JPH0580786B2 - - Google Patents

Info

Publication number
JPH0580786B2
JPH0580786B2 JP60106477A JP10647785A JPH0580786B2 JP H0580786 B2 JPH0580786 B2 JP H0580786B2 JP 60106477 A JP60106477 A JP 60106477A JP 10647785 A JP10647785 A JP 10647785A JP H0580786 B2 JPH0580786 B2 JP H0580786B2
Authority
JP
Japan
Prior art keywords
mass
voltage
quadrupole
constant
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP60106477A
Other languages
Japanese (ja)
Other versions
JPS61264653A (en
Inventor
Teiichiro Matsui
Hiroto Itoi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP60106477A priority Critical patent/JPS61264653A/en
Publication of JPS61264653A publication Critical patent/JPS61264653A/en
Publication of JPH0580786B2 publication Critical patent/JPH0580786B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/34Dynamic spectrometers
    • H01J49/42Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は四重極質量分析装置におけるピーク幅
一定の走査方式の改良に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an improvement in a scanning method with a constant peak width in a quadrupole mass spectrometer.

(従来の技術) 四重極質量分析装置は第4図に示すように四重
極間に直流電圧Uと高周波電圧Vを重畳して印加
し、四重極間の中心位置に図の紙面に垂直の方向
にイオンビームを入射させ、出射スリツト側から
特定質量のイオンを取出す構成で、電極に印加す
る直流電圧Uと高周波電圧Vとの或る組合せにお
いて、特定の質量のイオンだけが四重極の中心を
通つて出射スリツトに到達でき、他の質量のイオ
ンは軌道が発散して出射スリツトに到達できない
ことによつて質量分析を行うものである。第5図
Aは横軸に高周波電圧Vをとり、縦軸に直流電圧
Uをとつた平面において、或る質量のイオンが四
重極間を通過する際の軌道の安定、不安定を示し
たもので、一つの山形のカーブ(安定曲線)の下
の領域は或る一つの質量のイオンの軌道の安定領
域であり、上の領域は不安定つまり軌道が発散し
てしまう領域である。このカーブは質量が異るに
従つて図に1,2,3で示すように変化し、質量
が小さい程ピークが左に寄り高さが低くなつて、
ピーク頂点は原点を通る一本の直線lに沿つてい
る。こゝでU−V平面において原点Oを通り第5
図Aの直線Lに沿うような走査軌跡に従つて直流
電圧Uと高周波電圧の値を変化させると、各イオ
この安定曲線のピークと直線Lとで囲まれたせま
い領域で夫々の質量のイオンが安定軌道で四重極
間を通過し出射スリツトを通過できるので、第5
図Bに示すような質量スペクトルが得られる。第
5図Aから明かなように各質量のイオンの安定曲
線の直線Lから上の三角形の部分の形は略々相似
形であるから、この場合得られる質量スペクトル
のピークの幅は質量が大きい程広くなり、質量を
M、ピーク幅をΔMとすると分解能M/ΔMが一
定となつている。即ちU−V平面上で直流電圧U
と高周波電圧とが原点を通る直線に沿つて変化す
るようにして質量走査を行うと分解能一定の走査
が行われる。この分解能一定の走査方式は第5図
Aから明かなように質量が小さい程ピーク幅がせ
まくなり、イオン検出感度が低くなる。また質量
スペクトルは陽子の質量数(=1)を単位として
1飛びに現れ、これは質量の大きい領域でも同じ
なので、分解能一定であると質量の大きい所では
隣同士のピークを識別できなくなる。測定範囲中
質量最大の所で質量数差1の識別ができるように
しようとすると、最大質量が大きいときは分解能
を大きく設定しなければならず、質量の小さい領
域での感度が非常に低くなる。
(Prior art) As shown in Fig. 4, a quadrupole mass spectrometer applies a DC voltage U and a high frequency voltage V in a superimposed manner between the quadrupole, and places a voltage at the center of the quadrupole on the paper surface of the figure. It is a configuration in which an ion beam is input in the vertical direction and ions of a specific mass are extracted from the exit slit side, and in a certain combination of DC voltage U and high frequency voltage V applied to the electrode, only ions of a specific mass are quadrupled. Mass spectrometry is performed because ions of other masses can reach the exit slit through the center of the pole, and ions of other masses cannot reach the exit slit due to divergent trajectories. Figure 5A shows the stability and instability of the trajectory of an ion of a certain mass as it passes between quadrupoles on a plane with high frequency voltage V on the horizontal axis and DC voltage U on the vertical axis. The region below one chevron-shaped curve (stability curve) is the stable region of the trajectory of an ion of a certain mass, and the region above is the region where the trajectory is unstable, that is, the trajectory diverges. This curve changes as the mass changes, as shown by 1, 2, and 3 in the figure, and the smaller the mass, the more the peak shifts to the left and the height becomes lower.
The peak apex is along a single straight line l passing through the origin. Here, in the U-V plane, passing through the origin O, the fifth
When the values of the DC voltage U and the high-frequency voltage are changed according to the scanning locus along the straight line L in Figure A, each ion mass in a narrow area surrounded by the peak of this stability curve and the straight line L. can pass between the quadrupole and the exit slit in a stable orbit, so the fifth
A mass spectrum as shown in Figure B is obtained. As is clear from Figure 5A, the shapes of the triangular parts above straight line L of the stability curves of ions of each mass are approximately similar, so the width of the peak in the mass spectrum obtained in this case is large. If M is the mass and ΔM is the peak width, the resolution M/ΔM is constant. That is, on the UV plane, the DC voltage U
If mass scanning is performed with the high-frequency voltage and the high-frequency voltage varying along a straight line passing through the origin, scanning with constant resolution will be performed. In this scanning method with constant resolution, as is clear from FIG. 5A, the smaller the mass, the narrower the peak width, and the lower the ion detection sensitivity. Furthermore, the mass spectrum appears in leaps and bounds based on the proton mass number (=1), and this is the same even in areas with large masses, so if the resolution is constant, adjacent peaks cannot be distinguished from each other in areas with large masses. If you want to be able to identify a mass number difference of 1 at the maximum mass in the measurement range, the resolution must be set high when the maximum mass is large, and the sensitivity will be extremely low in areas with low mass. .

このため一般には次に述べる質量スペクトルの
ピーク幅一定の走査方式が用いられ、これは四重
極質量分析装置の一つの特徴となつている。第6
図Aに示すように各質量のイオン安定曲線の頂点
付近を一定の幅ΔMで切るような直線CはU−V
平面でV=Oにおいて直流電圧Uが或る一定値
Uoを持つ。即ち電流電圧Uに一定のバイアスUo
を与えてU,Vの関係が直線となるようにU,V
を変化させるとΔM=一定の走査ができ、このと
きの質量スペクトルは第6図Bのようになる。こ
の走査方式では質量の大小に関係なく感度が一定
となり、また質量の大きな所でも隣合うピーク同
士の識別が可能である。こゝで先に述べたように
質量スペクトルは1飛びに現れるものであること
を考慮すると、質量スペクトルのピーク幅ΔMは
質量数差1が識別できる程度でなるべく大きく設
定するのが感度を高める上で有利であり、ΔMを
不必要に小さくすることは意味がない。従つて通
常はΔM=1付近になるように第6図AのUo及
びU,V関係直線の傾斜を設定している。
For this reason, a scanning method in which the peak width of a mass spectrum is constant is generally used, which will be described below, and this is one of the characteristics of a quadrupole mass spectrometer. 6th
As shown in Figure A, the straight line C that cuts the vicinity of the apex of the ion stability curve for each mass with a constant width ΔM is U-V
When the DC voltage U is a certain constant value at V=O on a plane
Have Uo. That is, a constant bias Uo to the current voltage U
, so that the relationship between U and V is a straight line.
By changing ΔM, scanning can be performed with constant ΔM, and the mass spectrum at this time becomes as shown in Figure 6B. With this scanning method, the sensitivity is constant regardless of the size of the mass, and adjacent peaks can be distinguished from each other even in areas with large masses. Considering that mass spectra appear one at a time as mentioned earlier, it is best to set the peak width ΔM of the mass spectrum as large as possible to the extent that a mass number difference of 1 can be identified in order to increase sensitivity. Therefore, there is no point in reducing ΔM unnecessarily. Therefore, the slope of Uo and the U, V relationship straight line in FIG. 6A is usually set so that ΔM=1.

(発明が解決しようとする問題点) 上述したピーク幅一定の走査方式には次のよう
な問題がある。U−V平面上で各質量の安定曲線
の左側の裾は全て原点に集つており、第6図Aに
見られるようにピーク幅一定の走査におけるU,
V軌跡はΔMを1近に設定しようとすると質量数
1付近から以下の所で全ての質量の安定曲線の下
に入り、結局質量スペクトルは第6図Bに示すよ
うに質量数1以下では全イオンを検出してしま
い、質量数1のイオンを分離して検出することが
できない。
(Problems to be Solved by the Invention) The above-described scanning method with a constant peak width has the following problems. On the UV plane, the left tails of the stability curves for each mass all converge at the origin, and as seen in Figure 6A, U in a scan with a constant peak width,
If we try to set ΔM close to 1, the V locus will fall below the stability curve for all masses from near mass number 1 to ions are detected, and ions with mass number 1 cannot be separated and detected.

(問題点解決のための手段) 本発明は第1図Aに示すようにU−V平面上に
おける直流電圧Uと高周波電圧Vとの走査軌跡
を、ピーク幅一定の走査軌跡において、質量数1
の付近で上方に曲げ、VをOに近づける過程では
UはOになることなく、V=OにおいてU=一定
値Upを持つような形にした。
(Means for Solving Problems) As shown in FIG.
In the process of bending upward near , and bringing V closer to O, U does not become O, but is shaped so that U has a constant value Up at V=O.

(作用) 上述したような走査軌跡を用いると走査軌跡は
質量の安定曲線の下で他の2以上の質量の安定曲
線の上を通るので、質量スペクトルは第1図Bの
ようになり、質量数1の所のピークaは全イオン
ではなく質量数1のイオンのピークを示すことに
なる。
(Function) When the above-mentioned scanning trajectory is used, the scanning trajectory passes below the mass stability curve and above the other two or more mass stability curves, so the mass spectrum becomes as shown in Figure 1B, and the mass The peak a in equation 1 indicates the peak of ions with a mass number of 1, not all ions.

(実施例) 第2図に本発明の原理的な一実施例の回路を示
す。Qは四重極の各電極棒で対向する2本ずつが
一対となつて結線され、両対間に反対極性の電圧
が印加される。REは高周波発振器であり、その
出力はコンデンサCを介して四重極電極Qの一対
に印加される。RFの出力は整流回路Dで直流化
され、その直流出力電圧は引算回路SBに印加さ
れ、一定電圧Uoが引算され、SBの出力がダイオ
ードd1、チヨークコイルLを介して四重極Qの
一対に印加される。又整流回路Dの出力はコンパ
レータCPで基準電圧Vと比較され、高周波発振
器RFはコンパレータCPの出力信号により、高周
波出力電圧(波高値)が基準電圧Vと等しくなる
ように制御される。このフイードバツク系によ
り、基準値Vを変えることにより質量走査が行わ
れる。四重極Qに印加する直流電圧UはRFの出
力を整流したものであるから、Vと直線的関係を
保つており、引算回路SBによりバイアスUoが与
えられている。またダイオードd1と高周波チヨ
ークLとの間にダイオードd2を介して直流電源
Upが接続してある。四重極電極Qの一対に印加
される高周波電圧Vが増加するに従い、同電極に
印加される直流電圧Uは高くなつて行く。このU
が直流電源Upより高いときはd2は遮断状態で
Vの変化に従つてUが変化しているが、Uの値が
Upより低くなるとd1が遮断状態となり四重極
に印加される直流電圧は一定値Upになる。四重
極電極Qの他の一対に印加される直流電圧Uは引
算回路SBの出力を反転回路Inによつて極性が反
転された後ダイオードd1′を介して出力される
電圧であり、この電圧Uが直流電圧Up′(=Up)
以下になると、d1′が遮断状態となり、d2′を
介して一定電圧Up′が印加されるようになる。
(Embodiment) FIG. 2 shows a circuit according to an embodiment of the present invention. Q is connected as a pair of two opposing electrodes of each quadrupole, and a voltage of opposite polarity is applied between the two pairs. RE is a high frequency oscillator, the output of which is applied to a pair of quadrupole electrodes Q via a capacitor C. The output of RF is converted into DC by rectifier circuit D, the DC output voltage is applied to subtraction circuit SB, a constant voltage Uo is subtracted, and the output of SB is applied to quadrupole Q via diode d1 and chiyoke coil L. Applied to a pair. The output of the rectifier circuit D is compared with a reference voltage V by a comparator CP, and the high frequency oscillator RF is controlled so that the high frequency output voltage (peak value) is equal to the reference voltage V by the output signal of the comparator CP. Mass scanning is performed by changing the reference value V using this feedback system. Since the DC voltage U applied to the quadrupole Q is the rectified RF output, it maintains a linear relationship with V, and is given a bias Uo by the subtraction circuit SB. In addition, a DC power supply is connected between the diode d1 and the high frequency choke L via the diode d2.
Up is connected. As the high frequency voltage V applied to the pair of quadrupole electrodes Q increases, the DC voltage U applied to the quadrupole electrodes increases. This U
When is higher than the DC power supply Up, d2 is cut off and U changes as V changes, but the value of U changes.
When it becomes lower than Up, d1 enters the cutoff state and the DC voltage applied to the quadrupole becomes a constant value Up. The DC voltage U applied to the other pair of quadrupole electrodes Q is the voltage that is output via the diode d1' after the polarity of the output of the subtraction circuit SB is inverted by the inversion circuit In. Voltage U is DC voltage Up′ (=Up)
When the voltage is below, d1' becomes cut off, and a constant voltage Up' is applied via d2'.

上述した実施例では四重極に印加される交流電
圧Vが或る値以下になると直流電圧Uは一定値
Upに固定される。
In the embodiment described above, when the AC voltage V applied to the quadrupole becomes below a certain value, the DC voltage U becomes a constant value.
Fixed to Up.

第3図の実施例は第1図Aに示すように高周波
電圧VがV′以下の領域で直流電圧Uはゆるやか
な勾配を以つて変化し、V=Oにおいて一定値
Upとなるようにしたものである。第2図の実施
例と異る所は第2図の直流電源Up,Up′の部分
で引算回路SBより増幅倍率の小さい加算回路AD
によつて整流回路Dの出力に一定電圧dUを加算
した電圧をダイオードd1,d2等よりなるOR
回路に入力するようにした点である。その他第2
図の各部と対応する部分には同じ符号をつけて
一々の説明は省略する。
In the embodiment of FIG. 3, as shown in FIG. 1A, in the region where the high frequency voltage V is below V', the DC voltage U changes with a gentle slope, and remains constant at V=O.
It is designed so that it becomes Up. The difference from the embodiment shown in Fig. 2 is the DC power supplies Up and Up' in Fig. 2, which are the addition circuit AD, which has a smaller amplification factor than the subtraction circuit SB.
The voltage obtained by adding a constant voltage dU to the output of the rectifier circuit D is determined by OR consisting of diodes d1, d2, etc.
The point is that it is input to the circuit. Other 2nd
Components corresponding to those in the figure are given the same reference numerals, and individual explanations will be omitted.

(効果) 本発明によれば上述したように、四重極質量分
析装置で質量スペクトルの各ピークの幅を単位質
量に設定して走査を行い、しかも質量数1のピー
クも分離して検出できるので、全質量範囲にわた
つて高感度のイオン検出が可能となる。
(Effects) According to the present invention, as described above, a quadrupole mass spectrometer performs scanning by setting the width of each peak in a mass spectrum to a unit mass, and can also separate and detect a peak with a mass number of 1. Therefore, highly sensitive ion detection is possible over the entire mass range.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明を説明するグラフ、第2図は本
発明の一実施例の回路図、第3図は他の実施例の
回路図、第4図は四重極質量分析装置の四重極に
印加する電圧の種類を説明する図、第5図は定分
解能走査の説明図、第6図は従来のピーク幅一定
の走査の説明図である。
Figure 1 is a graph explaining the present invention, Figure 2 is a circuit diagram of one embodiment of the present invention, Figure 3 is a circuit diagram of another embodiment, and Figure 4 is a quadrupole mass spectrometer. FIG. 5 is a diagram illustrating the types of voltages applied to the poles, FIG. 5 is a diagram illustrating constant resolution scanning, and FIG. 6 is a diagram illustrating conventional scanning with a constant peak width.

Claims (1)

【特許請求の範囲】[Claims] 1 四重極質量分析装置を用い、四重極に印加す
る直流電圧Uと高周波電圧Vとを質量スペクトル
の幅ΔMが単位質量数になるような走査軌跡にお
いて、同軌跡が高周波電圧がOになる以前に直流
電圧UがOとなることがないよう質量数1の付近
から質量数Oにかけて直流電圧が走査軌跡の他部
分と同じ極性を有するよう反曲を与えることを特
徴とする質量分析方法。
1 Using a quadrupole mass spectrometer, scan the DC voltage U and high-frequency voltage V applied to the quadrupole on a scanning trajectory such that the width ΔM of the mass spectrum is the unit mass number, and the same trajectory is such that the high-frequency voltage becomes O. A mass spectrometry method characterized by giving a recursion so that the DC voltage has the same polarity as the other part of the scanning locus from the vicinity of the mass number 1 to the mass number O so that the DC voltage U does not become O before it becomes .
JP60106477A 1985-05-17 1985-05-17 Mass analyzing method Granted JPS61264653A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60106477A JPS61264653A (en) 1985-05-17 1985-05-17 Mass analyzing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60106477A JPS61264653A (en) 1985-05-17 1985-05-17 Mass analyzing method

Publications (2)

Publication Number Publication Date
JPS61264653A JPS61264653A (en) 1986-11-22
JPH0580786B2 true JPH0580786B2 (en) 1993-11-10

Family

ID=14434578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60106477A Granted JPS61264653A (en) 1985-05-17 1985-05-17 Mass analyzing method

Country Status (1)

Country Link
JP (1) JPS61264653A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4684287B2 (en) * 2004-05-05 2011-05-18 エムディーエス インコーポレイテッド ドゥーイング ビジネス アズ エムディーエス サイエックス Method and apparatus for mass selective axial ejection

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513239A (en) * 1974-05-28 1976-01-12 Minnesota Mining & Mfg

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513239A (en) * 1974-05-28 1976-01-12 Minnesota Mining & Mfg

Also Published As

Publication number Publication date
JPS61264653A (en) 1986-11-22

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