JPH0576637B2 - - Google Patents
Info
- Publication number
- JPH0576637B2 JPH0576637B2 JP58143191A JP14319183A JPH0576637B2 JP H0576637 B2 JPH0576637 B2 JP H0576637B2 JP 58143191 A JP58143191 A JP 58143191A JP 14319183 A JP14319183 A JP 14319183A JP H0576637 B2 JPH0576637 B2 JP H0576637B2
- Authority
- JP
- Japan
- Prior art keywords
- spanning
- electrode
- electrode group
- band
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 claims description 9
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- 239000010408 film Substances 0.000 description 16
- 239000011521 glass Substances 0.000 description 12
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000005566 electron beam evaporation Methods 0.000 description 4
- 238000000605 extraction Methods 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000007772 electrode material Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- -1 manganese-activated zinc sulfide Chemical class 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910001120 nichrome Inorganic materials 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明は数多くの絵素を有する固体映像表示板
およびその製造法に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a solid-state image display panel having a large number of picture elements and a method for manufacturing the same.
従来例の構成とその問題点
従来より電場発光螢光体を用いた固体映像表示
装置としては、Ｘ−Ｙマトリツクス表示装置が知
られている。この装置は電場発光層の両面に水平
平行電極群と垂直平行電極群とを互いに直交する
ように配置し、それぞれの電極群に接続された給
電線により切換装置を通して信号を加えて両電極
の交点部分の電場発光層（以下、EL層と略称す
る）を発光させ（この交点の発光部分面を絵素と
称する）、発光絵素の組合せによつて文字信号，
図形等を表示させるものである。2. Description of the Related Art Structure and Problems Thereof Conventionally, an X-Y matrix display device has been known as a solid-state image display device using an electroluminescent phosphor. In this device, a group of horizontal parallel electrodes and a group of vertical parallel electrodes are arranged perpendicularly to each other on both sides of an electroluminescent layer, and a signal is applied through a switching device by a feeder line connected to each electrode group, and a signal is applied to the intersection of both electrodes. The electroluminescent layer (hereinafter abbreviated as EL layer) of the part is made to emit light (the light emitting part surface at this intersection is called a picture element), and character signals,
It is used to display figures, etc.
ここで用いられる固体映像表示板は、通常ガラ
スなどの透光性基板上に透明平行電極群を形成
し、その上に電場発光層および発光制御層を順次
積層し、さらにその上に背面平行電極群を下層の
透明平行電極群に直交する配置で積層して形成す
る。各電極群には給電線への接続のために引出し
端子が設けられる。 The solid-state display board used here usually has a group of transparent parallel electrodes formed on a transparent substrate such as glass, an electroluminescent layer and a light emission control layer are sequentially laminated on top of the transparent parallel electrode group, and a rear parallel electrode is further layered on top of that. The electrodes are stacked in an arrangement perpendicular to the underlying transparent parallel electrode group. Each electrode group is provided with a lead terminal for connection to a power supply line.
一般に透明平行電極群としては平滑なガラス基
板上に酸化錫を被着するなどにより形成される。
これに直交させて、対向する平行電極群がアルミ
ニウムの真空蒸着などにより形成される。これら
のそれぞれの電極群から給電線を引出すには、各
電極群に設けられた引出し端子へ給電線を接続す
ることによつておこなう。 Generally, the transparent parallel electrode group is formed by depositing tin oxide on a smooth glass substrate.
Orthogonally to this, a group of parallel electrodes facing each other is formed by vacuum evaporation of aluminum or the like. In order to draw out the feeder line from each of these electrode groups, the feeder line is connected to a drawer terminal provided in each electrode group.
この場合、表示板の表示面積が大きくなるほ
ど、あるいは表示面積は同じでも表示面密度が大
きくなつて電極幅が狭くなるほど透明平行電極の
長さ方向の電気抵抗値が大きくなり、電極の一端
のみからの給電では電圧降下が大きくなつて、電
極の長さ方向の発光強度に傾斜が生じ、給電端か
ら遠ざかる程暗くなる。 In this case, as the display area of the display board becomes larger, or even if the display area is the same but the display surface density becomes larger and the electrode width becomes narrower, the electric resistance value in the length direction of the transparent parallel electrodes becomes larger. When feeding electricity, the voltage drop increases, and the emission intensity in the length direction of the electrode becomes sloped, and the farther from the feeding end, the darker the light becomes.
一般に電極の電気抵抗は断面積に反比例するた
め、幅が決まつている場合には厚みを増せば抵抗
値を減ずることはできるが、電場発光螢光体を用
いた固定映像表示板では、この電極の厚みを大き
くすると電極の端で生じる段差が大きくなり、
EL層の絶縁破壊の原因となる。したがつて、透
明平行電極の厚みを増すことには限界がある。こ
のため、透明平行電極群に対して、この電極材料
より導電性のよい帯状の補助電極（このような補
助電極を差渡し電極と呼ぶ）をそれぞれ対応する
透明平行電極に並列に結合する方法が効果的であ
り、実質上は透明平行電極に対して電極の両端か
ら給電することになる。 Generally, the electrical resistance of an electrode is inversely proportional to its cross-sectional area, so if the width is fixed, the resistance value can be reduced by increasing the thickness. When the thickness of the electrode is increased, the difference in level at the edge of the electrode becomes larger.
This causes dielectric breakdown of the EL layer. Therefore, there is a limit to increasing the thickness of the transparent parallel electrodes. Therefore, for a group of transparent parallel electrodes, there is a method in which strip-shaped auxiliary electrodes (such auxiliary electrodes are called spanning electrodes), which have better conductivity than this electrode material, are connected in parallel to the corresponding transparent parallel electrodes. This is effective, and essentially supplies power to the transparent parallel electrodes from both ends of the electrodes.
差渡し電極としては、例えば単に導電線などを
用いて透明平行電極の両端を接続する方法が考え
られるが、表示板が大きくなり平行電極の数が増
大してくると、この方法では多数の導電線が乱雑
になり易く、配列整理に時間がかかり、作業能率
が低下する。 As the spanning electrode, for example, it is possible to connect both ends of transparent parallel electrodes simply using conductive wires, but as the display board becomes larger and the number of parallel electrodes increases, this method requires a large number of conductive wires. The lines tend to get messy, and it takes time to arrange them, reducing work efficiency.
また、絶縁性基体上にあらかじめ差渡し電極群
を形成しておき、その差渡し電極板の電極と透明
平行電極とを接続する方法も考えられる。しかし
この方法では表示板以外に差渡し電極板が必要で
あり、工程が複雑になり、コスト面や外形寸法的
にも不利である。一般に、電場発光表示板では、
すでに説明した様に、背面平行電極群がアルミニ
ウムで形成されているため、透明基板側から入射
した外光に対する反射率が高く、画像のコントラ
ストが悪くなりがちである。これに対しても対策
が望まれている。 Another possible method is to form a group of spanning electrodes on an insulating substrate in advance and connect the electrodes of the spanning electrode plate to transparent parallel electrodes. However, this method requires a spanning electrode plate in addition to the display plate, complicates the process, and is disadvantageous in terms of cost and external dimensions. Generally, in an electroluminescent display board,
As already explained, since the rear parallel electrode group is made of aluminum, the reflectance of external light incident from the transparent substrate side is high, and the contrast of the image tends to be poor. Countermeasures are also desired for this.
発明の目的
本発明は、上記のように、微細に分割された多
数の電極を有する大型の表示板を製作する際に、
透明平行電極の長さ方向の電気抵抗値をできるだ
け低くし、かつ製作容易でかさばらない差渡し電
極を有する固体映像表示板およびその製造法を提
供することを目的とする。また同時に、差渡し電
極の構成と材料を工夫して、固体映像表示板のコ
ントラスト向上を目的とする。Purpose of the Invention The present invention provides, as described above, when producing a large display panel having a large number of finely divided electrodes.
It is an object of the present invention to provide a solid-state image display board having a longitudinal electrical resistance value of transparent parallel electrodes as low as possible, easy to manufacture, and a non-bulky spanning electrode, and a method for manufacturing the same. At the same time, the aim is to improve the contrast of solid-state image display panels by devising the structure and material of the spanning electrodes.
発明の構成
本発明は上記の目的を達成するために、以下の
ような差渡し電極を用いて固体映像表示板を構成
することを特徴とする。Structure of the Invention In order to achieve the above object, the present invention is characterized in that a solid-state image display board is constructed using the following spanning electrodes.
平滑なガラス基板上に、透明平行電極の電極材
料より導電性のすぐれ、かつ光反射率の小さい電
極材料で透明平行電極の配列間隔と同じ、もしく
はほぼ同じ配列間隔で帯状の補助電極（以下差渡
し電極と称する）群を形成する。その上に上記差
渡し電極の両端部を除いて全面に絶縁膜を形成す
る。その上に上記差渡し電極群と同一方向に透明
平行電極群を形成し、対応する差渡し電極とそれ
ぞれの電極の両端部にて接続する。その上にEL
層および発光制御層を順次積層し、さらにその上
に背面平行電極群を透明平行電極群に直交する配
置で積層して形成する。 On a smooth glass substrate, strip-shaped auxiliary electrodes (hereinafter referred to as auxiliary electrodes) are formed on a smooth glass substrate using an electrode material that has better conductivity and lower light reflectance than the electrode material of the transparent parallel electrodes, and are arranged at the same or almost the same interval as the transparent parallel electrodes. A group of electrodes (referred to as passing electrodes) is formed. Thereon, an insulating film is formed over the entire surface of the spanning electrode except for both ends. A transparent parallel electrode group is formed thereon in the same direction as the spanning electrode group, and is connected to the corresponding spanning electrode at both ends of each electrode. EL on top of that
The layer and the light emission control layer are sequentially laminated, and a back parallel electrode group is further laminated thereon in an arrangement perpendicular to the transparent parallel electrode group.
差渡し電極の幅についてはなるべく広い方が効
果は大きいが、EL層の発光は通常ガラス基板側
に取出されるため、ガラス基板側から見て差渡し
電極と透明平行電極とが重なると光をさえぎり、
効率よく取出せなくなる。したがつて、差渡し電
極の幅は透明平行電極間隔に一致するようにし、
配置も全く重ならないようにすれば効果はもつと
も大きい。このような両電極の関係はたとえば透
明平行電極のパターンを形成するときに、差渡し
電極の必要な個所をフオトマスクとして利用しガ
ラス基板側よりセルフアライメント露光すること
により達成される。 The wider the width of the spanning electrode, the greater the effect, but since the light emitted from the EL layer is usually extracted to the glass substrate side, if the spanning electrode and the transparent parallel electrode overlap when viewed from the glass substrate side, the light will be emitted. Saegiri,
It will not be possible to take it out efficiently. Therefore, the width of the spanning electrode should match the distance between the transparent parallel electrodes,
The effect is even greater if the arrangement is made so that they do not overlap at all. Such a relationship between the two electrodes can be achieved, for example, by performing self-alignment exposure from the glass substrate side, using necessary portions of the spanning electrodes as photomasks when forming a pattern of transparent parallel electrodes.
また、差渡し電極と透明平行電極との接続法に
ついてもいろいろ考えられるが、たとえばメタル
マスク蒸着法により両電極を接続すると、その接
続電極がそのまま給電線の取出し電極として利用
でき効果的である。 Various methods can be considered for connecting the span electrode and the transparent parallel electrode, but for example, connecting the two electrodes by metal mask vapor deposition is effective because the connecting electrode can be used as it is as the lead-out electrode for the power supply line.
このようにして、たとえば電気抵抗値Ｒの透明
平行電極と電気抵抗値１／ＫＲの差渡し電極とを並
列に接続すると、実質的には電気抵抗値Ｒ／（ｋ
＋１）の透明平行電極を用いていることになる。 In this way, for example, if a transparent parallel electrode with an electrical resistance value R and a spanning electrode with an electrical resistance value 1/KR are connected in parallel, the electrical resistance value R/(k
+1) transparent parallel electrodes are used.
上記のように本発明によれば、通常の薄膜形成
法で容易に差渡し電極を作製することができ、し
かも従来の表示板と比較して表示部の実行表示面
積を少しも減じることのない固体映像表示板およ
びその製造法を得ることができる。また、アルミ
ニムウからなる背面電極群の一部を、透明基板側
から見て、光反射率の低いクロム差渡し電極でさ
えぎることになるので、固体映像表示板のコント
ラストも向上できる。 As described above, according to the present invention, it is possible to easily fabricate a spanning electrode using a normal thin film forming method, and in addition, the effective display area of the display section is not reduced in the slightest compared to a conventional display panel. A solid-state image display board and a method for manufacturing the same can be obtained. Furthermore, since a part of the back electrode group made of aluminum is blocked by the chromium span electrode with low light reflectance when viewed from the transparent substrate side, the contrast of the solid-state image display board can also be improved.
実施例の説明
第１図は本発明に係る固体映像表示板の一実施
例を示したもので、図ａは平面図、図ｂはそのＡ
−A′断面図である。１は縦220mm、横220mm、厚
さ１mmの透明なガラス基板であり、２は幅0.15
mm、長さ210mm、厚さ3000Åのクロムからなる差
渡し電極である。３は絶縁層であり、膜厚5000Å
の酸化アルミニウムからなつている。４は酸化イ
ンジウムすず膜（以下ITO膜と称する）よりなる
幅0.15mm、長さ200mm、厚さ2500Åの透明平行電
極であり、その上に膜厚5000Åのマンガン付活硫
化亜鉛をEL発光層５として、膜厚5000Åの酸化
イツトリウムを発光制御層６として積層して形成
されている。７は幅0.15mm、長さ220mm、厚さ
1000Åの、アルミニウムよりなる背面平行電極で
あり、透明平行電極とは直交するような配置とな
つている。透明平行電極４のパターンと差渡し電
極２のパターンとはガラス基板１側から見て全く
重ならないように配置されており、透明平行電極
４の電極間隔は差渡し電極２の線幅に等しい。８
は給電線の取出し電極であり、幅0.2mm、長さ15
mmで膜厚は4000Åであり、ニクロム（膜厚3000
Å）と金（膜厚1000Å）との二層膜であり、透明
平行電極４と差渡し電極２との接続も兼ねてい
る。DESCRIPTION OF EMBODIMENTS FIG. 1 shows an embodiment of a solid-state image display board according to the present invention, in which figure a is a plan view, and figure b is a plan view thereof.
-A' sectional view. 1 is a transparent glass substrate with a length of 220 mm, a width of 220 mm, and a thickness of 1 mm, and 2 is a width of 0.15 mm.
It is a span electrode made of chromium with a length of 210 mm and a thickness of 3000 Å. 3 is an insulating layer with a thickness of 5000 Å
It is made of aluminum oxide. 4 is a transparent parallel electrode made of an indium tin oxide film (hereinafter referred to as ITO film) with a width of 0.15 mm, a length of 200 mm, and a thickness of 2500 Å, and an EL light-emitting layer 5 made of manganese-activated zinc sulfide with a thickness of 5000 Å on top of it. The light emission control layer 6 is formed by laminating yttrium oxide with a thickness of 5000 Å. 7 is width 0.15mm, length 220mm, thickness
It is a back parallel electrode made of aluminum with a thickness of 1000 Å, and is arranged perpendicular to the transparent parallel electrode. The pattern of the transparent parallel electrodes 4 and the pattern of the spanning electrodes 2 are arranged so as not to overlap at all when viewed from the glass substrate 1 side, and the electrode interval of the transparent parallel electrodes 4 is equal to the line width of the spanning electrodes 2. 8
is the extraction electrode of the power supply line, width 0.2 mm, length 15
The film thickness is 4000 Å in mm, and the film thickness is 3000 Å in nichrome (film thickness 3000 Å).
It is a two-layer film of gold (film thickness: 1000 Å) and gold (film thickness: 1000 Å), and also serves as a connection between the transparent parallel electrode 4 and the spanning electrode 2.
つぎに第２図、および第３図を用いて本発明に
かかる固定映像表示板の製造法の一実施例を説明
する。なお、図ａは平面図、図ｂはそれぞれのＢ
−B′断面図、Ｃ−C′断面図である。本発明にかか
る固体映像表示板は一般に以下の手順で製造され
る。まず透明なガラス基板１上に第２図に示すよ
うにクロムの蒸着膜を電子ビーム蒸着で被着し、
エツチングにより差渡し電極２のパターンを形成
する。その上に酸化アルミニウムからなる絶縁層
３、ITO膜９を順次電子ビーム蒸着法で形成し、
その上にポジレジスト膜１０を形成する。次に、
このポジレジスト膜１０を、差渡し電極２をマス
クとして、ガラス基板１側より光を照射して露光
する。その後ポジレジスト膜１０の露光部を除去
し、アルゴンガス２×10-2Torr、200Wのプラズ
マ中でスパツタエツチを行ない、第３図のように
透明平行電極４のパターンを形成する。しかる後
に、マンガン付活硫化亜鉛からなるEL層５、酸
化イツトリウムからなる発光制御層６を順次電子
ビーム蒸着にて積層して形成し、その上にフオリ
ソグラフイにてアルミニウムからなる背面平行電
極７のパターンを形成する。最後にメタルマスク
を用いてニクロム、金を順次電子ビーム蒸着にて
積層して形成し、取出し電極８をパターン形成す
る。 Next, an embodiment of the method for manufacturing a fixed video display board according to the present invention will be described with reference to FIGS. 2 and 3. In addition, figure a is a plan view, figure b is each B
-B' sectional view and CC' sectional view. The solid-state image display board according to the present invention is generally manufactured by the following procedure. First, as shown in FIG. 2, a chromium vapor deposition film is deposited on a transparent glass substrate 1 by electron beam evaporation.
A pattern for the spanning electrode 2 is formed by etching. On top of that, an insulating layer 3 made of aluminum oxide and an ITO film 9 are sequentially formed by electron beam evaporation.
A positive resist film 10 is formed thereon. next,
This positive resist film 10 is exposed to light from the glass substrate 1 side using the spanning electrode 2 as a mask. Thereafter, the exposed portion of the positive resist film 10 is removed, and sputter etching is performed in an argon gas plasma of 2×10 -2 Torr and 200 W to form a pattern of transparent parallel electrodes 4 as shown in FIG. 3. Thereafter, an EL layer 5 made of manganese-activated zinc sulfide and a light emission control layer 6 made of yttrium oxide are sequentially laminated by electron beam evaporation, and a back parallel electrode 7 made of aluminum is formed on top of this by phorisography. form a pattern. Finally, using a metal mask, nichrome and gold are sequentially laminated by electron beam evaporation to form a pattern for the extraction electrode 8.
このとき、取出し電極８にて透明平行電極４と
差渡し電極２とを接続する前後において透明平行
電極４の長さ方向の抵抗値を比較してみると、接
続前は10KΩであり、接続後は740Ωであつて大き
く低下していた。 At this time, when comparing the resistance value in the length direction of the transparent parallel electrode 4 before and after connecting the transparent parallel electrode 4 and the spanning electrode 2 at the extraction electrode 8, it is 10KΩ before the connection, and after the connection. was 740Ω, which was significantly lower.
発明の効果
以上のように、本発明によれば差渡し電極群を
絶縁層を介して透明電極と接続することにより、
透明電極の長さ方向の電気抵抗値を低下させ、し
かも製作容易で、表示板以外にとくに空間を必要
としない差渡し電極を有する固体映像表示板およ
びその製造法を得ることができる。同時に固体映
像表示板のコントラストも改善できる。Effects of the Invention As described above, according to the present invention, by connecting the spanning electrode group to the transparent electrode via the insulating layer,
It is possible to obtain a solid-state image display board having a spanning electrode that reduces the electrical resistance value of the transparent electrode in the longitudinal direction, is easy to manufacture, and does not require any space other than the display board, and a method for manufacturing the same. At the same time, the contrast of the solid-state display panel can also be improved.
第１図ａは本発明の一実施例を示す固体映像表
示板の平面図、同図ｂはそのＡ−A′断面図、第
２図ａおよび第３図ａはその要部の製造過程を示
す平面図、第２図ｂおよび第３図ｂはそれぞれＢ
−B′断面図，Ｃ−C′断面図である。
１……ガラス基板、２……差渡し電極、３……
絶縁層、４……透明平行電極、５……EL発光層、
６……発光制御層、７……背面平行電極、８……
取出し電極、９……ITO膜、１０……ポジレジス
ト膜。
Fig. 1a is a plan view of a solid-state display board showing an embodiment of the present invention, Fig. 1b is a sectional view taken along line A-A', and Figs. The plan views shown in Fig. 2b and Fig. 3b are respectively B.
-B' sectional view and CC' sectional view. 1... Glass substrate, 2... Across electrode, 3...
Insulating layer, 4...Transparent parallel electrode, 5...EL light emitting layer,
6... Light emission control layer, 7... Back parallel electrode, 8...
Extraction electrode, 9... ITO film, 10... positive resist film.
Claims (1)
発光層と発光制御層からなる積層表示層、および
前記帯状透明電極群に直交する配置の帯状背面電
極群が順次積層されてなる固体映像表示板におい
て、前記透明基板上に、互いに平行な帯状の差渡
し電極群を形成し、その上に絶縁層を介して、前
記差渡し電極群と平行同数の前記帯状透明電極群
を前記差渡し電極群のギヤツプ部分に積層し、前
記２種類の電極群の近接する各帯状電極同志を、
２箇所の引出し端子部において接続して並列接続
した構造を有することを特徴とする固体映像表示
板。 ２ 帯状の差渡し電極群をクロム金属で形成した
ことを特徴とする特許請求の範囲第１項記載の固
体映像表示板。 ３ 帯状透明電極群が設けられた透明基板上に、
発光層と発光制御層からなる積層表示層、および
前記帯状透明電極群に直交する配置の帯状背面電
極群が順次積層されてなる固体映像表示板の製造
方法において、前記透明基板上に、互いに平行な
帯状の差渡し電極群を形成し、前記差渡し電極群
に絶縁層、透明電極膜、レジスト膜を形成し、前
記差渡し電極群をマスクとして前記透明基板側よ
り露光して前記露光部のレジストを除去し前記透
明電極膜をエツチングして、前記差渡し電極群の
ギヤツプ部分に前記差渡し電極群と平行同数の前
記帯状透明電極群を形成し、前記差渡し電極群と
透明電極群を引出し端部において接続することを
特徴とする固体映像表示板の製造法。[Claims] 1. On a transparent substrate provided with a band-shaped transparent electrode group,
In a solid-state display board in which a laminated display layer consisting of a light emitting layer and a light emission control layer, and a band-shaped back electrode group arranged orthogonally to the band-shaped transparent electrode group are sequentially stacked, on the transparent substrate, mutually parallel band-shaped A spanning electrode group is formed, and the same number of band-shaped transparent electrode groups are laminated in parallel with the spanning electrode group in the gap portion of the spanning electrode group, with an insulating layer interposed therebetween, and the two types of electrode groups are formed. Each adjacent strip electrode of
A solid-state image display board characterized by having a structure in which two lead-out terminals are connected in parallel. 2. The solid-state image display board according to claim 1, wherein the band-shaped spanning electrode group is made of chromium metal. 3 On a transparent substrate provided with a band-shaped transparent electrode group,
In the method for manufacturing a solid-state display board, a stacked display layer including a light-emitting layer and a light-emission control layer, and a band-shaped back electrode group arranged orthogonally to the band-shaped transparent electrode group are sequentially stacked on the transparent substrate. forming a strip-shaped spanning electrode group, forming an insulating layer, a transparent electrode film, and a resist film on the spanning electrode group, and exposing the exposed portion to light from the transparent substrate side using the spanning electrode group as a mask. The resist is removed and the transparent electrode film is etched to form the same number of band-shaped transparent electrode groups parallel to the spanning electrode groups in the gap portions of the spanning electrode groups, and the spanning electrode groups and the transparent electrode groups are separated. A method for manufacturing a solid-state image display board, characterized in that the connection is made at the end of the drawer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58143191A JPS6033587A (en) | 1983-08-04 | 1983-08-04 | Solid video display panel and manufacture thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58143191A JPS6033587A (en) | 1983-08-04 | 1983-08-04 | Solid video display panel and manufacture thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6033587A JPS6033587A (en) | 1985-02-20 |
| JPH0576637B2 true JPH0576637B2 (en) | 1993-10-25 |
Family
ID=15332983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58143191A Granted JPS6033587A (en) | 1983-08-04 | 1983-08-04 | Solid video display panel and manufacture thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6033587A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5978384A (en) * | 1982-10-28 | 1984-05-07 | 富士通株式会社 | Display panel |
-
1983
- 1983-08-04 JP JP58143191A patent/JPS6033587A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5978384A (en) * | 1982-10-28 | 1984-05-07 | 富士通株式会社 | Display panel |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6033587A (en) | 1985-02-20 |
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