JPH0572971U - Quartz crucible assembly equipment - Google Patents

Abstract

(57) [Summary] [Purpose] To provide a quartz crucible assembling apparatus that allows safe and easy assembling of a quartz crucible into a graphite crucible and relieves an operator from troublesome work. [Structure] A push-up device, for example, a crucible receiver 5 and a graphite crucible 6 are provided on an upper surface of a base 1 to which a screw jack 2 is fixed.
Then, the screw shaft 2a of the screw jack 2 is extended through the holes provided in the bottoms of the crucible receiver 5 and the graphite crucible 6. A quartz crucible 8 is hung by a crane or the like on a graphite boss 7 mounted on the upper end of the screw shaft 2a, and the screw shaft 2a is lowered to fit the quartz crucible 8 into the graphite crucible 6. At the same time, the graphite boss 7 is inserted into the hole at the bottom of the graphite crucible 6.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a crucible used for a single crystal manufacturing apparatus, and more particularly to a quartz crucible incorporating device when a quartz crucible is fitted in a graphite crucible.

[0002]

[Prior Art]

 In a silicon single crystal manufacturing apparatus using the CZ method, a quartz crucible fitted in a graphite crucible having excellent heat resistance is used as a crucible for melting a silicon polycrystal raw material. Since the quartz crucible can be manually handled conventionally, fitting of the quartz crucible to the graphite crucible is generally performed manually.

[0003]

[Problems to be solved by the device]

 However, the capacity of quartz crucibles has tended to increase with the increase in diameter of single crystals in recent years, and handling by human power as in the past has forced the laborious task of handling heavy objects in an unreasonable posture. Therefore, it is becoming impossible to implement because of occupational safety. By the way, when considering a handheld device that grasps the outside of the upper part of the quartz crucible and attaches to and detaches it from the graphite crucible, the quartz crucible has a short protruding part with respect to the upper end surface of the graphite crucible, and the gripping allowance is small. It is extremely difficult to grasp the protruding part of the. Even if the gripping allowance is large, it is necessary to have a gripping force that does not cause the quartz crucible to fall, and it is necessary to take measures to prevent the quartz crucible from being deformed or damaged by the gripping force. Therefore, the handling device becomes quite large. Therefore, the present invention focuses on the above-mentioned conventional problems, and incorporates a quartz crucible that can be detached from the graphite crucible with respect to the graphite crucible safely and easily outside the single crystal manufacturing apparatus, and can relieve workers from troublesome work. The purpose is to provide a device.

[0004]

[Means for Solving the Problems]

 In order to achieve the above object, the apparatus for assembling a quartz crucible according to the present invention is a crucible of a single crystal manufacturing apparatus in which a quartz crucible is fitted in a graphite crucible and the graphite crucible is placed on a crucible receiver. And a graphite boss that is detachably attached to the upper end of the push-up shaft of the push-up mechanism and that can be inserted into the hole provided at the bottom of the graphite crucible. The quartz crucible by extending it upward through holes provided in the bottom of the graphite crucible and the graphite crucible, placing the quartz crucible on the graphite boss attached to the upper end of the push-up shaft, and then lowering the push-up shaft. It was fitted into the crucible, and at the same time, the graphite boss was inserted into the hole at the bottom of the graphite crucible.

[0005]

[Action]

 According to the above configuration, the quartz crucible is assembled by the frame equipped with the lifting mechanism and the black lead boss that is detachably mounted on the upper end of the lifting shaft of the lifting mechanism and that can be inserted into the hole provided at the bottom of the graphite crucible. Since the device was configured, the crucible receiver and the graphite crucible were placed on the pedestal, and the push-up shaft of the push-up mechanism was extended upward through the holes provided at the bottom of the crucible receiver and the bottom of the graphite crucible, respectively. The quartz crucible can be easily fitted into the graphite crucible by placing the quartz crucible on the graphite boss attached to the upper end of the upper shaft and then lowering the push-up shaft. At the same time, the graphite boss is inserted into the hole at the bottom of the graphite crucible.

[0006]

【Example】

 An embodiment of a quartz crucible assembling device according to the present invention will be described below with reference to the drawings. FIG. 1 is a sectional explanatory view showing a state immediately before fitting a quartz crucible into a graphite crucible, and FIG. 2 is a sectional explanatory view showing a state in which a quartz crucible is fitted into a graphite crucible. In FIG. 1, a push-up device such as a screw jack 2 is provided inside the gantry 1, and the screw jack 2 is driven by a motor 3 fixed to an upper side surface of the gantry 1 via a shaft coupling 4. . A recess for mounting the crucible receiver 5 is provided on the upper surface of the frame 1, and a hole for vertically moving the screw shaft 2a of the screw jack 2 is provided at the center of the recess and the center of the bottom surface of the crucible receiver 5.

At the center of the bottom surface of the graphite crucible 6, a hole 6 a having a larger diameter than the hole provided at the center of the bottom surface of the crucible receiver 5 is provided, and the protrusion provided on the outer periphery of the upper surface of the crucible holder 5 is a graphite crucible. 6 is fitted in an annular groove provided on the lower surface. A graphite boss 7 which can be inserted into a hole 6a provided at the center of the bottom surface of the graphite crucible 6 can be attached to the upper end of the screw jack 2.

The method of fitting the quartz crucible to the graphite crucible using the above-mentioned quartz crucible assembling device is as follows. As shown in FIG. 1, first, the crucible receiver 5 is placed on the gantry 1, and then the graphite crucible 6 is placed on the crucible receiver 5. At this time, by inserting the bottom portion of the crucible receiver 5 into the recess of the pedestal 1, the center of the cradle 1 and the center of the crucible receiver 5 are aligned, and the protrusions on the outer periphery of the upper surface of the crucible receiver 5 are joined to the graphite crucible 6. The center of the crucible receiver 5 and the center of the graphite crucible 6 coincide with each other by fitting in the annular groove on the lower surface. Next, the screw jack 2 is driven by the motor 3, the upper end of the screw shaft 2a is extended to the vicinity of the upper end of the graphite crucible 6, and the graphite boss 7 is attached to the upper end of the screw shaft 2a. In this state, the stone crucible 8 lifted up using a crane or the like and a hanging tool is hung down on the graphite boss 7.

After that, as shown in FIG. 2, the motor 3 drives the screw jack 2 in the lowering direction to fit the quartz crucible 8 into the graphite crucible 6. At this time, the graphite boss 7 is fitted into the bottom of the black lead crucible 6. After the quartz crucible assembly is completed in this way, the graphite crucible 6 fitted with the quartz crucible 8 is lifted together with the crucible receiver 5 with a crane or the like and installed in the single crystal manufacturing apparatus.

Although the motor is used as the power source of the screw jack in this embodiment, the present invention is not limited to this, and the screw shaft may be rotated manually. Further, instead of the screw jack, a lifting mechanism using a hydraulic cylinder may be used. In this case, the hydraulic power source may be installed in a place other than the mount and the hydraulic power source and the hydraulic cylinder may be connected by piping. When removing the quartz crucible from the graphite crucible, the procedure reverse to the above may be used.

[0011]

[Effect of the device]

 As described above, according to the present invention, a gantry equipped with a lifting mechanism and a graphite boss that is detachably mounted on the upper end of the lifting shaft of the lifting mechanism and that can be inserted into a hole provided at the bottom of the graphite crucible. Since the quartz crucible assembling device is constructed by and, the structure of the assembling device is extremely simple and can be easily procured. Then, after placing the crucible receiver and the graphite crucible on the pedestal, extend the push-up shaft of the push-up mechanism upward through the holes provided in the bottom of the crucible receiver and the bottom of the graphite crucible, respectively. The quartz crucible can be easily fitted into the graphite crucible by placing the quartz crucible on the graphite boss attached to the and then lowering the push-up shaft, so the assembling operation is extremely simple and easy. Therefore, by applying the present invention, the quartz crucible can be assembled into the graphite crucible safely and quickly outside the single crystal manufacturing apparatus, which frees the operator from the troublesome work and improves the efficiency of the preparatory work. it can.

[Brief description of drawings]

FIG. 1 is an explanatory sectional view showing a state immediately before fitting a quartz crucible into a graphite crucible.

FIG. 2 is a sectional explanatory view showing a state in which a quartz crucible is fitted in a graphite crucible.

[Explanation of symbols]

 1 Cradle 2 Screw jack 2a Screw shaft 5 Crucible holder 6 Graphite crucible 6a hole 7 Graphite boss 8 Quartz crucible

Claims (1)

[Scope of utility model registration request] 1. A crucible of a single crystal manufacturing apparatus in which a quartz crucible is fitted in a graphite crucible, and the graphite crucible is placed on a crucible receiver. In a crucible equipped with a push-up mechanism, and a top of a push-up shaft of the push-up mechanism. It is attached detachably,
It consists of a graphite boss that can be inserted into a hole provided in the bottom of the graphite crucible, and the push-up shaft of the push-up mechanism extends upward through the holes provided in the bottom of the crucible receiver and the bottom of the graphite crucible, and the upper end of the push-up shaft. After placing the quartz crucible on the graphite boss attached to the, the quartz crucible is fitted into the graphite crucible by lowering the push-up shaft, and at the same time, the graphite boss is inserted into the hole at the bottom of the graphite crucible. A quartz crucible built-in device.