JPH0570256B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to an AES/SIMS combined analyzer that enables simultaneous analysis of Auger electron analysis and secondary ion mass spectrometry.

(b) Prior art and its problems Conventional surface analyzers include so-called composite analyzers that can perform Auger electron spectroscopy (AES) and secondary ion mass spectrometry (SIMS) in a single device. be. This type of combined analyzer has these analysis functions in one vacuum container, so there is no need to take the sample out of the vacuum container, so the sample is less susceptible to contamination, and the analysis position can be adjusted. This method has the advantage of making selection relatively easy and allowing samples to be analyzed under the same circumstances.

However, when performing Auger electron analysis and secondary ion mass spectrometry with conventional equipment, the mutual analysis functions are not related, so it is not possible to analyze both in parallel; After analyzing one, the other is analyzed next. Therefore, when both analyzes are performed, a time lag inevitably occurs between them. However, when researching interactions between ions and substances or selective sputtering, there are cases where it is desirable to perform both analyzes simultaneously, and in such cases, conventional equipment cannot perform appropriate analysis. In particular, since secondary ion mass spectrometry in which ions are irradiated is a type of destructive analysis, the initial surface state changes after this analysis, resulting in the problem that Auger electron analysis cannot be performed in the transition state. be.

(c) Purpose The present invention solves these conventional problems and allows Auger electron analysis and secondary ion mass spectrometry to be performed simultaneously on the same element, thereby allowing more information on the analysis sample to be obtained. With the goal.

(d) Configuration Number commonly used in secondary ion mass spectrometry
Ion irradiation using an accelerating voltage of Kv has extremely low efficiency in emitting Auger electrons, while electron beam irradiation in Auger electron analysis hardly causes ion excitation. Therefore, even if a sample is irradiated with electrons and ions at the same time, the results of each analysis are not affected by each other. The present invention focuses on this point, and in order to achieve the above-mentioned object, it is equipped with each electron gun for Augier electron analysis, an electron energy analyzer, an energy scanning power supply, and an electron beam detection measurement system, and also includes a secondary ion In a composite analyzer equipped with each ion gun for mass spectrometry, a mass spectrometer, a mass scanning power source, and an ion detection measurement system, the energy scanning power source,
First and second setters that respectively control the mass scanning power supplies and a central control unit that provides element information to these first and second setters are provided so that energy scanning and mass scanning can be performed simultaneously for the same element. I have to.

(E) Embodiments The present invention will be described in detail below based on embodiments shown in the drawings.

The drawing is a configuration diagram of an AES/SIMS combined analysis device according to an embodiment of the present invention. In the drawing, reference numeral 1
indicates an AES/SIMS combined analyzer, 2 is an Augier electron analysis means, 4 is a secondary ion mass spectrometer,
6 is a sample for analysis.

The Auger electron analysis means 2 includes an electron gun 8 for irradiating the sample 6 with an electron beam, an electron energy analyzer 10 for performing energy separation, and an electron detector 12 for detecting the Auger electrons energy-separated by the electron energy analyzer 10. and an energy scanning power supply 14 for energy scanning the electronic energy analyzer 10. On the other hand, the secondary ion mass spectrometer 4 includes an ion gun 16 for irradiating the sample 6 with ions, an energy filter 18 for energy separation,
a mass spectrometer 20 for mass-separating the secondary ions energy-separated by the energy filter 18;
The main components include an ion detector 22 for detecting mass-separated secondary ions and a mass scanning power supply 24 for mass scanning the mass spectrometer 20.

26 is a first amplifier for amplifying the Auger electron detection output of the electron detector 12; 28 is a first amplifier for counting the Auger electron detection signal amplified by the first amplifier 26;
A counter, 30 is a first sensitivity corrector for correcting the sensitivity of the detection output of the first counter 28, and 32 is a first sensitivity corrector for adjusting the energy scanning power source 14 and the first sensitivity based on elemental information specified by a central control unit 42, which will be described later. This is a first setting device that controls the corrector 30. Further, 34 is a second amplifier that amplifies the secondary ion detection output of the ion detector 22, 36 is a second counter that counts the secondary ion detection signal amplified by the second amplifier 34, and 38 is a second
A second sensitivity corrector 40 corrects the sensitivity of the detection output of the counter 36; a second controller 40 controls the mass scanning power source 24 and the second sensitivity corrector 38 based on elemental information specified by the central control unit; It is. 42 is a central control unit that provides elemental information to the first and second setters 32 and 40 and also controls each part; 44 is an Auger electronic detection signal and ion detection that have passed through the first and second sensitivity correctors 30 and 38; This is a recording section that simultaneously records signal data.

In order to perform simultaneous analysis of one element with Auger electron analysis and secondary ion mass spectrometry with this AES/SIMS combined analyzer 1, an electron beam is emitted from the electron gun 8, and primary ions are emitted from the ion gun 16. The sample 6 is then irradiated with both of these. On the other hand, the central control unit 42 outputs preset information on the element to be measured, such as element name, scanning repetition period, detection sensitivity, etc., to the first and second setting devices 32 and 40, respectively. In response, the first setting device 32 outputs a control signal based on the elemental information given from the central control section 42 to the energy scanning power source 14 and the first sensitivity corrector 30. Therefore, the energy scanning power supply 14 outputs a scanning voltage corresponding to the energy corresponding to each element according to the control signal given from the first setting device 32, so that the applied voltage of the electronic energy analyzer 10 is scanned. Further, the first sensitivity corrector 30 is set to a detection sensitivity suitable for the element to be measured. In parallel with this, the second setting device 40 outputs a control signal based on the elemental information given from the central control section 42 to the mass scanning power supply 24 and the second sensitivity corrector 38. For this reason, mass scanning power supply 2
4 outputs a scanning voltage corresponding to the mass corresponding to each element according to the control signal given from the second setting device 40, so that the voltage applied to the mass spectrometer 20 is scanned. Further, the second sensitivity corrector 38 is set to a detection sensitivity suitable for the element to be measured.

Therefore, the Auger electrons emitted from the sample 6 by electron beam excitation are detected by the electron energy analyzer 10.
The energy of the Auger electrons is separated by the electron detector 12, and the energy-separated predetermined Auger electrons are detected by the electron detector 12. The Auger electron detection signal output from the electron detector 12 is amplified by the first amplifier 26 and then counted by the first counter 28. This count value is subjected to sensitivity correction by the first sensitivity corrector 30 in the next stage and is output to the recording section 44. On the other hand, secondary ions emitted by ion excitation from the sample 6 are energy-separated by an energy filter 18, and predetermined energy-separated secondary ions are mass-separated by a mass spectrometer 20 and then detected by an ion detector 22. Detected.
Then, the secondary ion detection signal output from the ion detector 22 is amplified by the second amplifier 34, and then
It is counted by the second counter 36. This count value is subjected to sensitivity correction by the second sensitivity corrector 38 in the next stage, and the recording unit 4
4 is output. Therefore, if both measurement signals are recorded on the plotter of the recording unit 44 with the horizontal axis representing time and the vertical axis representing signal intensity, the results of both Auger electron analysis and secondary ion mass spectrometry for the same element can be measured and recorded simultaneously. That will happen.

(F) Effect As described above, according to the present invention, Auger electron analysis and secondary ion mass spectrometry can be performed simultaneously on the same element, so the shortcomings of both analysis methods are compensated for, and the analysis sample can be better analyzed. You will be able to obtain a lot of information. It also has the excellent effect of making it easier to conduct research on interactions between ions and substances, selective sputtering, etc., for which information cannot be obtained without simultaneous analysis.

[Brief explanation of the drawing]

The drawing is a configuration diagram of an AES/SIMS combined analysis device showing an embodiment of the present invention. 1...AES/SIMS combined analyzer, 8...electron gun, 10...electron energy analyzer, 14...
...Energy scanning power supply, 16...Ion gun, 20
...Mass spectrometer, 24...Mass scanning power supply, 32...
...First setting device, 40...Second setting device, 42...Central control unit.

Claims (1)

[Claims] 1 Equipped with each electron gun, electron energy analyzer, energy scanning power supply, and electron beam detection measurement system for Auger electron analysis, and each ion gun, mass spectrometer, mass scanning power supply, and ion detection measurement system for secondary ion mass spectrometry. It is a complex analyzer equipped with first and second setting devices that respectively control the energy scanning power source and the mass scanning power source based on specified element information, and element information in these first and second setting devices. a central control unit providing information;
AES/SIMS combined analysis device that is characterized by simultaneous energy scanning and mass scanning for the same element.