JPH0572103B2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an XY drive mechanism, and is particularly suitable for driving a long frame in the XY axis direction.
Regarding the XY drive mechanism.

[Prior Art] Conventionally, for example, in an inner lead bonder that performs inner lead bonding to a semiconductor component, as shown in Japanese Patent Publication No. 57-53974, Japanese Patent Publication No. 62-27735, and Japanese Patent Publication No. 62-55298,
Automatic alignment of the carrier tape leads and the die on the wafer substrate is practiced.

By the way, since the carrier tape is wound onto the take-up reel from the supply reel through the bonding section, the frame that supports the guide member that guides the carrier tape is a long member in the carrier tape feeding direction (X-axis direction). . Therefore, in order to align the leads of the carrier tape and the die, it is necessary to move the frame, which is long in the X-axis direction, in the XY-axis directions.

In the conventional technology, one end of a frame long in the X-axis direction is supported by an XY table driven in the XY-axis directions by X-axis and Y-axis motors, and the other end is supported by a horizontally movable thrust bearing. It becomes.

[Problems to be Solved by the Invention] In the above conventional technology, the weight of the frame and the guide members supported by the frame is supported by the XY table and the thrust bearing, so one end side of the long frame in the X-axis direction is supported by the XY table. When the carrier tape is driven and moved especially in the X-axis direction, the movement of the other end (thrust bearing) is delayed and the amount of movement varies, causing variations in alignment between the carrier tape lead and the die. It was hot.

An object of the present invention is to be able to move a frame that is long in the X-axis direction with high precision, especially in the X-axis direction.
The purpose is to provide an XY drive mechanism.

[Means for solving the problem] The above object is to provide a frame that is long in the X-axis direction, and a first and second XY frame that supports both ends of the frame in the X-axis direction and is movable in the XY-axis directions.
a table, a first X-axis motor that drives the first XY table in the X-axis direction and the Y-axis direction, and a first Y-axis motor.
a second Y-axis motor that drives the second XY table in the Y-axis direction;
This problem can be solved by using a configuration including a synchronous drive means for driving the two Y-axis motors in synchronization.

[Operation] Both ends of the frame in the X-axis direction are driven by first and second Y-axis motors that are rotated in synchronization
Since it is moved axially, the frame can be moved in parallel with high precision.

[Example] An example of the present invention will be described below with reference to FIGS. 1 and 2. Both end sides in the X-axis direction of the frame 1, which is long in the X-axis direction, are supported by first and second XY tables 2 and 3, respectively, which are movable in the X-axis direction. The first XY table 2 is moved in the X-axis and Y-axis directions by a first X-axis motor 4 and a first Y-axis motor 5 via male and female screws (not shown), respectively. The second XY table 3 is similarly moved in the Y-axis direction by the second Y-axis motor 6 via the male and female screws.

An X-axis driver 7 and Y-axis drivers 8 and 9 are connected to the first X-axis motor 4, first Y-axis motor 5, and second Y-axis motor 6, respectively,
An X-axis pulse is input from the pulse generator 10 to the X-axis driver 7, and the same Y-axis pulse is input to the Y-axis drivers 8 and 9.

Next, the effect will be explained. Pulse generator 10
When an X-axis pulse is input to the X-axis driver 7, the first XY table 2 is moved in the X-axis direction. That is, the frame 1 is moved in the X-axis direction. Furthermore, when the same Y-axis pulse is input from the pulse generator 10 to the Y-axis drivers 8 and 9, the first
The second Y-axis motors 5 and 6 rotate by the same amount, and the first and second XY tables 2 and 3 are simultaneously moved by the same amount in the Y-axis direction. That is, the frame 1 is moved in parallel in the Y-axis direction by the same amount.

In this way, both ends of the frame 1 in the X-axis direction are moved in the Y-axis direction by the first and second Y-axis motors that are rotationally driven in synchronization.
Frame 1 is moved in parallel and with high precision without any movement delay or positional deviation.

[Effects of the Invention] As is clear from the above description, according to the present invention, a frame that is long in the X-axis direction can be moved particularly in the Y-axis direction with high precision.

[Brief explanation of the drawing]

FIG. 1 is a schematic plan view showing an embodiment of the present invention, and FIG. 2 is a front view of FIG. 1. 1: Frame, 2: 1st XY table, 3: 1st
2XY table, 4: 1st X-axis motor, 5: 1st Y
Axis motor, 6: 2nd Y-axis motor, 7: X-axis driver, 8, 9: Y-axis driver, 10: Pulse generator.

Claims (1)

[Claims] 1 A long frame in the X-axis direction, supporting both ends of this frame in the X-axis direction,
First and second XY tables movable in the XY axis directions; a first X axis motor and a first Y axis motor that drive the first XY table in the X axis direction and the Y axis direction; An XY drive mechanism comprising: a second Y-axis motor that drives in the direction; and a synchronous drive means that synchronizes and drives the first and second Y-axis motors.