JPH0569660U - Sample holder for electrical resistance measurement - Google Patents
Sample holder for electrical resistance measurementInfo
- Publication number
- JPH0569660U JPH0569660U JP2772091U JP2772091U JPH0569660U JP H0569660 U JPH0569660 U JP H0569660U JP 2772091 U JP2772091 U JP 2772091U JP 2772091 U JP2772091 U JP 2772091U JP H0569660 U JPH0569660 U JP H0569660U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- lead wires
- insulating member
- conductive
- bases
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Measurement Of Resistance Or Impedance (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
(57)【要約】
【目的】 試料の電気抵抗値を測定しながら、像観察を
行なうことのできる電気抵抗測定用試料ホルダを提供す
ること。
【構成】 試料１は導電性試料台２ａ，２ｂに固定さ
れ、該試料台は対向配置された電気絶縁部材３ａ，３ｂ
を介して、導電性支持台４ａ，４ｂに接続されている。
該支持台４ａ，４ｂは電気絶縁部材５ａ，５ｂを介して
試料導入棒６先端の棚部７に載置されている。試料台２
ａ，２ｂにはリード線９ａ，９ｂが接続され、前記導電
性支持台４ａ，４ｂには着脱可能な接触手８ａ，８ｂと
リード線１０ａ，１０ｂが接続され、該接触手８ａ，８
ｂの端部が試料１に接続されている。リード線９ａ，９
ｂは負接地された定電流電源１１に、リード線１０ａ，
１０ｂは電圧計１２にそれぞれ接続されている。
(57) [Abstract] [Purpose] To provide a sample holder for measuring electric resistance, which enables image observation while measuring the electric resistance value of the sample. [Structure] A sample 1 is fixed to conductive sample bases 2a and 2b, and the sample bases are electrically insulating members 3a and 3b oppositely arranged.
Is connected to the conductive supports 4a and 4b via.
The supports 4a and 4b are placed on the shelf 7 at the tip of the sample introducing rod 6 via the electric insulating members 5a and 5b. Sample table 2
Lead wires 9a and 9b are connected to a and 2b, and detachable contact hands 8a and 8b and lead wires 10a and 10b are connected to the conductive support bases 4a and 4b.
The end of b is connected to the sample 1. Lead wires 9a, 9
b is a negative current grounded constant current power supply 11 and lead wires 10a,
10b is connected to the voltmeter 12, respectively.
Description
【０００１】[0001]
【産業上の利用分野】 本考案は、透過電子顕微鏡に使用されるサイドエントリ ー形の試料ホルダに関し、特に、電子顕微鏡像観察を行ないながら観察試料の電 気抵抗値を測定することができる試料ホルダを提供することを目的としている。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a side-entry type sample holder used in a transmission electron microscope, and particularly to a sample capable of measuring an electric resistance value of an observed sample while observing an electron microscope image. It is intended to provide a holder.
【０００２】[0002]
【従来の技術】 従来、透過電子顕微鏡像を観察しながら、原子レベルでの物性 研究を行なうために、試料に機械的な応力を与えるための引っ張り試料ホルダや 、試料の温度依存性を知るために試料を加熱または冷却するための機能を有する 試料ホルダが開発されている。2. Description of the Related Art Conventionally, in order to study physical properties at the atomic level while observing a transmission electron microscope image, in order to know the tensile sample holder for giving a mechanical stress to the sample and the temperature dependence of the sample. A sample holder having a function for heating or cooling the sample has been developed.
【０００３】[0003]
近年、高温（常温）超電導材料の研究開発が盛んに行われるようになり、試料 の電気抵抗値の温度依存性を測定すると共に、原子レベルでの像観察を同時に行 なうことが要求されるようになってきた。 In recent years, high-temperature (normal temperature) superconducting materials have been actively researched and developed, and it is required to measure the temperature dependence of the electrical resistance of the sample and simultaneously observe the image at the atomic level. It started to come.
【０００４】 本考案は、上述した問題点を考慮し、試料の電気抵抗値を測定しながら、像観 察を行なうことのできる新規な電気抵抗測定用試料ホルダを提供することを目的 としている。The present invention has been made in consideration of the above-mentioned problems, and an object of the present invention is to provide a novel sample holder for electric resistance measurement, which enables image observation while measuring the electric resistance value of the sample.
【０００５】[0005]
【課題を解決するための手段】 本考案は、試料両端が固定されるように２片の 導電性部材から成る試料台と、該２片の試料台を対向して保持するように配置さ れた電気絶縁部材と、該絶縁部材の端部を支持する２片の導電性支持台と、該支 持台と試料導入棒間を接続する絶縁部材と、前記試料台に定電流源から電流を供 給するための電流導入手段と、前記試料に接触する一対の検出プローブと、該プ ローブによって検出された信号を導出するための一対の信号線とを設け、前記各 々支持台をプローブと信号導出線の中継点としたことを特徴としている。Means for Solving the Problems The present invention is arranged such that a sample stage composed of two pieces of conductive members is fixed so that both ends of the sample are fixed, and the sample stage of the two pieces is held so as to face each other. An electrically insulating member, two pieces of conductive supporting bases for supporting the ends of the insulating member, an insulating member for connecting the supporting base and the sample introducing rod, and a current from a constant current source to the sample base. A current introducing means for supplying, a pair of detection probes in contact with the sample, and a pair of signal lines for deriving a signal detected by the probe are provided, and each of the support bases serves as a probe. The feature is that it is used as a relay point for the signal lead-out line.
【０００６】[0006]
【実施例】 以下、本考案の実施例を図面に基づいて説明する。図１及び図２は 本考案による電気抵抗測定用試料ホルダの一実施例を説明するための構成図であ り、図２は図１の上面図である。Embodiment An embodiment of the present invention will be described below with reference to the drawings. 1 and 2 are configuration diagrams for explaining an embodiment of a sample holder for measuring electrical resistance according to the present invention, and FIG. 2 is a top view of FIG.
【０００７】 図１において、試料１は試料押さえ（図示せず）により、２片の導電性部材か らなる試料台２ａ，２ｂに固定されている。そして、該試料台２ａ，２ｂは対向 して配置された電気絶縁部材３ａ，３ｂを介して、２片の導電性支持台４ａ，４ ｂに接続されている。さらに、該支持台４ａ，４ｂは電気絶縁部材５ａ，５ｂを 介して試料導入棒６先端の開口部分に設けられた棚部７に載置されている。ここ で、前記試料台２及び支持台４は耐熱性を有する導電性金属が使用されている。 また、電気絶縁部材３及び５は試料の熱絶縁をも施すために、ステアタイトやル ビー等の材料が使用されている。In FIG. 1, a sample 1 is fixed to a sample table 2a, 2b composed of two pieces of conductive members by a sample holder (not shown). The sample bases 2a and 2b are connected to the two pieces of conductive support bases 4a and 4b through electrically insulating members 3a and 3b which are arranged to face each other. Further, the supporting bases 4a and 4b are mounted on a shelf portion 7 provided at an opening portion at the tip of the sample introducing rod 6 via electric insulating members 5a and 5b. Here, the sample table 2 and the support table 4 are made of a heat-resistant conductive metal. Further, materials such as steatite and ruby are used for the electric insulating members 3 and 5 in order to also perform thermal insulation of the sample.
【０００８】 前記試料台２ａ，２ｂにはリード線９ａ，９ｂが接続され、前記導電性支持台 ４ａ，４ｂには着脱可能な接触手８ａ，８ｂとリード線１０ａ，１０ｂが接続さ れ、該接触手８ａ，８ｂの端部が試料１に接続されている。リード線９ａ，９ｂ はリード線１０ａ，１０ｂと共に試料導入棒６の内部を貫通する通路に設けられ たハーメチックシール（図示せず）を介して電子顕微鏡の鏡筒外（真空外）へ導 出されており、リード線９ａ，９ｂは負接地された定電流電源１１に、リード線 １０ａ，１０ｂは電圧計１２にそれぞれ接続されている。試料の透過電子顕微鏡 像を観察しながら該試料１抵抗値を測定する場合、試料に照射された電子線の大 部分は試料１を透過し結像に寄与するが、その内の一部は試料に吸収され、該吸 収電流は定電流電源１１に接続されたリード線９ｂを介して接地される。Lead wires 9a and 9b are connected to the sample bases 2a and 2b, and detachable contact hands 8a and 8b and lead wires 10a and 10b are connected to the conductive support bases 4a and 4b. The ends of the contact hands 8a and 8b are connected to the sample 1. The lead wires 9a and 9b are led out to the outside of the lens barrel (outside the vacuum) of the electron microscope through a hermetic seal (not shown) provided in a passage penetrating the inside of the sample introducing rod 6 together with the lead wires 10a and 10b. The lead wires 9a and 9b are connected to a constant current power source 11 that is negatively grounded, and the lead wires 10a and 10b are connected to a voltmeter 12. Transmission electron microscope of sample When measuring the resistance value of the sample 1 while observing the image, most of the electron beam irradiated on the sample passes through the sample 1 and contributes to image formation, but a part of it The absorbed current is grounded via the lead wire 9b connected to the constant current power supply 11.
【０００９】 上述したような構成による試料ホルダによって、試料１の電気抵抗を測定する ための方法としては、既知の４端子法が用いられる。図２に示すように４端子法 によれば、負接地された定電流電源１１からリード線９ａ，９ｂを介して試料に 数十μＡの定電流Ｉを供給すると、リード線１０ａ，１０ｂ間に試料１に接続さ れた接触手間電圧Ｖが発生する。この電圧Ｖを電圧計１２により検出することに より、該電圧値Ｖと定電流値Ｉからオーム法則に基づいて試料の抵抗値Ｒを求め ることができる。A known four-terminal method is used as a method for measuring the electrical resistance of the sample 1 with the sample holder having the above-described configuration. According to the 4-terminal method as shown in FIG. 2, when a constant current I of several tens of μA is supplied to the sample from the negative-current constant current power source 11 via the lead wires 9a and 9b, the lead wires 10a and 10b are connected to each other. A contact effort voltage V connected to the sample 1 is generated. By detecting this voltage V with the voltmeter 12, the resistance value R of the sample can be obtained from the voltage value V and the constant current value I based on Ohm's law.
【００１０】 また、本考案では、抵抗値の温度依存性を測定するために図３に示すように前 記試料台２及び支持台４の外周部分に、アルミナ被覆の施されたヒータ１３が無 誘導巻で旋回されており、また、試料の温度をモニタするための熱電対１４が試 料台２ｂに接触されている。なお、ヒータ１３に電流を供給するためのリード線 １５ａ，１５ｂ及び熱電対１４は前述した各リード線９，１０と共に試料導入棒 ６の内部を貫通する通路を介して電子顕微鏡の鏡筒外（真空外）へ導出されてい る。Further, in the present invention, in order to measure the temperature dependence of the resistance value, as shown in FIG. 3, there is no heater 13 coated with alumina on the outer peripheral portions of the sample base 2 and the support base 4. It is rotated by induction winding, and a thermocouple 14 for monitoring the temperature of the sample is in contact with the sample table 2b. The lead wires 15a and 15b for supplying a current to the heater 13 and the thermocouple 14 together with the above-mentioned lead wires 9 and 10 are connected to the outside of the lens barrel of the electron microscope through a passage penetrating the inside of the sample introduction rod 6. Out of vacuum).
【００１１】 このヒータ１３に電源１６から電流を供給して試料を加熱しながら該試料の抵 抗値の測定を行なえば、電子顕微鏡像を観察しつつ前述した試料の抵抗値の温度 依存性の測定を行なうことができる。If the resistance value of the sample is measured while heating the sample by supplying an electric current from the power source 16 to the heater 13, it is possible to observe the temperature dependence of the resistance value of the sample described above while observing the electron microscope image. A measurement can be made.
【００１２】[0012]
【考案の効果】 本考案は、試料両端が固定されるように２片の導電性部材から 成る試料台と、該２片の試料台を対向して保持するように配置された電気絶縁部 材と、該絶縁部材の端部を支持する２片の導電性支持台と、該支持台と試料導入 棒間を接続する絶縁部材と、前記試料台に定電流源から電流を供給するための電 流導入手段と、前記試料に接触する一対の検出プローブと、該プローブによって 検出された信号を導出するための一対の信号線とを設け、前記各々支持台をプロ ーブと信号導出線の中継点としたことにより、試料の電気抵抗値を測定しながら 、像観察を行なうことのできる電気抵抗測定用試料ホルダを実現することができEFFECTS OF THE INVENTION The present invention provides a sample table composed of two pieces of conductive members so that both ends of the sample are fixed, and an electrically insulating member arranged so as to hold the two pieces of sample table opposite to each other. A two-piece conductive support that supports the end of the insulating member, an insulating member that connects the support and the sample introduction rod, and an electric power source for supplying a current from the constant current source to the sample base. A flow introducing means, a pair of detection probes that come into contact with the sample, and a pair of signal lines for deriving signals detected by the probes are provided, and each of the supports is connected to the probe and the signal derivation line. By setting it as a point, it is possible to realize a sample holder for electric resistance measurement that can observe an image while measuring the electric resistance value of the sample.
【提出日】平成５年２月２５日[Submission date] February 25, 1993
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１２[Correction target item name] 0012
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００１２】[0012]
【考案の効果】 本考案は、試料両端が固定されるように２片の導電性部材から 成る試料台と、該２片の試料台を対向して保持するように配置された電気絶縁部 材と、該絶縁部材の端部を支持する２片の導電性支持台と、該支持台と試料導入 棒間を接続する絶縁部材と、前記試料台に定電流源から電流を供給するための電 流導入手段と、前記試料に接触する一対の検出プローブと、該プローブによって 検出された信号を導出するための一対の信号線とを設け、前記各々支持台をプロ ーブと信号導出線の中継点としたことにより、試料の電気抵抗値を測定しながら 、像観察を行なうことのできる電気抵抗測定用試料ホルダを実現することができ る。EFFECTS OF THE INVENTION The present invention provides a sample table composed of two pieces of conductive members so that both ends of the sample are fixed, and an electrically insulating member arranged so as to hold the two pieces of sample table opposite to each other. A two-piece conductive support that supports the end of the insulating member, an insulating member that connects the support and the sample introduction rod, and an electric power source for supplying a current from the constant current source to the sample base. A flow introducing means, a pair of detection probes that come into contact with the sample, and a pair of signal lines for deriving signals detected by the probes are provided, and each of the supports is connected to the probe and the signal derivation line. By setting the points, it is possible to realize a sample holder for electric resistance measurement that can observe an image while measuring the electric resistance value of the sample.
【図１】本考案による電気抵抗測定用試料ホルダの一実
施例を説明するための構成図。FIG. 1 is a configuration diagram for explaining an embodiment of a sample holder for measuring electrical resistance according to the present invention.
【図２】図１の上面図FIG. 2 is a top view of FIG.
【図３】ヒータを付設した場合の構成図。FIG. 3 is a configuration diagram when a heater is attached.
１：試料 ２ａ，２ｂ：試
料台 ３ａ，３ｂ：電気絶縁部材 ４ａ，４ｂ：支
持台 ５ａ，５ｂ：絶縁部材 ６：試料導入棒 ７：棚部 ８ａ，８ｂ：接
触手 ９ａ，９ｂ：リード線 １０ａ，１０
ｂ：リード線 １１：定電流電源 １２：電圧計 １３：ヒータ1: sample 2a, 2b: sample stand 3a, 3b: electric insulating member 4a, 4b: support stand 5a, 5b: insulating member 6: sample introduction rod 7: shelf 8a, 8b: contact hand 9a, 9b: lead wire 10a , 10
b: lead wire 11: constant current power supply 12: voltmeter 13: heater
─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成５年２月２５日[Submission date] February 25, 1993
【手続補正２】[Procedure Amendment 2]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】図面の簡単な説明[Name of item to be corrected] Brief explanation of the drawing
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【図面の簡単な説明】[Brief description of drawings]
【図１】本考案による電気抵抗測定用試料ホルダの一実
施例を説明するための構成図。FIG. 1 is a configuration diagram for explaining an embodiment of a sample holder for measuring electrical resistance according to the present invention.
【図２】図１の上面図FIG. 2 is a top view of FIG.
【図３】ヒータを付設した場合の構成図。FIG. 3 is a configuration diagram when a heater is attached.
【符号の説明】 １：試料 ２ａ，２ｂ：試
料台 ３ａ，３ｂ：電気絶縁部材 ４ａ，４ｂ：支
持台 ５ａ，５ｂ：絶縁部材 ６：試料導入棒 ７：棚部 ８ａ，８ｂ：接
触手 ９ａ，９ｂ：リード線 １０ａ，１０
ｂ：リード線 １１：定電流電源 １２：電圧計 １３：ヒータ[Explanation of Codes] 1: Samples 2a, 2b: Sample stands 3a, 3b: Electrical insulating members 4a, 4b: Support stands 5a, 5b: Insulating members 6: Sample introduction rods 7: Shelf parts 8a, 8b: Contact hands 9a, 9b: Lead wires 10a, 10
b: lead wire 11: constant current power supply 12: voltmeter 13: heater
Claims (1)
性部材から成る試料台と、該２片の試料台を対向して保
持するように配置された電気絶縁部材と、該絶縁部材の
端部を支持する２片の導電性支持台と、該支持台と試料
導入棒間を接続する絶縁部材と、前記試料台に定電流源
から電流を供給するための電流導入手段と、前記試料に
接触する一対の検出プローブと、該プローブによって検
出された信号を導出するための一対の信号線とを設け、
前記各々支持台をプローブと信号導出線の中継点とした
ことを特徴とする電気抵抗測定用試料ホルダ。1. A sample stage composed of two pieces of conductive members so that both ends of the sample are fixed, an electric insulating member arranged so as to hold the two pieces of sample stage facing each other, and the insulating member. A two-piece conductive support for supporting the end of the sample, an insulating member for connecting the support and the sample introduction rod, a current introducing means for supplying a current from a constant current source to the sample stage, A pair of detection probes that come into contact with the sample, and a pair of signal lines for deriving a signal detected by the probe are provided.
A sample holder for electric resistance measurement, wherein each of the supports is a relay point between a probe and a signal lead wire.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2772091U JPH0569660U (en) | 1991-03-29 | 1991-03-29 | Sample holder for electrical resistance measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2772091U JPH0569660U (en) | 1991-03-29 | 1991-03-29 | Sample holder for electrical resistance measurement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0569660U true JPH0569660U (en) | 1993-09-21 |
Family
ID=12228850
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2772091U Withdrawn JPH0569660U (en) | 1991-03-29 | 1991-03-29 | Sample holder for electrical resistance measurement |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0569660U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006244796A (en) * | 2005-03-02 | 2006-09-14 | Jeol Ltd | Sample holder of electron microscope |
| JP2016100301A (en) * | 2014-11-26 | 2016-05-30 | アオイ電子株式会社 | Sample fixing device |
| JP2017139175A (en) * | 2016-02-05 | 2017-08-10 | 日本電子株式会社 | Sample holder |
-
1991
- 1991-03-29 JP JP2772091U patent/JPH0569660U/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006244796A (en) * | 2005-03-02 | 2006-09-14 | Jeol Ltd | Sample holder of electron microscope |
| JP2016100301A (en) * | 2014-11-26 | 2016-05-30 | アオイ電子株式会社 | Sample fixing device |
| JP2017139175A (en) * | 2016-02-05 | 2017-08-10 | 日本電子株式会社 | Sample holder |
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