JPH057252Y2 - - Google Patents

Info

Publication number
JPH057252Y2
JPH057252Y2 JP4283188U JP4283188U JPH057252Y2 JP H057252 Y2 JPH057252 Y2 JP H057252Y2 JP 4283188 U JP4283188 U JP 4283188U JP 4283188 U JP4283188 U JP 4283188U JP H057252 Y2 JPH057252 Y2 JP H057252Y2
Authority
JP
Japan
Prior art keywords
shutter
evaporation source
growth chamber
opening
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4283188U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01147272U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4283188U priority Critical patent/JPH057252Y2/ja
Publication of JPH01147272U publication Critical patent/JPH01147272U/ja
Application granted granted Critical
Publication of JPH057252Y2 publication Critical patent/JPH057252Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP4283188U 1988-03-30 1988-03-30 Expired - Lifetime JPH057252Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4283188U JPH057252Y2 (enEXAMPLES) 1988-03-30 1988-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4283188U JPH057252Y2 (enEXAMPLES) 1988-03-30 1988-03-30

Publications (2)

Publication Number Publication Date
JPH01147272U JPH01147272U (enEXAMPLES) 1989-10-11
JPH057252Y2 true JPH057252Y2 (enEXAMPLES) 1993-02-24

Family

ID=31269235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4283188U Expired - Lifetime JPH057252Y2 (enEXAMPLES) 1988-03-30 1988-03-30

Country Status (1)

Country Link
JP (1) JPH057252Y2 (enEXAMPLES)

Also Published As

Publication number Publication date
JPH01147272U (enEXAMPLES) 1989-10-11

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