JPH057641B2 - - Google Patents
Info
- Publication number
- JPH057641B2 JPH057641B2 JP58048187A JP4818783A JPH057641B2 JP H057641 B2 JPH057641 B2 JP H057641B2 JP 58048187 A JP58048187 A JP 58048187A JP 4818783 A JP4818783 A JP 4818783A JP H057641 B2 JPH057641 B2 JP H057641B2
- Authority
- JP
- Japan
- Prior art keywords
- output
- circuit
- scale
- physical quantity
- converter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 12
- 230000001427 coherent effect Effects 0.000 claims description 4
- 230000010363 phase shift Effects 0.000 claims 1
- 230000003252 repetitive effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 9
- 239000011521 glass Substances 0.000 description 8
- 239000002184 metal Substances 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000001934 delay Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 229910001026 inconel Inorganic materials 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Optical Transform (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4818783A JPS59173709A (ja) | 1983-03-23 | 1983-03-23 | 物理量測定システム |
US06/591,511 US4629886A (en) | 1983-03-23 | 1984-03-20 | High resolution digital diffraction grating scale encoder |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4818783A JPS59173709A (ja) | 1983-03-23 | 1983-03-23 | 物理量測定システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59173709A JPS59173709A (ja) | 1984-10-01 |
JPH057641B2 true JPH057641B2 (ru) | 1993-01-29 |
Family
ID=12796377
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4818783A Granted JPS59173709A (ja) | 1983-03-23 | 1983-03-23 | 物理量測定システム |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59173709A (ru) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63115012A (ja) * | 1986-10-31 | 1988-05-19 | Canon Inc | 変位測定装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5826208A (ja) * | 1981-08-08 | 1983-02-16 | Fujitsu Ltd | 位置および速度検出装置 |
-
1983
- 1983-03-23 JP JP4818783A patent/JPS59173709A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5826208A (ja) * | 1981-08-08 | 1983-02-16 | Fujitsu Ltd | 位置および速度検出装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS59173709A (ja) | 1984-10-01 |
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