JPH058013Y2 - - Google Patents
Info
- Publication number
- JPH058013Y2 JPH058013Y2 JP1985021823U JP2182385U JPH058013Y2 JP H058013 Y2 JPH058013 Y2 JP H058013Y2 JP 1985021823 U JP1985021823 U JP 1985021823U JP 2182385 U JP2182385 U JP 2182385U JP H058013 Y2 JPH058013 Y2 JP H058013Y2
- Authority
- JP
- Japan
- Prior art keywords
- machining
- pipe
- electrode
- workpiece
- pad body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000003754 machining Methods 0.000 claims description 57
- 239000012530 fluid Substances 0.000 claims description 33
- 239000011148 porous material Substances 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 230000002265 prevention Effects 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000009760 electrical discharge machining Methods 0.000 description 1
- 239000003350 kerosene Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 210000002445 nipple Anatomy 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
Landscapes
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Description
【考案の詳細な説明】
〔産業上の利用分野〕
本発明は、加工用電極としてパイプ状の電極を
用い放電加工や放電電解加工等の電気加工により
細孔加工、特に孔径に対して深い孔又は長い貫通
孔を高速で加工するための細孔加工用治具に関す
る。[Detailed description of the invention] [Industrial application field] The present invention uses a pipe-shaped electrode as a machining electrode to perform fine hole machining, particularly deep hole machining with respect to the hole diameter, by electrical machining such as electric discharge machining and electric discharge electrolytic machining. The present invention also relates to a small hole machining jig for machining long through holes at high speed.
一般に工作物に孔明をする方法には、機械的に
加工を行なうドリル加工、レーザ光線によるレー
ザ加工の他、棒状電極を用いて放電加工や電解加
工等の電気加工により行なうことが公知である。
しかしながら、工作物の板厚が厚くなつたり、難
削材の場合には、上記電気加工に依存することに
なる。しかして、棒状電極としてパイプ状の電極
を使用する電気加工では、火災の恐れのない水系
加工液を高圧力噴流供給して加工を行なう放電加
工で、真鍮パイプ0.8mm径の電極で20mm厚さの鋼
板をわずか10数秒で貫通させることが可能となつ
た（例えば、特開昭56−69033号公報）ため、斯
種高圧水系加工液を用いる放電加工が、細孔加工
として用いられるようになつてきた。
In general, known methods for making holes in a workpiece include mechanical drilling, laser machining using a laser beam, and electrical machining such as electric discharge machining and electrolytic machining using a rod-shaped electrode.
However, when the thickness of the workpiece becomes thick or the workpiece is made of a material that is difficult to cut, it becomes dependent on the above-mentioned electrical machining. However, in electrical machining that uses a pipe-shaped electrode as a rod-shaped electrode, in electrical discharge machining that processes by supplying a high-pressure jet of water-based machining fluid that does not pose a risk of fire, a brass pipe with a diameter of 0.8 mm and a 20 mm thick electrode are used. As it became possible to penetrate a steel plate in just a few seconds (for example, Japanese Patent Application Laid-open No. 56-69033), electric discharge machining using this type of high-pressure water-based machining fluid came to be used for fine hole machining. It's here.
しかし細孔加工用長尺電極にパイプ電極を用い
て放電加工をするときには、パイプ電極の内から
加工液を高圧で噴射する為加工液が周囲に散つ
て、汚したり、又、その加工液がケロシン等石油
類でなく水系であるところから廻りの金属類を発
錆させたりする。
However, when performing electric discharge machining using a pipe electrode as a long electrode for fine hole machining, the machining fluid is sprayed at high pressure from inside the pipe electrode, which may cause the machining fluid to scatter and contaminate the surrounding area. Since it is water-based rather than petroleum-based, such as kerosene, it can cause rust on surrounding metals.
又、細孔加工の速度を向上させるために、例え
ば、特開昭59−93239号公報記載のような炭素粒、
その他の添加物が添加された水系加工液を用いる
ことになるが、かかる場合の加工液飛散による汚
染は大きな問題であつた。又、細いパイプ電極で
ある為にその先端部の位置が不安定であると言う
問題もあつた。 In addition, in order to improve the speed of pore processing, for example, carbon particles as described in JP-A-59-93239,
An aqueous machining fluid to which other additives have been added is used, but contamination due to scattering of the machining fluid in such cases has been a major problem. Another problem was that the position of the tip of the electrode was unstable because it was a thin pipe electrode.
本考案の細孔加工用治具は、上述した問題点の
解決を目的とするものであつて、パイプ状電極と
同軸状に配置され該パイプ状電極の案内用貫通孔
を有する円筒状の電極案内と、該円筒状電極案内
を同軸状に囲繞して配置され該円筒状電極案内の
一端部に嵌合し他端部に於て該他端部の外径より
も大きい内径を有し該他端部の外周面との間に環
状の空所を形成すると共に該環状空所に連通する
加工液排出孔を有する円筒状の加工液飛散防止パ
ツド本体と、該パツド本体の上記環状空所を形成
する側の先端部に該先端部端面よりも突出して設
けられ工作物表面に当接して上記先端部端面と工
作物表面との間をシールする環状シール部材とか
ら成ることを特徴とする。
The purpose of the pore processing jig of the present invention is to solve the above-mentioned problems. a guide, which is disposed coaxially surrounding the cylindrical electrode guide, fits into one end of the cylindrical electrode guide, and has an inner diameter larger at the other end than an outer diameter of the other end; A cylindrical machining fluid scattering prevention pad body forming an annular cavity between the pad body and the outer peripheral surface of the other end and having a machining fluid discharge hole communicating with the annular cavity, and the annular cavity of the pad body. It is characterized by comprising an annular sealing member provided at the tip on the side forming the tip so as to protrude beyond the end surface of the tip and abut against the surface of the workpiece to seal between the end surface of the tip and the surface of the workpiece. .
パイプ状電極と工作物をパイプ状電極の軸方向
と直交する平面上に相対的に移動させて所定の加
工位置に位置決めし、円筒状電極案内を挿通した
パイプ状電極の先端を工作物表面に接近させ、パ
ツド本体先端部の環状シール部材を工作物表面に
当接させた後、パイプ電極の内から加工液を噴流
すると共に、パイプ電極と工作物との間に放電加
工電源からの加工電圧を印加して孔明加工をす
る。そのとき加工する孔に向かつて噴出した加工
液は工作物表面と環状シール部材とで囲まれたパ
ツド本体の環状空所部に溜り、該環状空所に連通
する加工液排出孔からパツド本体外に排出され、
パイプを介して適宜廃棄乃至は加工液供給装置に
環流されるため、パイプ状電極から噴出した加工
液が飛散することがなく、周囲の機器装置類や環
境を汚染することがない。又、円筒状電極案内の
先端部を囲繞して環状空所を形成するようにパツ
ド本体が構成さていて、円筒状電極案内の先端を
工作物表面に充分に接近させた位置でパイプ状電
極の保持案内が行なわれるため、パイプ状電極を
所定加工位置に安定した状態で精度良く保持案内
することができる。
The pipe-shaped electrode and the workpiece are moved relative to each other on a plane perpendicular to the axial direction of the pipe-shaped electrode, positioned at a predetermined processing position, and the tip of the pipe-shaped electrode, which has been inserted through the cylindrical electrode guide, is placed on the surface of the workpiece. After bringing the pads close together and bringing the annular seal member at the tip of the pad body into contact with the workpiece surface, machining fluid is jetted from inside the pipe electrode, and a machining voltage from the electric discharge machining power supply is applied between the pipe electrode and the workpiece. is applied to perform perforation processing. At that time, the machining fluid that spouted toward the hole to be machined collects in the annular cavity of the pad body surrounded by the workpiece surface and the annular seal member, and is discharged from the pad body from the machining fluid discharge hole communicating with the annular cavity. is discharged into
Since the machining fluid is appropriately disposed of or recycled to the machining fluid supply device via the pipe, the machining fluid ejected from the pipe-shaped electrode does not scatter, and does not contaminate surrounding equipment or the environment. In addition, the pad body is configured to surround the tip of the cylindrical electrode guide to form an annular cavity, and the pipe-shaped electrode is placed at a position where the tip of the cylindrical electrode guide is brought sufficiently close to the workpiece surface. Since the holding and guiding is performed, the pipe-shaped electrode can be held and guided precisely at a predetermined processing position in a stable state.
次に本考案を例示した図に基づいて説明をす
る。第１図に於て、ベツド１にテーブル２が載置
されている。このテーブル２は図示していない制
御装置で制御されながら、ベツド１上を互いに直
角なXYの方向に移動できるような公知の構成を
もつたものであつてもよいし、このテーブル２の
移動に代つてテーブル２の後方に設けたコラム３
が互いに直角なXY方向に移動することができる
ように構成されていてもよい。コラム３にはコラ
ム３上を鉛直方向に移動するヘツド４が設けら
れ、このヘツド４にスリーブ５が支持されてい
る。しかしスリーブ５がヘツド４内を鉛直方向に
移動する構成のときは、ヘツド４はコラム３に固
定しておいてよい。スリーブ５に軸の廻りに往復
回転又は回転するように支持されたスピンドル６
の先端にチヤツク７を設け、チヤツク７に固着し
たパイプ電極８の先端をテーブル２に固定した工
作物９に向ける。このパイプ電極８の先端を囲ん
だ合成樹脂製のパツド本体１０を支持する支持ア
ーム１１はベース１２に取付けられ、ベース１２
はコラム３に直接固着されるか、モータ１３で鉛
直方向に、更には水平面上を互いに直角なXY方
向に移動させることができるガイド１４に取付け
てもよい。１５は前記の水系加工液を入れるタン
クである。
Next, the present invention will be explained based on figures illustrating the invention. In FIG. 1, a table 2 is placed on a bed 1. This table 2 may have a known configuration that allows it to move on the bed 1 in mutually perpendicular X and Y directions while being controlled by a control device (not shown). Column 3 installed behind table 2 instead
may be configured to be able to move in XY directions that are perpendicular to each other. The column 3 is provided with a head 4 that moves vertically on the column 3, and a sleeve 5 is supported on the head 4. However, when the sleeve 5 is configured to move vertically within the head 4, the head 4 may be fixed to the column 3. A spindle 6 supported by the sleeve 5 so as to reciprocate or rotate around an axis.
A chuck 7 is provided at the tip of the chuck 7, and the tip of a pipe electrode 8 fixed to the chuck 7 is directed toward a workpiece 9 fixed to the table 2. A support arm 11 that supports a synthetic resin pad body 10 surrounding the tip of the pipe electrode 8 is attached to a base 12.
may be directly fixed to the column 3, or may be attached to a guide 14 that can be moved by a motor 13 in the vertical direction and further in the XY directions perpendicular to each other on a horizontal plane. 15 is a tank for storing the aqueous processing fluid.
第２図に於て、支持アーム１１の先端に支持さ
れたパツド加工液飛散防止パツド本体１０には同
軸状に円筒状電極案内１６が嵌合され、パイプ電
極８をガイドする。１７はパツド本体１０と円筒
状電極案内１６間をシールするオーリングであ
る。加工液飛散防止パツド本体１０は、全体とし
て円筒状で、円筒状電極案内１６を同軸状に囲繞
して配置され、上記したように円筒状電極案内１
６の一端部に嵌合し、他端部に於て該他端部の外
径よりも大きい内径を有し該他端部の外周面との
間に環状の空所１８を形成し、該環状空所１８に
連通する加工液排出孔２０を有する。 In FIG. 2, a cylindrical electrode guide 16 is coaxially fitted into the pad body 10 for preventing scattering of the pad machining liquid supported at the tip of the support arm 11, and guides the pipe electrode 8. 17 is an O-ring that seals between the pad body 10 and the cylindrical electrode guide 16. The machining fluid scattering prevention pad main body 10 has a cylindrical shape as a whole and is disposed coaxially surrounding the cylindrical electrode guide 16, and as described above, the cylindrical electrode guide 1
6, the other end has an inner diameter larger than the outer diameter of the other end, and an annular space 18 is formed between the outer peripheral surface of the other end and the outer peripheral surface of the other end. It has a machining fluid discharge hole 20 that communicates with the annular cavity 18 .
又、１９は、パツド本体１０の上記環状空所１
８を形成する側の先端部に該先端部端面よりも突
出して設けられ工作物９表面に当接して上記先端
部端面と工作物表面との間をシールする環状シー
ル部材であり、スポンジ等の弾性合成樹脂から形
成することが望ましい。加工液排出孔２０は、パ
ツド本体１０に螺着又は接着剤により取付けられ
たニツプル２１に一端が嵌着するパイプ２２に連
通している。そのパイプ２２の他端はタンク１５
に設けたＴ字形のアスピレータ２３に嵌着してい
る。このアスピレータ２３はタンク１５内に開口
すると共に圧縮空気を送るパイプ２４を嵌着して
いる。タンク１５には加工液２５を攪拌するとこ
ろのモータ２６で回転するスクリユ２７と加工液
を供給するパイプ２８とタンク１５内に加工液２
５を補給し、且つ、余分な加工液２５を戻すドレ
ン用のパイプ２９が設けられている。パイプ２４
によつて送られてくる圧縮空気をアスピレータ２
３を通してタンク１５内に噴射すると、負圧を発
生する噴流方向と直角の方向に嵌着されているパ
イプ２２を通して、環状空所１８内の加工液を吸
引し、タンク１５内に圧縮空気と共に噴出する。
一方、加工液２５は図示していない所定の高圧ポ
ンプにより、パイプ２８を通つて、ヘツド４、ス
リーブ５、スピンドル６、チヤツク７、及びスリ
ーブ５中等に設けられる高圧加工液供給用の図示
しない水密回転ジヨイト等を介してパイプ電極８
の先端より、孔明加工部分に噴流する。支持アー
ム１１はベース１２やコラム３に固定したもので
もよいが、モータ１３でガイド１４上を鉛直方向
に移動させ、先ず、上方に移動させて、パイプ電
極８の先端位置を確認した後に、パイプ電極８に
沿つて下降させるようにしてもよい。更にXY方
向に微動させて電極８の鉛直方向の軸心に合せる
ようにする。 Further, 19 is the annular space 1 of the pad body 10.
It is an annular sealing member that is provided at the tip end on the side forming the tip 8 to protrude beyond the end surface of the tip and comes into contact with the surface of the workpiece 9 to seal between the end surface of the tip and the surface of the workpiece. Preferably, it is made of elastic synthetic resin. The machining fluid discharge hole 20 communicates with a pipe 22, one end of which is fitted into a nipple 21 attached to the pad body 10 by screws or adhesive. The other end of the pipe 22 is the tank 15
It is fitted into a T-shaped aspirator 23 provided in the. This aspirator 23 opens into the tank 15 and has a pipe 24 fitted therein for sending compressed air. The tank 15 includes a screw 27 rotated by a motor 26 that stirs the machining fluid 25, a pipe 28 for supplying the machining fluid, and the machining fluid 2 in the tank 15.
A drain pipe 29 is provided for replenishing the machining fluid 5 and returning excess machining fluid 25. pipe 24
The compressed air sent by the aspirator 2
3 into the tank 15, the machining fluid in the annular cavity 18 is sucked through the pipe 22 fitted in the direction perpendicular to the direction of the jet that generates negative pressure, and is jetted into the tank 15 together with compressed air. do.
On the other hand, the machining fluid 25 is supplied to the head 4, sleeve 5, spindle 6, chuck 7, sleeve 5, etc. through a pipe 28 by a predetermined high-pressure pump (not shown) to a water-tight pump (not shown) for supplying high-pressure machining fluid. Pipe electrode 8 via rotating joint etc.
A jet flows from the tip to the perforated area. The support arm 11 may be fixed to the base 12 or the column 3, but the support arm 11 is moved vertically on the guide 14 by the motor 13, first moved upward, and after confirming the position of the tip of the pipe electrode 8, the support arm 11 is fixed to the base 12 or column 3. It may be made to descend along the electrode 8. Further, it is made to move slightly in the XY directions to align with the vertical axis of the electrode 8.
本考案によれば、パイプ状電極８の内部を通つ
て先端から噴出した加工液は、環状シール部材１
９により工作物９表面との間がシールされたパツ
ド本体１０内部の環状空所に溜り、ここから加工
液排出孔２０を介してパツド本体１０の外部に吸
引等排出処理されるから、加工部に供給した加工
液が飛散して周辺の機器装置類を汚したり発錆さ
せたりすることがない。又、パツド本体１０が円
筒状電極案内１６の先端部を囲繞して環状空所を
形成するように構成されているため、円筒状電極
案内１６の先端を工作物９表面に充分に接近させ
た位置でパイプ状電極８を保持案内することがで
き、パイプ状電極を所定加工位置に安定した状態
で精度よく保持案内して高精度の加工を行なうこ
とができる。又、円筒状電極案内１６はパツド本
体１０に嵌合する構成であるから、使用するパイ
プ状電極の径に応じて円筒状電極案内１６を容易
に交換使用することができる。
According to the present invention, the machining fluid ejected from the tip of the pipe-shaped electrode 8 passes through the annular seal member 1.
The machining fluid collects in an annular space inside the pad body 10 sealed with the surface of the workpiece 9 by 9, and is discharged by suction etc. from there to the outside of the pad body 10 via the machining fluid discharge hole 20. The machining fluid supplied to the machine will not scatter and contaminate surrounding equipment or cause rust. Furthermore, since the pad body 10 is configured to surround the tip of the cylindrical electrode guide 16 to form an annular space, the tip of the cylindrical electrode guide 16 can be brought sufficiently close to the surface of the workpiece 9. The pipe-shaped electrode 8 can be held and guided at a certain position, and the pipe-shaped electrode can be held and guided with precision in a stable state at a predetermined processing position to perform highly accurate processing. Further, since the cylindrical electrode guide 16 is configured to fit into the pad body 10, the cylindrical electrode guide 16 can be easily replaced depending on the diameter of the pipe-shaped electrode to be used.
第１図は本考案の装置を備えた加工機の全体
図、第２図は本考案を示す図である。
２……テーブル、８……パイプ電極、９……工
作物、１０……パツド本体、１１……支持アー
ム、１６……電極案内、１８……環状空所、１９
……シール部材。
FIG. 1 is an overall view of a processing machine equipped with the device of the present invention, and FIG. 2 is a diagram showing the present invention. 2... Table, 8... Pipe electrode, 9... Workpiece, 10... Pad body, 11... Support arm, 16... Electrode guide, 18... Annular cavity, 19
...Seal member.
Claims (1)
イプ状電極の先端部を工作物に対向させ、該対向
間〓に加工液をパイプ状電極内を通して供給する
と共にパイプ状電極に軸方向の加工送りを与えて
電気加工により細孔を形成する細孔加工用の治具
であつて、パイプ状電極と同軸状に配置され該パ
イプ状電極の案内用貫通孔を有する円筒状の電極
案内と、該円筒状電極案内を同軸状に囲繞して配
置され該円筒状電極案内の一端部を嵌合し他端部
に於て該他端部の外径よりも大きい内径を有し該
他端部の外周面との間に環状の空所を形成すると
共に該環状空所に連通する加工液排出孔を有する
円筒状の加工液飛散防止パツド本体と、該パツド
本体の上記環状空所を形成する側の先端部に該先
端部端面よりも突出して設けられ工作物表面に当
接して上記先端部端面と工作物表面との間をシー
ルする環状シール部材とから成る細孔加工用治
具。 A pipe-shaped electrode is used as a machining electrode, and the tip of the pipe-shaped electrode is opposed to the workpiece, and machining fluid is supplied through the pipe-shaped electrode between the opposing sides, and machining feed in the axial direction is applied to the pipe-shaped electrode. A pore processing jig for forming pores by electrical machining by giving The cylindrical electrode guide is arranged coaxially surrounding the cylindrical electrode guide, one end of the cylindrical electrode guide is fitted into the cylindrical electrode guide, and the other end has an inner diameter larger than the outer diameter of the other end. A cylindrical machining fluid scattering prevention pad body forming an annular cavity between the pad body and the outer peripheral surface and having a machining fluid discharge hole communicating with the annular cavity, and a side of the pad body forming the annular cavity. A jig for pore machining, comprising: an annular sealing member provided at a distal end of the tool so as to protrude beyond the end surface of the distal end, and abuts against the surface of the workpiece to seal between the end surface of the distal end and the surface of the workpiece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985021823U JPH058013Y2 (en) | 1985-02-18 | 1985-02-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985021823U JPH058013Y2 (en) | 1985-02-18 | 1985-02-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61137425U JPS61137425U (en) | 1986-08-26 |
| JPH058013Y2 true JPH058013Y2 (en) | 1993-03-01 |
Family
ID=30513569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985021823U Expired - Lifetime JPH058013Y2 (en) | 1985-02-18 | 1985-02-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH058013Y2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2565680B2 (en) * | 1986-05-27 | 1996-12-18 | 株式会社ソディック | Perforation electric discharge machining attachment |
| JPH0737789Y2 (en) * | 1988-03-24 | 1995-08-30 | 西部電機株式会社 | Pipe electrode guide holder device |
| JP5147984B2 (en) * | 2011-11-12 | 2013-02-20 | 賢造 堀江 | Fine hole electric discharge machining apparatus and fine hole electric discharge machining method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS493852A (en) * | 1972-03-30 | 1974-01-14 | ||
| JPS5942822B2 (en) * | 1978-02-21 | 1984-10-17 | 株式会社村田製作所 | Analysis equipment |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5942822U (en) * | 1982-09-10 | 1984-03-21 | 株式会社東芝 | electrical discharge machine |
-
1985
- 1985-02-18 JP JP1985021823U patent/JPH058013Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS493852A (en) * | 1972-03-30 | 1974-01-14 | ||
| JPS5942822B2 (en) * | 1978-02-21 | 1984-10-17 | 株式会社村田製作所 | Analysis equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61137425U (en) | 1986-08-26 |
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