JPH0583817B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an apparatus for constructing a clean work room (clean room).

[Conventional technology]

Clean rooms, which are used for electrical and electronic equipment, pharmaceuticals, precision machinery, and other production processes, as well as operating rooms and laboratories, are designed to distribute clean air horizontally or vertically over virtually the entire width of the room. The most common method is to blow air in a direction (from top to bottom), but the most popular is the vertical flow type (vertical laminar flow type), which blows air vertically from the ceiling to the floor.

Conventionally, such a vertical flow clean room has been constructed by installing a HEPA filter 2 on the ceiling of the clean room space 1 and a porous floor 3 such as a grating board on the floor, as shown in FIG. 6 as a typical example. by extending the supply air from the air conditioner in the machine room installed outside the room to the attic space 6 through the air supply duct 5.
Clean air was blown out from HEPA filter 2. On the other hand, the return air is sent to the air conditioner 4 from the underfloor space 7 below the porous floor 3 through the return air duct 8.
is returned. The air conditioner 4 must have sufficient capacity to cover the load of the clean room, but normally one main air conditioner is installed, and two including a spare air conditioner are installed. Usually, three or three units were installed. In addition, even if the clean room load is divided and processed, at most 5
There were about 6 cars. That is, in a vertical flow clean room in which the space 6 above the ceiling of the HEPA filter 2 stretched on the ceiling is used as a plenum chamber of the clean room, conditioned air is produced in the machine room and sent to the plenum chamber. In small clean rooms, this air conditioner is sometimes installed outside the room wall or in the ceiling, but the number of air conditioners is usually one, or at most two. .

[Problem that the invention seeks to solve]

The method of supplying conditioned air (air with adjusted temperature and humidity) produced in the machine room to the clean room's plenum chamber through an air supply duct and returning it to the air conditioner through a return air duct requires a large amount of blower power. Since the running cost of a clean room is mostly due to the power of the blower, the above-mentioned conventional system has a problem in that the running cost is high. In addition, when producing the required conditioned air in a machine room, it is important to note that when the load changes depending on the working conditions of the clean room, for example, when the load decreases due to work stoppages or light work, There was a problem in that it was difficult to control the operating status of the vehicle in a timely manner. Additionally, in the event of a breakdown or maintenance, extensive work was required that would force the use of the clean room to be stopped. When installing an air conditioner adjacent to a clean room,
There was a problem that noise propagated and worsened the working environment. Once a clean room was established, it was very difficult to expand or reduce its scale or capacity.

[Means to solve problems]

In order to solve the above-mentioned problems, the present invention provides a structure with a width of about 1 inch on the back side of both side walls of a clean room.
Vertically long, small-capacity air conditioner units of approximately 3 m each that can each be operated independently are placed adjacent to each other over virtually the length of the side wall, and the air supply and return air passages to each unit are directly connected to the clean room. At the same time, the aim is to construct a clean room that can quickly respond to changes in load by controlling the number of these units, and an air conditioner unit that can be suitably used for this purpose has been developed. That is, the air conditioner unit of the present invention is a clean room air conditioner unit in which a large number of units are installed adjacently with the back side of the casing of the unit back to back with the back side of the side wall of the clean room, and the air conditioner unit is substantially smaller than the room height of the clean room to be formed. A return air side box, a mechanical box, and a supply air side box are formed in order from the bottom in a vertically long casing having a large height, and a zigzag airflow passage is formed inside the return air side box, and one part of this passage is A heat exchange coil, a blower, and a blower motor are installed in the machine box so that the heat exchange coil is on the suction side of the blower, and a discharge port of the blower is installed in the air supply side box. This device is characterized in that a muffler is installed at the discharge port, and the blower discharge flow flows in a zigzag pattern toward the supply air discharge through hole of the unit.

By using this unit, as shown in Figures 3 to 5 below, a large number of units can be placed next to each other with the back side of the casing of each unit facing the back side of the room side wall, and the return air side box of each unit can be The return air intake is communicated with the room underfloor space (the space below the porous floor), and the air supply outlet of each unit's air supply side box is communicated with the room attic space (the space above the HEPA filter layer). This constitutes a clean room device.

〔Example〕

FIG. 1 shows a longitudinal cross section of the unit of the present invention, and FIG. 2 shows a cross section taken along the line -- in FIG. As seen in these figures, the air conditioner unit of the present invention has a casing with a vertically long outer shape, and its height is higher than the height of the clean room to be formed. Appropriate width is approximately 1 to 3 m and depth is approximately 0.5 to 2.5 m. The inside of this casing is divided into three stages, and from the bottom, a return air side box 10, a mechanical box 11, and a supply air side box 12 are formed. The front side of the return air side box 10 slightly protrudes forward. The casing back plate 13 is provided with a return air intake opening 14 at the lower part corresponding to the return air side box 10 and a supply air discharge opening 15 at the upper part corresponding to the supply air side box 12. Most of the back surfaces of the plates that make up the casing are covered with sound-absorbing plates (which also serve as insulation) for noise prevention.

The return air side box 10 has a return air intake opening 14.
A baffle plate 16 is horizontally stretched across the middle of the baffle plate so that the return air taken in from the air rises in a meandering manner, and a sound absorption cell 17 connected to the return air intake opening 14 is installed below the baffle plate 16. There is. That is, the return air sucked into the return air side box 10 from the return air intake opening 14 first enters the sound absorption cell 17 installed in the horizontal direction, and the air coming out of the sound absorption cell 17 collides with the front plate 18. After that, the air flows through a zigzag airflow path in which it reverses direction and passes between the sound absorption cells 17 and the baffle plate 16, collides with the casing back plate 13, changes direction, and flows into the air supply side box 12 at the top. A part of this zigzag airflow passage is constructed with a silencing cell 17. As will be described later, the return air intake opening 14 is connected to a very short duct 19 in the lower space of the clean room to be formed.
However, by configuring the inside of the return air side box 10 as a zigzag air flow passage and using a part of it as a sound absorption cell, it is possible to effectively prevent the noise of the unit from propagating through this passage. be done. A ventilation intake opening 20 is provided on the front surface of the return air side box 10 (above the baffle plate 16), and a necessary amount of ventilation is supplied to the inside of the return air side box 10 through this opening 20. will be introduced in

The machine box 11 is provided in the middle above the return air side box 10. Here, a heat exchange coil 21, a blower 22, and a blower motor 23 are installed.
will be installed. The heat exchange coil 21 is installed on the suction side, that is, below, of the blower 22, and is fixed by a partition plate 24 having a central opening that partitions it from the return air side box 10. Cold water produced outside the unit is passed through the heat exchange coil 21 to cool the air passing therethrough to the required temperature. By controlling this water flow rate, the temperature of the treated air is regulated. To give an example of this cold water, the inlet water temperature is 15℃ and the outlet water temperature is 18℃.
℃, water flow rate is 28℃/min, air volume is 16.5m ³ /
min, the inlet air to this heat exchange coil 21 is cooled from 23°C to 21.2°C. The blower 22 and the blower motor 23 are connected to a support rod 25 stretched horizontally.
In the illustrated example, as shown in FIG.
Two units of No. 2 are installed with their discharge ports facing upward.
Each blower 22 has an individual motor 23 so that it can be driven independently.

The air supply side box 12 is formed on the machine box 11 and is partitioned from the machine box 11 by a horizontal partition plate 28. A discharge pipe 29 of each blower 22 passes through this partition plate 28, and a muffler 30 is attached to the end of the air supply side box 12 of this discharge pipe 29. This muffler 30 is composed of a tube made of punching board,
This prevents the blower discharge flow passing through the board from generating resonance sound, and also allows the air to be dispersed and flowed out into the air supply side box 12 from each hole of the board. The tip of this muffler 30 is opened toward the top so as to discharge the main flow of the blower discharge flow, and a shutter 32 for preventing backflow is attached to this opening 31. The place where this muffler 30 stands up and the air supply discharge opening 1
A baffle plate 33 is installed between the 5 and 5. This baffle plate 33 is made of a member with a sound absorbing plate pasted on its surface, and its lower edge is separated from the partition plate 28 by a sufficient distance.
It is hung from the ceiling surface of the air supply side box 12 so that it is open. As a result, the main flow of the blower discharge flow discharged from the opening 31 of the muffler collides with the ceiling surface of the air supply side box 12, and then reverses its direction by the baffle plate 33. The air passes through the lower edge of the air and flows toward the supply air discharge opening 15. Therefore,
A zigzag passage for the blower discharge airflow is also formed within this air supply side box 12. With this configuration of the air supply side box 12, the muffler 30 itself mutes noise, the airflow from the muffler 30 is dispersed, and the baffle plate 33 forms a zigzag airflow passage, thereby reducing the discharge flow from the blower 22. Not only resonance noise but also vibration noise of the blower 22 and motor noise are largely prevented from propagating through the air supply/discharge opening 15.

FIG. 3 is a perspective view of a portion of a clean room configured by installing a large number of air conditioner units 40 of the present invention having the above-described configuration. As shown in the figure, the air conditioner unit 40 of the present invention is installed on the back side of both side walls 41 and 42 for forming the vertical flow clean room space 1, so that the back side of each side wall 41 and 42 and the back side of the casing of the unit are back to back. Adjacent in the width direction with the following relationship. A HEPA filter 2 is stretched across the ceiling of the clean room space 1, as in the past, and a perforated plate 3 is stretched across the floor. A ceiling space 6 is formed above the HEPA filter 2,
A bottom space 7 is formed below the perforated plate 3. In the air conditioner unit 40 of the present invention, the height of the casing, more specifically, the height of the casing back plate 13, is the room height of the clean room it forms (from the porous floor 3 to the height of the casing back plate 13).
The height of the room leading to HEPA filter 2) is larger than the
By setting up each unit on the same level as the bottom floor 9 of the clean room, the position of the return air intake opening 14 provided at the back of the return air side box 10 is at the position of the underfloor space 7 of the clean room. The air supply/discharge opening 15 provided on the back side of the air supply side box 12 can be located at the attic space 6 of the clean room.

On the other hand, return air intakes 43 are provided on both side walls of the underfloor space 7 of the clean room at predetermined intervals corresponding to the unit width, and air supply ports 43 are provided on both side walls of the attic space 6 at predetermined intervals corresponding to the unit width. The discharge ports 44 are connected and provided, and each return air intake port 43 is connected to the return air intake opening 14 of each unit, and each supply air discharge port 4 is connected to the return air intake opening 14 of each unit.
4 is connected to the air supply/discharge opening 15 of each unit through a short duct to complete the air circulation path.

FIG. 4 is an example of a vertical section of a clean room configured as shown in FIG. 3, and FIG. 5 shows a plane seen from the arrows in FIG. 4. In this example, as shown in FIG. 5, seven air conditioner units 40 of the present invention are installed on one side and a total of 14 on both sides.
The distance between each air conditioner unit 40 and both side walls of the clean room can be extremely small, and even if this distance is made small, the propagation of noise from each unit can be extremely reduced as described above. By connecting units with the same shape and structure, the supply air outlet 44 and the return air intake 43 can be regularly installed in a consistent relationship.
This makes it possible to create a preferable vertical airflow distribution within the clean room space.

[Effect]

By connecting a large number of air conditioner units of the same shape and structure, the air conditioner unit of the present invention can be used as air conditioning equipment for forming a vertical clean room. In particular, it can be used in such a way that a large number of units can be installed adjacent to each other on the back side of both walls of a clean room, and the return air passage and supply air passage connecting the unit and the clean room can be shortened to the point where they are almost non-existent. . For this reason, a desired air volume can be obtained with less blower power. Also,
Each unit has excellent silencing effects and generates little noise even if adjacent to a clean room. The most distinctive feature is that when a clean room is configured using the air conditioner units of the present invention, the number of units can be controlled according to the load of the clean room, and in some cases, some of the units may be stopped. It can fully function as a clean room even in a closed state. Therefore, the running cost of the clean room is significantly reduced, maintenance work can be performed even while the clean room is in operation, and the maintenance work can be performed easily. In addition, air conditioning equipment can be immediately configured to suit the size of both large and small clean rooms.

[Brief explanation of the drawing]

FIG. 1 is a longitudinal cross-sectional view showing an embodiment of the air conditioner unit of the present invention, FIG. Figure 4 is a diagram showing a vertical section of the clean room configured as shown in Figure 3, Figure 5 is a plan view of the clean room shown in Figure 4, and Figure 6 is a conventional vertical view. 1 is a schematic cross-sectional view showing a typical example of a flow-type clean room. 1...Clean room space, 2...HEPA filter, 3...Porous floor, 6...Attic space, 7
...Underfloor space, 10...Return air side box, 11...
...Machine box, 12...Air supply side box, 13
... Casing back plate, 14 ... Return air intake opening, 15 ... Supply air discharge opening, 16, 33 ... Baffle plate, 17 ... Sound absorption cell, 20 ... Ventilation intake port,
21...Heat exchange coil, 22...Blower, 23...
...Blower motor, 24, 28...Partition plate, 3
0...Muffler, 32...Backflow prevention shutter, 40...Air conditioner unit, 43...Return air intake, 44...Air supply outlet.

Claims (1)

[Claims] 1. A return air side box, a machine box, and a supply air side box are formed in order from the bottom in a vertically elongated casing having a height substantially greater than the height of the clean room to be formed. A plurality of air conditioner units are placed adjacent to each other with the back side of the casing facing the back side of the room side wall, and the return air intake of the return air side box is communicated with the underfloor space of the room,
This is a clean room device in which the air supply outlet of the air supply side box is communicated with the room ceiling space, and the inside of the return air side box of the unit is formed into a zigzag airflow passage, and a part of this passage is silenced. a heat exchange coil, a blower, and a blower motor are installed in a mechanical box of the unit such that the heat exchange coil is on the suction side of the blower;
A clean room apparatus characterized in that a discharge port of a blower is opened in an air supply side box of the unit, and a muffler is installed at the discharge port.