JPH0569256A - Multiaxis airslide table - Google Patents

Abstract

PURPOSE:To supply pressure air to the air bearing of a slide unit through the inside of the slide unit forming a multiaxis airslide table. CONSTITUTION:Pressure air is supplied into an air bearing part Bx formed at a sliding part between an X-axis guide 3 and an X-axis slider 4 forming a slide unit, from the pressure air supply port 2 of a fixed base 1 through the air holes 21, 22 of the X-axis guide 3, and a part of the pressure air is further supplied into the air holes 24 of a Y-axis base 5 fixed to the X-axis slider 4, through a pressure air supply groove 4a and an air hole 23 provided at the X-axis slider 4. Pressure air can be supplied to plural slide units by providing a pressure air supply tube at one place outside an airslide table.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multi-axis air slide table used for precision measuring instruments, precision machine tools, precision assembling devices and the like.

[0002]

2. Description of the Related Art In precision measuring instruments, precision machine tools, precision assembly equipment, etc., X, Y, and
A multi-axis slide table is used that can move along the Z axis and the rotation axis (θ axis). This type of multi-axis slide table is basically a linear slide unit in which a slider is linearly slidably supported by a linear guide shaft, or a rotary slide in which a slider is rotatably and rotatably supported by a cylindrical guide shaft. It is constructed by combining the required number of dynamic units.

In order to support the slider smoothly and accurately with respect to the guide shaft, a precision bearing is used as the bearing. Recently, pressurized air is supplied to the sliding surface between the slider and the guide shaft. There are some which use an air bearing in which a gap of about 10 to 20 μm is formed between them.

[0004]

In this type of air bearing, it is necessary to constantly supply pressurized air to the bearing portion. Therefore, when an air bearing is used in a device with a large number of shafts such as a multi-axis air slide table, a large number of compressed air supply for supplying compressed air to the bearing part of the linear or rotary sliding unit. The pipe will be connected. Slide table
When the table moves, it moves while dragging a large number of these compressed air supply pipes.Therefore, such a structure not only affects the positioning accuracy of the slide table but also the vicinity of the slide table becomes complicated. , It also affected work efficiency. The present invention is intended to solve the above problems.

[0005]

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and makes the slider slidable by an air bearing formed by pressurized air supplied to the sliding surface between the guide and the slider. In a multi-axis air slide table constructed by connecting the required number of supporting sliding units, the sliding surface on which the air bearing of each sliding unit is formed is pressed over the allowable sliding range of the sliding unit. An air supply groove is provided, and a ventilation hole communicating with the pressure air supply groove is provided on the slider side, and the pressure air supplied to the sliding unit is passed through the pressure air supply groove and the ventilation hole to the sliding unit. It is characterized in that it is configured so as to be supplied to the sliding unit at the next stage connected to the slider.

[0006]

[Function] The pressure air supply groove provided on the sliding surface on which the air bearing of each sliding unit is formed always has a ventilation hole on the slider side when the sliding unit moves within the allowable sliding range. After that, it communicates with the ventilation hole provided in the sliding unit of the next stage. As a result, the pressure air supplied to one sliding unit is sequentially supplied to the sliding unit of the next stage through the pressure air supply groove and the ventilation hole in each sliding unit.

[0007]

Embodiments of the present invention will be described below.
In the first embodiment described below, left and right (X axis), front and rear (Y
It is a 4-axis air slide table that can move vertically (Z axis), and rotate (θ axis).

FIG. 1 is a front view of the air slide table, FIG. 2 is a sectional view taken along line AA of FIG. 1, and FIG. 3 is B- of FIG.
A cross-sectional view along line B is shown. 1, 2 and 3, 1
Is a fixed base which is the base of the air slide table, 2 is a pressure air supply port provided in the fixed base 1, 3 is an X-axis guide, 4 is an X-axis slider, and an X-axis guide 3 and An X-axis sliding unit is constructed with the X-axis slider 4. The X-axis slider 4 is slidably supported along the X-axis guide 3 in the X-axis direction (horizontal direction in FIGS. 1 and 3, and front-back direction in FIG. 2).

A Y-axis base 5 is fixed to the X-axis slider 4 and is movable in the X-axis direction. 6 is Y
A Y-axis guide fixed to the shaft base 5, and 7 is a Y-axis slider, and the Y-axis guide 6 and the Y-axis slider 7 constitute a Y-axis sliding unit. The Y-axis slider 7 is slidably supported along the Y-axis guide 6 fixed to the Y-axis base 5 in the Y-axis direction (left and right direction in FIG. 2, front-back direction with respect to paper surface in FIG. 3). Therefore, the Y-axis slider 7 is movable in the X-axis and Y-axis directions with respect to the fixed base 1.

Reference numeral 8 is a Z-axis guide fixed to the Y-axis slider 7, reference numeral 9 is a Z-axis slider, and the Z-axis guide 8 and the Z-axis slider 9 constitute a Z-axis sliding unit. The Z-axis slider 9 is slidably supported along the Z-axis guide 8 in the Z-axis direction (vertical direction in FIGS. 1, 2, and 3). Also, 10 is θ
It is fixed to the Z-axis slider 9 with an axial base. Therefore, the θ-axis base 10 has the X-axis and Y-axis relative to the fixed base 1.
It is movable in the axis and Z-axis directions. 11 is the θ-axis base 10
The .theta.-axis guide is fixed to the .theta.-axis table 12, and the .theta.-axis table 11 and the .theta.-axis table 12 constitute a .theta.-axis rotary sliding unit. The θ-axis table 12 is the θ-axis guide 11
Since it is rotatably supported around (θ axis), the θ axis table 12 slides with respect to the fixed base 1 along the X, Y, and Z axes, and the θ axis rotates. It is possible to move in four axes.

Next, the structure of the air bearing portion formed on the sliding surfaces of the linear sliding unit and the rotary sliding unit will be described.
The configuration of the air bearing portion is almost the same in any of the sliding unit and the rotating unit. Therefore, here, the configuration of the air bearing portion of the X-axis sliding unit will be described with reference to FIGS. The description of the structure of the air bearing portion of the sliding unit of the shaft is omitted.

FIG. 4 is a partially enlarged sectional view showing the structure of the air bearing portion of the X-axis sliding unit. In the figure, the X-axis guide 3 is provided with a vent hole 21 connected to a pressure air supply source. Is in communication with the vent hole 22 for supplying air. The X-axis slider 4 has a pressure air supply groove 4 communicating with the ventilation hole 22 over its allowable movement range.
a and a vent hole 23 communicating with the pressure air supply groove 4a. Further, Y fixed to the X-axis slider 4
The shaft base 5 is provided with a vent hole 24 communicating with the vent hole 23 of the X-axis slider 4. The vent hole 24 of the Y-axis base 5 is for supplying pressurized air to the sliding unit of this stage (Y-axis sliding unit).

With the above structure, the compressed air supplied from the ventilation holes 21 and 22 forms the air bearing Bx on the sliding surface between the X-axis guide 3 and the X-axis slider 4, and
Part of the compressed air is supplied to the ventilation hole 24 of the Y-axis base 5 through the compressed air supply groove 4 a communicating with the ventilation hole 22 and the ventilation hole 23. Even if the X-axis slider 4 moves over the allowable movement range, as shown in FIG.
2, the compressed air supply passage is maintained through the compressed air supply groove 4a and the ventilation hole 23 to the ventilation hole 24 of the Y-axis base 5.

Next, the piping for the pressure air and the situation in which the pressure air is supplied to each shaft sliding unit will be described with reference to FIGS.

Pressure air supplied from an air compressor (not shown) is supplied to a pressure air supply port 2 provided in the fixed base 1 through a pipe (not shown). Fixed air is fixed base 1
Vent hole 20 provided on the X-axis guide 3
1, the air is supplied to the air bearing portion Bx formed by the sliding surfaces of the X-axis guide 3 and the X-axis slider 4 through the ventilation hole 22. A part of the pressure air supplied to the air bearing portion Bx is supplied to the ventilation hole 24 provided in the Y-axis base through the pressure air supply groove 4a provided in the X-axis slider 4 and the ventilation hole 23.

The pressure air supplied to the ventilation hole 24 of the Y-axis base 5 is the ventilation hole 25 and the ventilation hole 2 provided in the Y-axis guide 6.
It is supplied to the air bearing portion By formed by the sliding surface of the Y-axis guide 6 and the Y-axis slider 7 via 6. A part of the pressure air supplied to the air bearing portion By is supplied to the ventilation hole 28 provided in the Z-axis guide 8 through the pressure air supply groove 7 a provided in the Y-axis slider 7 and the ventilation hole 27.

The compressed air supplied to the ventilation hole 28 of the Z-axis guide 8 passes through the ventilation hole 29 provided in the Z-axis guide 8 and is an air bearing formed by the sliding surface of the Z-axis guide 8 and the Z-axis slider 9. It is supplied to the section Bz. A part of the pressure air supplied to the air bearing portion Bz is supplied to the ventilation hole 31 provided in the θ-axis base 10 through the pressure air supply groove 9a provided in the Z-axis slider 9 and the ventilation hole 30.

The pressure air supplied to the ventilation hole 31 of the θ-axis base 10 passes through the ventilation hole 32 provided in the θ-axis guide 11 and is formed on the sliding surface of the θ-axis guide 11 and the θ-axis table 12. Is supplied to the air bearing portion Bθ.

Next, a second embodiment of the present invention will be described. The second embodiment is a biaxial air slide table that can move in the X and Y axes.

FIG. 6 is a plan view of the biaxial air slide table, FIG. 7 is a front view thereof, and FIG. 8 is a sectional view taken along the line CC of FIG. In FIGS. 6, 7 and 8, 51 is a fixed base.
5, 52 and 53 are X-axis guides fixed to the fixed base 51, 54 is an X-axis slider slidably supported by the X-axis guide 52, and 55 is slidably supported by the X-axis guide 53. The X-axis slider 52 and the X-axis slider 54, and the X-axis guide 53 and the X-axis slider 55 constitute an X-axis sliding unit that is movable in the X-axis direction (left and right direction in FIG. 6). To do. 6 and 8, the fixed base 5 is used.
1 is omitted and shown.

Reference numerals 56 and 57 are Y-axis guides, 58 is a Y-axis slider slidably supported by the Y-axis guide 56, and 59 is Y.
A Y-axis slider slidably supported by the shaft guide 57, including a Y-axis guide 56, a Y-axis slider 58, and a Y-axis guide 5.
7 and the Y-axis slider 59 respectively move in the Y-axis direction (see FIGS. 6 and 8).
To form a Y-axis sliding unit that can be moved vertically.

X-axis sliders 54 and 55 and Y-axis guide 5
6 and 57 are connected so as to form a rectangular frame, and the inside of the vent hole 6 communicates as shown in FIG.
5, 66, 67 and 70 are provided. Further, the X-axis guide 52 has a pressure air supply groove 52a formed over the allowable sliding range of the X-axis slider 54, and when the X-axis slider 54 is within the allowable sliding range, the X-axis slider 54 is formed.
The pressure air supply port 61 and the vent hole 65 communicate with each other via the pressure air supply groove 52a regardless of the position.

A top plate 60 connects the two Y-axis sliders 58 and 59, and serves as a workpiece holding portion. Since the top plate 60 combines the movements of the X-axis slider and the Y-axis slider, it is possible to move the X-axis and the Y-axis.

Next, the pressure air pipe and the pressure air are
The situation in which each of the sliding units of the shaft and the Y-axis is supplied will be described with reference to FIG.

The pressure air supplied from the air compressor (not shown) is supplied to the pressure air supply port 61 of the X-axis guide 52 fixed to the fixed base 51 through a pipe (not shown). The compressed air flows through the ventilation holes 62, X
An air bearing portion B formed by a sliding surface of the X-axis guide 52 and the X-axis slider 53 through a pressure air supply groove 52a provided in the shaft guide 52 and a ventilation hole 63 provided in the X-axis slider 54.
x1. A part of the supplied pressurized air communicates with the ventilation hole 63 provided in the X-axis slider 54.
5. Vent hole 66 provided in Y-axis guide 56, and vent hole 66
Is supplied to the air bearing portion By1 formed by the sliding surface of the Y-axis guide 56 and the Y-axis slider 58 through a vent hole 68 communicating with the air-bearing part 67 provided in the Y-axis guide 57.
It is supplied to the air bearing portion By2 formed by the sliding surface of the Y-axis guide 57 and the Y-axis slider 59 via the ventilation hole 69 communicating with the ventilation hole 67. Further, the ventilation holes 66 and 67 are formed by the sliding surfaces of the X-axis guide 53 and the X-axis slider 55 through the ventilation hole 70 provided in the X-axis slider 55 and the ventilation hole 71 communicating with the ventilation hole 70. It is supplied to the air bearing portion Bx2.

Although the embodiment of the 4-axis and 2-axis air slide table has been described above, the present invention is not limited to this, and is applied to an air slide table having an arbitrary number of moving axes. It goes without saying that you can do it.

[0027]

As described above, according to the present invention, the pressure air inside the sliding unit is changed from one sliding unit constituting the multi-axis air slide table to the next sliding unit. Pressured air can be sequentially supplied through the supply groove and the ventilation hole, and a large number of pressurized air supply pipes for supplying pressurized air to each sliding unit can be omitted. As a result, when the air slide table moves, the large number of pressure air supply pipes are not dragged, and the air slide table is not dragged.
Not only can the positioning accuracy of the bull be improved, but the area around the air slide table is not complicated, and the working efficiency can be improved.

[Brief description of drawings]

FIG. 1 is a front view showing the outer appearance of a first embodiment to which the present invention is applied.

FIG. 2 is a sectional view taken along line AA of the first embodiment shown in FIG.

FIG. 3 is a sectional view taken along line BB of the first embodiment shown in FIG.

FIG. 4 is a sectional view of an air bearing portion of the first embodiment.

5 is a cross-sectional view showing a state where the slider of the air bearing portion shown in FIG. 5 has moved.

FIG. 6 is a plan view showing the outer appearance of a second embodiment to which the invention is applied.

FIG. 7 is a front view showing the outer appearance of the second embodiment.

FIG. 8 is a sectional view taken along the line CC of the second embodiment shown in FIG.

[Explanation of symbols]

1, 51: Fixed base 3, 52, 53: X-axis guide 4, 54, 55: X-axis slider 5: Y-axis base 6, 56, 57: Y-axis guide 7, 58, 59: Y-axis Slider 8: Z-axis guide 9: Z-axis slider 10: θ-axis base 11: θ-axis guide 12: θ-axis table 4a, 7a, 9a, 52a: Pressure air supply groove 20, 21, 22, 23, 24, 25, 26, 27, 2
8, 29, 30, 31, 32, 62, 63, 65, 6
6, 67, 68, 69, 70, 71: Vent hole

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yasuhiro Okamoto 2-3-3 Azuchi-cho, Chuo-ku, Osaka, Osaka International Building Minolta Camera Co., Ltd. (72) Inventor Nobuaki Iguchi 239 Shimohirama, Saiwai-ku, Kawasaki-shi, Kanagawa Address Kuroda Seiko Co., Ltd.

Claims (1)

[Claims] 1. A sliding unit for slidably supporting the slider by an air bearing formed by pressurized air supplied to a sliding surface between a guide and a slider, the sliding unit being connected by a required number of axes. In the axial air slide table, a pressure air supply groove is provided on the sliding surface on which the air bearing of each sliding unit is formed, over the allowable sliding range of the sliding unit, and communicates with the pressure air supply groove. An air hole is provided on the slider side so that the pressure air supplied to the sliding unit is supplied to the next sliding unit connected to the slider of the sliding unit through the pressure air supply groove and the air hole. A multi-axis air slide table characterized in that