JPH0581270U - Base material with carbon hard coating - Google Patents
Base material with carbon hard coatingInfo
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- JPH0581270U JPH0581270U JP9218792U JP9218792U JPH0581270U JP H0581270 U JPH0581270 U JP H0581270U JP 9218792 U JP9218792 U JP 9218792U JP 9218792 U JP9218792 U JP 9218792U JP H0581270 U JPH0581270 U JP H0581270U
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- nickel
- base material
- plating
- carbon hard
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Abstract
(57)【要約】
【目的】 耐蝕性の劣る基材に対し、高密着性、高信頼
性等を有するカーボン硬質被膜が形成された基材を提供
することにある。
【構成】 基材１上に形成されたニッケル−リン被膜２
とチタン被膜３とシリコン被膜４とカーボン硬質被膜５
とより構成されている。
【効果】 基材上に密着性及び耐蝕性のよいカーボン硬
質被膜が得られる。
(57) [Summary] [Object] To provide a base material having a hard carbon coating having high adhesion, high reliability, etc., on a base material having poor corrosion resistance. [Structure] Nickel-phosphorus coating 2 formed on a substrate 1
And titanium coating 3, silicon coating 4 and carbon hard coating 5
It is composed of [Effect] A hard carbon coating having good adhesion and corrosion resistance can be obtained on a substrate.
Description
【０００１】[0001]
本願考案はカーボン硬質被膜を被覆した基材に関するものである。更に詳しく はカーボン硬質被膜を被覆した基材の密着性及び耐蝕性を向上させるために介在 させる中間層に関する。 The present invention relates to a substrate coated with a carbon hard coating. More specifically, it relates to an intermediate layer interposed to improve the adhesion and corrosion resistance of a base material coated with a carbon hard coating.
【０００２】[0002]
従来、カーボン硬質被膜は、高硬度、高絶縁性、高熱伝導性、及び化学的安定 性などのダイヤモンドに似た優れた性質を有していることから、近年注目を集め ている。このカーボン硬質被膜の形成には、イオンビーム法、スパッタリング法 、イオンプレーティング法等の物理蒸着法（以下ＰＶＤと略す）や、ＥＣＲ（El ectron Cyclotron Reso- nance)、ＲＦ（Radio Erequency)プラズマ化学蒸着法 （以下Ｐ−ＣＶＤと略す）がすで実用に供されている。 Conventionally, carbon hard coatings have been attracting attention in recent years because they have excellent properties similar to diamond, such as high hardness, high insulation, high thermal conductivity, and chemical stability. The carbon hard film is formed by physical vapor deposition (hereinafter abbreviated as PVD) such as ion beam method, sputtering method, ion plating method, ECR (El ectron Cyclotron Resonance), RF (Radio Erequency) plasma chemistry. The vapor deposition method (hereinafter abbreviated as P-CVD) is already in practical use.
【０００３】[0003]
前記の方法で形成されるカーボン硬質被膜は、１０10ｄｙｎｅ／ｃｍ2 台の高 い圧縮応力が残留している。このため、カーボン硬質被膜と基材、特に金属性基 材との密着性が悪く、剥離、クラック、寿命が短い、あるいは膜形成が不可能な どの問題点を有していた。すなわち、シリコン基材、超硬基材上にカーボン硬質 被膜は形成可能であるが、ステンレス材をはじめとする各種金属基材などへの形 成は不可能であるなどカーボン硬質被膜を形成できる基材は非常に限定されてい た。上記問題点を解決し、カーボン硬質被膜の幅広い応用を可能とするために、 本考案者らは先に、乾式メッキ法でクロムを主体とする下層とシリコンを主体と する上層とからなる中間層を基材とカーボン硬質被膜間に介在させる構成（特願 昭６０−２５６４２６号）をさらに改良し、下層中間層を上層中間層との界面に おける相互拡散による固溶体層を形成させることを提案した。（特願昭６３−３ ０１８２９号）The carbon hard coating formed by the above method has a high compressive stress of the order of 10 10 dyne / cm 2 remaining. For this reason, the adhesion between the hard carbon coating and the substrate, especially the metallic substrate is poor, and there are problems such as peeling, cracking, short life, and inability to form a film. That is, although a carbon hard coating can be formed on a silicon base material or a super hard base material, it cannot be formed on various metal base materials such as stainless steel materials. The material was very limited. In order to solve the above-mentioned problems and enable a wide range of applications of carbon hard coatings, the present inventors have previously developed an intermediate layer consisting of a lower layer mainly composed of chromium and an upper layer mainly composed of silicon by a dry plating method. It was proposed to further improve the structure (Japanese Patent Application No. 60-256426) in which the carbon is interposed between the base material and the hard carbon coating, and to form a solid solution layer by mutual diffusion at the interface between the lower intermediate layer and the upper intermediate layer. . (Japanese Patent Application No. 63-3 01829)
【０００４】 しかしながら未だ応用できる基材は限られている。例えば黄銅においては、前 記中間層を形成した場合、チャンバー内の温度上昇、あるいはカーボン硬質被膜 形成時のチャンバー内の温度上昇により、真空雰囲気での脱亜鉛現象が発生し、 黄銅材料の表面がユズ肌を呈し、表面の耐蝕性、及び密着性が落ち、その結果、 カーボン硬質被膜の優れた特性を生かすことが出来なかった。However, the applicable substrate is still limited. For example, in the case of brass, when the above-mentioned intermediate layer is formed, the dezincification phenomenon occurs in a vacuum atmosphere due to the temperature rise in the chamber or the temperature rise in the chamber during the formation of the hard carbon film, and the surface of the brass material is The skin was discolored, and the corrosion resistance and adhesion of the surface were deteriorated. As a result, the excellent characteristics of the carbon hard coating could not be utilized.
【０００５】 また、ＳＫ材等の炭素工具鋼、マルテンサイト系ステンレス、及びフェライト 系ステンレス鋼等の鉄系でＳＵＳ３０４等のオーステナイト系ステンレス鋼より も耐蝕性の劣る鉄系の基材に対しては、前洗浄後に発錆による腐蝕等が発生し、 密着性及び耐蝕性等の問題を有していた。In addition, for carbon-based tool steels such as SK materials, iron-based materials such as martensitic stainless steels, and ferritic stainless steels, and iron-based base materials that are inferior in corrosion resistance to austenitic stainless steels such as SUS304, However, after pre-cleaning, corrosion due to rusting etc. occurred, and there were problems such as adhesion and corrosion resistance.
【０００６】 この考案の目的は、黄銅、ＳＫ材、マルテンサイト系ステンレス、及びフェラ イト系ステンレス鋼等、耐蝕性の劣る基材に対して、高密着性、高信頼性等を有 するカーボン硬質被膜が形成された基材を提供することにある。The object of the present invention is to provide a carbon hard material having high adhesion and high reliability with respect to a substrate having poor corrosion resistance such as brass, SK material, martensitic stainless steel, and ferrite stainless steel. It is to provide a base material having a coating film formed thereon.
【０００７】[0007]
上記目的を達成するため本願考案は、ＳＫ材、黄銅等の基材上に湿式メッキに より形成された下地金属被膜と、該下地金属被膜上に乾式メッキにより形成した チタン被膜と、該チタン被膜上に乾式メッキにより形成したシリコン被膜と、該 シリコン被膜上に乾式メッキにより形成したカーボン硬質被膜とにより構成した ものである。また、基材上に形成する下地金属被膜として、ニッケル合金被膜、 ニッケル被膜、クロム被膜、パラジウム被膜、ニッケル合金被膜とクロム被膜、 ニッケル合金被膜とパラジウム被膜の中の１つからなるものがある。また、ニッ ケル合金被膜の中のニッケル−リン被膜については、時効処理によって被膜硬度 をあげることもできる。 In order to achieve the above object, the present invention provides a base metal coating formed by wet plating on a base material such as SK material or brass, a titanium coating formed on the base metal coating by dry plating, and the titanium coating. It is composed of a silicon coating formed on the above by dry plating and a carbon hard coating formed on the above silicon coating by dry plating. The underlying metal film formed on the substrate may be one of a nickel alloy film, a nickel film, a chromium film, a palladium film, a nickel alloy film and a chromium film, and a nickel alloy film and a palladium film. Further, the nickel-phosphorus coating in the nickel alloy coating can be hardened by aging treatment.
【０００８】[0008]
本願考案に係るカーボン硬質被膜を形成した基材は、まず基材上に湿式メッキ により下地金属被膜として、ニッケル合金被膜（ニッケル−リン被膜、ニッケル −パラジウム被膜、ニッケル−ボロン被膜、ニッケル−スズ被膜等）、ニッケル 被膜、クロム被膜、パラジウム被膜、ニッケル合金被膜とクロム被膜、ニッケル 合金被膜とパラジウム被膜の中の１つからなる被膜が形成される。この被膜を直 接基材に施すことにより、黄銅、ＳＫ材等の耐蝕性の劣る基材の耐蝕性を向上さ せ、さらに時効処理を施すことにより硬度を向上させ、カーボン硬質被膜の特性 をさらに生かすことが可能となる。次に、乾式メッキ法によりチタン被膜を形成 し、さらに乾式メッキ法によりシリコン被膜を形成し、順次積層構造にすること によりカーボン硬質被膜のコーティングを可能にし、耐蝕性の劣る基材に対して 、高耐蝕性、高密着性のあるカーボン硬質被膜が形成される。 The base material on which the carbon hard coating according to the present invention is formed is first formed by wet plating on the base material as a base metal coating to form a nickel alloy coating (nickel-phosphorus coating, nickel-palladium coating, nickel-boron coating, nickel-tin coating). Etc.), a nickel coating, a chromium coating, a palladium coating, a nickel alloy coating and a chromium coating, and a nickel alloy coating and a palladium coating. By applying this coating directly to the base material, the corrosion resistance of the base material with poor corrosion resistance such as brass and SK material is improved, and further by aging treatment, the hardness is improved and the characteristics of the carbon hard coating are improved. It is possible to make better use of it. Next, a titanium film is formed by a dry plating method, a silicon film is further formed by a dry plating method, and a carbon hard film can be coated by sequentially forming a layered structure, and for a substrate with poor corrosion resistance, A hard carbon coating with high corrosion resistance and high adhesion is formed.
【０００９】[0009]
以下に本願考案の実施例を図面に用いて詳細に説明する。図１は、本願考案の 第１実施例である膜構造の要部断面図である。黄銅、ＳＫ材等の炭素工具鋼、マ ルテンサイト系ステンレス鋼、フェライト系ステンレス鋼等の耐蝕性の劣る基材 の中のＳＫ材を使用して行なった。ＳＫ基材１上に湿式メッキにより、下地金属 被膜のニッケル合金メッキ、例えば無電解ニッケル−リンメッキでニッケル−リ ン被膜２を２〜５μｍ形成した。 ≪ニッケル−リン合金メッキ≫ ＜メッキ液組成＞ 硫酸ニッケル ２０ｇ／１ 次亜リン酸ナトリウム ２５ｇ／１ 乳酸 ２５ｇ／１ プロピオン酸 ３ｇ／１ ＜メッキ条件＞ ｐＨ ４〜５ 温度 ９０℃ 処理後、時効処理を行なっても良い。時効処理の条件は、４００℃〜５００℃ で３０分〜６０分間行なう。また、無電解ニッケル−ボロンメッキでニッケル− ボロン被膜を形成させる場合は、下記メッキ液組成で行なう。 ≪ニッケル−ボロン合金メッキ≫ ＜メッキ液組成＞ 塩化ニッケル ３０ｇ／１ 水酸化ナトリウム ４０ｇ／１ エチレンジアミン ６０ｇ／１ ふっ化ナトリウム ３ｇ／１ ほう水素化ナトリウム ０．５ｇ／１ ＜メッキ条件＞ 温度 ９０℃ 尚、上記以外のニッケル合金被膜として、ニッケル−パラジウム被膜、ニッケ ル−スズ被膜等があり、この被膜を形成させても良いことは言うまでもない。ま た、ニッケル−パラジウム被膜やニッケル−スズ被膜の形成は、一般に電解メッ キによって行なわれる。 Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a sectional view of an essential part of a membrane structure according to a first embodiment of the present invention. Carbon tool steel such as brass and SK material, SK material among base materials with poor corrosion resistance such as martensitic stainless steel and ferritic stainless steel were used. A nickel-phosphorus coating 2 having a thickness of 2 to 5 μm was formed on the SK substrate 1 by wet plating by nickel alloy plating of a base metal coating, for example, electroless nickel-phosphorus plating. << Nickel-Phosphorus alloy plating >> <Plating solution composition> Nickel sulfate 20g / 1 Sodium hypophosphite 25g / 1 Lactic acid 25g / 1 Propionic acid 3g / 1 <Plating conditions> pH 4-5 Temperature 90 ° C After aging treatment May be done. The aging treatment is performed at 400 ° C. to 500 ° C. for 30 minutes to 60 minutes. When a nickel-boron coating is formed by electroless nickel-boron plating, the following plating solution composition is used. << Nickel-boron alloy plating >> <Plating solution composition> Nickel chloride 30g / 1 Sodium hydroxide 40g / 1 Ethylenediamine 60g / 1 Sodium fluoride 3g / 1 Sodium borohydride 0.5g / 1 <Plating conditions> Temperature 90 ° C Needless to say, nickel-palladium coatings, nickel-tin coatings, and the like are available as nickel alloy coatings other than the above, and these coatings may be formed. The nickel-palladium coating and the nickel-tin coating are generally formed by electrolytic plating.
【００１０】 次に乾式メッキ法は、例えばスパッタリング法によりチタン被膜３をニッケル 合金被膜であるニッケル−リン被膜２上に、０．１μｍ形成し、同様に該チタン 被膜３上にシリコン被膜４を０．３μｍ形成した。Next, in a dry plating method, for example, a titanium coating 3 is formed on the nickel-phosphorus coating 2 which is a nickel alloy coating by 0.1 μm by, for example, a sputtering method, and a silicon coating 4 is formed on the titanium coating 3 in a similar manner. .3 μm was formed.
【００１１】 その後、乾式メッキ法、例えばＲＦＰ−ＣＶＤ法を用いて以下の条件により該 シリコン被膜４上にカーボン硬質被膜５を２μｍ形成した。 ≪カーボン硬質被膜≫ ＜形成条件＞ ガス種 ：メタンガス 成膜圧力 ：０．１トール 高周波電力 ：３００ワット 成膜速度 ：毎分０．１２μｍ ビッカース硬度 ：３０００〜５０００（Ｈｖ） この様にして、基材１上に密着性が良好でしかも信頼性の高いカーボン硬質被 膜５が得られた。After that, a carbon hard coating 5 was formed to a thickness of 2 μm on the silicon coating 4 under the following conditions using a dry plating method such as RFP-CVD method. << Carbon hard coating >> <Forming conditions> Gas type: Methane gas Film forming pressure: 0.1 Torr High frequency power: 300 Watt Film forming rate: 0.12 μm / min Vickers hardness: 3000 to 5000 (Hv) A carbon hard coating 5 having good adhesion and high reliability was obtained on the material 1.
【００１２】 次に第２図は、本願考案の第２実施例である膜構造の要部断面図である。黄銅 、ＳＫ材等の炭素工具鋼、マルテンサイト系ステンレス鋼、フェライト系ステン レス鋼等の耐蝕性の劣る基材の中の黄銅を使用して行なった。黄銅の基材６上に 湿式メッキにより下地金属被膜であるニッケル合金メッキ、例えば無電解ニッケ ル−リンメッキでニッケル−リン被膜７を前記と同様な方法で２〜５μｍ形成し た。Next, FIG. 2 is a cross-sectional view of an essential part of a film structure according to a second embodiment of the present invention. Brass, carbon tool steel such as SK material, martensite stainless steel, ferritic stainless steel and the like, which are inferior in corrosion resistance, were used as brass. A nickel-phosphorus coating 7 of 2 to 5 μm was formed on the brass base material 6 by wet plating by nickel alloy plating as a base metal coating, for example, electroless nickel-phosphorus plating, in the same manner as described above.
【００１３】 次に湿式メッキにより、クロム被膜８を該ニッケル−リン被膜７上に２〜５μ ｍ形成した。 ≪クロムメッキ≫ ＜メッキ液組成＞ 無水クロム酸 ２００〜３００ｇ／ｌ 硫酸 ２〜３ ｇ／ｌ ３価クロム １〜５ ｇ／ｌ ＜メッキ条件＞ 浴温 ４０〜５５℃ 電流密度 １０〜６０Ａ／ｄｍ2 尚、クロム被膜を形成させるためのクロムメッキには、装飾クロムメッキ、工 業用クロムメッキがあるが、どちらのメッキでクロム被膜を形成させても良いこ とは言うまでもない。Then, a chromium coating 8 was formed on the nickel-phosphorus coating 7 by wet plating to a thickness of 2 to 5 μm. << Chromium plating >><Plating solution composition> Chromic anhydride 200 to 300 g / l Sulfuric acid 2 to 3 g / l Trivalent chromium 1 to 5 g / l <Plating conditions> Bath temperature 40 to 55 ° C Current density 10 to 60 A / dm 2 Note that there are decorative chrome plating and industrial chrome plating as the chrome plating for forming the chrome coating, but it goes without saying that either plating may be used to form the chrome coating.
【００１４】 次に乾式メッキ法により第１実施例と同様な方法で、クロム被膜８上にチタン 被膜９を０．１μｍ形成し、同様に該チタン被膜９上にシリコン被膜１０を０． ３μｍ形成し、その後、第１実施例と同様な方法でシリコン被膜１０上にカーボ ン硬質被膜１１を２μｍ形成した。この様にして、基材６上に密着性が良好でし かも信頼性の高いカーボン硬質被膜１１が得られた。Then, a titanium coating 9 is formed to a thickness of 0.1 μm on the chromium coating 8 by the dry plating method in the same manner as in the first embodiment, and a silicon coating 10 is formed on the titanium coating 9 to a thickness of 0.1 μm. Then, a carbon hard film 11 having a thickness of 2 μm was formed on the silicon film 10 by the same method as in the first embodiment. In this way, a hard carbon coating 11 having good adhesion and high reliability was obtained on the substrate 6.
【００１５】 尚、基材が黄銅、または温度により軟化等発生する基材の場合、ニッケル−リ ンメッキ後、時効処理は行なわず、本願考案のクロム被膜を前記ニッケル−リン 被膜上に形成することにより、前記ニッケル−リン被膜の時効処理を行なったも のと、同等な硬度が得られた。また下地金属被膜の中の例えばパラジウム被膜は 、銅合金材等の耐蝕性の劣る基材に使用し、クロム被膜は耐摩耗性を必要とする 基材に使用する。しかしながら、排水処理等の問題により、クロムメッキが使用 できない場合に、ニッケルメッキでニッケル被膜を形成しても良い。さらに基材 が耐蝕性を必要とする用途に使用される場合は、ニッケル合金被膜上にパラジウ ム被膜を形成することにより耐蝕性を更に向上させることも、可能であり、硬度 及び耐摩耗性が必要な場合は、ニッケル合金被膜上にクロム被膜を形成すること により比較的安価に製造することできると共に、硬度及び耐摩耗性も向上する。When the base material is brass or a material that causes softening or the like due to temperature, the chrome coating of the present invention should be formed on the nickel-phosphorus coating without aging treatment after nickel-lin plating. As a result, the same hardness as that obtained by aging the nickel-phosphorus coating was obtained. In addition, for example, the palladium coating in the base metal coating is used for a base material having poor corrosion resistance such as a copper alloy material, and the chromium coating is used for a base material requiring abrasion resistance. However, when chromium plating cannot be used due to problems such as wastewater treatment, the nickel coating may be formed by nickel plating. Further, when the base material is used for applications requiring corrosion resistance, it is possible to further improve the corrosion resistance by forming a palladium film on the nickel alloy film, and the hardness and wear resistance are improved. By forming a chromium coating on a nickel alloy coating, if necessary, it can be manufactured at a relatively low cost, and the hardness and wear resistance are also improved.
【００１６】 以下にＳＫ材、黄銅基材上に上記方法によりカーボン硬質被膜５・１１を形成 した結果を記す。従来ＳＫ材基材上にカーボン硬質被膜５・１１を形成する場合 、前洗浄工程後に腐蝕が発生し、カーボン硬質被膜５・１１形成後に、微小な剥 離が金属顕微鏡等で観察すると発見されたが、本願考案の手法で形成した場合、 微小な剥離は全く観察されなくなった。The results of forming the carbon hard coatings 5 and 11 on the SK material and the brass base material by the above method will be described below. Conventionally, when the carbon hard coatings 5 and 11 were formed on the SK material substrate, corrosion was generated after the pre-cleaning step, and it was discovered that minute delamination was observed with a metallographic microscope after the carbon hard coatings 5 and 11 were formed. However, when formed by the method of the present invention, minute peeling was not observed at all.
【００１７】 また、黄銅基材上にカーボン硬質被膜５・１１を形成する場合、脱亜鉛現象に より充分な密着性が得られず結果的に耐蝕性が落ちることとなった。本願考案の 手法で形成した場合には、上記の現象が抑えられ黄銅材に対して高密着性、高耐 蝕性の膜が得られた。さらに上記サンプルをＣＡＳＳ試験（２４時間）と人工汗 浸漬試験（２４時間）を行なった。 （１）ＣＡＳＳ試験 ２４時間 試料 結 果 従来品（下地金属被膜なし） 腐蝕有 本考案品 腐蝕無 （２）人工汗浸漬試験 ２４時間 試料 結 果 従来品（下地金属被膜なし） 腐蝕有 本考案品 腐蝕無Further, when the carbon hard coatings 5 and 11 are formed on the brass base material, sufficient adhesion cannot be obtained due to the dezincification phenomenon, and as a result, the corrosion resistance decreases. When formed by the method of the present invention, the above phenomenon was suppressed and a film having high adhesion and high corrosion resistance to the brass material was obtained. Further, the sample was subjected to a CASS test (24 hours) and an artificial sweat immersion test (24 hours). (1) CASS test 24 hours Sample result Conventional product (no underlying metal film) Corrosion present Inventive product No corrosion (2) Artificial sweat immersion test 24 hours Sample result Conventional product (no underlying metal film) Corrosion present product No corrosion
【００１８】 また、乾式メッキにより形成したニッケル−リン被膜２・７に時効処理を行な ったものについてはニッケル−リン被膜２・７自体の硬度もＨｖ８００〜１００ ０程度になり、耐摩耗性も向上することが判った。上記サンプルと時効処理を行 なっていないものについて摩耗試験を行なった。 （ＩＩ） 耐摩耗試験 スガ摩耗試験機使用 荷重：３Ｋｇｆ、研磨紙：ｓｉｃ＃６００、 摩耗回数：１６００サイクル 試料 結 果 時効処理 無 一部基材から剥離 時効処理 有 外観上変化なし、磨耗量≒０ 上記の結果から明らかなように、本願考案の試料は優れた特性を示し、高耐 蝕性、 高密着性の改善が得られた。Further, in the case where the nickel-phosphorus coating 2.7 formed by dry plating is subjected to an aging treatment, the hardness of the nickel-phosphorus coating 2.7 itself becomes about Hv800 to 1000, and the wear resistance is high. It was also found to improve. Abrasion tests were performed on the above samples and those that had not been aged. (II) Abrasion resistance test Suga Abrasion tester load: 3 Kgf, abrasive paper: sic # 600, wear number: 1600 cycles Sample Aging treatment No peeling from some base materials Aging treatment Yes No change in appearance, wear amount ≒ 0 As is clear from the above results, the samples of the present invention exhibited excellent characteristics and improved high corrosion resistance and high adhesion.
【００１９】[0019]
上記のごとく、本願考案によれば、基材上に湿式メッキにより形成された下地 金属被膜により、黄銅、ＳＫ材、マルテンサイト系、フェライト系ステンレス鋼 等の耐蝕性の劣る鉄系の基材に対しても、高耐蝕性、密着性の高いカーボン硬質 被膜を形成することができる。さらに下地金属被膜であるニッケル合金被膜のう ちニッケル−リン被膜に時効処理を行なったものについては耐摩耗性が更に向上 することが期待でき、また黄銅等、時効処理が有効でない基材に対してもクロム 被膜を施すことにより、時効処理を行なったものと同等な耐摩耗性が得られるこ とも期待できる。本願考案により、さらに基材の種類が増し、カーボン硬質被膜 の応用範囲が広がり大きな効果を有する。 As described above, according to the present invention, the base metal film formed by wet plating on the base material makes it possible to form an iron base material having poor corrosion resistance such as brass, SK material, martensite base material, and ferritic stainless steel. On the other hand, a carbon hard coating having high corrosion resistance and high adhesion can be formed. Furthermore, it is expected that the wear resistance of the nickel alloy coating, which is the underlying metal coating, of the nickel-phosphorus coating, which has been subjected to the aging treatment, will be further improved in the abrasion resistance. However, by applying a chromium coating, it can be expected that the same wear resistance as that obtained by aging treatment can be obtained. According to the invention of the present application, the types of base materials are further increased, and the application range of the carbon hard coating is expanded, which has a great effect.
【図面の簡単な説明】[Brief description of drawings]
【図１】本願考案の第１実施例の膜構造を示す要部断面
図である。FIG. 1 is a sectional view of an essential part showing a film structure of a first embodiment of the present invention.
【図２】本願考案の第２実施例の膜構造を示す要部断面
図である。FIG. 2 is a sectional view of an essential part showing a film structure of a second embodiment of the present invention.
１ 基材 ２ ニッケル−リン被膜 ３ チタン被膜 ４ シリコン被膜 ５ カーボン硬質被膜 ６ 基材 ７ ニッケル−リン被膜 ８ クロム被膜 ９ チタン被膜 １０ シリコン被膜 １１ カーボン硬質被膜 1 Base Material 2 Nickel-Phosphorus Coating 3 Titanium Coating 4 Silicone Coating 5 Carbon Hard Coating 6 Base Material 7 Nickel-Phosphorus Coating 8 Chromium Coating 9 Titanium Coating 10 Silicone Coating 11 Carbon Hard Coating
Claims (3)
おいて、基材上に湿式メッキにより形成された下地金属
被膜と、該下地金属被膜上に乾式メッキにより形成した
チタン被膜と、該チタン被膜上に乾式メッキにより形成
したシリコン被膜と、該シリコン被膜上に乾式メッキに
より形成したカーボン硬質被膜とより構成されたことを
特徴とするカーボン硬質被膜を有する基材。1. A substrate having a carbon hard coating on its surface, a base metal coating formed by wet plating on the base, a titanium coating formed by dry plating on the base metal coating, and a titanium coating on the base. 1. A base material having a carbon hard coating, comprising a silicon coating formed by dry plating and a carbon hard coating formed on the silicon coating by dry plating.
ケル合金被膜、ニッケル被膜、クロム被膜、パラジウム
被膜、ニッケル合金被膜とクロム被膜、ニッケル合金被
膜とパラジウム被膜の中の１つからなることを特徴とす
る請求項１記載のカーボン硬質被膜を有する基材。2. The base metal coating formed on the base material comprises one of a nickel alloy coating, a nickel coating, a chromium coating, a palladium coating, a nickel alloy coating and a chromium coating, a nickel alloy coating and a palladium coating. A substrate having a carbon hard coating according to claim 1.
ち、ニッケル−リン被膜に時効処理を施したことを特徴
する請求項２記載のカーボン硬質被膜を有する基材。3. A substrate having a carbon hard coating according to claim 2, wherein the nickel-phosphorus coating of the nickel alloy coating formed on the substrate is aged.
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1992092187U JP2576042Y2 (en) | 1992-01-31 | 1992-12-22 | Substrate with carbon hard coating |
| US08/171,659 US5607779A (en) | 1992-12-22 | 1993-12-21 | Hard carbon coating-clad base material |
| DE69310334T DE69310334T2 (en) | 1992-12-22 | 1993-12-21 | Hard carbon coated material |
| EP93310380A EP0605179B1 (en) | 1992-12-22 | 1993-12-21 | Hard carbon coating-clad base material |
| CN93119987A CN1048292C (en) | 1992-12-22 | 1993-12-22 | Hard carboncoating-clad base material |
| US08/786,849 US6074766A (en) | 1992-12-22 | 1997-01-22 | Hard carbon coating-clad base material |
| HK97102002A HK1000424A1 (en) | 1992-12-22 | 1997-10-22 | Hard carbon coating-clad base material |
| US09/024,075 US6180263B1 (en) | 1992-12-22 | 1998-02-17 | Hard carbon coating-clad base material |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP911592 | 1992-01-31 | ||
| JP4-9115 | 1992-01-31 | ||
| JP1992092187U JP2576042Y2 (en) | 1992-01-31 | 1992-12-22 | Substrate with carbon hard coating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0581270U true JPH0581270U (en) | 1993-11-05 |
| JP2576042Y2 JP2576042Y2 (en) | 1998-07-09 |
Family
ID=26343773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1992092187U Expired - Fee Related JP2576042Y2 (en) | 1992-01-31 | 1992-12-22 | Substrate with carbon hard coating |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2576042Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02149673A (en) * | 1988-11-29 | 1990-06-08 | Citizen Watch Co Ltd | Member coated with rigid carbon film |
| JPH03138375A (en) * | 1989-10-23 | 1991-06-12 | Mitsubishi Electric Corp | Corrosion resisting low friction material |
-
1992
- 1992-12-22 JP JP1992092187U patent/JP2576042Y2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02149673A (en) * | 1988-11-29 | 1990-06-08 | Citizen Watch Co Ltd | Member coated with rigid carbon film |
| JPH03138375A (en) * | 1989-10-23 | 1991-06-12 | Mitsubishi Electric Corp | Corrosion resisting low friction material |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2576042Y2 (en) | 1998-07-09 |
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