
| US20020020689A1 (en) | Accelerometer without proof mass | |
| JP2008102069A (ja) | 半導体感歪センサ | |
| JPS6051051B2 (ja) | 微小圧力測定変換器 | |
| US4309687A (en) | Resistance strain gauge | |
| KR101193501B1 (ko) | 이에스피용 자동차 압력센서 제조방법 및 그 방법에 의해 제조된 압력센서 | |
| KR101927046B1 (ko) | 압력센서 및 그 제조방법 | |
| JPH0586676B2 (enrdf_load_stackoverflow) | ||
| KR101267469B1 (ko) | 압력 센서 | |
| JPS5856423B2 (ja) | 力変換器 | |
| KR101837999B1 (ko) | 압력센서 및 그 제조방법 | |
| US3621435A (en) | Transducer beam with back-to-back related deposited film type strain gages | |
| KR100330370B1 (ko) | 세라믹 다이어프램형 압력센서의 제조방법 | |
| JPS60186727A (ja) | 圧力センサ | |
| JPS6321531A (ja) | 力検出装置 | |
| JPH073379B2 (ja) | 接触覚センサ |