JPH057641B2 - - Google Patents

Info

Publication number
JPH057641B2
JPH057641B2 JP58048187A JP4818783A JPH057641B2 JP H057641 B2 JPH057641 B2 JP H057641B2 JP 58048187 A JP58048187 A JP 58048187A JP 4818783 A JP4818783 A JP 4818783A JP H057641 B2 JPH057641 B2 JP H057641B2
Authority
JP
Japan
Prior art keywords
output
circuit
scale
physical quantity
converter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58048187A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59173709A (ja
Inventor
Koji Akyama
Hideto Iwaoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP4818783A priority Critical patent/JPS59173709A/ja
Priority to US06/591,511 priority patent/US4629886A/en
Publication of JPS59173709A publication Critical patent/JPS59173709A/ja
Publication of JPH057641B2 publication Critical patent/JPH057641B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Optical Transform (AREA)
JP4818783A 1983-03-23 1983-03-23 物理量測定システム Granted JPS59173709A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP4818783A JPS59173709A (ja) 1983-03-23 1983-03-23 物理量測定システム
US06/591,511 US4629886A (en) 1983-03-23 1984-03-20 High resolution digital diffraction grating scale encoder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4818783A JPS59173709A (ja) 1983-03-23 1983-03-23 物理量測定システム

Publications (2)

Publication Number Publication Date
JPS59173709A JPS59173709A (ja) 1984-10-01
JPH057641B2 true JPH057641B2 (enrdf_load_stackoverflow) 1993-01-29

Family

ID=12796377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4818783A Granted JPS59173709A (ja) 1983-03-23 1983-03-23 物理量測定システム

Country Status (1)

Country Link
JP (1) JPS59173709A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63115012A (ja) * 1986-10-31 1988-05-19 Canon Inc 変位測定装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5826208A (ja) * 1981-08-08 1983-02-16 Fujitsu Ltd 位置および速度検出装置

Also Published As

Publication number Publication date
JPS59173709A (ja) 1984-10-01

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