JPH0571894B2 - - Google Patents
Info
- Publication number
- JPH0571894B2 JPH0571894B2 JP62175982A JP17598287A JPH0571894B2 JP H0571894 B2 JPH0571894 B2 JP H0571894B2 JP 62175982 A JP62175982 A JP 62175982A JP 17598287 A JP17598287 A JP 17598287A JP H0571894 B2 JPH0571894 B2 JP H0571894B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- diaphragm
- fixed electrode
- conductive
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229920006254 polymer film Polymers 0.000 claims description 13
- 239000004020 conductor Substances 0.000 claims description 9
- 230000004044 response Effects 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 239000010408 film Substances 0.000 description 10
- 238000005259 measurement Methods 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 238000001514 detection method Methods 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
【発明の詳細な説明】
（発明の利用分野）
本発明は静電容量変化により圧力又は差圧を測
定するダイヤフラム式の圧力検出器に関し、特に
数10mmAq程度の微圧微差圧測定に適した圧力検
出器に関する。[Detailed Description of the Invention] (Field of Application of the Invention) The present invention relates to a diaphragm pressure detector that measures pressure or differential pressure by changing capacitance, and is particularly suitable for measuring minute pressure or differential pressure of about several tens of mmAq. Regarding pressure detectors.
（従来技術）
従来の微圧検出方式の内、ダイヤフラム式はダ
イヤフラムにステンレス等の金属材料を用いてお
りその金属の剛性からして微圧を検出する為には
受圧面積を大きくする必要が有り小型化する為に
は限界であり、又価格も高価である。(Prior art) Among the conventional micro-pressure detection methods, the diaphragm type uses a metal material such as stainless steel for the diaphragm, and due to the rigidity of the metal, it is necessary to increase the pressure-receiving area in order to detect micro-pressure. There is a limit to miniaturization, and the price is also high.
又感度を高くする為にはダイヤフラムの厚みを
薄くする必要があり、おのずと耐圧は弱くなる。 Furthermore, in order to increase the sensitivity, it is necessary to reduce the thickness of the diaphragm, which naturally weakens the pressure resistance.
一方、ベロー式では微圧検出は可能であるが寸
法が大きく、応答性は遅くなり、構造が複雑であ
る為高価となる。 On the other hand, the bellows type is capable of detecting low pressure, but is large in size, slow in response, and has a complicated structure, making it expensive.
一方、半導体式では受圧面積は小さく小型であ
るが、100mmAq以下の微差圧検出は困難であり、
又高価である。 On the other hand, the semiconductor type has a small pressure receiving area and is compact, but it is difficult to detect minute differential pressures of 100 mmAq or less.
It is also expensive.
（発明が解決しようとする問題点）
従来の微圧検出器では前述のごとく、受圧面積
を大きくすると微圧検出は可能である小型化が困
難であり、受圧面積を小さくすると小形は可能で
あるが微圧検出が困難であつたり、耐圧を犠牲に
して小型化せざるを得ない。(Problems to be Solved by the Invention) As mentioned above, with conventional low pressure detectors, it is possible to detect low pressure by increasing the pressure receiving area, but it is difficult to downsize; however, by decreasing the pressure receiving area, downsizing is possible. However, it is difficult to detect low pressure, and it is necessary to downsize at the expense of withstand voltage.
本発明はこの様な状況に鑑みなされたもので、
数100mmAq以下更には数10mmAq以下の微圧が感
度良く小型で安価に検出できる圧力検出器を提供
することを目的とするものである。 The present invention was made in view of this situation.
The object of the present invention is to provide a pressure detector that is small and inexpensive and can detect minute pressures of several hundred mmAq or less, or even several tens of mmAq or less, with high sensitivity.
（問題を解決するための手段）
上述の目的は以下の本発明によつて達成され
る。すなわち、本発明は、測定すべき圧力又は差
圧を受けて変位するダイヤフラムに連動する移動
電極と、これに対向して配置した固定電極との間
の静電容量が、前記ダイヤフラムに作用する圧力
の差に応じて変化することを検出するようにした
ダイヤフラム式の圧力検出器において、前記ダイ
ヤフラムを一方の表面を導電性物質で処理した高
分子フイルムとし、その導電性物質で処理しない
他方の面が圧力の差が零の時固定電極の略全面に
接するように配置し、該導電性物質を移動電極と
したことを特徴とする圧力検出器である。(Means for Solving the Problems) The above-mentioned objects are achieved by the following present invention. That is, in the present invention, the capacitance between a movable electrode that moves in conjunction with a diaphragm that is displaced in response to the pressure or differential pressure to be measured and a fixed electrode that is disposed opposite the movable electrode reduces the pressure that acts on the diaphragm. In a diaphragm-type pressure sensor that detects changes in accordance with the difference in is arranged so as to be in contact with substantially the entire surface of a fixed electrode when the pressure difference is zero, and the conductive material is used as a moving electrode.
上述の本発明は前記現状を解決するため、ダイ
ヤフラム式のダイヤフラムの改良に着目し種々検
討の結果、高分子フイルム、なかでも導電性層を
積層した導電性高分子フイルムが数10mmAqとい
うような微圧の検出に対しては、優れた弾性特性
を有し、且つ静電容量検出に適した構造を有する
ことを見出し、なされたものである。 In order to solve the above-mentioned current situation, the present invention focused on improving the diaphragm type diaphragm, and as a result of various studies, it was found that polymer films, especially conductive polymer films with conductive layers laminated, have a microscopic size of several tens of mmAq. For pressure detection, it was discovered that it has excellent elastic properties and a structure suitable for capacitance detection.
以下、実施例に基いて、本発明の詳細を説明す
る。 Hereinafter, the details of the present invention will be explained based on Examples.
第１図は本発明の一実施例の微圧・微差圧の検
出に好適な圧力検出器の側断面図と正面図、第２
図はその分解図、第３図はその各部品の矢視図で
ある。 FIG. 1 is a side sectional view and a front view of a pressure detector suitable for detecting minute pressures and differential pressures according to an embodiment of the present invention, and FIG.
The figure is an exploded view of the same, and FIG. 3 is a view of each part in the direction of arrows.
図において、１が表面を移動電極となる導電性
物質２で処理した高分子フイルムの受圧ダイヤフ
ラムで、セツトした時後述の固定電極により若干
張力が付与される所定の半径の円形としてある。
３′は付属検出回路が搭載されるプリント基板４
に所定半径の円形パターンに形成された銅薄膜等
からなる固定電極である。５は固定電極３のリー
ド部で、固定電極３と共に形成される銅薄膜から
なる。６は、受圧ダイヤフラム１の受圧部に相当
する部分７が切り抜かられたプリント基板等の板
体からなる中間枠で、受圧ダイヤフラム１に接す
る側には銅等の導電薄膜８が形成され、受圧ダイ
ヤフラム１の周辺をプリント基板４との間に封止
（受圧ダイヤフラム１は固定電極３の厚み分だけ
延びた状態でセツトされる。）固定すると同時に
受圧ダイヤフラム１の動作空間を決め、且つ移動
電極の導電性物質２の接続端子９を形成するよう
になつている。１０は受圧ダイヤフラム１の一方
の側へ圧力を導入するための導入口１１に接続具
１０ａを有するプラスチツク等のカバーである。
受圧ダイヤフラム１の他方の側への導入口１２ば
プリント基板４に形成されている。なお図の１３
は固定電極３の接続端子である。又接続端子９，
１３は図示省略した同じフリント基板４の部分に
設けられた周知の静電容量検出回路に接続されて
いる。 In the figure, reference numeral 1 denotes a pressure receiving diaphragm made of a polymer film whose surface is treated with a conductive material 2 which serves as a moving electrode, and is circular in shape with a predetermined radius to which a slight tension is applied by a fixed electrode, which will be described later, when set.
3' is a printed circuit board 4 on which the attached detection circuit is mounted.
This is a fixed electrode made of a thin copper film or the like formed in a circular pattern with a predetermined radius. Reference numeral 5 denotes a lead portion of the fixed electrode 3, which is made of a copper thin film formed together with the fixed electrode 3. Reference numeral 6 denotes an intermediate frame made of a plate such as a printed circuit board into which a portion 7 corresponding to the pressure receiving part of the pressure receiving diaphragm 1 is cut out, and a conductive thin film 8 made of copper or the like is formed on the side in contact with the pressure receiving diaphragm 1. The periphery of the pressure receiving diaphragm 1 is sealed between the printed circuit board 4 (the pressure receiving diaphragm 1 is set in a state where it has been extended by the thickness of the fixed electrode 3). A connecting terminal 9 for the conductive material 2 is formed. 10 is a cover made of plastic or the like having a connector 10a at an inlet 11 for introducing pressure to one side of the pressure receiving diaphragm 1.
An inlet 12 to the other side of the pressure receiving diaphragm 1 is formed on the printed circuit board 4. Note that 13 in the figure
is a connection terminal of the fixed electrode 3. Also, connection terminal 9,
13 is connected to a well-known capacitance detection circuit provided on the same flint substrate 4 (not shown).
そしてプリント基板４の固定電極３上に受圧ダ
イヤフラム１をその導電性物質２を形成しない面
が固定電極３側になるように重ね、次いで中間枠
６をその導電薄膜８側が受圧ダイヤフラム１に接
するように重ね、更にその上にカバー１０を載置
してボルト１４により締付けることにより組み立
てる。従つて、受圧ダイヤフラム１は固定電極３
の厚み分だけ引張られた状態となる。これにより
後述の通り、測定のヒステリシスの減少及び再現
性の向上が得られる。なお、この際必要に応じ封
止部にパツキン等を用いても良い。 Then, the pressure-receiving diaphragm 1 is stacked on the fixed electrode 3 of the printed circuit board 4 so that the surface on which the conductive material 2 is not formed is on the fixed electrode 3 side, and then the intermediate frame 6 is placed so that the conductive thin film 8 side is in contact with the pressure-receiving diaphragm 1. The cover 10 is placed on top of the cover 10, and is assembled by tightening the bolts 14. Therefore, the pressure receiving diaphragm 1 is connected to the fixed electrode 3
It is in a state where it is stretched by the thickness of . As described below, this reduces measurement hysteresis and improves reproducibility. Note that at this time, a packing or the like may be used for the sealing portion if necessary.
以上の構成の圧力検出器において、移動電極２
を兼ねる受圧ダイヤフラム１に使用する表面導電
性物質で処理した高分子フイルムには、市販の導
電薄膜を形成したフレキシルブプリント基板
（FPC）、導電性フイルム、金属蒸着フイルム、
等がそのまま利用でき、高分子フイルムの柔軟性
を利用して受圧面積は小さくとも高感度に小型に
安価に製作できるので、前述のごとく従来技術の
問題を解決することができる。 In the pressure detector having the above configuration, the moving electrode 2
The polymer film treated with a surface conductive material used for the pressure-receiving diaphragm 1, which also serves as
etc. can be used as is, and by utilizing the flexibility of the polymer film, the pressure-receiving area can be small, but it can be manufactured with high sensitivity, small size, and low cost, so that the problems of the prior art as described above can be solved.
第４図、第５図は上記構成において受圧ダイヤ
フラムに市販の透明導電性フイルム（帝人(株)製商
品名Ｔコートフイルム、Ｆタイプ）及びポリエチ
レンテレフタレートフイルム（PET）にNi（ニツ
ケル）の蒸着膜を積層した導電性フイルムを用い
て測定した時の圧力と静電容量の関係の測定結果
を示す。第４図は電極サイズは固定電極30φ、移
動電極（ダイヤフラム）40φにおいて、用いる高
分子フイルムの膜厚を変えた場合の特性の変化を
測定した結果であり、第５図は高分子フイルタ膜
厚75μｍのＴコートを用い電極サイズを変えた場
合の特性の変化を測定した結果であり、共に横軸
は圧力、縦軸は静電容量である。 Figures 4 and 5 show a pressure-receiving diaphragm using a commercially available transparent conductive film (product name: T-coat film, F type, manufactured by Teijin Ltd.) and a vapor-deposited Ni film on polyethylene terephthalate film (PET). The following shows the measurement results of the relationship between pressure and capacitance when measured using a conductive film laminated with . Figure 4 shows the results of measuring the changes in characteristics when the thickness of the polymer film used was changed for a fixed electrode of 30φ and a moving electrode (diaphragm) of 40φ.Figure 5 shows the thickness of the polymer filter. These are the results of measuring changes in characteristics when changing the electrode size using a 75 μm T-coat, with the horizontal axis representing pressure and the vertical axis representing capacitance.
図より数10mmAq以下の範囲においてもヒステ
リシスもなく非常に高感度で且つ線型性、再現性
も良い測定できることが理解できる。特に受圧ダ
イヤフラム１が固定電極３にその厚み分（本例
35μｍ）だけ引張られた状態でセツトすることに
よりヒステリシス、再現性が大巾に向上している
ことを確認した。従つて、受圧ダイヤフラム１は
若干張力が付与された状態でセツトされることが
好ましく、更には該張力下で固定電極３に押し付
けられた状態でセツトされることが望ましい。又
測定範囲、測定感度等は、用いる高分子フイルム
の厚み、ダイヤフラムの面積等を設計することに
より容易に所定のものに設定できることがわか
る。 From the figure, it can be seen that even in the range of several tens of mmAq or less, measurements can be made with very high sensitivity without hysteresis, and with good linearity and reproducibility. In particular, the pressure receiving diaphragm 1 is attached to the fixed electrode 3 by its thickness (in this example).
It was confirmed that hysteresis and reproducibility were greatly improved by setting the wire under tension by 35 μm). Therefore, it is preferable that the pressure-receiving diaphragm 1 be set in a state where a slight tension is applied, and more preferably, it is set in a state where it is pressed against the fixed electrode 3 under this tension. Furthermore, it can be seen that the measurement range, measurement sensitivity, etc. can be easily set to predetermined values by designing the thickness of the polymer film used, the area of the diaphragm, etc.
以上本発明を実施例に基いて説明したが本発明
はかかる実施例に限定されるものではないことは
云うまでもない。 Although the present invention has been described above based on Examples, it goes without saying that the present invention is not limited to these Examples.
高分子フイルムに設ける移動電極として、その
全面に導電性層を積層したものを示したが、直線
性の向上等のためパターン化した導電性物質の層
を設けても良いことは云うまでもない。なお、こ
の層の電気抵抗は実施例等から表面抵抗で数
1000Ω／□以下程度であれば良く、その膜厚は数
μｍ以下、耐久性、生産性等の面から数1000Å以
下程度が実用的である。又高分子フイルム自体も
前述の市販品の他ポリエステル、ポリイミド、エ
ポキシ樹脂等の各種高分子のフイルム上に移動電
極となる金、銀、銅等各種金属又はその合金等の
導電性物質の層、すなわち導電性層を形成したも
のであれば適用であることは云うまでもない。な
かでも、機械的寸法安定性に優れたポリエステル
フイルム、特に二軸延伸したPETフイルム上に
導電性層を形成したものが好ましい。 As a moving electrode provided on a polymer film, a conductive layer laminated on the entire surface is shown, but it goes without saying that a patterned layer of conductive material may be provided to improve linearity, etc. . Note that the electrical resistance of this layer is determined by the surface resistance based on the examples, etc.
The film thickness may be approximately 1000Ω/□ or less, and the film thickness is several μm or less, and from the viewpoint of durability, productivity, etc., it is practical to be approximately several thousand Å or less. In addition to the above-mentioned commercially available polymer films, the polymer films themselves are made of films of various polymers such as polyester, polyimide, epoxy resin, etc., and layers of conductive substances such as various metals such as gold, silver, copper, or alloys thereof, which serve as moving electrodes. That is, it goes without saying that any material having a conductive layer formed thereon is applicable. Among these, a polyester film with excellent mechanical dimensional stability, particularly a biaxially stretched PET film on which a conductive layer is formed, is preferred.
以上の通り、本発明は、導電性層を形成した高
分子フイルムをダイヤフラムとした圧力検出器で
あり、コンパクトな構成で、従来測定が困難であ
つた数100mmAq以下、特に数10mmAq以下の微圧、
微差圧の検出が感度良く、且つ応答性も良く検出
できるという作用を奏するもので、多方面に適用
できるものである。 As described above, the present invention is a pressure sensor whose diaphragm is a polymer film on which a conductive layer is formed, and which has a compact configuration and is capable of measuring micro-pressures of several 100 mmAq or less, especially several 10 mmAq or less, which have been difficult to measure in the past. ,
It has the effect of being able to detect slight differential pressures with good sensitivity and responsiveness, and can be applied in many fields.
第１図Ａ，Ｂは実施例の側断面図と正面図、第
２図は該実施例の分解図、第３図Ａ〜Ｄは該実施
例の各部品の矢視図、第４図、第５図は実施例の
圧力一静電容量変換特性の測定結果を示すグラフ
である。
１：受圧ダイヤフラム（高分子フイルム）、
２：移動電極（導電性物質）、３：固定電極、
４：プリント基板、６：中間枠、１０：カバー。
1A and 1B are a side sectional view and a front view of the embodiment, FIG. 2 is an exploded view of the embodiment, FIGS. 3A to D are arrow views of each part of the embodiment, and FIG. FIG. 5 is a graph showing the measurement results of the pressure-capacitance conversion characteristics of the example. 1: Pressure receiving diaphragm (polymer film),
2: moving electrode (conductive substance), 3: fixed electrode,
4: Printed circuit board, 6: Intermediate frame, 10: Cover.
Claims (1)
イヤフラムに連動する移動電極と、これに対向し
て配置した固定電極との間の静電容量が、前記ダ
イヤフラムに作用する圧力の差に応じて変化する
ことを検出するようにしたダイヤフラム式の圧力
検出器において、前記ダイヤフラムを一方の表面
を導電性物質で処理した高分子フイルムとし、そ
の導電性物質で処理しない他方の面が圧力の差が
零の時固定電極の略全面に接するように配置し、
該導電性物質を移動電極としたことを特徴とする
圧力検出器。 ２ 前記ダイヤフラムを高分子フイルム上に導電
性物質層を積層した導電性フイルムとした特許請
求の範囲第１項記載の圧力検出器、 ３ 前記固定電極は、付属回路用のプリント基板
上に形成され、前記ダイヤフラムがその上に対向
配置されている特許請求の範囲第１項又は第２項
記載の圧力検出器。[Claims] 1. Capacitance between a movable electrode that moves in conjunction with a diaphragm that is displaced in response to the pressure or differential pressure to be measured and a fixed electrode that is placed opposite the diaphragm acts on the diaphragm. In a diaphragm-type pressure sensor that detects changes in pressure depending on differences in pressure, the diaphragm is made of a polymer film whose one surface is treated with a conductive material, and the other surface which is not treated with the conductive material is used as the diaphragm. Arrange the surface so that it is in contact with almost the entire surface of the fixed electrode when the pressure difference is zero,
A pressure detector characterized in that the conductive substance is used as a moving electrode. 2. The pressure sensor according to claim 1, wherein the diaphragm is a conductive film in which a conductive material layer is laminated on a polymer film; 3. The fixed electrode is formed on a printed circuit board for an attached circuit. 3. A pressure sensor according to claim 1, wherein the diaphragms are disposed oppositely thereon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17598287A JPS6421330A (en) | 1987-07-16 | 1987-07-16 | Pressure detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17598287A JPS6421330A (en) | 1987-07-16 | 1987-07-16 | Pressure detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6421330A JPS6421330A (en) | 1989-01-24 |
| JPH0571894B2 true JPH0571894B2 (en) | 1993-10-08 |
Family
ID=16005633
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17598287A Granted JPS6421330A (en) | 1987-07-16 | 1987-07-16 | Pressure detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6421330A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7740013B2 (en) | 2003-08-14 | 2010-06-22 | Teijin Pharma Limited | Oxygen concentrating apparatus and execution support method of home oxygen therapy using the same |
| JP2010540119A (en) * | 2007-09-26 | 2010-12-24 | ブリーズ・テクノロジーズ・インコーポレーテッド | Method and apparatus for venting inspiratory and expiratory airflow during ventilation therapy |
| WO2018212067A1 (en) | 2017-05-18 | 2018-11-22 | 帝人ファーマ株式会社 | Exacerbation predicting device, oxygen concentrating device, and exacerbation predicting system |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2775075B1 (en) * | 1998-02-18 | 2000-05-05 | Theobald Sa A | DIFFERENTIAL PRESSURE SENSOR |
| US7272976B2 (en) * | 2004-03-30 | 2007-09-25 | Asml Holdings N.V. | Pressure sensor |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51125858A (en) * | 1975-01-07 | 1976-11-02 | Bendix Corp | Pressure sensitiue capacitor |
| JPS6281539A (en) * | 1985-10-04 | 1987-04-15 | Yokogawa Electric Corp | Diaphragm |
-
1987
- 1987-07-16 JP JP17598287A patent/JPS6421330A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51125858A (en) * | 1975-01-07 | 1976-11-02 | Bendix Corp | Pressure sensitiue capacitor |
| JPS6281539A (en) * | 1985-10-04 | 1987-04-15 | Yokogawa Electric Corp | Diaphragm |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7740013B2 (en) | 2003-08-14 | 2010-06-22 | Teijin Pharma Limited | Oxygen concentrating apparatus and execution support method of home oxygen therapy using the same |
| US8151792B2 (en) | 2003-08-14 | 2012-04-10 | Teijin Pharma Limited | Oxygen concentrating apparatus and execution support method of home oxygen therapy using the same |
| EP3508240A1 (en) | 2003-08-14 | 2019-07-10 | Teijin Pharma Limited | Oxygen concentrating apparatus |
| JP2010540119A (en) * | 2007-09-26 | 2010-12-24 | ブリーズ・テクノロジーズ・インコーポレーテッド | Method and apparatus for venting inspiratory and expiratory airflow during ventilation therapy |
| WO2018212067A1 (en) | 2017-05-18 | 2018-11-22 | 帝人ファーマ株式会社 | Exacerbation predicting device, oxygen concentrating device, and exacerbation predicting system |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6421330A (en) | 1989-01-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |