JPH0583864B2 - - Google Patents
Info
- Publication number
- JPH0583864B2 JPH0583864B2 JP12001389A JP12001389A JPH0583864B2 JP H0583864 B2 JPH0583864 B2 JP H0583864B2 JP 12001389 A JP12001389 A JP 12001389A JP 12001389 A JP12001389 A JP 12001389A JP H0583864 B2 JPH0583864 B2 JP H0583864B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- amount
- gask
- standard
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000035945 sensitivity Effects 0.000 claims description 22
- 238000004458 analytical method Methods 0.000 claims description 17
- 101100227721 Rattus norvegicus Frk gene Proteins 0.000 claims description 16
- 239000000203 mixture Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 100
- 229910002091 carbon monoxide Inorganic materials 0.000 description 12
- 229910052786 argon Inorganic materials 0.000 description 10
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000012634 fragment Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000004868 gas analysis Methods 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
Landscapes
- Treatment Of Steel In Its Molten State (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、分析精度を上げるための、質量分析
計の標準ガス成分の構成方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for configuring standard gas components of a mass spectrometer in order to improve analysis accuracy.
質量分析計でサンプルガスの成分を分析するに
は予めパターン係数と感度係数を求めておく必要
があり、これには標準ガスを用いる。本発明はこ
の標準ガスの組成に係るものである。 In order to analyze the components of a sample gas with a mass spectrometer, it is necessary to determine the pattern coefficient and sensitivity coefficient in advance, and a standard gas is used for this purpose. The present invention relates to the composition of this standard gas.
質量分析計は周知のようにサンプルガスをイオ
ン化し、加速し、電界／磁界で偏向し、コレクタ
に入つたものをイオン化電流という形で検出す
る。ある値の質量数ｍ／ｅのイオンがコレクタに
入るように調整すれば、他の質量数のイオンはコ
レクタに入らず、これにより質量数ｍ／ｅの分
析、ひいてはガス種の分析ができる。
As is well known, a mass spectrometer ionizes a sample gas, accelerates it, deflects it with an electric/magnetic field, and detects what enters the collector in the form of an ionizing current. If the adjustment is made so that ions with a certain mass number m/e enter the collector, ions with other mass numbers will not enter the collector, thereby making it possible to analyze the mass number m/e and, by extension, the gas species.
しかし質量分析形では、異種のガスでもｍ／ｅ
が一致するものは同じピーク（イオン化電流）に
含まれる。また、同じガスでも複数のピーク（メ
インピーク、フラグメントピーク）を作り、各ガ
スのそれが同じピークに含まれることがある。等
の問題がある。第３図はCO2、CO、N2混合ガス
の分析例であるが、この図に示されるようにCO2
はｍ／ｅ＝44の所にメインピークを作る他、ｍ／
ｅ＝28及び12の所にもフラグメントピークを作
る。同様にN2はｍ／ｅ＝28にメインピークを、
またｍ／ｅ＝14にフラグメントピークを作り、
COはｍ／ｅ＝28にメインピークを、またｍ／ｅ
＝14と12にフラグメントピークを作る。ｍ／ｅ＝
28ではCOとN2とCO2のピークがあるから、CO、
N2量を求めるにはこれらの分離が必要である。 However, with mass spectrometry, even different gases have m/e
Those that match are included in the same peak (ionization current). Furthermore, the same gas may produce multiple peaks (main peak, fragment peak), and the peaks of each gas may be included in the same peak. There are other problems. Figure 3 is an example of analysis of CO 2 , CO, and N 2 mixed gas ;
produces a main peak at m/e = 44, and also produces a main peak at m/e = 44.
Fragment peaks are also created at e=28 and 12. Similarly, N 2 has a main peak at m/e = 28,
Also, create a fragment peak at m/e = 14,
CO has a main peak at m/e = 28, and m/e
= Create fragment peaks at 14 and 12. m/e=
At 28, there are peaks for CO, N 2 and CO 2 , so CO,
These separations are necessary to determine the amount of N2 .
この分離は、パターン係数を用いて行なうこと
ができる。即ち、メインピークとフラグメントピ
ークの間には一定の関係（比；パターン係数）が
あるので、この関係を用いて、例えばｍ／ｅ＝28
のCO2成分のｍ／ｅ＝44のCO2成分から算出し…
…という要領でｍ／ｅ＝28のCO2、N2、CO各成
分を分離する、ことが可能である。 This separation can be done using pattern coefficients. That is, since there is a certain relationship (ratio; pattern coefficient) between the main peak and the fragment peak, using this relationship, for example, m/e = 28
Calculated from m/e of CO 2 component = 44 CO 2 component...
It is possible to separate CO 2 , N 2 , and CO components with m/e=28 in the following manner.
イオン化電流値Ｉはそのガス成分の分圧Ｐ、パ
ターン係数π、および感度Ｓに関係しており、Ｉ
＝Ｓ・π・Ｐで表わされる。アルゴンArを基準
ガスとし、これにあるガスGASを種々の％で加
えた混合ガスのその比％Gas／％Arを横軸にと
り、質量分析計で得られた該ガスのメインピーク
hMGasとアルゴンのメインピークh40Arの比を縦
軸にとつてプロツトすると、ほヾｙ＝ax＋ｂな
る直線関係が得られる。この勾配ａが感度係数で
ある。 The ionization current value I is related to the partial pressure P of the gas component, the pattern coefficient π, and the sensitivity S, and I
=S・π・P. Using argon as a reference gas, the horizontal axis is the ratio of %Gas/%Ar of a mixed gas in which various percentages of GAS are added, and the main peak of the gas obtained with a mass spectrometer is plotted.
When the ratio of h M Gas to the main peak h 40 Ar of argon is plotted on the vertical axis, a linear relationship such as y=ax+b is obtained. This gradient a is the sensitivity coefficient.
質量分析計で分析するには、これらのパターン
係数と感度係数が必要であるが、従来、これらを
得るにはサンプルガス成分中のｍ／ｅが重ならな
いもの２つをとり、これらの２種混合ガスを標準
ガスとし、これを質量分析計にかけてその結果か
らパターン係数及び感度係数を得ている。例えば
真空脱炭装置（RH）で溶鋼の脱炭をするとき生
じる排ガスはCO、CO2、N2、O2、H2、Arなど
の混合ガスであるが、この混合ガスからCO、
CO2を質量分析計で分析する際の標準ガスとして
はCO用にArとCOの混合ガス、CO2用にArと
CO2の混合ガスを用い、混合比は同程度であつ
て、実際とは大きく異なるのが普通である。 These pattern coefficients and sensitivity coefficients are required for analysis with a mass spectrometer, but conventionally, to obtain them, two sample gas components with non-overlapping m/e are taken, and these two types are The mixed gas is used as a standard gas, and it is applied to a mass spectrometer and the pattern coefficient and sensitivity coefficient are obtained from the results. For example, the exhaust gas generated when molten steel is decarburized in a vacuum decarburizer (RH) is a mixed gas of CO, CO 2 , N 2 , O 2 , H 2 , Ar, etc. From this mixed gas, CO,
The standard gas when analyzing CO 2 with a mass spectrometer is a mixed gas of Ar and CO for CO, and a mixture of Ar and CO for CO 2.
Usually, a mixed gas of CO 2 is used, and the mixing ratio is about the same, but it is usually very different from the actual one.
質量分析計で分析するに当つて必要なパターン
係数及び感度係数は従来、上記の如き標準ガスで
測定しているが、これは質量分析計でイオンソー
ス内の試料ガス圧力と二次電子増倍管出力信号Ｉ
との間には下記(1)式
Ｉ＝kP ……(1)
こゝでＰはイオンソース内の試料ガス圧力、ｋ
はガスのタイプ、機器の状態に依る定数、が成立
することを仮定しており、サンプルガスが理想気
体の場合は構成ガスの分圧に比例した出力信号が
得られ、従来方法で良い精度が得られる。
The pattern coefficient and sensitivity coefficient necessary for analysis with a mass spectrometer have conventionally been measured using the standard gases mentioned above, but this is because the mass spectrometer uses the sample gas pressure in the ion source and secondary electron multiplication. Tube output signal I
The equation (1) below is between I=kP...(1) where P is the sample gas pressure in the ion source and k
assumes that a constant that depends on the type of gas and the state of the equipment holds; if the sample gas is an ideal gas, an output signal proportional to the partial pressure of the constituent gases will be obtained, and the conventional method has good accuracy. can get.
しかし、実際のガスは厳密には理想気体ではな
く、またｋは試料成分ガスのタイプに起因するミ
ーンフリーパス及びクロスセクシヨン、及び試料
ガスのイオン化電圧、等に左右されるため、(1)式
は厳密には成り立たない。 However, actual gases are not strictly ideal gases, and k depends on the mean free path and cross section caused by the type of sample component gas, the ionization voltage of the sample gas, etc. (1) The formula does not hold true strictly.
また質量分析計の出力データの処理にコンピユ
ータが用いられることが多くなり、信号がＡ／Ｄ
変換されて扱われるため、サンプルガス中の当該
成分の濃度と標準ガス中の当該成分の濃度が異な
ると、誤差が大きくなる恐れがある。例えばＡ／
Ｄ変換器は12ビツト、フルスケールは4095とし
て、２種混合標準ガスの各ガスの分圧は同程度と
すると、その検出出力（イオン化電流値）はこの
12ビツトの多くの部分を使つて表わされる
（MSBが上位にある）が、サンプルガス中の当該
ガスの分圧は微小とするとその検出出力は12ビツ
トの小部分を使つて表わされるだけである
（MSBが下位にある）。このような標準ガスで求
めたパターン係数は大きいもの同志の比であるの
に対し、サンプルガスでのパターン係数は小さい
もの同志の比であり、Ａ／Ｄ変換における電子化
誤差等により両者は等しくない。実際にできるだ
け近づけるようにするには、標準ガスも実際に合
つたものであるのが好ましい。 In addition, computers are increasingly being used to process the output data of mass spectrometers, and the signals are
Since it is converted and handled, if the concentration of the relevant component in the sample gas differs from the concentration of the relevant component in the standard gas, there is a risk that the error will become large. For example, A/
Assuming that the D converter is 12 bits, the full scale is 4095, and the partial pressures of each gas in the two standard gas mixtures are about the same, the detection output (ionization current value) will be
It is expressed using many parts of 12 bits (MSB is at the top), but if the partial pressure of the gas in question in the sample gas is extremely small, its detection output is expressed using only a small part of 12 bits. (MSB is at the bottom). The pattern coefficients obtained using such a standard gas are a ratio of large numbers to each other, whereas the pattern coefficients for a sample gas are a ratio of small numbers to each other, and due to electronic errors in A/D conversion, etc., the two are equal. do not have. In order to be as close as possible to reality, it is preferred that the standard gas also be a true match.
それ故本発明は、パターン係数、感度係数を測
定する際用いる標準ガス成分をできるだけサンプ
ルガスと一致させ、不要なガス成分はサンプルガ
ス系で反応、また変質せざるガスで代替すること
によつて分析精度を大幅に向上することを目的と
するものである。 Therefore, the present invention makes the standard gas components used when measuring pattern coefficients and sensitivity coefficients match the sample gas as much as possible, and replaces unnecessary gas components with gases that do not react or change in the sample gas system. The purpose is to significantly improve analysis accuracy.
本発明では、サンプルガスを質量分析計で分析
するにあたつてその際用いるパターン係数、及び
感度係数の測定用の標準ガス成分をサンプルガス
成分にできるだけ近づけ、サンプルガス測定時の
パターン係数、感度係数に可及的に近いものが得
られるようにする。
In the present invention, when analyzing a sample gas with a mass spectrometer, standard gas components for measuring the pattern coefficients and sensitivity coefficients used at that time are as close as possible to the sample gas components, and the pattern coefficients and sensitivity coefficients used when measuring the sample gas are adjusted as close as possible to the sample gas components. Try to get as close to the coefficients as possible.
即ちサンプルガス構成成分をGasi、各々の量
をgi（％）とし、そのうちのGaskのパターン係数
を得るとき使用する標準ガスは、質量分析計での
該Gaskの分析に影響を与えない（サンプルガス
と反応しない、変質しない、ピークが重ならな
い）ガスGasxと、Gasi中のベースガスGasbと、
該ガスGaskとの３種混合ガスで、各々の量は
gb′＋gk′＋gx＝100（％）
とする。こゝでgb′はサンプルガス中のベースガ
スGasbの量のgb（％）に近い量、gkはサンプル
ガス中のGaskの量gk（％）に近い量、gxはGasx
の量（％）である。 In other words, the sample gas component is gasi, the amount of each is gi (%), and the standard gas used to obtain the gask pattern coefficient does not affect the analysis of the gask by the mass spectrometer (sample gas (does not react with, does not change in quality, does not have overlapping peaks) gas Gasx and the base gas Gasb in Gasi,
Three kinds of gases are mixed with Gask, and the amount of each gas is gb'+gk'+gx=100 (%). Here, gb' is an amount close to gb (%) of the amount of base gas Gasb in the sample gas, gk is an amount close to the amount gk (%) of Gask in the sample gas, and gx is Gasx
is the amount (%).
例えばRH装置での排ガスの成分および量、そ
の経時変化の概略は分つているから、サンプルガ
ス中の量gb、gkの概略値は推定でき、従つて
gb′、gk′はこの推定値として決定できる。 For example, since we know the components and amounts of exhaust gas in an RH device and their approximate changes over time, we can estimate the approximate values of the amounts gb and gk in the sample gas, and therefore
gb′ and gk′ can be determined as these estimated values.
またガスGaskの感度係数を得るとき使用する
標準ガスは、該ガスGasbとGaskとGasxとの３
種混合で、各々の量は、Gasbはサンプルガス中
の量に近い量、Gaskの量は感度係数測定に必要
な範囲（第４図の係数ａを決めるに必要な範囲）
で変えたもの、Gasxは残りを満たす量とする。 In addition, the standard gas used when obtaining the sensitivity coefficient of gas Gask is the 3 of gas Gasb, Gask, and Gasx.
In the mixture of species, the amount of each gas is close to the amount in the sample gas, and the amount of Gask is within the range necessary to measure the sensitivity coefficient (the range necessary to determine the coefficient a in Figure 4).
Gasx is the amount that fills the remainder.
このようにガスGaskのパターン係数、感度係
数の決定に用いる標準ガスを、該ガスGaskに関
してサンプルガスと類似のものとすると、実際の
分析時に近いパターン係数、感度係数が得られ、
分析を正確に、実際に近いものにすることができ
る。
In this way, if the standard gas used to determine the pattern coefficient and sensitivity coefficient of the gas Gask is similar to the sample gas with respect to the gas Gask, pattern coefficients and sensitivity coefficients that are close to those in actual analysis can be obtained.
The analysis can be accurate and close to reality.
第１図に、RH排ガス分析についての例を示
す。ａはRH排ガスの代表的な成分例を示し、図
示のようにこれはアルゴンAr、二酸化炭素CO2、
一酸化炭素CO、窒素N2、酸素O2、水素H2から
なる。このうちのCO、CO2は溶鋼中のＣが脱炭
されて生じたもの、N2は空気中の窒素がRH装置
の間隙などから侵入したもの、O2も同様である
がこれには溶鋼等に含まれていたものも含まれ
る。ArはRH装置で溶鋼の循環に用いたものであ
る。このArガスは第４図の如く、感度係数測定
のベースガスになつており、ｘ＝Gask／Ar、ｙ
＝hMGask／h40Arとして複数の測定点を得、こ
れらの複数点を代表する直線ｙ＝ax＋ｂの該ａ
が感度係数になる。
Figure 1 shows an example of RH exhaust gas analysis. A shows typical examples of components of RH exhaust gas, and as shown in the figure, these include argon Ar, carbon dioxide CO 2 ,
Consists of carbon monoxide CO, nitrogen N2 , oxygen O2 , and hydrogen H2 . Of these, CO and CO 2 are generated when C in the molten steel is decarburized, N 2 is the result of nitrogen in the air entering through the gaps in the RH equipment, and O 2 is the same, but this includes the molten steel. This also includes items that were included in the above. Ar was used for circulating molten steel in the RH equipment. As shown in Figure 4, this Ar gas is the base gas for sensitivity coefficient measurement, where x=Gask/Ar, y
Obtain multiple measurement points as = h M Gask/h 40 Ar, and obtain the corresponding a of the straight line y = ax + b representing these multiple points.
becomes the sensitivity coefficient.
第１図ａの成分の排ガス中のCO2のパターン係
数、感度係数測定用の標準ガスは、従来は第１図
ｄに示す如く、ベースガスArとCO2ガスをほヾ
等量（本例では４対６程度）混合したものであつ
た。これに対して本発明では第１図ｂに示すよう
に、ベースガス（Gasb）Arと、パターン係数及
び感度係数の測定対象であるガス（Gask）CO2
と、該ガスCO2の分析に影響を与えないガス
（Gasx）Heとの３種混合ガスを標準ガスにする。
各々の量はパターン係数用には、ArとCO2はサ
ンプルガス（排ガス）中の量にほヾ等しい量と
し、Heは残りを埋める量とする。 Conventionally, the standard gas for measuring the pattern coefficient and sensitivity coefficient of CO 2 in the exhaust gas of the components shown in Figure 1a has been prepared by using base gas Ar and CO 2 gas in approximately equal amounts (in this example), as shown in Figure 1d. It was a mixture of about 4:6). On the other hand, in the present invention, as shown in FIG .
The standard gas is a three-component mixture of gas (Gasx) and He, which does not affect the analysis of the gas CO 2 .
For the pattern coefficients, the amounts of Ar and CO 2 are approximately equal to the amounts in the sample gas (exhaust gas), and the amount of He is to fill in the remaining amount.
パターン係数と感度係数の測定対象ガスがCO
であれば、標準ガスは第１図ｃに示すようにAr
とCOとHeの３種混合で、量は、ArとCOについ
てはサンプルガスのそれとほヾ同量、Heはこれ
らの残りとする。他も、同様である。 The gas to be measured for the pattern coefficient and sensitivity coefficient is CO.
If so, the standard gas is Ar as shown in Figure 1c.
The amount of Ar and CO is approximately the same as that of the sample gas, and the amount of He is the remaining amount. The same goes for the others.
分析に影響しないガスGasxとしてはHeの他に
Arなどがある。なおArをベースガスとしている
場合はそれを入れ替えて、Heがベースガス、Ar
がGasxとすることができる。 In addition to He, gases that do not affect analysis include
There are Ar, etc. If Ar is used as the base gas, replace it so that He is the base gas and Ar is the base gas.
can be Gasx.
第２図に分析例を示す。ａは従来の標準ガスを
用いた場合で、COの存在を示している。ｂは本
発明の標準ガスを用いた場合で、COの存在は認
められない。ガスクロによる分析でもCOは検出
されず、従つてｂが正しい。 Figure 2 shows an example of analysis. A shows the presence of CO when a conventional standard gas is used. b is the case where the standard gas of the present invention was used, and the presence of CO was not observed. CO was not detected in gas chromatography analysis, so b is correct.
第２図ａでCOが検出されてしまうのは、パタ
ーン係数及び感度係数の測定精度が不十分、第３
図に示したようにN2とCOは同じｍ／ｅ＝28にメ
インピークを待ちこれらの分離が不完全、などに
よる。 The reason why CO is detected in Figure 2a is because the measurement accuracy of the pattern coefficient and sensitivity coefficient is insufficient, and the third
As shown in the figure, N 2 and CO have a main peak at the same m/e = 28, and their separation is incomplete.
本発明の改善した標準ガスを用いると、分析誤
差が１％以内に収まることが判明した。 It has been found that when the improved standard gas of the present invention is used, the analytical error is within 1%.
以上説明したように本発明による標準ガスを用
いると、実際の分析時に近いパターン係数及び感
度係数が得られ、分析誤差を小さくすることがで
きる。
As explained above, when the standard gas according to the present invention is used, pattern coefficients and sensitivity coefficients that are close to those in actual analysis can be obtained, and analysis errors can be reduced.
第１図は本発明の説明図、第２図は分析例を示
すグラフ、第３図は排ガスの質量分析例を示すグ
ラフ、第４図は感度係数の説明図である。
Fig. 1 is an explanatory diagram of the present invention, Fig. 2 is a graph showing an analysis example, Fig. 3 is a graph showing an example of mass analysis of exhaust gas, and Fig. 4 is an explanatory diagram of the sensitivity coefficient.
Claims (1)
て使用するパターン係数及び感度係数の測定用標
準ガスを、 サンプルガス構成成分をGasi、各々の量をgi
（％）とし、そのうちのガスGaskのパターン係数
を得るとき使用する標準ガスは、質量分析計での
該ガスGaskの分析に影響を与えないガスGasx
と、該Gasi中のベースガスGasbと、該ガスGask
との３種混合ガスで、各々の量は、 gb′＋gk′＋gx＝100（％） ここでgb′はサンプルガス中のGasbの量gb（％）
に近い量、gk′はサンプルガス中のGaskの量gk
（％）に近い量、gxはGasxの量（％）、とし、 また該Gaskの感度係数を得るとき使用する標
準ガスは、該ガスGasbとGaskとGasxとの３種
混合で、ガスGasbの量はサンプルガス中のそれ
に近い値とし、ガスGaskの量は種々変え、残り
はガスGasxで埋めたものとすることを特徴とす
る質量分析計用標準ガス成分構成方法。[Claims] 1. A standard gas for measuring pattern coefficients and sensitivity coefficients used when analyzing a sample gas with a mass spectrometer.
(%), of which the standard gas used when obtaining the gas Gask pattern coefficient is a gas Gasx that does not affect the analysis of the gas Gask with the mass spectrometer.
, the base gas Gasb in the Gasi, and the gas Gask
The amount of each gas is gb′ + gk′ + gx = 100 (%) where gb′ is the amount of Gasb in the sample gas gb (%)
, gk′ is the amount of Gask in the sample gas gk
(%), gx is the amount (%) of Gasx, and the standard gas used to obtain the sensitivity coefficient of the gas is a mixture of three types of gas Gasb, Gask, and Gasx, and A method for composing standard gas components for a mass spectrometer, characterized in that the amount is set to a value close to that in the sample gas, the amount of gas Gask is varied, and the remainder is filled with gas Gasx.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12001389A JPH02298860A (en) | 1989-05-12 | 1989-05-12 | Method for constituting standard gas components for mass spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12001389A JPH02298860A (en) | 1989-05-12 | 1989-05-12 | Method for constituting standard gas components for mass spectrometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02298860A JPH02298860A (en) | 1990-12-11 |
| JPH0583864B2 true JPH0583864B2 (en) | 1993-11-29 |
Family
ID=14775742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12001389A Granted JPH02298860A (en) | 1989-05-12 | 1989-05-12 | Method for constituting standard gas components for mass spectrometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02298860A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2767197B1 (en) * | 1997-08-11 | 1999-12-03 | Alsthom Cge Alcatel | GAS ANALYZER |
-
1989
- 1989-05-12 JP JP12001389A patent/JPH02298860A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02298860A (en) | 1990-12-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US2373151A (en) | Analytical system | |
| Gorman et al. | Analysis of Solids with Mass Spectrometer | |
| CN109358095B (en) | Quantitative measurement method and system for gas concentration of each component of mixed gas | |
| CA1126879A (en) | Trace water measurement | |
| JPH0746074B2 (en) | Vacuum gauge | |
| JP3683749B2 (en) | Mass spectrometry method | |
| JP4256208B2 (en) | Isotope ratio analysis using a plasma ion source mass spectrometer | |
| US3946229A (en) | Gain control for a quadrupole mass spectrometer | |
| Nier et al. | Recording mass spectrometer for process analysis | |
| US4529879A (en) | Process for the determination of isotopes by mass spectrometry | |
| KR100809149B1 (en) | A method for measuring the concentration of impurities in nitrogen, hydrogen and oxygen by means of ion mobility spectrometry | |
| JPH0583864B2 (en) | ||
| US2551637A (en) | Self-calibrating mass spectrometer | |
| US4538066A (en) | Modulated voltage metastable ionization detector | |
| Schoeller et al. | Double-comparison method for mass spectrometric determination of hydrogen isotopic abundances | |
| JPS63111461A (en) | Mass spectroscopy with gas chromatography | |
| Fisher et al. | The analysis of deuterium content of hydrogen at and below natural abundance levels | |
| CN116087309A (en) | Method for measuring helium content in hydrogen isotope based on mass spectrometer | |
| SU885871A2 (en) | Automatic gas analyzing system | |
| CN116148376A (en) | Method for calibrating sensitivity of hydrogen isotope gas and application thereof | |
| SU1499202A1 (en) | Method of determining content of hydrogen in gases | |
| JPH0752163B2 (en) | Simplified quantitative analysis method using wavelength dispersive X-ray spectrometer | |
| JPS5815733B2 (en) | sekisouchi | |
| Plavinskii | Mass spectrometric determination of nitrogen in technological gases | |
| CN116930302A (en) | Mass spectrometry method for nickel stable isotope abundance in tetra (trifluorophosphine) nickel |